subfab · 1 2 3 4 5 6 7 8 9 10 11 13 a b j h g f e d c k 12 b.1 23072 sf subfab 149 sheet crq-101b...

1 2 3 4 5 6 7 8 9 10 11 13

A

B

J

H

G

F

E

D

C

K

12

B.1

23072 SF

SUBFAB149

SHEET CRQ-101BSECTOR B

SHEET CRQ-101ASECTOR A

SHEET CRQ-101DSECTOR D

SHEET CRQ-101CSECTOR C

Sheet Number

Original drawing is 42 x 30. Do not scale contents of this drawing.

Sheet Title

Project No:

Date ofFirst Issue: Drawn by:

Professional Seals

Key Plan

In Association with

Project

All reproduction & intellectual property rights reserved © 2012

No. Description Date

Abbie Gregg, Inc.

1130 East University Drive Suite 105Tempe, AZ 85281

Cleanroom Consultant

t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:

One Tampa City Center, Suite 1800,Tampa, FL 33602

HOK

Client Location

Reviewedby:

AGI AND CLIENT CONFIDENTIAL

3/10

/201

6 2:

46:0

3 PM

EQUIPMENT PLAN-SUBFAB - LEVEL 1

CRQ-100A

DN10/05/15

CD-0819

FAMRCOsceola County, FL

Owner

CD-0819

MW

1/8" = 1'-0"1 LEVEL 1- OVERALL EQUIPMENT PLAN- SUBFAB

NOTES:A. ALL TOOLS AND EQUIPMENT ON THIS SHEET DENOTED WITH SOLID HATCH ARE FOR PHASE 1 ONLY. ALL FUTURE PHASE 2 EQUIPMENT IS DENOTED WITH DIAGONAL LINE HATCHING.B. REFER TO SHEET CRQ-600 FOR TOOL AND EQUIPMENT SCHEDULES.C. ALL PHASE 2 EQUIPMENT IS FOR REFERENCE PURPOSES ONLY AND IS NOT IN CONTRACT.

1 ADVANCED SCHEMATIC DESIGN 2015-08-102 DESIGN DEVELOPMENT 2015-10-023 PERMIT SET 2015-12-074 CONSTRUCTION DOCUMENT

REVISIONS2016-02-15

5 CONSTRUCTION DOCUMENTSREVISION 2

2016-03-11

4

4

4

4

4

4

4

4

1 2 3 4 5 6 7

A

B

F

E

D

C

VMB-003BCl3

VMB-007HCl IN Ne

VMB-008HBr

B.1

VMB-020SbH3

VMB-011SiCl4

VMB-018SPARE

VMB-021NF3

VMB-017SPARE

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

46:3

1 PM

EQUIPMENT PLAN-LEVEL 1- SUBFAB-SECTOR A

CRQ-101A

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- SUBFAB- SECTOR A



REVISIONS2016-02-15


2016-03-11

4

4

1 2 3 4 5 6 7

J

H

G

F

K

SCRB-013JS

CALLISTO DUALDRY ABATE

WASTE-002METAL

COLLECTION

WASTE-003SLURRY

COLLECTIONWASTE-004

III-V COLLECTION

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

46:5

2 PM

EQUIPMENT PLAN-LEVEL 1- SUBFAB-SECTOR B

CRQ-101B

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- SUBFAB- SECTOR B



REVISIONS2016-02-15


2016-03-11

4

4

4

7 8 9 10 11 13

J

H

G

F

K

12

EPI-001.06PUMP PKG.

EPI-001.04SCROLL

PUMPVMB-001PH3

SCRB-007JS

CALLISTO 180DRY ABATE

SCRB-011JSIO

THER/WET ABATE

VMB-002AsH3 VMB-024

NH3

VMB-004GeH4

VMB-005CH4

WP-002.02UPS

CABINET

WP-002.03HOT DIW

UNIT 144KW

WP-002.04CSU

CABINET

WP-002.05CSB

COOLINGUNIT

WP-002.06COOLING

TANK

WP-002.07CO2 UNIT

WP-002.08A BOX

WP-002.12HOT DIW

UNIT 72 KW

WP-002.09CO2 UNIT

WP-002.11CO2 UNIT

WP-002.10CO2 UNIT

VMB-009HCl

VMB-010200 TO 300

DISILANE IN H2

VMB-013(CH3)3SiH

SS-006SAFETY

SHOWER

SS-011SAFETY

SHOWER

SCRB-010JS


CVD-001.14CONTROLLER

PM 4


PM 3

CVD-001.05CONTROLLERPM 1 & MAIN


PM 2

CVD-002/005.12CONTROLLER

PM-2

CVD-002/005.14CONTROLLER

PM-1CVD-002/005.13CONTROLLER

PM-3

CVD-002/005.05CONTROLLERPM-1 & MAIN

CVD-002/005.11HEAT

EXCHANGERCVD-002/005.06

HEATEXCHANGER

CVD-002/005.08HEAT

EXCHANGER

CVD-002/005.09HEAT

EXCHANGER

CVD-002/005.01DRY PUMP


CVD-002/005.07TM & LLPUMP



CVD-001.06HEAT

EXCHANGER-PM-1

CVD-001.11HEAT

EXCHANGER-PM-4

CVD-001.09HEAT

EXCHANGER-PM-3

CVD-001.08HEAT

EXCHANGER-PM-2

CVD-001.01DRY PUMP

CVD-001.02DRY PUMP

CVD-001.07TM & LLPUMP

CVD-001.03DRY PUMP

CVD-001.10DRY PUMP

WASTE-001SOLVENT

COLLECTION

PURN2-003SAES, PURE GAS

PS8-MGT300N2 PURIF

VMB-0225% Cl2 IN N2

VMB-026H2

BOOTIESHOODS

GOWN RACK

BENCH

PRODUCTWIPE DOWN

TABLE

WASTE-005HF COLLECTION

GOWNING ZONEFOR SUBFABDENOTED BY DASHEDLINES- KEEP AREACLEAR OF ALL TOOLSAND EQUIPMENT NOTRELATED TO GOWNING

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

47:3

0 PM

EQUIPMENT PLAN-LEVEL 1- SUBFAB-SECTOR C

CRQ-101C

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- SUBFAB- SECTOR C



REVISIONS2016-02-15


2016-03-11

4

4

4

4

4

5

7 8 9 10 11 13

A

B

E

D

C

12

EPI-001.01POWER

DIST.MODULE

PURN2-001SAES

N2 PURIF

PURH2-001SAES

H2 PURIF

MOCVD-004.32HPDU

MOCVD-004.01MPDU

MOCVD-004.12PM1

CHILLER-CHAMBERCOOLING

MOCVD-004.10PM1

CHILLER-SHOWERHEAD

MOCVD-004.05PROC DIFF

PUMP

MOCVD-004.09TM VACPUMP 3

MOCVD-004.08PM1 PUMP

NO.2PRE-CLEAN

MOCVD-004.11PM1

CHILLER-CHAMBERPROC

MOCVD-004.07PM1

PROCESSPUMPS


NO.2PRE-CLEAN


NO.1

MOCVD-004.16PM2

CHILLER-CHAMBERPROC

MOCVD-004.17PM2

CHILLER-SHOWERHEAD

MOCVD-004.18PM2


PURNH3-001SAES

NH3 PURIF

SCRB-005JS


SCRB-006JS


SCRB-008JS


VMB-025H2

VMB-006Cl2

MOCVD-001.01DRY PUMP



PURN2-002SAES

N2 PURIF

PURH2-002SAES

H2 PURIF

MOCVD-004.04CHILLER 2

PM2

VMB-012SPARE

VMB-014BLUE NH3

B.1

VMB-019SI2H6

VMB-0165%B2H6 IN H2

VMB-015NO

MOCVD-001ALT.03

POWER/CONTROLRACK

MOCVD-001ALT.05

CHILLER

MOCVD-001ALT.01

CHAMBERPUMP

MOCVD-001ALT.02

LL VACUUMPUMP

MOCVD-005ALT.12PM1


MOCVD-004.06PRE-CLEANDIFF PUMP

VMB-023SiH4

MOCVD-005ALT.32HPDU

MOCVD-005ALT.01MPDU

MOCVD-005ALT.10PM1

CHILLER-SHOWERHEAD

MOCVD-005ALT.05PROC DIFF

PUMP

MOCVD-005ALT.07PM1

PROCESSPUMPS

MOCVD-005ALT.08PM1 PUMP

NO.2PRE-CLEAN

MOCVD-005ALT.11PM1

CHILLER-CHAMBERPROC


NO.2PRE-CLEAN


NO.1

MOCVD-005ALT.16PM2

CHILLER-CHAMBERPROC

MOCVD-005ALT.17PM2

CHILLER-SHOWERHEAD

MOCVD-005ALT.18PM2


MOCVD-005ALT.04TM VACPUMP 2MOCVD-005ALT.03

TM VACPUMP 1

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

48:1

2 PM

EQUIPMENT PLAN-LEVEL 1- SUBFAB-SECTOR D

CRQ-101D

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- SUBFAB- SECTOR D



REVISIONS2016-02-15


2016-03-11

4

4

4

J

H

14 15 16 17

809 SF

MAINT. SHOP129

795 SF

CHEM. LAB131

902 SF

ELEC./BURN-IN TEST132

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

48:2

5 PM

EQUIPMENT PLAN-LEVEL 1-LABORATORIES-SECTOR E

CRQ-101E

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- LABORATORY SPACES- SECTOR E


REVISIONS2016-02-15


2016-03-11

4

13

L

K

N

14 15 16 17

STR-001FLAM CAB

STR-008CHEM CAB

STR-007CARBOY

PUMPOUT

GC-001PH3

LC-001LEAKER CAB

GM-009He

GM-001Ar

SCRB-001OLYMPUS 2000

DRY ABATE

GC-002AsH3

GC-010200-300 PPMSi2H6 IN H2

GC-019Si2H6

GM-00210% Xe IN Ne

GM-003C4F8

GM-004CF4

GM-005CHF3

GM-006CO2

GM-0070.5% H2 IN Ne

GM-008Ne

GM-010N2O

GM-011O2

GM-012SF6

LC-002LEAKER CAB

SCRB-004OLYMPUS 2000

DRY ABATE

STR-002FLAM CAB

STR-003FLAM CAB

STR-004FLAM CAB

STR

-005

FLAM

CAB

STR

-006

FLAM

CAB

STR-009CHEM CAB

STR-010CHEM CAB

STR-011CHEM CAB

STR-012CHEM CAB

STR-013CHEM CAB

STR-014CHEM CAB

STR-015CHEM CAB

STR-016CHEM CAB

STR-017CHEM CAB

STR-018CHEM CAB

STR-019CHEM CAB

STR-007.01CO2 FIRE SUP

GC

-007

HC

l/H2/

Ne

GC

-008

HBr GC

-009

HC

l

GC

-018

SPAR

EG

C-0

17SP

ARE

GC

-011

SiC

l4G

C-0

21N

F3

SS-001SAFETY SHOWER

GC-005CH4 GC-013

SiH(CH3)3

GC-0165%B2H6 IN H2

GC

-006

Cl2

GC

-015

NO

GC

-012

5% C

I2 IN

N2

STR-021IPA CHEMDELIVERY

STR-020ACETONE CHEM

DELIVERY

STR-023HF CHEMDELIVERY

STR-022SULF ACID CHEM

DELIVERY



642 SF

CORR. /OX. GAS ROOM(H-3/H-4)

154

721 SF

FLAM. GAS ROOM(H-2/H-4)

153

759 SF

CORR. LIQUID ROOM(H-3/H-4)

155

605 SF

FLAM. LIQUID ROOM(H-2/H-4)

151

323 SF

GAS ROOM (H-5)152

SCR

B-00

9O

LYM

PUS

2000

DR

Y AB

ATE

SS-019SAFETY SHOWER

SS-018SAFETY SHOWER

SS-020SAFETY SHOWER

SS-021SAFETY SHOWER

GC

-003

BCl3

O

M

14.6

SCR

B-00

2O

LYM

PUS

2000

DR

Y AB

ATE

SCR

B-00

3O

LYM

PUS

2000

DR

Y AB

ATE

SCR

B-01

4O

LYM

PUS

2000

DR

Y AB

ATE

LOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERS LOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERSLOCKERS

GC-020SbH3

GC-004GeH4

GC-014SPARE

STEEL OVERHEAD TRESTLE AND ABOVEGRADE CONC. TRENCH FOR PIPING ANDCONDUITS TO BULK GAS YARD- SEE CRG-100AND SITE DRAWINGS. SEE STRUCTURALFOR TRESTLE AND TRENCH DETAILS

5

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

49:1

4 PM

EQUIPMENT PLAN-LEVEL 1- HPM AREAS-SECTOR F

CRQ-101F

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 LEVEL 1- EQUIPMENT PLAN- HPM SPACES

NOTES:A. ALL TOOLS AND EQUIPMENT ON THIS SHEET DENOTED WITH SOLID HATCH ARE FOR PHASE 1 ONLY. ALL FUTURE PHASE 2 EQUIPMENT IS DENOTED WITH DIAGONAL LINE HATCHING.B. REFER TO SHEET CRQ-600 FOR TOOL AND EQUIPMENT SCHEDULES.C. ALL CHEMICAL STORAGE CABINETS SHOWN ON THIS SHEET ARE O.F.O.I.D. ALL PHASE 2 EQUIPMENT IS FOR REFERENCE PURPOSES ONLY AND IS NOT IN CONTRACT.


REVISIONS2016-02-15


2016-03-11

4

4

1 2 3 4 5 6 7 8 9 10 11 13

A

B

J

H

G

F

E

D

C

L

K

N

12 14 15

16 17

341 SF

STAGING/WIPEDOWN241

Class 10,000 219 SF

STAGING/WIPEDOWN213

Class 10,000

764 SF

MOCVD 2240D

Class 1,000

1405 SF

MOCVD 1240C

Class 1,000

O

319 SF

WAFER STARTS240A

Class 1,000

169 SF

ULTRA CLEAN ZONE242

Class 1,000

M

14.6

75 SF

VESTIBULE245

888 SF

8'-0" WIDE CLEAR AISLE240P

Class 1,000

521 SF

METROLOGY240F

Class 1,000

528 SF

MOCVD 3240E

Class 1,000

221 SF

STOCKERS240B

Class 1,000

507 SF

CVD240G

Class 1,000

475 SF

10'-0" WIDE CLEARAISLE240L

Class 1,000

146 SF

CLEAN VESTIBULE (B)243

Class 1,000

548 SF

GOWNING212

Class 1,000

407 SF

PRE-GOWNING211

Class 10,000

7615 SF

CLASS 10,000CLEANROOM SPACE

210

Class 10,000

132 SF

RETURN AIR CHASE215

Class 10,000

465 SF

PARTS CLEAN240H

Class 1,000

1113 SF

10'-0" WIDE CLEARAISLE240M

Class 1,000

200 SF

10'-0" WIDE CLEARAISLE240N

Class 1,000

493 SF

WET PROCESS240J

Class 1,000

616 SF

RACKS/STG.240K

Class 1,000

14423 SF

UNASSIGNED CLASS1,000 CLEANROOM

SPACE240Q

Class 1,000

115 SF

WAFER CART PASSTHRU246

Class 1000

113 SF

CHEM. CART PASSTHRU247

Class 1000

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

49:4

5 PM

EQUIPMENT PLAN-OVERALL LEVEL 2

CRQ-200

DN10/05/15

CD-0819


Owner

CD-0819

MW

3/32" = 1'-0"1 LEVEL 2- OVERALL EQUIPMENT PLAN



REVISIONS2016-02-15


2016-03-11

4

4

4

7 8 9 10 11 13

J

H

G

F

K

12

EPI-001ASM

EPSILON E2000EPI Si, SigE, Ge

EPI-001.02TOOL

INTERFACEMODULE

EPI-001.03SIDECAR

GAS PURF

EPI-001.07VAPOR

DELIVERYSYS.

CVD-001AMAT

PRODUCERLPCVD OR RTCVD

POLYCRYST/AMORPH- SiGe: Si-C, ASi

CVD-002/005AMAT

PRODUCERPECVD- SiO2,

SiON, Si3N4, SiN

WP-002SCREENCW-1500

PRE GATECLEAN- PRE EPICLEAN SILICON

BASED

WP-012KINETICSCUSTOM

WET BENCH-SOLVENT

WP-015JST MFGCUSTOM

WET BENCH-ACID


WET BENCH-BASE


WET BENCH-SPINNER

MET-002MECHATRONICmWS200-300T

WAFER SORTER

MET-006SEMILABSE-2500

VASE

MET-006.01COMPUTER

WP-002.01ELECTRICAL

BOX

341 SF

STAGING/WIPEDOWN241

Class 10,000

BURN-003BLUE M

DCC1406INERT GAS OVN

BURN-004BLUE M

DCC1406INERT GAS OVN

WP-024JST MFGCUSTOM

SOLV PARTSCLEAN

STOCK-001BROOKS

M2100WAFER STOCKER

STOCK-002BROOKS

M2100WAFER STOCKER

WP-024.01CO2 FIRE

SUP

WP-012.01CO2 FIRE

SUP

SUP-0034' HOOD

BOTTLE WASHWP-025JST MFGCUSTOM

ACID PARTSCLEAN

SUP-002BROOKS

M0300FOUP CLEANER

WP-019CLASS 1 TECH

TRIDENTSRD

WP-017CLASS 1 TECH

TRIDENTSRD

WP-018CLASS 1 TECH

TRIDENTSRD

169 SF

ULTRA CLEAN ZONE242

Class 1,000

319 SF

WAFER STARTS240A

Class 1,000

888 SF

8'-0" WIDE CLEAR AISLE240P

Class 1,000

221 SF

STOCKERS240B

Class 1,000

507 SF

CVD240G

Class 1,000

475 SF

10'-0" WIDE CLEARAISLE240L

Class 1,000

146 SF

CLEAN VESTIBULE (B)243

Class 1,000

465 SF

PARTS CLEAN240H

Class 1,000

1113 SF


Class 1,000

200 SF


Class 1,000

493 SF

WET PROCESS240J

Class 1,000

616 SF

RACKS/STG.240K

Class 1,000

MET-005BRUKER

DIMENSION ICONAFM


WET BENCH-ACID PARTS

CLEAN


WET BENCH-ACID PARTS

CLEAN

CVD-002/005.15COMPUTER

CVD-001.15COMPUTER

WP-013.01CO2 FIRE

SUP

??

SAFETY SHOWERW/ INTEGRAL BOOTH ENCLOSUREAND DRAIN PAIN- REFER TO DETAIL6/CRA-503 FOR INSTALLATION OFSHOWER BOOTH AND RAISED ACCESSFLOORING SYSTEM

521 SFMETROLOGY

115 SF

WAFER CART PASSTHRU246

Class 1000113 SF

CHEM. CART PASSTHRU247

Class 1000

WAFER STARTSTABLE

?

MET-005.01COMPUTER

?

MET-005.03AIR TABLEVIBRATIONISOLATION

SS-012SAFETY

SHOWER

?

CART

CART

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

50:0

3 PM

EQUIPMENT PLAN-LEVEL 2- CLASS 1000CLEANROOM-SECTOR C

CRQ-201C

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 EQUIPMENT PLAN- LEVEL 2- CLASS 1000 CLEANROOM - SECTOR C



REVISIONS2016-02-15


2016-03-11

4

4

4

4

7 8 9 10 11 13

B

E

D

C

12

MOCVD-001AIXTRONBM300T

CNT/GRAPHENE

MOCVD-001.02REMOTE PC

MOCVD-004AIXTRONEOS-XPEPI III-V

EPI-001ASM

EPSILON E2000EPI Si, SigE, Ge

EPI-001.02TOOL

INTERFACEMODULE

EPI-001.03SIDECAR

GAS PURF

EPI-001.07VAPOR

DELIVERYSYS.

EPI-001.05MAINT. CART

MET-007BRUKER

CONTOUR3D MICROSCOPE


VASE


PHOTOLUMINESCENCE

MET-011KLA TENCOR

CS920SURFACEDEFECT

MET-006.01COMPUTER

MET-007.01COMPUTER

MET-008.01COMPUTER

MOCVD-004.13PM1

VAPORSTATION

MOCVD-004.29PM2

VAPORSTATION

MOCVD-004.30PM3

VAPORSTATION

MOCVD-004.31PM4

VAPORSTATION

MOCVD-005ALTAIXTRONEOS-XP

Gan/ALGaN

MOCVD-005ALT.13PM1

VAPORSTATION

MOCVD-005ALT.29PM2

VAPORSTATION

MOCVD-005ALT.30PM3

VAPORSTATION

MOCVD-005ALT.31PM4

VAPORSTATION

MOCVD-005ALT.02REMOTE PC

MOCVD-001ALTPLASMA-THERM

VERSALINESINGLE CHMBR

SiC PECVD

MOCVD-001ALT.04

COMPUTERCART

B.1

764 SF

MOCVD 2240D

Class 1,000

1405 SF

MOCVD 1240C

Class 1,000

MOCVD-004.02REMOTE PC

521 SF

METROLOGY240F

Class 1,000

528 SF

MOCVD 3240E

Class 1,000

1113 SF


Class 1,000

200 SF


Class 1,000


RAMAN W/ WFRHNDLNG

?

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

50:2

5 PM

EQUIPMENT PLAN-LEVEL 2- CLASS 1000CLEANROOM-SECTOR D

CRQ-201D

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 EQUIPMENT PLAN- LEVEL 2- CLASS 1000 CLEANROOM - SECTOR D



REVISIONS2016-02-15


2016-03-11

4

J

H

G

F

K

14 15 16 17

DISPOSE

WASTE

BOOTIESHOODS

HIGH TOPBOOTIES

HAMPER

219 SF

STAGING/WIPEDOWN213

Class 10,000

548 SF

GOWNING212

Class 1,000

407 SF

PRE-GOWNING211

Class 10,000

7615 SF

CLASS 10,000CLEANROOM SPACE

210

Class 10,000

132 SF

RETURN AIR CHASE215

Class 10,000

BOOTIESHOODS

BOOTIESHOODS

DISPOSE

HAMPER

BENCH

BENCH

BENCH

BENCH

PRODUCTWIPE DOWN

TABLE

GLOVEDISP.

GLOVEDISP.

GOWN RACK

GOWN RACK

GOWN RACK

GOWN RACK

GOWN RACK

GOWN RACK

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 2:

50:3

5 PM

EQUIPMENT PLAN-LEVEL 2- CLASS 10,000CLEANROOM-SECTOR E

CRQ-201E

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/4" = 1'-0"1 EQUIPMENT PLAN- LEVEL 2- CLASS 10,000 CLEANROOM - SECTOR E


REVISIONS2016-02-15


2016-03-11

4

2/CRQ-30

0

4/CRQ-300

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 1:

54:4

0 PM

3D VIEWS FOR CLASS1000 CLEANROOM

CRQ-300

DN10/05/15

CD-0819


Owner

CD-0819

MW

1/16" = 1'-0"1 LEVEL 2- EQUIPMENT KEY PLAN2 ELEVATED VIEW OUTSIDE STAGING/WIPE-DOWN

4 VIEW INTO CLEANROOM FROM CORRIDOR


REVISIONS2016-02-15


2016-03-11

Sheet Number


Sheet Title

Project No:


Professional Seals

Key Plan

In Association with

Project



Abbie Gregg, Inc.



t +1 813 229 0300 f +1 813 223 7116

Prepared For

Contract No:


HOK

Client Location

Reviewedby:


3/10

/201

6 1:

55:0

4 PM

EQUIPMENTSCHEDULES- SUBFAB,HPM, & CLEANROOMS

CRQ-600

DN10-05-15

CD-0819


Owner

CD-0819

MW

1 CONSTRUCTION DOCUMENTREVISIONS

2016-02-15


2016-03-11

Level 1 Phase 1 Equipment Schedule HPM Areas

Tool ID Room: Number Room: Name Phasing Description Responsibility

SS-001 150 HPM CORRIDOR (H-5) PHASE 1 SAFETY SHOWER CFCISS-020 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 SAFETY SHOWER CFCISTR-001 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 FLAM CAB OFOISTR-002 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 FLAM CAB OFOISTR-003 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 FLAM CAB OFOISTR-004 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 FLAM CAB OFOISTR-007 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 CARBOY PUMPOUT OFOISTR-007.01 151 FLAM. LIQUID ROOM (H-2/H-4) PHASE 1 CO2 FIRE SUP OFOIGM-001 152 GAS ROOM (H-5) PHASE 1 Ar CFCIGM-009 152 GAS ROOM (H-5) PHASE 1 He CFCIGM-010 152 GAS ROOM (H-5) PHASE 1 N2O CFCIGM-011 152 GAS ROOM (H-5) PHASE 1 O2 CFCIGM-012 152 GAS ROOM (H-5) PHASE 1 SF6 CFCIGC-001 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 PH3 CFCIGC-002 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 AsH3 CFCIGC-004 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 GeH4 CFCIGC-005 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 CH4 CFCIGC-010 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 200-300 PPM Si2H6 IN H2 CFCIGC-013 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 SiH(CH3)3 CFCIGC-016 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 5%B2H6 IN H2 CFCIGC-019 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 Si2H6 CFCILC-001 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 LEAKER CAB CFCISCRB-001 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 DRY ABATE CFCISCRB-004 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 DRY ABATE CFCISS-021 153 FLAM. GAS ROOM (H-2/H-4) PHASE 1 SAFETY SHOWER CFCIGC-006 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 Cl2 CFCIGC-009 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 HCl CFCIGC-012 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 5% CI2 IN N2 CFCIGC-015 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 NO CFCILC-002 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 LEAKER CAB CFCISCRB-009 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 DRY ABATE CFCISCRB-014 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 DRY ABATE CFCISS-019 154 CORR. /OX. GAS ROOM (H-3/H-4) PHASE 1 SAFETY SHOWER CFCISS-018 155 CORR. LIQUID ROOM (H-3/H-4) PHASE 1 SAFETY SHOWER CFCI

Phase 1 Equipment Schedule- Table 1


CVD-001 240G CVD PHASE 1 LPCVD OR RTCVDPOLYCRYST/AMORPH -SiGe: Si-C, ASi

OFOI

CVD-001.01 149 SUBFAB PHASE 1 DRY PUMP OFOICVD-001.02 149 SUBFAB PHASE 1 DRY PUMP OFOICVD-001.03 149 SUBFAB PHASE 1 DRY PUMP OFOICVD-001.05 149 SUBFAB PHASE 1 CONTROLLER PM 1 & MAIN OFOICVD-001.06 149 SUBFAB PHASE 1 HEAT EXCHANGER-PM-1 OFOICVD-001.07 149 SUBFAB PHASE 1 TM & LL PUMP OFOICVD-001.08 149 SUBFAB PHASE 1 HEAT EXCHANGER-PM-2 OFOICVD-001.09 149 SUBFAB PHASE 1 HEAT EXCHANGER-PM-3 OFOICVD-001.10 149 SUBFAB PHASE 1 DRY PUMP OFOICVD-001.11 149 SUBFAB PHASE 1 HEAT EXCHANGER-PM-4 OFOICVD-001.12 149 SUBFAB PHASE 1 CONTROLLER PM 2 OFOICVD-001.13 149 SUBFAB PHASE 1 CONTROLLER PM 3 OFOICVD-001.14 149 SUBFAB PHASE 1 CONTROLLER PM 4 OFOICVD-001.15 240G CVD PHASE 1 COMPUTER OFOICVD-002/005 240G CVD PHASE 1 PECVD- SiO2, SiON, Si3N4,

SiNOFOI

CVD-002/005.01

149 SUBFAB PHASE 1 DRY PUMP OFOI

CVD-002/005.02


CVD-002/005.03


CVD-002/005.05

149 SUBFAB PHASE 1 CONTROLLER PM-1 & MAIN OFOI

CVD-002/005.06

149 SUBFAB PHASE 1 HEAT EXCHANGER OFOI

CVD-002/005.07

149 SUBFAB PHASE 1 TM & LL PUMP OFOI

CVD-002/005.08


CVD-002/005.09


CVD-002/005.10


CVD-002/005.11


CVD-002/005.12

149 SUBFAB PHASE 1 CONTROLLER PM-2 OFOI

CVD-002/005.13


CVD-002/005.14


CVD-002/005.15

240G CVD PHASE 1 COMPUTER OFOI

EPI-001 240C MOCVD 1 PHASE 1 EPI Si, SigE, Ge OFOIEPI-001.01 149 SUBFAB PHASE 1 POWER DIST. MODULE OFOIEPI-001.02 240C MOCVD 1 PHASE 1 TOOL INTERFACE MODULE OFOIEPI-001.03 240C MOCVD 1 PHASE 1 SIDECAR GAS PURF OFOIEPI-001.04 149 SUBFAB PHASE 1 SCROLL PUMP OFOIEPI-001.05 240C MOCVD 1 PHASE 1 MAINT. CART OFOIEPI-001.06 149 SUBFAB PHASE 1 PUMP PKG. OFOIEPI-001.07 240C MOCVD 1 PHASE 1 VAPOR DELIVERY SYS. OFOIMET-002 240A WAFER STARTS PHASE 1 WAFER SORTER OFOIMET-005 240C MOCVD 1 PHASE 1 AFM OFOIMET-005.01 240C MOCVD 1 PHASE 1 COMPUTER OFOIMET-005.03 240C MOCVD 1 PHASE 1 AIR TABLE VIBRATION

ISOLATIONOFOI

MET-005.04 240Q UNASSIGNED CLASS 1,000CLEANROOM SPACE

PHASE 1 NANODRIVE CONTROLLER OFOI

MET-006 240C MOCVD 1 PHASE 1 VASE OFOIMET-006.01 240C MOCVD 1 PHASE 1 COMPUTER OFOIMET-007 240F METROLOGY PHASE 1 3D MICROSCOPE OFOIMET-007.01 240F METROLOGY PHASE 1 COMPUTER OFOIMET-008 240F METROLOGY PHASE 1 RAMAN W/ WFR HNDLNG OFOIMET-008.01 240F METROLOGY PHASE 1 COMPUTER OFOIMET-011 240F METROLOGY PHASE 1 SURFACE DEFECT OFOI

Phase 1 Equipment Schedule-Table 2


MET-014 240F METROLOGY PHASE 1 PHOTOLUMINESCENCE OFOIMOCVD-001 240E MOCVD 3 PHASE 1 CNT/GRAPHENE OFOIMOCVD-001.01 149 SUBFAB PHASE 1 DRY PUMP OFOIMOCVD-001.02 240E MOCVD 3 PHASE 1 REMOTE PC OFOIMOCVD-001ALT

240E MOCVD 3 PHASE 1 SiC PECVD OFOI

MOCVD-001ALT .01

149 SUBFAB PHASE 1 CHAMBER PUMP OFOI

MOCVD-001ALT .02

149 SUBFAB PHASE 1 LL VACUUM PUMP OFOI

MOCVD-001ALT .03

149 SUBFAB PHASE 1 POWER/CONTROL RACK OFOI

MOCVD-001ALT .04

240E MOCVD 3 PHASE 1 COMPUTER CART OFOI

MOCVD-001ALT .05

149 SUBFAB PHASE 1 CHILLER OFOI

MOCVD-004 240D MOCVD 2 PHASE 1 EPI III-V OFOIMOCVD-004.01 149 SUBFAB PHASE 1 MPDU OFOIMOCVD-004.02 240D MOCVD 2 PHASE 1 REMOTE PC OFOIMOCVD-004.03 149 SUBFAB PHASE 1 TM VAC PUMP 1 OFOIMOCVD-004.04 149 SUBFAB PHASE 1 TM VAC PUMP 2 OFOIMOCVD-004.04 149 SUBFAB PHASE 1 CHILLER 2 PM2 OFOIMOCVD-004.05 149 SUBFAB PHASE 1 PROC DIFF PUMP OFOIMOCVD-004.06 149 SUBFAB PHASE 1 PRE-CLEAN DIFF PUMP OFOIMOCVD-004.07 149 SUBFAB PHASE 1 PM1 PROCESS PUMPS OFOIMOCVD-004.08 149 SUBFAB PHASE 1 PM1 PUMP NO.2

PRE-CLEANOFOI

MOCVD-004.09 149 SUBFAB PHASE 1 TM VAC PUMP 3 OFOIMOCVD-004.10 149 SUBFAB PHASE 1 PM1

CHILLER-SHOWERHEADOFOI

MOCVD-004.11 149 SUBFAB PHASE 1 PM1 CHILLER-CHAMBERPROC

OFOI

MOCVD-004.12 149 SUBFAB PHASE 1 PM1 CHILLER-CHAMBERCOOLING

OFOI

MOCVD-004.13 240D MOCVD 2 PHASE 1 PM1 VAPORSTATION OFOIMOCVD-004.14 149 SUBFAB PHASE 1 PM2 PUMP NO.2

PRE-CLEANOFOI

MOCVD-004.15 149 SUBFAB PHASE 1 PM2 PUMP NO.1 OFOIMOCVD-004.16 149 SUBFAB PHASE 1 PM2 CHILLER-CHAMBER

PROCOFOI

MOCVD-004.17 149 SUBFAB PHASE 1 PM2CHILLER-SHOWERHEAD

OFOI

MOCVD-004.18 149 SUBFAB PHASE 1 PM2 CHILLER-CHAMBERCOOLING

OFOI

MOCVD-004.29 240D MOCVD 2 PHASE 1 PM2 VAPORSTATION OFOIMOCVD-004.30 240D MOCVD 2 PHASE 1 PM3 VAPORSTATION OFOIMOCVD-004.31 240D MOCVD 2 PHASE 1 PM4 VAPORSTATION OFOIMOCVD-004.32 149 SUBFAB PHASE 1 HPDU OFOIMOCVD-005ALT

240C MOCVD 1 PHASE 1 Gan/ALGaN OFOI

MOCVD-005ALT.01

149 SUBFAB PHASE 1 MPDU OFOI

MOCVD-005ALT.02

240C MOCVD 1 PHASE 1 REMOTE PC OFOI

MOCVD-005ALT.03

149 SUBFAB PHASE 1 TM VAC PUMP 1 OFOI

MOCVD-005ALT.04

149 SUBFAB PHASE 1 TM VAC PUMP 2 OFOI

MOCVD-005ALT.05

149 SUBFAB PHASE 1 PROC DIFF PUMP OFOI

MOCVD-005ALT.07

149 SUBFAB PHASE 1 PM1 PROCESS PUMPS OFOI

MOCVD-005ALT.08

149 SUBFAB PHASE 1 PM1 PUMP NO.2PRE-CLEAN

OFOI

MOCVD-005ALT.10

149 SUBFAB PHASE 1 PM1CHILLER-SHOWERHEAD

OFOI

MOCVD-005ALT.11

149 SUBFAB PHASE 1 PM1 CHILLER-CHAMBERPROC

OFOI

MOCVD-005ALT.12

149 SUBFAB PHASE 1 PM1 CHILLER-CHAMBERCOOLING

OFOI

MOCVD-005ALT.13

240C MOCVD 1 PHASE 1 PM1 VAPORSTATION OFOI

MOCVD-005ALT.14

149 SUBFAB PHASE 1 PM2 PUMP NO.2PRE-CLEAN

OFOI

MOCVD-005ALT.15

149 SUBFAB PHASE 1 PM2 PUMP NO.1 OFOI

MOCVD-005ALT.16

149 SUBFAB PHASE 1 PM2 CHILLER-CHAMBERPROC

OFOI

MOCVD-005ALT.17

149 SUBFAB PHASE 1 PM2CHILLER-SHOWERHEAD

OFOI

MOCVD-005ALT.18

149 SUBFAB PHASE 1 PM2 CHILLER-CHAMBERCOOLING

OFOI

MOCVD-005ALT.29


MOCVD-005ALT.30


MOCVD-005ALT.31


MOCVD-005ALT.32

149 SUBFAB PHASE 1 HPDU OFOI

Phase 1 Equipment Schedule-Table 3


PURH2-001 149 SUBFAB PHASE 1 H2 PURIF OFOIPURH2-002 149 SUBFAB PHASE 1 H2 PURIF OFOIPURN2-001 149 SUBFAB PHASE 1 N2 PURIF OFOIPURN2-002 149 SUBFAB PHASE 1 N2 PURIF OFOIPURN2-003 149 SUBFAB PHASE 1 N2 PURIF GAS VENDORPURNH3-001 149 SUBFAB PHASE 1 NH3 PURIF OFOISCRB-005 149 SUBFAB PHASE 1 DRY ABATE OFOISCRB-006 149 SUBFAB PHASE 1 DRY ABATE OFOISCRB-007 149 SUBFAB PHASE 1 DRY ABATE OFOISCRB-008 149 SUBFAB PHASE 1 DRY ABATE OFOISCRB-010 149 SUBFAB PHASE 1 DRY ABATE OFOISCRB-011 149 SUBFAB PHASE 1 THER/WET ABATE OFOISS-006 149 SUBFAB PHASE 1 SAFETY SHOWER CFCISS-011 149 SUBFAB PHASE 1 SAFETY SHOWER CFCISTOCK-001 240B STOCKERS PHASE 1 WAFER STOCKER OFOISTOCK-002 240B STOCKERS PHASE 1 WAFER STOCKER OFOISUP-002 240H PARTS CLEAN PHASE 1 FOUP CLEANER OFOISUP-003 240H PARTS CLEAN PHASE 1 BOTTLE WASH OFOIVMB-001 149 SUBFAB PHASE 1 PH3 CFCIVMB-002 149 SUBFAB PHASE 1 AsH3 CFCIVMB-004 149 SUBFAB PHASE 1 GeH4 CFCIVMB-005 149 SUBFAB PHASE 1 CH4 CFCIVMB-006 149 SUBFAB PHASE 1 Cl2 CFCIVMB-009 149 SUBFAB PHASE 1 HCl CFCIVMB-010 149 SUBFAB PHASE 1 200 TO 300 DISILANE IN H2 CFCIVMB-013 149 SUBFAB PHASE 1 (CH3)3SiH CFCIVMB-014 149 SUBFAB PHASE 1 BLUE NH3 CFCIVMB-015 149 SUBFAB PHASE 1 NO CFCIVMB-016 149 SUBFAB PHASE 1 5%B2H6 IN H2 CFCIVMB-019 149 SUBFAB PHASE 1 SI2H6 CFCIVMB-022 149 SUBFAB PHASE 1 5% Cl2 IN N2 CFCIVMB-023 149 SUBFAB PHASE 1 SiH4 CFCIVMB-024 149 SUBFAB PHASE 1 NH3 CFCIVMB-025 149 SUBFAB PHASE 1 H2 CFCIVMB-026 149 SUBFAB PHASE 1 H2 CFCIWASTE-001 149 SUBFAB PHASE 1 SOLVENT COLLECTION OFOIWASTE-005 149 SUBFAB PHASE 1 HF COLLECTION OFOIWP-002 240J WET PROCESS PHASE 1 PRE GATE CLEAN- PRE EPI

CLEAN SILICON BASEDOFOI

WP-002.01 240J WET PROCESS PHASE 1 ELECTRICAL BOX OFOIWP-002.02 149 SUBFAB PHASE 1 UPS CABINET OFOIWP-002.03 149 SUBFAB PHASE 1 HOT DIW UNIT 144KW OFOIWP-002.04 149 SUBFAB PHASE 1 CSU CABINET OFOIWP-002.05 149 SUBFAB PHASE 1 CSB COOLING UNIT OFOIWP-002.06 149 SUBFAB PHASE 1 COOLING TANK OFOIWP-002.07 149 SUBFAB PHASE 1 CO2 UNIT OFOIWP-002.08 149 SUBFAB PHASE 1 A BOX OFOIWP-002.09 149 SUBFAB PHASE 1 CO2 UNIT OFOIWP-002.10 149 SUBFAB PHASE 1 CO2 UNIT OFOIWP-002.11 149 SUBFAB PHASE 1 CO2 UNIT OFOIWP-002.12 149 SUBFAB PHASE 1 HOT DIW UNIT 72 KW OFOIWP-011 240J WET PROCESS PHASE 1 WET BENCH- BASE OFOIWP-012 240H PARTS CLEAN PHASE 1 WET BENCH- SOLVENT OFOIWP-012.01 240H PARTS CLEAN PHASE 1 CO2 FIRE SUP OFOIWP-013 240J WET PROCESS PHASE 1 WET BENCH- SPINNER OFOIWP-013.01 240J WET PROCESS PHASE 1 CO2 FIRE SUP OFOIWP-015 240G CVD PHASE 1 WET BENCH- ACID OFOIWP-017 240J WET PROCESS PHASE 1 SRD OFOIWP-018 240G CVD PHASE 1 SRD OFOIWP-019 240J WET PROCESS PHASE 1 SRD OFOIWP-022 240J WET PROCESS PHASE 1 WET BENCH- ACID PARTS

CLEANOFOI

WP-023 240J WET PROCESS PHASE 1 WET BENCH- ACID PARTSCLEAN

OFOI

WP-024 240H PARTS CLEAN PHASE 1 SOLV PARTS CLEAN OFOIWP-024.01 240H PARTS CLEAN PHASE 1 CO2 FIRE SUP OFOIWP-025 240H PARTS CLEAN PHASE 1 ACID PARTS CLEAN OFOI

NOTES:1. ALL TOOLS AND EQUIPMENT ARE OWNER-FURNISHED/OWNER-INSTALLED (OFOI) UNLESS NOTED OTHERWISE IN THE RESPONSIBILITY COLUMN OF EACH SCHEDULE ON THIS SHEET. ALL CONTRACTOR-FURNISHED/ CONTRACTOR-INSTALLED (CFCI) ITEMS ARE SHADED IN THE RESPONSIBILITY COLUMN.

2. REFER TO CRQ PLAN SHEETS FOR EQUIPMENT TAGS AND LAYOUT.

3. THE SCHEDULES ON THIS SHEET ARE FOR PHASE 1 EQUIPMENT ITEMS ONLY. PHASE 2 ITEMS AS SHOWN ON THE CRQ PLAN SHEETS DENOTED AS SUCH ARE FOR REFERENCE PURPOSES ONLY AND ARE NOT IN CONTRACT.

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1

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subfab · 1 2 3 4 5 6 7 8 9 10 11 13 a b j h g f e d c k 12 b.1 23072 sf subfab 149 sheet crq-101b...

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