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PROPERTIES AND CHARACTERISTICS OF GRAPHITE For the semiconductor industry May 2013 SPECIALTY MATERIALS

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PROPERTIES AND CHARACTERISTIOF GRAPHITE

For the semiconductor industryMay 2013

SPECIALTY M

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 1

INTRODUCTION

Introduction As Entegris has continued to grow its market share ofmanufactured graphite material and to expand their

usage into increasingly complex areas, the need tobe more technically versed in both Entegris’ POCO® graphite and other manufactured graphite propertiesand how they are tested has also grown. It is with thisthought in mind that this primer on properties andcharacteristics of graphite was developed.POCO, now owned by Entegris, has been a supplierto the semiconductor industry for more than 35 years.Products include APCVD wafer carriers, E-Beam cruci-bles, heaters (small and large), ion implanter parts,LTO injector tubes, MOCVD susceptors, PECVD wafertrays and disk boats, plasma etch electrodes, quartzreplacement parts, sealing plates, bonding fixturesand sputtering targets. Entegris has a wide range ofmaterials, as well as post-processing and machiningcapabilities to meet the demanding requirements ofsemiconductor processing.With an accumulation of experience and data intesting POCO graphites as well as other manufacturedgraphites, it is now possible to describe the propertiesand testing techniques and their interrelationship.The very discussion of these issues will bring forthmany of the reasons why POCO graphites with theirunique properties are superior to other manufacturedgraphites.

The purpose of this primer is to introduce the readerto graphite properties and to describe testing tech-niques, which enable true comparisons between amultitude of manufactured graphites. POCO graphitescome in many grades, each designed for a specificrange of applications. In the semiconductor industry,these are represented by grades such as SFG, CZR,TRA, DFP, HPD, PLS, SCF and ZEE. These are thematerials upon which POCO facility has built itsreputation as a manufacturer of the best graphitesin the world.

Table of ContentsIntroduction .............................................................1

Structure ..................................................................2 Apparent Density .............. .............. .............. ........... 6

Porosity ....................................................................8

Hardness ................................................................11

Compressive Strength .............................................12

Flexural Strength ...................................................14

Tensile Strength .....................................................16

Modulus of Elasticity .............................................18

Electrical Resistivity ..............................................19Thermal Expansion ................................................21

Thermal Conductivity .............................................22

Thermal Shock .......................................................24

Specific Heat ..........................................................26

Emissivity ...............................................................28

Ash .......................................................................... 30

Oxidation ................................................................32

Appendix A .............. .............. .............. ............... .... 34 Appendix B .............. .............. .............. ............... .... 35

Appendix C Bibliography ............. ............... ........... 36

For More Information ............................................38

Terms and Conditions of Sale ................................38

Product Warranties ................................................38

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2 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

STRUCTURE

StructureDefinition: Carbon, the Element

Carbon is the sixth element on the periodic table andcan be found in abundance in the sun, stars, cometsand atmospheres of most planets.Carbon is a Group 14 element (on older periodictables, Group IVA) along with silicon, germanium,tin and lead. Carbon is distributed very widely innature (Figure 1-1).

In 1961, the International Union of Pure and AppliedChemistry (IUPAC) adopted the isotope12C as thebasis for atomic weights. Carbon-14,14C, an isotope with a half-life of 5730 years, is used to date suchmaterials as wood, archeological specimens, etc.Carbon-13,13C, is particularly useful for isotopic label-ing studies since it is not radioactive, but has a spinI = 1 ⁄ 2 nucleus and therefore a good NMR nucleus.Carbon has four electrons in its valence shell (outershell). The electron configuration in carbon is 1s2 2s2 2p2. Since this energy shell can hold eight electrons,each carbon atom can share electrons with up to fourdifferent atoms. This electronic configuration givescarbon its unique set of properties (Table 1-1). Carboncan combine with other elements as well as with itself.This allows carbon to form many different compoundsof varying size and shape.Carbon is present as carbon dioxide in the atmosphereand dissolved in all natural waters. It is a componentof rocks as carbonates of calcium (limestone), magne-sium and iron. Coal, petroleum and natural gas arechiefly hydrocarbons. Carbon is unique among the ele-ments in the vast number of varieties of compounds itcan form. Organic chemistry is the study of carbon andits compounds.

TABLE 1-1. PROPERTIES OF THE ELEMENT CARBON

Name: CarbonSymbol: CAtomic number: 6Atomic mass: 12.0107 amuMelting point: 3500.0°C

3773.15 K6332.0°F

Boiling point: 4827.0°C5100.15 K8720.6°F

Number of protons/electrons: 6Number of neutrons: 6, 7, 8Classification: Non-metalCrystal structure: Hexagonal

CubicDensity @ 293 K: Graphite – 2.26 g/cm3 Diamond – 3.53 g/cm3

Color: Black, gray

The history of manufactured graphite began at theend of the 19th century with a surge in carbon manfacturing technologies. The use of the electricalresistance furnace to manufacture synthetic graphiled to the development of manufactured forms of cbon in the early part of the 20th century and morerecently, to a wide variety of high-performance maals such as carbon fibers and nanotubes (Figure 1-

Forms of CarbonCarbon is found free in nature in three allotropicforms: amorphous carbon, graphite and diamond.More recently, a fourth form of carbon, buckminstfullerene, C60, has been discovered. This new formof carbon is the subject of great interest in researchlaboratories today. Within the past few years, thisresearch has centered on graphene and its derivativ which have the potential to bring about a fundamechange in the semiconductor/electronic industry.Carbon alone forms the familiar substances graphi

and diamond. Both are made only of carbon atomsGraphite is very soft and slippery, while diamond ione of the hardest substances known to man. Carbas microscopic diamonds, is found in some meteorNatural diamonds are found in ancient volcanic“pipes” such as found in South Africa. If both grapand diamond are made only of carbon atoms, whatgives them different properties? The answer lies inthe way the carbon atoms form bonds with each ot

Figure 1-1. Carbon as on the periodic table

CCarbon

6 12.011

4

Atomic number

Crystal structure

Atomic weight

Common oxidation state

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4 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

STRUCTURE

Thermodynamically, graphite at atmospheric pressureis the more stable form of carbon. Diamond is trans-formed to graphite above 1500°C (Figure 1-4).

The structure of graphite consists of a successionof layers parallel to the basal plane of hexagonallylinked carbon atoms. The ideal graphite structureis shown in Figure 1-5.In this stable hexagonal lattice, the interatomicdistance within a layer plane, a, is 1.42 Å and theinterlayer distance, d, between planes is 3.35 Å.Crystal density is 2.266 g/cm3 as compared with3.53 g/cm3 for diamond. In the graphite structure(sp2 hybridization), only three of the four valenceelectrons of carbon form regular covalent bonds(σ-bonds) with adjacent carbon atoms. The fourthorπ electron resonates between the valence bondstructures. Strong chemical bonding forces exist within the layer planes, yet the bonding energybetween planes is only about two percent of that within the planes (150–170 kcal/[gram atom] vs.1.3–4 kcal/[gram atom]). These weaker bondsbetween the planes are most often explained tobe the result of van der Waals forces.However, Spain2 identifies theπ orbital, which has a pz configuration, and not van der Waals forces as the cor-rect source of bonding between the adjacent layers. Ingeneral, theπ bands overlap by ~40 meV to form thethree-dimensional graphite network where the layerplanes are stacked in the ABAB sequence illustratedin Figure 1-5. Spain concludes in his discussions onelectronic structure and transport properties of graph-ite that the overlap ofπ orbitals on adjacent atoms in

2 Spain, I.L., Electronic Transport Properties of Graphite, Carbons,and Related Materials, Chemistry and Physics of Carbon, 16 (1981),p. 119.

a given plane also provides the electron bond netwresponsible for the high mobility (electronic) of grite. This would appear more correct, since van derWaals forces are the result of dipole moments, whi

would not account for the high mobility.Consequently, weak forces between layer planesaccount for (a) the tendency of graphitic materialsto fracture along planes, (b) the formation of interstial compounds and (c) the lubricating, compressivand many other properties of graphite. As previously mentioned for the hexagonal graphistructure, the stacking order of planes is ABAB, sothat the atoms in alternate planes are congruent(Figure 1-5). Studies have shown that natural grapcontains 17 to 22 percent of a rhombohedral struct with a stacking sequence of ABCABC. In “artifici“synthetic” graphite, in the as-formed state, only apercent at best could be found. However, deformatprocesses such as grinding substantially increase thpercent of rhombohedral structure found in the oth wise hexagonal structure. Amorphous carbon is also referred to as nongraphicarbon. When examined by X-ray diffraction, thesmaterials show only diffuse maxima at the normalscattering angles. This has been attributed to a random translation and rotation of the layers withinthe layer planes. This disorder has been called tur-bostratic. Some of these nongraphitic carbons willbecome graphitic, upon heating to 1700–3000°C.

Some will remain nongraphitic above 3000°C.Thus far, the discussion has centered on the crystalstructure of graphites. On a more macroscopic levethe structure as routinely examined on a light micrscope at magnifications of 100, 200 and 500 timesreveals the porosity, particle or grain size and thegeneral microstructure as it is commonly referred tPhotomicrographs of POCO DFP-1 graphite compto a conventional graphite demonstrate some signicant differences when viewed at 100× magnificatio(Figure 1-6) and at 500× magnification (Figure 1-7It can be seen from these photos that vast differencdo exist in graphite microstructure. These differen

are directly related to raw material and processingparameters. As seen in the photos, the dark or black regions resent the porosity while the lighter regions representhe graphite matrix. It is this matrix, composed ofsmaller particles bound together either chemicallyor mechanically, which is comprised of the crystalstacked layer upon layer. This is more easily seen iscanning electron micrographs (SEM).

A

B

A

1.42 Å

3.35 Åd

2.46 Å

6.70 Åc

a

Figure 1-5. The crystal structure of graphite

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 5

STRUCTURE

The fourth form of carbon, buckminsterfullerene,formula C60, whose framework is reminiscent of theseams in an Association Football (“soccer”) ball(Figure 1-8), is the subject of considerable interest atpresent and was only discovered a few years ago in workinvolving Harry Kroto, a Sheffield University graduate.

Test MethodsThe structure of graphite has been determinedthrough such methods as X-ray diffraction, transmis-sion electron microscopy, neutron diffraction andconvergent beam electron diffraction. These methodsare highly sophisticated and generally require veryexpensive equipment with a highly skilled operator.This is normally beyond the scope of typical industriallaboratories. Since this type of testing or analysis ismore research-oriented, no standard methods will bepresented.However, several books have been published on thestructure of graphite and the reader is encouraged toreview the bibliography in the appendix.

Entegris’ POCO Graphites vs. Conventional

GraphitesWith regard to crystalline structure, POCO graphitehas a typical hexagonal structure. The layer spacingsmay vary, as they are a function of raw material andprocess conditions which vary from manufacturer tomanufacturer. It is reasonable to assume that a certaindegree of rhombohedral structure exists also inmachined artifacts due to the machining-induceddeformation mentioned previously. No testing has beendone to confirm this.

Figure 1-8. The crystal structure of C 60 , Fullerene

POCO DFP-1 Graphite – mag. 100×

POCO DFP-1 Graphite – mag. 500×

Conventional Graphite – mag. 100×

Conventional Graphite – mag. 500×

Figure 1-6. POCO graphite vs. conventional graphite under lightmicroscope at 100× magnification

Figure 1-7. POCO graphite vs. conventional graphite under lightmicroscope at 500× magnification

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6 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

APPARENT DENSITY

POCO graphites are also highly isotropic with respectto their structure and properties. The isotropy factor isbetween 0.97 and 1.03 with 1.00 being perfect. A factorof 1.00 means the properties are identical no matter

which direction they are measured in. Many conven-tional graphites are anisotropic. This means theproperties vary depending on which direction youtest them in. The high degree of isotropy makes POCOgraphites useful in many applications where an aniso-tropic material would fail. It also allows for maximumutilization of material, as machining orientation is ofno importance.

Temperature EffectsThere are two general types of carbon, those consid-ered to be “graphitizing” carbons and those that are“nongraphitizing.” The most significant difference isfound in the apparent layer size and apparent stackheight. For equal layer sizes, the apparent stackheight, i.e., average number of layers per stack, is lessfor nongraphitizing carbons than graphitizing carbons.The layer stacking is more perfect in graphitizing car-bons than nongraphitizing. These apparent sizes andheights are important in the first stages ofcarbonization.

Figure 1-9. A model of changes from mesophase to graphite duringheat treatment 3

The structure of graphite with regard to interlayerspacings and crystallite size does change with temper-ature (Figure 1-9). Interlayer spacing, d, decreases asheat-treat temperature increases. Beginning about1500°C, the interlayer spacing, d, decreases sharplyfrom about 3.50 Å to about 3.40 Å by the time the tem-perature reaches 2000°C. At this point it begins tolevel off, approaching 3.35 Å above 3000°C. The crys-tallite size, La , increases as heat-treat temperatures

3 See footnote 1.

increase. Conversely to the interlayer spacing, d,the crystallite size, La , begins a sharp increase about1500°C and continues to about 2000°C where it beto level off. The size at <1500°C is 50 Å and incre

to about 400 Å at 2000°C. A difference will be noted in petroleum coke versupitch coke. The pitch coke does not increase to thesame size as the petroleum coke at the same tempeture. It parallels about 75 Å lower, beginning abou1700–1800°C. La is the basal plane size. La , which alsoincreases, is the stacking direction height (Figure1-5). The total size increases while the interlayerspacing, d, decreases. These changes, along withprocessing parameters, account for the graphites’excellent properties.

Density EffectsIsotropy is independent of density. A high- or low-density material can be isotropic or anisotropic.The general crystal “structure” is also independentin that the greatest effects on density are due to process parameters. The same crystal “structure” canexist independent of the density of the bulk piece.

Apparent Density DefinitionThe density of a substance is the amount of materia

mass, per unit volume. Density is ordinarily exprein grams per cubic centimeter or pounds per cubicfoot (1 g/cm3 = 62.4 lb/ft3). To determine the densityof a specimen, one would first calculate its volumefrom the physical dimensions (for a rectangular sothe volume is equal to the product of the length, wand thickness). Next, the mass would be determineby weighing the specimen. The density is determinby dividing the mass by the calculated volume.If the specimen were completely homogeneous, wno flaws or voids, this method of determining den would yield the theoretical value. Graphite materiaare, however, porous; hence, the term apparent

density.In general, the differences in density of POCO graites reflect what some of the other physical propert will be. The higher-density graphite will, generallystronger with a higher hardness value plus improvment in many other properties and characteristics.

1100°K

1500°K

1700°K

2000°K

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8 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

POROSITY

Temperature EffectThe apparent density will be influenced by tempera-ture during the graphitization process. Generally, thehigher the graphitization temperature, the higher thedensity will become. There are other factors whichmay contribute to this also, but there is an appreciabledensity increase as you go from 2000°C to 3000°C.

Porosity DefinitionThe standard definition for porosity, as found in ASTMStandard C709 which has definitions of terms relatingto manufactured carbon and graphite, is “the percent-age of the total volume of a material occupied by bothopen and closed pores.” When one calculates theapparent density of a material, the pore volume isincluded in the calculation. This results in typicalmaximum densities for nonimpregnated manufacturedgraphites of 1.90 g/cm3. The theoretical density ofgraphite is 2.26 g/cm3. This means that in the very bestcase, about 16 percent of the volume of a bulk piece ofgraphite is open or closed pores. This porosity plays animportant role in many ways, as will be discussed later.The characteristics of the porosity of POCO fine-grained graphites have been studied extensively.4

Test MethodsThere is no recognized ASTM standard for measuringthe porosity of manufactured graphites at this time. A number of techniques may be employed for the pur-pose and are widely in use today. It is important tostate the method by which porosity data is determinedbecause each method imparts its own bias.One of the more widely used methods is mercury poro-simetry. Two other methods in use are gas absorptionby the BET technique and direct image analysis of themicrostructure. The latter is gaining increased accep-tance as a means of measuring more accurately thereal pore structure. The advent of computer and videoequipment has pushed this technique to the forefrontof the porosimetry field. There are, nonetheless, limi-tations to this method also.The mercury porosimetry technique is the methodused for the data reported in POCO graphite litera-ture. It involves basically pushing, under increasingpressure, mercury into the pores and as a function of

4 Brixius, W.H., Dagdigian, J.V., “Mercury Porosimetry Analysis of Fine-Grained Graphite," Conf. Proc., 16th Biennial Conference on Carbon,(1983), pp. 465–466.

pressure and volume filled, the pore size and pore volume can be determined. There are certain disad vantages of this method, such as:1. The pores are not usually circular in cross-sectio

and so the results can only be comparative.2. The presence of “ink-bottle” pores or some othe

shape with constricted “necks” opening into larg void volumes. The pore radius calculated by theWashburn equation is not truly indicative of thetrue pore radius and capillaries are classified attoo small a radius.

3. The effect of compressibility of mercury withincreasing pressure. This should be corrected forby carrying out a blank run.

4. The compressibility of the material under test. Tis a problem of particular importance for materia

which have pores that are not connected to the sface, e.g., cork. Additionally, pore walls may breunder the pressures used if the material under tesis relatively weak. This could cause a bias in thedata.

5. The assumption of a constant value for the surfatension of mercury.

6. The assumption of a constant value for the anglcontact of mercury.

30

25

20

15

10

5

0

1.5 1.6 1.7 1.8 1.9

Apparent Density (g/cm3)

C l o s e d P o r o s i t y ( %

o f T h e o r e t i c a l )

1.1

1.0

0.9

0.8

0.7

0.6

0.5

0.4

0.3

0.2

0.1

0.01.5 1.6 1.7 1.8 1.9

Apparent Density (g/cm3)

A v e r a g e

P o r e

D i a m e t e r

( µ m

)

Figure 3-1. Closed porosity vs. density

Figure 3-2. Pore diameter vs. density

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 9

POROSITY

Entegris has carried out extensive analysis via mer-cury porosimetry to determine fundamental porosityparameters such as pore size and distribution, pore volume and surface area. Using these pore characteris-

tics, two basic linear correlations were observed:closed porosity versus graphite apparent density(Figure 3-1) and average pore diameter versusgraphite apparent density (Figure 3-2).The mercury porosimetry measurements were madeon a Micromeritics® Mercury Porosimeter, Model 915-2. A surface tension constant of 480 dynes/cm and a wetting contact angle of 140 degrees were assumedand used in the Washburn equation5 where P is pres-sure in psi, r is the pore radius in cm,γ is the surfacetension andθ is the contact angle. A pressure andpenetration volume reading were derived from themercury porosimetry apparatus.Penetration volume and pressure data were used togenerate a printout of pressure, volume, pore size andpercent porosity relationships. Graphical plots weregenerated to summarize pore size distribution infor-mation; percent porosity was plotted as a function ofpore diameter.

The surface area was also determined for each sampleas described in the relationship6 where S is the surfacearea in square meters per gram. In addition, the totalclosed porosity was determined from the theoreticalporosity and the observed (open) porosity. Percentopen and closed porosity were expressed as theoreticalporosity.

The above porosity parameters are displayed in graphi-cal form as closed porosity versus apparent densityand average pore diameter versus apparent densityand average pore diameter versus apparent densityin Figures 3-1 and 3-2, respectively. Linear regressionanalysis was performed to determine the best fit equa-tion (dotted lines represent limits at the 95 percentconfidence level).The results of these porosimetry studies indicate a lin-ear relationship between average pore diameter andgraphite apparent density. That is, as the graphiteapparent density increases the average size of thepores increases. Previous in-house photomicrograph

5 Washburn, E.W., Phys. Rev., 17, 273 (1921).6 Orr, C., Jr., “Application of Mercury Penetration to Materials

Analysis," Publication 9-AN-1 from Micromeritics InstrumentCorporation, 8.

studies confirm this observation. Closed porosity wasalso found to increase with graphite apparent density. As can be predicted on the basis of the above surfacearea equation and the above observations, surface

area varies inversely with graphite apparent density. A greater amount of surface area is observed in thelower-density graphite than in the higher-density prod-uct. At first glance, these observations are surprisingand may even seem contradictory. Why should closedporosity increase when a concomitant increase in thepore diameter is also observed? Although cause-and-effect relationships are difficult toestablish, graphite porosity, pore size and surface areaare all physically related to density. Their relationshipto density, whether direct or inverse, has implicationson the structural properties of POCO graphite. The fol-lowing physical model is advanced to rationalize theabove relationships.One notes that as graphite density increases, closedporosity and average pore size also increase whilegraphite surface area decreases. As the graphite struc-ture increases in density, the smaller pores can beimagined to become more and more occluded untilthey are isolated from the rest of the pore system. Asthis process occurs, the smaller-diameter pores aresystematically eliminated until only the larger, lesscomplex pores remain. This also creates a largeramount of closed porosity. Thus, not only does theaverage pore diameter increase as a result of theelimination of small open pores, but pore surfacearea is reduced, since only pores with less branchedstructures remain.Mercury porosimetry data on fine-grained graphitesreveals a definite relationship between closed porosityand apparent density with the closed porosity increas-ing as the apparent density increases. The pore sizealso increases as apparent density increases.

POCO Graphite vs. Conventional GraphiteThe pore volume will be the same for all graphite with the same apparent density, but that is where thesimilarity ends. The pore diameter of POCO graphitesrange from 0.2 microns nominal to 0.8 microns nomi-nal for our 1 and 5 micron grades and densities. Theopen porosity ranges from 75 percent open to 95 per-cent open and the pores are generally spherical inshape. The smaller pore size materials have a verylarge surface area associated with them. Conventionalgraphites will, at best, have typical pore sizes onlydown to several microns in size. The distribution ofpore sizes is very narrow for POCO graphites, whilethey are generally broader for conventional graphites(Figure 3-3).

Pr = –2γ cosθ

S = 0.0225 PdV V max

0

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10 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

POROSITY

The fineness of the porosity allows Entegris materialsto be modified to create truly impermeable graphite.With various post-processing techniques, Entegris canseal, fill or close the porosity, depending on the endapplication. The high degree of open porosity alsoallows Entegris to purify the material to less than5 parts-per-million (ppm) total impurities, by ash

analysis. Figure 3-4 shows helium flow data on variousgrades of POCO graphite. It clearly shows a wide vari-ety of capabilities for POCO graphites. The helium flowtest for checking the permeability, like the mercuryporosimetry test, has its limits or bias and should beclearly identified when using data generated by it.Permeability is simply the rate of flow of a mediumsuch as a gas or liquid through a material while undera pressure gradient. The pores of POCO graphite arenot only uniformly distributed, but are well intercon-nected so flow can take place through them. There areapplications (such as filters) where this is important. Another feature of the small pore size is that some liq-

uids will not generally penetrate the pores readily. Forinstance, it has been determined that after soaking in water for seven days, a sample of DFP-1 picked up lessthan one percent by weight of the water (Figure 3-5).This could be an advantage in some applications.However, in other applications, such as wanting toinfiltrate a liquid such as molten copper, very highpressures are required at high temperatures to accom-plish it. This is a decided disadvantage.

10,000

1000

100

10

1

DFP-1

SFG-1

20 40 60 80 100 120 140 160

Pressure (psi)All test samples: 1/4” thick

Flow cross section: 1.25” diameter

H e

l i u m

F l o w

( c c

/ m i n )

PS-1

Figure 3-4. Helium flow vs. pressure for some POCO graphitematerials

5

4

3

2

1

0

CZR-1

DFP-1

SFG-1

0 24 48 72 96 120 144 168 192

Soak Time in Water (hours)

C u m u l a t i v e

W e i g h t

P i c k - u p ( % )

Figure 3-5. Water absorption of POCO graphites

100

90

80

70

60

50

40

30

20

10

00.1 1 100.01

Pore Diameter (microns)

P o r o s i t y ( % )

Conventionalgraphite

POCOgraphite

Figure 3-3. Pore size distribution: POCO graphite vs. conventionalgraphite

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12 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

COMPRESSIVE STRENGTH

a sample’s surface by a primary and secondary loadand a specific-sized indenter. The hardness is takendirectly from a dial reading. The higher the number,the “harder” the material. A variety of loads and

indenter sizes are available depending upon thematerial being tested and its expected hardness. Forgraphite, the method specified calls for use of the “L”scale with a 60 kg load and a 6.35 mm diameter steel-ball indenter.This works well for conventional graphites, but theultra-fine particle POCO graphites are usually off thescale on the high side when tested with this method. Another scale and/or a smaller indenter would bemore appropriate, but a standard method has not beendeveloped for use. However, a number of our custom-ers specify use of the Rockwell 15T scale for hardnessdata. This is a 15 kg load with a 1.5875 mm diametersteel-ball indenter. There are a number of factors which affect the accuracy of this method, regardlessof the scale used. They are listed in TDI 4.1.1.4,Section 3.4 (Appendix B).

POCO Graphite vs. Conventional GraphitesSince hardness is influenced by a number of other fac-tors, the comparison of POCO graphite to conventionalgraphites is relative at best. If all factors were heldconstant, including graphitization temperature and noartificial densification, etc., based strictly on particlesize alone, POCO graphite would have a higher hard-ness number.

Temperature EffectsGenerally speaking, the higher the temperature, thesofter or lower the hardness becomes. There is a directrelationship to graphitization temperature. The lowerthis temperature is, the higher the hardness number will be. As the temperature increases to about 3400°C,the hardness will continue to slowly drop. From roomtemperature up to the material’s original graphitiza-tion temperature, the hardness will show basically nochange.

Density EffectsThere is a correlation of hardness to density for thebase graphite (Figure 4-1). As density increases, ageneral increase is seen in hardness. This is associated with the amount of porosity, which basically lowers theresistance to penetration. The lower the density, thegreater the pore volume and the less the resistance tothe penetrator and, hence, a lower hardness number.If the porosity is filled with a material for densificationpurposes, the hardness might increase slightly. If,

however, a material such as copper, which is very and ductile, is introduced into the pores, the overalhardness drops in direct relationship to the volumecopper filling the pores. Hence, a material with 75

cent open porosity will have a higher hardness whfilled with copper than a material initially having 9percent open porosity when it is filled with copper

Compressive StrengthDefinitionThe easiest strength characteristic of a material tounderstand and measure is the compressive strengtWhen a material is positioned between two flat, palel platens and a continually increasing compressivforce is applied, either of two things can occur:1. If the material is ductile, such as copper or iron,

atomic or molecular bonds can be re-formed eastherefore, when crystalline planes begin to slipacross each other, the atoms will readily re-form

bonds with other atoms. Consequently, it is quitepossible to flatten a very ductile material, such agold, into a very thin sheet (if high enough compsive load is applied).

2. If the material is brittle, such as graphite or manceramic materials, atomic or molecular bonds canot be re-formed easily; therefore, when crystallplanes begin to slip, catastrophic failure occurs athe material fractures.

84

82

80

78

76

74

72

70

68

66

64

62

60

1.56 1.60 1.64 1.68 1.72 1.76 1.80 1.84 1.88

Apparent Density (g/cm3)

S h

o r e

S c

l e r o s c o p e

H a r

d n e s s

( S S H )

Figure 4-1. Correlation of hardness to density in POCO graphites

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 13

COMPRESSIVE STRENGTH

The compressive strength of a brittle material isexpressed as the maximum force per unit area thatcan be withstood before failure occurs. It is usuallyexpressed in pounds per square inch (lb/in2 or psi) or

in megapascal (MPa) in metric units. The mathemati-cal expression for the determination of compressivestrength is:

Where: C.S. = Compressive strengthL = Load required to cause failureA = Cross-sectional area of specimen

Sample Calculation:

A graphite specimen with a cross-sectional area of0.25 square inches (in2) fails when a load of 3500

pounds is applied; calculate the compressive strength.

To convert to MPa, multiply by 0.0068948.

Compressive strength = 97 MPa

NOTE: 1 psi = 0.0068948 MPaOther units and the appropriate conversionfactors are given in Appendix A.

Test MethodThe standard method of measuring the compressive

strength of a graphite specimen is described in ASTMStandard C695. Entegris’ method differs in that thespecimen used is rectangular rather than a right cylin-der. Cushion pads are not used either (TDI 4.1.1.14 in Appendix B and Figure 5-1).

POCO Graphites vs. Conventional GraphitesPOCO graphites have high compressive strengthscompared to conventional materials. The compressivestrengths of Entegris materials range from 69 MPa(10,000 psi) to over 207 MPa (30,000 psi) dependingon the grade selected. These values are two to threetimes higher than most other graphites. The finalheat-treating temperature used in the manufacture ofa carbon/graphite material has a marked effect on itscompressive strength; the lower the final temperature,the higher the compressive strength.

Temperature Effects As the temperature of a piece of graphite is increased,its compressive strength increases, up to about 2500°C.This is particularly important in such applications ashot pressing dies, where the material is subjected toboth high temperature and high stress levels.Depending on the grade and type of graphite, theincrease in strength will be from 15 to 50 percenthigher at 2500°C than it is at 25°C.The graphitization temperature also has a markedeffect on the compressive strength. The lower thegraphitization temperature, the less graphitic thematerial is and the higher the compressive strength will be. This is readily seen when comparing carbon-based material to graphite-based material for areassuch as mechanical application.

Density Effects As with many other properties, the compressivestrength of graphites changes with apparent density;the higher density having the highest strength(Figure 5-2).

C.S.= LA

C.S.= =LA

= 14,000 psi3500 lbs0.25 in2

Spring attachment

Upper head

Spring attachmentSpherical bearing block

Clear plastic safety shield

Contact block

Contact block

Test specimen

Lower head

Figure 5-1. Elements of compressive strength load train

30

28

26

24

22

20

18

16

14

12

10

8

6

1.56 1.60 1.64 1.68 1.72 1.76 1.80 1.84 1.88

Apparent Density (g/cm3)

C o m p r e s s i v e S

t r e n g

t h ( k s i )

Figure 5-2. Compressive strength of the graphite changes whenapparent density increases

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14 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

FLEXURAL STRENGTH

Flexural StrengthDefinition

Flexural strength, tensile strength and compressivestrength are the three common tests performed tomeasure the strength of materials. In flexural strengthtesting, a steadily increasing bending movement isapplied to a long bar until the material eventuallyruptures. If the material is ductile (like copper), it will bend prior to breaking. However, if the materialis brittle (such as chalk or graphite), it will bend verylittle before it fails catastrophically.Flexural strength can be defined as the maximumstress in bending that can be withstood by the outerfibers of a specimen before rupturing (Figure 6-1).

The mathematical expression for calculating flexuralstrength is:

Where: F.S. = Flexural strength in pounds per square inch(psi)

P = Load in pounds at failure

L = Length between outer support roller pinsin inchesW = Width of specimen in inchesT = Thickness of specimen in inches

Sample Calculation:

Assume a graphite specimen 4.0 inches long by 0.inches wide by 0.50 inches thick is flexure tested oa fixture with support roller pins 3.0 inches apart. specimen fails under a 500 pound load; calculate itflexural strength.

To convert to MPa, multiply by 0.0068948.

Flexural strength = 55 MPa

Test MethodThe details of the procedure commonly used fortesting the flexural strength of graphite are foundin ASTM Standard C651. Entegris’ method (TDI

4.1.1.13 in Appendix B) differs in that the specimegeometry has a 1:1 ratio in thickness and width ratthan the 2:1 width to thickness. The fixture used isnot exactly as described either, but with a surfacefinish of less than 32 micro inches Ra on the sampthe frictional component is minimized, and resultsare comparable to those obtained with the fixturerecommended by ASTM. Regardless of the procedfollowed, steps must be taken to avoid factors thatthe results, such as improper sample alignment, rouand/or non-parallel surfaces. It is also important toknow whether the reported strength values wereobtained from three-point or four-point loading.

For example, a test specimen typically has a uniforrectangular cross-section but the load may be applin three or four point as illustrated in Figure 6-2. Nthe shaded areas indicating the stress distribution. 3-point loading, the peak stress occurs on a single at the surface of the test bar and opposite the pointloading. The stress decreases linearly along the lenof the bar, and into the thickness of the bar, untilreaching zero at the bottom supports.Unlike the 3-point bend tests, where the peak stresoccurs on a single line opposite the point of loadin4-point loading distributes the peak stress over anarea that is determined by the width of the sampleand the span of the top loading supports, respectivObserve how the tensile stress distribution decreaslinearly from the area of peak stress on the tensileface, and into the thickness of the bar, until reachinzero at the bottom span supports. The increased arand volume under peak tensile stress, or near thepeak tensile stress, in 4-point loading increases theprobability of encountering a larger flaw.

F.S.= PLW(T)2

F.S.= =PLW(T)2

500 × 3.0 lbs0.75 × (0.50)2

= psi = 8000 psi15000.1875 in2

L

P

T

Rollerpin

Upper span

Support span

Test specimen

L

1/3 L 1/

3 L

T

W

Cross section of specimen

Figure 6-1. Four-point loading fixture

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 15

FLEXURAL STRENGTH

The probability of detecting the largest flaw in thespecimen during 3-point loading is minimized sincethe largest flaw must be at the surface and along theline of peak stress. Consequently, the specimen frac-tures at either a smaller flaw or within a region oflower stress, thus yielding artificially higher strength values in comparison with 4-point loading results. Thestrength limit of the material, or even the local stressand flaw size that caused fracture, is not revealed in3-point loading. It only indicates the peak stress onthe tensile surface at the time of fracture for a givenmaterial.

POCO Graphites vs. Conventional GraphitesIn a brittle material such as graphite, the flexuralstrength is particularly sensitive to flaws or defectsin the material. If a flaw is present within span L,i.e., between the outer support pins of the flexuraltest specimen, then the load P required to break thesample will be reduced. When failure occurs, it is cata-strophic. The sample breaks suddenly and, frequently,small chips and flakes of material break away at thepoint of failure.POCO graphites have flexural strengths covering therange from 34 MPa (5000 psi) to over 124 MPa (18,000psi). These values are quite high when compared toconventional graphites, which may range from less

than 7 MPa (1000 psi) to around 41 MPa (6000 psi).The fine particle size and homogeneous structureof POCO graphites contribute to their high flexuralstrengths. Another important characteristic of this

property in POCO graphites is that the flexuralstrength is the same for samples cut from any direc-tion or orientation of the parent block of material.This characteristic is called isotropy; POCO graphitesare said to be isotropic, whereas most other graphitesare anisostropic. In conventional graphites that aremolded or extruded, the ratio of flexural strengthsbetween the “against grain” and “with grain” directionsmay range from 0.3 to 0.5.

Temperature EffectsOne of the unusual properties of graphite is that itgets stronger as it gets hotter (up to about 2500°C).This is contrary to most materials, which lose strengthas the temperature increases. The flexural strength ofgraphites will increase by 20 to 50 percent when thetest temperature is increased from 25°C to 2500°C.

Density EffectsFlexural strength, like many other physical propertiesof graphite, increases with increasing density. Forexample, nominal flexural strength of 5 microngraphite (DFP-1, TRA-1 and CZR-1) ranges from6000–17,000 psi for densities of 1.60 (g/cm2) and1.88 (g/cm2), respectively (Figure 6-3). One micronor SFG exhibits the highest flexural strength indicat-ing 18,000 psi.

24

22

20

18

16

14

12

10

8

6

4

2

01.56 1.60 1.64 1.68 1.72 1.76 1.80 1.84 1.88

Apparent Density (g/cm3)

F l e

x u r a

l S t

r e n g

t h

( k

s i )

Figure 6-3. Nominal flexural strength vs. apparent density of DFP-1,TRA-1 and CZR-1 graphites

Peak stress

Peak stress

3-point Flexural Test

Load

4-point Flexural Test

Load

Figure 6-2. 4-point bend strength <3-point bend strength

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16 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

TENSILE STRENGTH

Tensile StrengthDefinitionThe tensile strength of a material can be defined asits strength when a pulling force is applied along thelength of a sample. If a cylindrical bar of uniformcross-section is subjected to a steadily increasing ten-sile (“pulling apart”) force along its axis, the material will eventually rupture and tear apart when a largeenough force is applied. It is extremely difficult tocorrectly determine the tensile strength of a brittlematerial, such as graphite. The reason for this is that when brittle materials fail in tension, a crack origi-nates at some point and is rapidly propagated acrossthe specimen, causing catastrophic failure. Any imper-fection in the material, such as voids, or surfacescratches, will cause stress concentrations at thatpoint. Since the stress at this point is higher than theoverall average throughout the specimen, a crack willbegin to propagate and premature fracture will occur.To alleviate this situation, carefully machined, highlypolished specimens are used. Also, of no lesser impor-tance is the alignment of the gripping apparatus onthe specimen. Even small misalignments could causepremature fracture, resulting in an erroneous (low) value for the tensile strength.Tensile strength, like compressive strength, isexpressed in pounds per square inch and is calcu-lated in the same manner as compressive strength,i.e., the applied force at failure is divided by thecross-sectional area of the sample.

Sample Calculation:

If a rod with a cross-sectional area of 0.25 in2 breaksat a load of 2000 pounds, then the tensile strength is8000 psi.

To convert to MPa, multiply by 0.0068948.

Tensile strength = 55 MPa

Test MethodThe details of the commonly used method for tensstrength testing are shown in ASTM Standard C56Other, more sophisticated testing equipment has bedeveloped for this test; one of the better ones useshemispherical air bearings instead of chain connecto eliminate misalignment of the sample.

POCO Graphites vs. Conventional GraphiThe tensile strength of a brittle material, such asgraphite, is very sensitive to defects or imperfectioin the material. The fine structure and uniformity oPOCO graphites result in higher tensile strength foEntegris materials as compared to conventionalgraphites. Typical tensile strength for conventionalgraphites ranges from 14 MPa (2000 psi) to 34 M(5000 psi), as compared to 34 MPa (5000 psi) to 6MPa (10,000 psi) for Entegris materials (Table 7-1)

TABLE 7-1. TYPICAL ULTIMATE TENSILE STRENGTHS OF VARIOUS MATERIALS

MaterialUltimate Tensile Strengths(103 psi)

Natural rubber >4ABS/PVC plastic 3–6Graphite (polycrystalline) 2–10Aluminum (wrought) 13–98Silicon carbide 3–20

Alumina (ceramic) 20–30Steel (wrought) 90–290Brass 34–129Copper 29–76Nickel 50–290Gold 19–32Platinum 18–30

Tensile strength = = = 8000 psiLoadArea

2000 lbs0.25 in2

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 17

TENSILE STRENGTH

Temperature Effects As the testing temperature of graphite is increased,its tensile strength increases; this is in sharp contrastto the behavior of metals, which show a decrease instrength as temperature increases. In an inert atmo-sphere (to avoid oxidation), the tensile strength ofPOCO DFP-1 graphite is almost 138 MPa (20,000 psi)at 5000°F (2760°C), as compared to 63 MPa (9150 psi)at room temperature (Figure 7-1). This dramaticchange is characteristic of graphite materials, eventhough most grades do not show the 100 percentincrease that POCO graphites exhibit.The final heat-treat temperature of the graphitehas a marked effect on its room temperature tensilestrength: the lower the heat-treat temperature, thehigher the strength. This is similar to the effect seenon other strength characteristics where the lessgraphitic materials are harder and stronger. Therelationship between graphitization temperatureand tensile strength is shown in Figure 7-2. Density Effects

The tensile strength of graphite has a strong correla-tion with density: as the density increases, the tensilestrength increases. This is typical of the other strengthcharacteristics of graphites. Figure 7-3 shows the gen-eral relationship between density and tensile strengthfor the DFP-1, TRA-1 and CZR-1 graphites. The nomi-nal values of tensile strength range from 34 MPa (5000psi) at 1.60 g/cm3 to 55 MPa (8000 psi) at 1.84 g/cm3.

14,000

12,000

10,000

8000

6000

4000

2000

01.60 1.64 1.68 1.72 1.76 1.80 1.84 1.88

Apparent Density (g/cm3)

T e n s

i l e S t

r e n g

t h

( p s

i )

Figure 7-3. Nominal tensile strength vs. apparent density of POCODFP-1, TRA-1 and CZR-1 graphites

20

18

16

14

12

10

8

6

4

2

0

0 1000 2000 3000 4000

Temperature (°C)

U l t i m a

t e T e n s i l e

S t r e n g

t h ( k s i )

Figure 7-1. Ultimate tensile strength of DFP-1

9000

8000

7000

6000

5000

2000 2200 2400 2600 2800 3000 3200

Graphitization Temperature (°C)

T e n s

i l e S t

r e n g

t h

( p s

i )

Figure 7-2. Graphitization temperature effect on tensile strength

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18 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

MODULUS OF ELASTICITY

Modulus of Elasticity Definition

The elasticity of a material is related to a uniformlyincreasing separation between the atoms of that mate-rial. As a consequence, the elasticity is directly relatedto the bonding between atoms and the respectiveenergies associated therewith. This can be readilydemonstrated by showing the general relationshipbetween modulus of elasticity (MOE) and meltingpoints of various materials. The higher the meltingpoint (i.e., the energy required to disrupt the atom-to-atom bonds), the higher the modulus of elasticity(Figure 8-1). The presence of a second phase of dif-fering modulus results in most of the stress beingcarried by the higher modulus phase. Porosity, whichis uniformly distributed and continuous, constitutes asecond phase. The effect on the modulus in materialsof less than 50 percent pore volume can be repre-sented by the relationship:

Where: P = Porosity (volume fraction)Eo = Original modulus of elasticity

Another way of expressing the modulus of elasticity isby referring to Hooke’s law, which applies to materialsbelow their elastic limit. Basically, Hooke’s law saysthat the average stress is proportional to the averagestrain.

Where: T = Stresse = StrainE = Modulus of elasticity, or Young’s modulus

Stress is the load per unit area and strain is the ratiof change in length to the original length, i.e.,

Where: P = LoadA = AreaδL = Change in length (L – Lo)Lo = Original length

Therefore:

Sample Calculation:

If a tensile sample with a diameter of 0.220 inch agage length of 1.000 inch breaks at 500 pounds wigage length increase of 0.008 inch, the tensile MO would be 1.6 × 106 psi.

The modulus of elasticity is usually expressed inmillions of pounds per square inch (106 psi), or inN/mm2 in metric units.

Test MethodThe standard method of measuring modulus of elaity for graphite when not determined from samplestested in tension is described in ASTM Standards and C769. The methods are approximations derivefrom other properties. A more accurate, but also mdifficult, means is to attach proper strain measuringages to tensile strength samples and measure straalong with stress during a tensile test. Then, emploing Hooke’s law, the modulus can be calculated.

POCO Graphites vs. Conventional GraphiThe modulus of elasticity varies for the many diffegrades of graphite available; therefore, a significandifference in the modulus for POCO materials compared to conventional graphite is not seen (Table 8The most notable difference, however, is the isotroof POCO which assures a modulus of the same vain any direction as compared to many conventionagraphites being anisotropic.

Eo (1 – 1.9P + 0.9P2 )

= E = ConstantTe

T= PA

e = δ LLo

E = =P / A

δ L / Lo

PLo

δ L

E = = = 1.6 × 106 psiPLo

δ LA(500 lbs)(1)

(0.008 in)(0.038 in2 )

70

60

50

40

30

20

10

00 500 1000 1500 2000 2500 3000 3500 4000

Melting Point (°C)

M O E ( 1 0 6

p s i )

Phenolicplastic

Al

NaCl

Ca

SiO2 glass Polycrystallinegraphite

Singlecrystal

graphite

Pt

MoTiC

W

Al2O3

MgO

Figure 8-1. Modulus for elasticity vs. melting point for variousmaterials

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 19

ELECTRICAL RESISTIVITY

TABLE 8-1. MODULUS OF ELASTICITY OF VARIOUS GRAPHITES

MaterialApparentDensity (g/cm3)

MOE(106 psi)

POCO CZR 1.65 1.3TRA 1.72 1.5DFP 1.77 1.6HPD 1.76 1.7

Mersen® 2161 1.66 1.32020 1.77 1.32080 1.87 1.8

Morgan P3W 1.60 1.4L-56 1.63 .5P5 1.72 2.4

P03 1 0.82 1.8SGL Group,The CarbonCompany®

H-440 1.75 1.5HLM 1.75 1.8H-463 1.75 1.8H478 1.88 2.2

Toyo TansoUSA®

SEM5 1.80 2.4SEM3 1.85 1.4

UCAR® AGSR 1.58 1.6CBN 1.67 1.8CS 1.70 2.0 WG*

1.1 AG*

* Shows typical anisotropy effects

Temperature Effects As with the other strength properties of graphite, astemperature increases, the modulus of elasticity alsoincreases, to a point beyond which it begins to droprapidly. This is typically around 2500°C. The increasecan be as much as 25 percent higher before the dropbegins. The final graphitization temperature also hasan effect, but is relatively small.

Density EffectsThe density relationship is evident with about a15 to 20 percent increase in modulus detected asthe density increases from 1.65 g/cm3 to 1.77 g/cm3.This follows the same pattern as other strengthproperties for graphite.

Electrical Resistivity DefinitionThe electrical resistivity is that property of a material which determines its resistance to the flow of anelectrical current and is an intrinsic property. Theelectrical resistance of a substance is directly propor-tional to the length of the current path, i.e., as thecurrent path increases, the resistance increases. It isalso inversely proportional to its cross-sectional area,i.e., as the area increases, the resistance decreases.The mathematical expression for the determinationof electrical resistivity is:

Where: ER = Electrical resistivity at room temperatureA = Cross-sectional area (square inches)R = Electrical resistance of the material (ohms)L = Distance between potential contacts (inches)

Sample Calculation:

For a graphite sample with a cross-sectional area of0.25 in2, distance between the potential contacts of2.0 inches and an electrical resistance reading of0.00425Ω (ohms); calculate the electrical resistivity.

ER = 0.000531 Ω-inER = 531 µΩ-in

To convert to µΩ-cm, multiply by 2.54

Electrical resistivity = 1349 µΩ-cm

Test MethodThe standard method of measuring the electricalresistivity of a graphite sample is described in ASTMStandard C611. At Entegris only two resistance read-ings are taken, using a special sample holder witheight electrical contacts which takes the equivalentof four readings at once. Entegris uses test methodTDI 4.1.1.2 (Appendix B).

ER= ARL

ER= (0.25 in2 )(0.00425 Ω )2.0 in

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 21

THERMAL EXPANSION

Thermal ExpansionDefinition

The physical dimensions of a body are determined bythe number and spacing of its atoms. At temperaturesabove 0 K, the atoms are always in constant vibrationabout their positions in the lattice. If energy is addedto the material (by heating it), the atoms vibrate more vigorously, causing the macroscopic dimensions of thematerial to increase.The coefficient of thermal expansion (CTE) is definedas the change in length of a substance per unit lengthfor a specific change in temperature. If this thermalexpansion is hindered in any way, internal stresses will occur.

When two different materials are to be joinedpermanently, as in the electrical connection to anincandescent lamp or a vacuum tube, it is importantthat they have nearly the same values of CTE if thereis to be no danger of failure from cracking. The sameprecaution applies to coatings or cladding of onematerial to another.The CTE is normally expressed as inch per inch per °Cor as inch per inch per °F, with the temperature rangeover which the CTE is applicable being specified. Thisis done because, for some materials, the CTE willchange with temperature.The mathematical expression for the determination ofthe coefficient of thermal expansion is:

Where: CTE = Coefficient of thermal expansionδL = Change in sample length from the lower

temperature to the upper temperatureL = Sample length at the lower temperatureT1 = Lower temperatureT2 = Upper temperature seen by sample

Sample Calculation:

A two-inch graphite sample is heated from room tem-perature to 1000°C.The length uniformly increases until it is 2.0164 inchesin length at 1000°C; calculate the CTE.

CTE = 8.39 × 10-6 (in/in)/°C

To convert to (in/in)/°F: divide by 1.8

CTE = 4.65 × 10-6 (in/in)/°F

Test MethodThe standard method of measuring the coefficient ofthermal expansion of a graphite sample is similar to ASTM Standard E228, but there is no specific methodfor graphite. POCO has a horizontal silica (orton)dilatometer and follows TDI 4.1.1.5 (Appendix B).

POCO Graphites vs. Conventional GraphitesPOCO graphites have high coefficients of thermalexpansion compared to conventional materials (Table10-1). The coefficient of thermal expansion of POCOmaterials range from 7.0 × 10-6 to 9.0 × 10-6 (in/in)/°C,depending on the grade selected. These values are twoto four times higher than most other graphites.

TABLE 10-1. COEFFICIENT OF THERMAL EXPANSION

10-6

(in/in)/°CMaterial High Low

Aluminum alloys (68–212°F) 24.1 22.3300 Stainless steels (32–212°F) 18.7 14.9Copper (68–572°F) 17.6 16.7Nickel base superalloys (70–200°F) 17.8 10.6Cobalt base superalloys (70–1800°F) 17.1 16.2Boron nitride (70–1800°F) 7.5 –Titanium carbide (77–1472°F) 7.4 6.7Tungsten carbide 7.4 4.5Silicon carbide (0–2550°F) 4.3 3.9Silicon nitride (70–1800°F) 2.5 –POCO graphite (70–1832°F) 8.8 7.0

CTE= δLL(T2 –T1 )

CTE= 2.0164 in – 2.0000 in2.0000 in (1000°C – 23°C)

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22 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

THERMAL CONDUCTIVITY

Temperature Effects As the temperature of a piece of graphite is increased,its coefficient of thermal expansion will becomegreater (Figure 10-1). There is limited data todescribe its expansion characteristics above 1000°C,but the data available indicates a linear increase inexpansion as high as 2500°C.

Density Effects As with many other properties, the coefficient of ther-mal expansion changes with apparent density; as thedensity of the material increases, so will the coeffi-cient of thermal expansion.Since the higher-density material has less porosity,

there is less distance for the crystals to move unob-structed as the temperature is increased; therefore,higher density means greater expansion (Figure 10-2).

Thermal Conductivity Definition

The thermal conductivity of a material is a measurof its ability to conduct heat. A high thermal condutivity denotes a good heat conductor, while a lowthermal conductivity indicates a good thermalinsulator (Table 11-1).

TABLE 11-1. TYPICAL THERMAL CONDUCTIVITY OF VARIOUS MATERIALS

MaterialThermal Conductivity RangeBtu-ft/hr/ft 2 °F

Natural rubber 0.082Nickel 6–50Steel (wrought) 8–21Silicon carbide 9–25Tungsten carbide 16–51Brass 15–135Iron (cast) 25–30POCO graphite 40–70Platinum 42Conventional graphite 65–95Aluminum 67–135Tungsten 97Copper 112–226Gold 172Silver 242

The mathematical expression for thermal conducti(K) is:

Where: Q = Rate of heat flow through a slab in Btuper hour

A = Cross-sectional area of the slab in feet2 ∂X = Thickness of slab in feet∂T = Temperature drop across the slab (°F)

Therefore, K is expressed as:Btu-ft/hr/ft 2 °F

orcal/(meter °C sec)

orW/m-K

K= Q∂XA∂T

10

9

8

7

6

5

4

3

2

10

TRA-1Taylor/Groot

0 500 1000 1500 2000 2500Temperature (°C)

C o e

f f i c i e n

t o

f T h e r m a

l E x p a n s i o n

( 1 0 - 6 / ° C )

8.5

8.4

8.3

8.2

8.1

8.0

7.9

7.8

7.7

7.6

1.601.56 1.64 1.68 1.72 1.76 1.80 1.84 1.88

Apparent Density (g/cm3)

C o e

f f i c i e n

t o

f T h e r m a

l E x p a n s i o n

( 1 0 - 6

i n / i n / ° C )

Figure 10-1. CTE vs. temperature of POCO TRA-1 graphite

Figure 10-2. CTE vs. apparent density of POCO DFP-1, TRA-1 andCZR-1 graphite

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 23

THERMAL CONDUCTIVITY

Sample Calculation:

Assume a flat plate of graphite 0.1 foot thick has a sur-face area of one square foot. Heat is flowing throughthis plate at a rate of 1000 Btu per hour; the hottersurface is at a temperature of 1036°F, while the coolersurface is at 1018°F; calculate the thermalconductivity.

To convert to metric system of units, multiply by 0.413to obtain:

K = 22.9 cal/(meter °C sec)

To convert to SI system of units, multiply by 1.73 toobtain:

K = 96.0 W/m-K

Test MethodHistorically, two different techniques were employedfor determining thermal conductivity over thetemperature range of 110–3300 K. They are:1. A comparative rod apparatus from 110 K to 1250 K2. A radial inflow apparatus from 1250 K to 3300 K There is no standard method associated with graphitefor measurement of thermal conductivity.However, ASTM Standard C714-72 is routinelyused for determining thermal diffusivity and thecorresponding results are used to calculate thermalconductivity. POCO graphite deviates from ASTMStandard C714-72 in that this standard requires theuse of a flash lamp for sample heating and thermocou-ples for monitoring temperature. A similar techniqueemployed by Entegris utilizes a Netzsch® LFA-427(Laser Flash Apparatus), which has a high-intensitylaser to heat the sample surface and the resultanttemperature change is monitored with an infrareddetector (Figure 11-1).

Thermal diffusivity measurements involve quantifyingthe rate of diffusion of heat through a solid wherelocal temperature and temperature gradients vary with time. This is a decided advantage in that thermaldiffusivity measurements are nonsteady-state, due tothe transient nature of diffusion, thus eliminatingthe need for determining heat flux and maintainingsteady-state conditions. Nonetheless, close controlof local time-temperature relationships in the systemis required. Thermal diffusivity methods are also pre-ferred over heat flux measurements due to the ease

of sample preparation. With less material require-ments and fast measurements, one typically obtainsaccuracy within ±5% when implementing carefulmeasurement techniques. Thermal conductivity iscalculated from the relationship:

Where: K = Thermal conductivity (W/cm K)α = Thermal diffusivity (cm2/sec)CP = Heat capacity at constant pressure (J/g K)ρ = Apparent density (g/cm3)

POCO Graphite vs. Conventional GraphitesFrom studies on POCO graphite and experimental work on other graphites, it is believed that the con-ductivity of most graphites is mainly governed byUmklapp type phonon-phonon interactions.For POCO graphite and most other graphites, thermalconductivity begins to decrease around 27°C (70°F)and continues to decrease as the temperatureincreases to 3227°C (5800°F). Thermal diffusivityand thermal conductivity results for POCO graphitegrades are indicated in Figures 11-2 and 11-3, respec-tively, as a function of temperature from 23–1650°C.It has been reported that above 2727°C (4900°F),electrons contribute about 20 percent to the totalthermal conductivity of these graphites. For morehighly graphitized graphites and other feedstocks,the results can be different.

K= =Q∂XA∂T

(1000 Btu)(0.1 ft)(hr)(1 ft2 )(1036°F – 1018°F)

K= = 55.5(1000 Btu)(0.1 ft)(hr)(1 ft2 )(18°F)

Btu-fthr/ft2 °F

Iris diaphragm

IR sensor

GE lens

Cooling water

Sample holder

Enlargement optic

Adjustment laser

Sample holderadjustment

Vacuum seal

Decoupling mirrorShutter

Resonator

Rear mirror

Graphite heater

Figure 11-1. Netzch LFA-427

K= α CPρ

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 25

THERMAL SHOCK

In either case, the typical properties of carbon andgraphite generally yield the best overall thermal shockresistance of all the temperature-resistant, non-metal-lic materials available. This is useful for rocket nozzle

and reentry nose-cone applications, among others.Sample Calculation:

A graphite sample with a thermal conductivity of0.29 (cal cm)/(cm2 sec °C) and a tensile strength of10,000 psi (703 kg/cm2) has a modulus of elasticity of1.6 × 106 psi (0.112 × 106 kg/cm2) and a CTE of 8.4 ×10-6 (in/in)/°C; calculate its thermal shock resistance.

Test MethodThere are no standard test methods for accuratelymeasuring the thermal shock resistance of materials. A number of practical tests are being used for specificapplications. One such testing device is described bySato.9 Use of the relationships previously describedare generally accepted for prediction of the thermalshock resistance of a material, but many other consid-erations must be made such as sample size, stressdistribution in material (i.e., geometry and stressduration).

POCO Graphite vs. Conventional GraphitesSome early studies10 reported that coarse-particlegraphite had better thermal shock resistance thanfiner-particle graphite despite the higher strength offiner-particle graphite. The study further indicated acorrelation to the binder. If the binder were decreased,the thermal shock resistance also dropped, suggestingthe thermal stresses were being absorbed by thebinder material. Other studies11 have shown the pre-cursor material, e.g., tar coke versus oil coke, to have

effects on the thermal shock resistance. The oil cokehad resistance values about seven times higher thanthe tar coke.

9 Sato, S., Sato, K., Imamura, Y. and Kon, J., Carbon, 13 (1975),p. 309.

10 Kennedy, A.J., Graphite as a Structural Material in Conditions ofHigh Thermal Flux. (Craneld: The College of Aeronautics,November 1959. [CoA Report No. 121]), p.15.

11 Sato, S., Hwaji, H., Kawamata, K. and Kon, J., “Resistance andFracture Toughness Against Thermal Shock of Several Varietiesof Graphite," The 22nd Japan Congress on Materials Research –Metallic Materials, Mito, Japan: March 1979, 67-68.

Generally, due to small particle size and high CTE,POCO graphite may not fare as well as some othergraphites in overall thermal shock resistance. Testsat Entegris have shown that samples of the DFP-1

grade, measuring one inch cubed, can survive a1000°C to 10°C instantaneous change without fractur-ing in repeated tests. Other tests on POCO graphiteshave subjected the samples to 335°F to -335°F instan-taneous changes without affecting the graphite. Acomparison of some thermal shock resistance valuesfor some materials is shown in Table 12-1.

TABLE 12-1. THERMAL SHOCK RESISTANCES

cal/cm•sec

POCO graphite (DFP-1) 217(SFG-1) 233

GLC (Graphnol) 450Mersen graphite (2020) 140Pyrolytic graphite (w/grain) 4300

(a/grain) 0.29SGL Group, The CarbonCompany graphite

(EK-82) 252(EK-87) 426

Titanium carbide (unknown) 3.45Toyo Tanso USA graphite (Isograph 88) 340UCAR (ATJ) 329

While the differences are not as great between the

various grades as the pyrolytic graphite shows betweenorientations, it should still be noted that processing variables, starting materials, etc., can influence thethermal shock resistance of graphite. For example, theRingsdorff EK-87 grade has an average particle sizeof 20 microns, yet it has about 30 percent more calcu-lated thermal shock resistance than the UCAR ATJ, which has an average particle size of 25 microns andnearly twice the calculated resistance of a POCOgraphite with a particle size average of 4 microns.

Temperature EffectsDepending on the type of graphite used and its partic-ular characteristics or properties, and consideringshape, size, etc., higher temperature drops could besustained without affecting the graphite. The tempera-ture starting and ending points may have some bearingon the overall resistance to fracture, because thematerial will be thermally stressed differently at ele- vated temperatures. A drop from 1000°C to 500°C mayrespond differently than from 500°C to 0°C. Little datais available to clearly define what the relationship orlimits are for the different types of graphite.

R = 216.7 calcm × sec

R = =KTS

α ET

cm2 × sec × °C8.4 × 10 -6

0.29 cal × cm

°C

cm2

0.112 × 10 -6 kg

703 kg

cm2

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26 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

SPECIFIC HEAT

Density EffectsSince, generally, strength and thermal conductivityincrease with density, higher thermal shock resistanceshould be found in higher-density ranges. However, with higher density, higher modulus and CTE are alsousually found and these would tend to offset the gainsin strength. The coarser-particle systems may be moreeffective than the finer-particle systems on an equaldensity basis. Many factors are involved, and welldefined tests to measure these effects are not incommon use.

Specific HeatDefinitionHeat capacity is the quantity of heat required to raisethe temperature of a unit mass of material 1°, and therelationship between the two most frequently usedunits is as follows:

It has been found that the values of heat capacity forall types of natural and manufactured graphites arebasically the same, except near absolute-zero tempera-tures. The differences found in measuring the samegrade of graphite are as great as the differences in

measuring different grades of graphite. Differencesas much as nine percent have been found betweennatural graphite and manufactured graphite at lowtemperatures (120 K to 300 K), but at higher tempera-tures the differences for all types of graphite has beenfound to be less than the experimental error. Table13-1 shows comparisons to other materials.

Heat Capacity Equation

The heat capacity at constant pressure (CP) can beexpressed by polynomial functions of the absolutetemperature T, with T in K to give CP in cal/(g°C).Within the temperature interval 0 K to 300 K:

However, below 40 K, this equation has not beenreliable in correlation with experimental data. Thecalculated values are in good agreement (<2.2 per-cent) with the experimental values for temperaturesabove 40 K.

CP = (0.19210 x 10-4)T – (0.41200 x 10-5)T2 –(0.10831 x 10-7)T3 – (0.10885 x 10 -10)T4

1 = 1Btulb °F

calg °C

TABLE 13-1. TYPICAL SPECIFIC HEAT OF VARIOUS MATERIALS

MaterialHeat CapacityRange cal/(g°C)

Heat CapacityRange J/(g K)

Gold 0.031 0.13Platinum 0.031 0.13Tungsten 0.034 0.14Tungsten carbide 0.04 0.17Silver 0.056 0.23Brass 0.090 0.38Nickel 0.091–0.14 0.38–0.59Copper 0.092 0.38Steel (wrought) 0.11 0.46Iron (cast) 0.13 0.54

Graphite 0.17 0.72Alumina 0.19 0.79Aluminum 0.22–0.23 0.92–0.96Silicon carbide 0.285–0.34 1.19–1.42

For the temperature range 300 K to 3200 K:

This expression yields calculated values within 1.5percent of the experimental values for the entiretemperature range.Table 13-2 represents the best fit of the values for cal manufactured graphite with proper consideratiogiven to the accuracy of the individual measureme

Sample Calculation:

Determine the heat capacity of a sample of graphit500°C using a differential scanning calorimeter (Dand a strip chart recorder to follow the calorimetricresponse for the temperature scans of 30°C. DSC sare taken for the sample of graphite, a sapphire refence sample and the baseline for correction of themeasured response. The heat capacity, CP is then

calculated for the graphite using the formula:

Where: WS = Weight of sapphireWG = Weight of graphiteDS = Signal displacement of sapphireDG = Signal displacement of graphite

CP = 0.44391 + (0.30795 × 10 -4)T –(0.61257 × 105)T-2 + (0.10795 × 10 8)T-3

CP (graphite) = × × CP (sapphire)WS

WG

DS

DG

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 27

SPECIFIC HEAT

TABLE 13-2. TYPICAL SPECIFIC HEAT OFMANUFACTURED GRAPHITES

Temperature (K)Specific Heat(cal/[g°C])

Specific Heat(J/[g K])

0 0.0000 0.000050 0.0101 0.0423100 0.0335 0.1402150 0.0643 0.2690200 0.0995 0.4163250 0.1357 0.5678300 0.1723 0.7214350 0.2090 0.8750400 0.2450 1.0258450 0.2760 1.1556

500 0.3030 1.2686550 0.3230 1.3523600 0.3400 1.4235650 0.3560 1.4905700 0.3700 1.5492750 0.3820 1.5994800 0.3930 1.6454850 0.4020 1.6831900 0.4090 1.7124950 0.4150 1.73751000 0.4210 1.76261100 0.4320 1.80871200 0.4430 1.85471300 0.4520 1.89241400 0.4600 1.92591500 0.4680 1.95941600 0.4740 1.98451800 0.4860 2.03482000 0.4960 2.07662200 0.5040 2.11012400 0.5110 2.1394

2600 0.5160 2.16042800 0.5210 2.18133000 0.5270 2.20643200 0.5360 2.24413400 0.5480 2.29443600 0.5800 2.42833800 0.6900 2.8889

Let the weight of the sapphire reference = 0.203 g anda sample of DFP graphite, i.e., indicating a density of1.82 g/cm3 and measuring 1.5 mm × 6 mm diameter, weigh 0.077 g, respectively. CP of sapphire is 0.19 cal/

(g°C). CP of graphite at 500°C can be calculated byknowing the displacement as determined from thestrip chart recorder. Assume the displacement (corrected) is 40.0 for thegraphite and 52.5 for the sapphire reference.Therefore:

Test MethodThe previous example best illustrates how a DSC anda chart recorder may be used in determining heatcapacity. However, modern technology has integratedthe DSC with computer and software technology,thereby eliminating the need for calculating CP froma chart recorder. Entegris currently uses a NetzschSTA-449 Heat Flux DSC (Figure 13-1) for evaluatinggraphite and other related materials. Heat capacitycalculations are made via software but the fundamen-tal principles remain the same.

In DSC, a distinction must be made between therecorded baseline in the presence and absence of asample. Thus, measurements are first taken with anempty sample crucible to determine the instrumentbaseline. A second run is made to verify the accuracyof the instrument by placing a sapphire reference sam-ple in the sample crucible and taking measurements

CP (graphite) = × × 0.190.023 g0.077 g

4052.5

calg °C

CP (graphite) = 0.382 = 1.6calg °C

Jg K

Hoistingdevice

Protectivetube

Furnace

DSC sensor

Gas inlet

Balance

Gas outlet

Figure 13-1. Netzsch STA-449

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28 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

EMISSIVITY

under the same experimental conditions. The DSCcurve rises linearly resulting from the change in heatcapacity of the sample as a function of temperature.Sapphire is routinely used as a reference material

since it is stabilized, i.e., will not oxidize, and due tothe fact that heat capacity for sapphire has been thor-oughly investigated and well documented. Once thebaseline and accuracy have been established, a thirdrun is made on the sample of interest under the sameexperimental conditions.There is no standard test method for determiningspecific heat of graphite, but the DSC method is com-monly used for specific heat determination of othermaterials. Another simple method which yields approximate spe-cific heat data is an ice calorimeter. If a body of mass(m) and temperature (t) melts a mass (mI) of ice, itstemperature being reduced to 0°C, the specific heat ofthe substance is:

POCO Graphite vs. Conventional GraphitesPOCO graphites have heat capacity values that arein the same range as conventional manufacturedgraphites. POCO graphites have a range from around0.72 J/(g K) to 1.60 J/(g K) between 20° and 500°C(Figure 13-2).12

Temperature EffectsThe heat capacity of manufactured graphite increases with increasing temperature (Figure 13-3).

12 Taylor, R.E. and Groot, H., Thermophysical Properties of POCOGraphite. (West Lafayette, Indiana: Purdue University, July 1978.[NTIS No. ADA060419]), p.15.

Density EffectsHeat capacity has no significant change as a functiof density. It is intrinsic to the graphite crystal itseand apparently independent of density.

Emissivity Definition A measure of the heat radiating ability of a surfacereferred to as emissivity. Total emissivity or spectremissivity are ways to express it. The total emissivis defined as the ratio of thermal energy emitted bymaterial per unit time per unit area to that emitted

a black body over the entire band of wavelengths wboth are at the same temperature. A black body, i.eideal radiator, is one which absorbs all the radiantenergy falling on it and, at a given temperature, raates the maximum amount of energy possible overentire spectrum of wavelengths.The spectral emissivity is defined as the ratio of thmal energy emitted by a material per unit time perunit area to that emitted by a black-body reference where radiation from both are of the same wavelenand both are at the same temperature. The spectralemissivity of graphite has been measured at 6500 ÅDull surfaced graphite and polished graphite havehad typical values of 0.90 and 0.77, respectively. Ibeen determined that the emissivity of graphite do vary slightly with temperature. A temperature coecient of 1.9 × 10-5 /K has been determined. Graphiteemissivity has been found to be nearly constant in wavelength range 2000 Å to 60,000 Å. Spectral emity values approaching 0.99 have been measured fographite near sublimation temperatures of 3600 K.

2.5

2.0

1.5

1.0

0.50 500 1000 1500 2000 2500 3000

Temperature (°C)

C P

( J / g K )

TRA-1(Taylor-Groot)

Figure 13-2. Specific heat vs. temperature: POCO graphite

3.5

3.0

2.5

2.0

1.5

1.0

0.5

0.0

0 1000 2000 3000 4000

Temperature (°C)

Manufactured graphiteAmerican Institute of PhysicsHandbook, 3rd edition, 1972POCO DFP-1 graphite

C P

( J / g K )

Figure 13-3. Specific heat of manufactured graphite

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 29

EMISSIVITY

For a specific temperature, at a specific wavelength,normal spectral emissivity can be expressed as:

Where:

WS,λ = Normal spectral radiant energy emitted by aspecimen material per unit time, unit area andunit solid angle.

WBB,λ = Normal spectral radiant energy emitted by ablack-body reference per unit time, unit area,and unit solid angle.

Normal spectral emissivity written as a function oftemperature is:

Where: C = 14,380 micron – Kλ = 0.65 micronT = Temperature of material (K)TA,λ = Apparent temperature of material (K)

For a specific temperature the total normal emissivitycan be expressed as:

Where:

WS = Normal total radiant energy emitted by a specimen

material per unit time, unit area and unit solidangle.

WBB = Normal total radiant energy emitted by a blackbody reference per unit time, unit area and unitsolid angle.

Total normal emissivity at elevated temperatures canbe expressed as:

Where: T = Temperature of material (K)TA,t = Apparent temperature of material (K)

Emissivity data has usefulness in applications such asaerospace, heaters, pyrometry, etc., but published datais difficult to find.

Test MethodThere are no standard methods for measuring emissiv-ity of graphite, but one method used to measure theemissivity of graphite is described by Grenis and

Levitt.13 A schematic of this equipment can be seenin Figure 14-1. The methods of measuring emissivityare wrought with difficulties and results may be biaseddue to equipment and/or assumptions made in run-

ning the tests. At best, the testing is at a researchlevel and not a routine procedure.

POCO Graphites vs. Conventional GraphitesVery little information on the emissivity of graphiteis available. The following information on total emit-tance of two grades of POCO graphite and pyrolyticgraphite has been reported by Cezairliyan andRighini.14

The equation for total emittance of POCO (TRA-1)graphite as a function of temperature, between 1800to 2900 K is:

E = 0.679 + (6.00 × 10 -5)T

The equation for POCO (DFP-2) graphite, between1700 to 2900 K is:

E = 0.794 + (2.28 × 10 -5)T

The equation for pyrolytic graphite, between 2300 to3000 K is:

E = 0.641 – (5.70 × 10-5

)TWhere: T is in K.

13 Grenis, A.F. and Levitt, A.P., The Spectral Emissivity and TotalNormal Emissivity of Graphite at Elevated Temperatures.(Watertown, Mass.: Watertown Arsenal Laboratories, November1959. [NTIS No. ADA951659]), p.14.

14 Cezairliyan, A. and Righini, F., “Measurements of Heat Capacity,Electrical Resistivity, and Hemispherical Total Emittance of TwoGrades of Graphite in the Range of 1500° to 3000°K by a PulseHeating Technique,” Rev. in Htes Temp. et Refract., t.12 (1975),p. 128.

En, λ = WS,λ

WBB,λ

logEn, λ = –C2.303λ

1T

1TA,λ

En, λ = WS

WBB

En,t =T4

A,t

T4

(C)

Holders and electrodesSpecimen

Vacuum/pressurechamber

Power D.C.and controls

(E)

Vacuumpump andgauges (V)

Micro-opticalpyrometer (O)

Micro-opticalpyrometer (O)

Totalradiationdetector

Millivolttemperaturerecorder (M)

Precisionpotent-

iometer (P)

Figure 14-1. Schematic block diagram of the emissivity apparatus

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30 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

ASH

TABLE 14-1. TOTAL EMITTANCE

Temperature(K)

POCOTRA-1

POCODFP-1

PyrolyticGraphite

1700 — 0.833 —1800 0.787 0.835 —1900 0.793 0.837 —2000 0.799 0.840 —2100 0.805 0.842 —2200 0.811 0.844 —2300 0.817 0.846 0.5102400 0.823 0.849 0.5042500 0.829 0.851 0.4992600 0.835 0.853 0.4932700 0.841 0.856 0.487

2800 0.847 0.858 0.4812900 0.853 0.860 0.4763000 — — 0.470

The measured values of the total emittance of thegraphite specimens are shown in Table 14-1 and againgraphically in Figure 14-2.

The differences may be associated with layer planeorientation or other crystallographic effects, particu-larly when comparing a pyrolytic graphite to apolycrystalline graphite such as TRA-1. The differenceseen between DFP-1 and TRA-1 may go back to a sur-face roughness effect, but are primarily associated with the porosity differences with regard to size andfrequency distribution across the surface.

AshDefinition

ASTM Standard C709 defines ash of manufacturedbon and graphite as the “residual product followinoxidation of the base carbon as determined by pre-scribed methods.” This ash or residual productgenerally results from natural contamination of theraw material used to produce graphite and may beintroduced to a lesser extent during processing of traw material or graphite products. Table 15-1 showa general listing of typical elements and their levelof contamination in graphite bulk product. As willdiscussed later, there are means by which the contanation can be reduced or removed.

TABLE 15-1. TYPICAL PURITY ANALYSISSTANDARD POCO GRADES (UNPURIFIED)TOTAL ASH RANGE 300-1000 PPM

Element Element Detected ppm Range

Vanadium (V) Yes 100–500Iron (Fe ) Yes 5–300Nickel (Ni) Yes 1–100Calcium (Ca) Yes 5–100Silicon (Si) Yes 5–50Aluminum (Al) Yes 10–50Titanium (Ti) Yes 1–50

Potassium (K) Yes 1–20Sodium (Na) Yes 1–15Copper (Cu) Yes 1–10Magnesium (Mg) Yes 1–5Chromium (Cr) Yes Trace to 10Phosphorus (P) Yes Trace to 10Boron (B) Yes 1–5Sulfur (S) Yes 1–5Molybdenum (Mo) Yes TraceZinc (Zn) Yes TraceLithium (Li) Yes Trace

Test MethodThe standard test method for ash content of graphiis ASTM Standard C561. This technique applies ppally to nonpurified graphites of several hundred por more, of total impurities. The method is generaltoo crude for good reproducibility on high-puritysamples.

0.87

0.86

0.85

0.84

0.83

0.82

DFP-1

1400 1600 1800 2000 2200 2400 2600 2800

Temperature (°C)

T o t a l E m

i t t a n c e

TRA-1

Figure 14-2. Total emittance of POCO graphite

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 31

ASH

One of the disadvantages of this method is the poten-tial loss of low melting point impurities due to thetemperature at which the test is run. Theoretically, at950°C as a final test temperature, nothing should be

lost that was not already volatilized during graphitiza-tion, but as a practical matter, it seems to occur. Theseare possibly impurities trapped in closed pores thatdid not successfully escape during the graphitizationcycle. The test temperature could be lowered to pre-clude some of this from occurring, but then the timeto complete the test is extended considerably as oxida-tion is a time-temperature dependent reaction.It has also been found in previous studies that athigher temperatures (desirable for shorter test cycles)reactions of carbon and platinum, of which the cruci-bles are made, can occur and consequently bias thetest results.Entegris’ method, TDI 4.1.1.6 (Appendix B), differsslightly from the ASTM procedure, in that a solid sam-ple is used rather than a powdered sample. The risk ofcontamination in powdering the sample is nonexistentif a solid sample is used. A standard test cycle fornonpurified material is 24 hours, whereas, a purifiedmaterial usually takes 48–72 hours to complete thecycle.

Sample Calculation:

If a graphite sample weighed 80.0000 grams after dry-ing and was ashed in a 35.0000 grams crucible where

the total ash after testing was 0.4 milligrams, the totalash would be 5 ±1 parts per million.

Where: A = Crucible weightB = Crucible plus dried sample weightC = Crucible plus ash weight

If ash % is required, multiply by

Ash % = 0.0005

POCO Graphites vs. Conventional GraphitesWhen discussing nonpurified graphites, POCO graph-ites are fairly clean, i.e., contain relatively low levels ofimpurities. However, since graphitization temperaturehas a strong bearing on the impurities which remain,the ash levels on any product can vary accordingly.There are other process steps which influence thefinal ash level also.

In material which has been impregnated for densifica-tion, contaminants in the raw material used couldincrease the impurity content as well.POCO graphites will typically range from 300–3000ppm total impurities, depending on the grade anddensity. Many conventional graphites fall within thisrange also, but some will be in the range of 0.1 percent(1000 ppm) to several percent (20,000–30,000 ppm).Purified POCO graphite will have less than 5 ppm totalimpurities. This is one of the best grades of purifiedgraphite available anywhere. The unique nature of thePOCO pore structure and relatively clean raw materi-als aids in allowing this ultra-high purity. Typicalanalysis of a purified POCO graphite is seen in Table15-2. Purified graphites can be produced in several ways. Simply heat-treating to very high temperatures,usually in excess of 3000°C, will volatilize most heavyelements present. Halogen gases, such as chlorine orfluorine, will react with the impurities at high temper-ature and volatilize off as chloride or fluoride salts.Some elements such as boron are very stable and diffi-cult to remove, especially since they can substitute forcarbon atoms in the crystal structure.

Temperature EffectsThe only real temperature effect on ash levels comesfrom the graphitization temperature or a subsequentthermal processing to remove impurities. As men-tioned previously, the higher the final thermal

treatment, the lower the ash level will usually be.Density EffectsIn POCO graphite, a slight trend has been noted with ash as related to density. Since POCO graphiteshave increasingly more open porosity as the densitydecreases, more opportunity for volatilization escapeof the impurities during graphitization can occur.Consequently, slightly lower ash levels are typicallyfound for the lower-density grades. This may be uniqueto POCO graphites. The difference is relatively smallthough, so it is mentioned only in passing, as a numberof other factors may have more significant effects onthe final ash level.

× 1,000,000 = 5 ±1 ppm35.0004 – 35.000115.0000 – 35.000

B – AAsh (ppm)= C – A × 1,000,000 =

C–A 100B–A

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32 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

OXIDATION

TABLE 15-2. TYPICAL PURITY ANALYSISPURIFIED POCO GRADESTOTAL ASH RANGE 5 PPM OR LESS

Element Element Detected ppm Range

Silicon (Si) Yes TraceSulfur (S) Yes Trace Vanadium (V) Yes TraceCalcium (Ca) Yes TraceBoron (B) Yes TraceAluminum (Al) Yes TraceMagnesium (Mg) Yes TraceIron (Fe) Yes TraceMolybdenum (Mo) Yes TracePhosphorus (P) Yes Trace

Nickel (Ni) No —Titanium (Ti) No —Potassium (K) No —Sodium (Na) No —Copper (Cu) No —Chromium (Cr) No —Zinc (Zn) No —Lithium (Li) No —

OxidationDefinitionOxidation is a chemical reaction that results in elec-trons being removed from an atom, which makes theatom more “reactive” so that it may join with one ormore other atoms to form a compound. When talkingabout carbon and graphite, oxidation is normallythought of as the reaction of carbon atoms withoxygen to form carbon monoxide (CO) and carbondioxide (CO2). However, many other gases (besidesoxygen) will react with carbon in an oxidation reac-tion (e.g., CO2, H2O, N2O, etc.). The result of theoxidation reaction is a loss of carbon atoms fromthe carbon or graphite material, which obviouslyaffects many of its properties and characteristics. Ifoxidation of a piece of carbon is allowed to continuelong enough, all the carbon atoms will react to form

a gas (or gases) which dissipates and leaves behinnothing except a small amount of ash, which is theoxides of the metallic impurities that were presentin the carbon to begin with.

The oxidation of carbon by oxygen (as well as othgases) is highly temperature-dependent. No detectareaction occurs at temperatures up to about 350°C As the temperature is increased, the rate of reactioincreases rapidly, according to the well-known Arrhenius expression:

Where: T = TemperatureE = Activation energyK = Reaction rateR = Universal gas constant

Test MethodTo measure the oxidation characteristics of a particcarbon material, a piece of known weight is exposthe “oxidizing environment” of interest for some pof time, and then reweighed, to determine a weighloss (the oxidation weight loss). There is not a widaccepted standard test for measuring the oxidationcharacteristics of carbon materials (TDI 4.1.1.7 an4.1.1.8 in Appendix B).The oxidation characteristics of carbon are usuallyexpressed in one of two different ways:1. The percent weight loss in 24 hours at a given te

perature, often referred to as oxidation resistance2. The temperature at which a sample loses approx

mately one percent of its weight in a 24-hour per which is called the oxidation threshold temperatuof the material being tested

Sample Calculation:

If a sample originally weighed 10.0000 grams aftebeing dried and 9.9900 grams after oxidation testinthe percent weight loss would be 0.1 percent.

Where: WTO = Initial sample weight (dried)WTF = Sample weight after oxidation testing percentWTL = Percent weight loss

In Kα E/RT

%WTL = × 100 = × 100 = 0.1%WTO–WTF

WTO

10.0000–9.9900

10.0000

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 33

OXIDATION

POCO Graphites vs. Conventional GraphitesThe oxidation characteristics of any graphite at thesame temperature and atmospheric conditions aredependent on the amount of impurities in the mate-rial, the density of the material and the amount ofsurface area available to react with the oxidizingatmosphere. POCO graphites can be impregnated witha proprietary oxidation inhibitor that can substantiallyincrease its oxidation resistance. Purification alsoreduces oxidation significantly by removing metallicimpurities, which act as oxidation catalysts. As the surface area increases, the oxidation rateincreases, too. This is expected, as the surfaceexposure is important to the oxidation process. Forpurposes of standardization and to minimize the effectof variable surface area to volume (SA/V) ratios, theuse of a sample with an SA/V ratio of 10:1 is used atEntegris for testing oxidation rates.

Temperature EffectsThe differences in oxidation behavior of the variousgrades of graphite are widest at the lowest tempera-tures, tending to disappear as the temperature

increases. The “oxidation threshold temperature,”defined as that at which a sample loses approximatelyone percent of its weight in 24 hours, is about 570°Cfor purified graphite, while nonpurified graphite is

about 430°C (Figure 16-1).The oxidation of graphite is highly temperature-dependent. At temperatures up to about 350°C, nodetectable oxidation occurs. As the temperature isincreased, the rate of reaction increases rapidly,according to the Arrhenius equation (Figure 16-2).

Density EffectsSince the oxidation of graphite is a surface reaction,it is known that the rate of oxidation is affected bythe porosity of the material. As the percent porosityincreases, the apparent density of the material willdecrease. Therefore, as the apparent density decreases,the rate of oxidation will increase. However, theeffects of impurities and their catalytic action caneasily override the density effects. Purified data showsthe density difference more clearly, but it is, neverthe-less, relatively small when other factors areconsidered.

1000

100

10

1

0.1

0.01

1000

100

10

1

0.1

0.01

Threshold

Threshold

300 400 500 600 700 800 900 1000

Temperature (°C)

% W

e i g h t L o s s / 2 4 h o u r s

% W

e i g h t L o s s / 2 4 h o u r s

300 400 500 600 700 800 900 1000

Temperature (°C)

Oxidation ThresholdPurified POCO Grades

Oxidation ThresholdNon-purified POCO Grades

1000

100

10

1

0.1

0.01

1000

100

10

1

0.1

0.01

% W

e i g h t L o s s / h o u r

% W

e i g h t L o s s / h o u r

300 400 500 600 700 800 900 1000

Temperature (°C)

300 400 500 600 700 800 900 1000

Temperature (°C)

Oxidation RatePurified POCO Grades

Oxidation RateNon-purified POCO Grades

Figure 16-1. Oxidation threshold Figure 16-2. Oxidation rate

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34 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

APPENDIX A

Appendix A PREFIX CONVERSION FACTORS

Prefix Symbol Unit Multiplier

giga G 109

mega M 106

kilo K 103

deci d 10-1

centi c 10-2

milli m 10-3

micro µ 10-6

nano n 10-9

pico p 10-12

DENSITY CONVERSION FACTORS

From To Multiply By

g/cm3 lb/in3 0.03613g/cm3 lb/ft3 62.428g/cm3 kg/m3 1000g/cm3 g/m3 1,000,000lb/in3 g/cm3 27.6799lb/in3 kg/m3 27,679.905lb/ft3 g/cm3 0.016lb/ft3 kg/m3 16.0185

LENGTH CONVERSION FACTORS

From To Multiply By

inch ft 0.0833inch m 0.0254inch cm 2.54inch mm 25.4feet in 12.0feet m 0.3048feet cm 30.48feet mm 304.8centimeter m 0.01centimeter mm 10.0centimeter µ 1.0 × 104

microns (µ) cm 1.0 × 10-4

microns (µ) in 3.937 × 10-5

microns (µ) ft 3.281 × 10-6

microns (µ) m 1.0 × 10-6

microns (µ) Å 1.0 × 104

Angstroms (Å) m 1.0 × 10-10

STRENGTH CONVERSION FACTORS

Pressure:

From To Multiply by

lb/in2 (= psi) lb/ft2 144.0

lb/in2 (= psi) g/cm2 70.307lb/in2 (= psi) kg/cm2 0.0703lb/in2 (= psi) kg/m2 703.07lb/ft2 lb/in2 6.94 × 10-3

lb/ft2 g/cm2 0.4882lb/ft2 kg/m2 4.8824kg/m2 lb/ft2 0.2048kg/m2 lb/in2 1.422 × 10-3

kg/m2 g/cm2 0.10kg/cm2 lb/in2 14.223

g/cm2

kg/m2

10.0g/cm2 lb/in2 0.01422N/mm2 (= MPa) lb/in2 (= psi) 145.032N/mm2 (= MPa) kg/m2 101.972 × 103

MN/m2 MPa 1N/m2 lb/in2 (= psi) 1.45 × 10-4

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 35

APPENDIX B

ELECTRICAL RESISTIVITY CONVERSION FACTORS

From To Multiply by

Ω-in Ω-cm 2.54Ω-in Ω-m 0.0254Ω-in Ω-ft 0.3333µΩ-in Ω-in 1.0 × 106

Ω-ft Ω-in 12.0Ω-ft Ω-cm 30.48Ω-ft Ω-m 0.3048Ω-cm Ω-in 0.3937Ω-cm µΩ-in 393.7 × 103

Ω-cm Ω-ft 0.0328Ω-cm Ω-m 0.01Ω-m Ω-in 39.37Ω-m Ω-ft 3.281Ω-m Ω-cm 100.0Ωmm2/m Ω-m 1.0 × 10-6

Ωmm2/m Ω-cm 1.0 × 10-4

COEFFICIENT OF THERMAL EXPANSION

From To Multiply by

(in/in)/°C (in/in)/°F 0.55561/°C 1/°F 0.5556(in/in)/°F (in/in)/°C 1.80

1/°F 1/°C 1.80

Conversion constants for 1/°C to 1/°F and 1/°F to 1/°Care true for any dimensional unity, i.e., in/in, cm/cm,ft/ft, m/m.

THERMAL CONDUCTIVITY CONVERSION FACTORS

From To Multiply by

(Btu-ft/hr/ft2 °F) (cal cm)/(cm2 sec °C) 4.134 × 10-3

(Btu-ft/hr/ft2 °F) (Kcal cm)/(m2 hr °C) 148.8(Btu-ft/hr/ft2 °F) (kilowatt hr in)/(ft hr °F) 3.518 × 10-3

(Btu-ft/hr/ft2 °F) (Btu-in/hr/ft2 °F) 12.00(Btu-ft/hr/ft2 °F) (Btu-in/ft2/sec °F) 3.33 × 10-3

(Btu-ft/hr/ft2 °F) (watts cm)/(cm2 °C) 0.0173(Btu-ft/hr/ft2 °F) (cal cm)/(cm2 hr °C) 14.88(Btu-ft/hr/ft2 °F) (Btu-in/ft2 /day °F) 288.0(Btu-ft/hr/ft2 °F) W/m-K 0.01731 calorie = 1 cal = 1 gram cal1 calorie = 1 kilogram cal = 1 Kcal = 1000 cal

Appendix BRESEARCH& DEVELOPMENT LABORATORY INSTRUCTIONS

Number Instruction

4.1.1.1 Apparent Density of Carbon and GraphiteArticles

4.1.1.2 Electrical Resistivity of Carbon and Graphite4.1.1.3 Shore Scleroscope Hardness of Carbon and

Graphite4.1.1.4 Rockwell Hardness of Graphite4.1.1.5 Coefficient of Thermal Expansion (CTE) of

Graphite4.1.1.6 Ash Analysis4.1.1.7 Oxidation Resistance Test Method4.1.1.8 Oxidation Threshold Test Method4.1.1.13 Flexural Strength of Carbon and Graphite4.1.1.14 Compressive Strength of Carbon

and Graphite4.1.1.15 Polishing Samples for Photomicrographs4.1.1.16 Microphotography and Examination of Carbon

and Graphite4.1.1.19 Permeability of Graphite Plates4.1.1.22 Equotip Hardness of Carbon and Graphite

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36 PROPERTIES AND CHARACTERISTICS OF GRAPHITE ENTEGRIS,

APPENDIX C BIBLIOGRAPHY

Appendix C Bibliography “Anodes of the Aluminium Industry,” R&D CarbonLtd., P.O. Box 157, CH-3960, Sierre, Switzerland.

Brixius, W.H., Dagdigian, J.V., “Mercury Porosimetry Analysis of Fine-Grained Graphite,” Conf. Proc., 16thBiennial Conference on Carbon, (1983), pp. 465–466.Brooks, J.D. and Taylor, G.H.,“The Formation of

Some Graphitizing Carbons,” Chemistry and Physicsof Carbon, Ed. Walker, P.L., Jr., Dekker, M., New York,4, 243–283 (1968).Bundy, F.P., Bassett, W.A., Weathers, M.S., Hemley,R.J., Mao, H.K. and Goncharov, A.F., The Pressure-Temperature Phase and Transformation Diagram forCarbon; Updated Through 1994, Carbon, 34, 141–153,(1996).Campbell, I.E. and Sherwood, E.M., High TemperatureMaterials and Technology, New York: John Wiley &Sons, Inc., 1967.Cezairliyan, A. and Righini, F.,“Measurements of HeatCapacity, Electrical Resistivity, and HemisphericalTotal Emittance of Two Grades of Graphite in the

Range of 1500° to 3000°K by a Pulse HeatingTechnique,” Rev. in. Htes Temp. et Refract. t.12(1975), pp. 124–131.Fitzer, E., Köchling, K.-H., Boehm, H.P. and Marsh, H.,“Recommended Terminology for the Description ofCarbon as a Solid,” Pure and Applied Chemistry, 67,473–506 (1995).Grenis, A.F. and Levitt, A.P., The Spectral Emissivityand Total Normal Emissivity of Graphite at ElevatedTemperatures. (Watertown, Mass.: Watertown ArsenalLaboratories, November, 1959. [NTIS No. ADA951659]).Hasselman, D.P.H., Becher, P.F., Mazdiyasni, K.S.,“Analysis of the Resistance of High-E, Low-E

Brittle Composites to Failure by Thermal Shock,” Z. Werkstofftech. 11 (1980), 82–92.Heintz, E.A.,“The Characterization of Petroleum

Cokes,” Carbon, 34, 699–709 (1996).The Industrial Graphite Engineering Handbook,New York: Union Carbide Corporation, 1969.Kelly, B.T., Physics of Graphite, London: AppliedScience Publishers Ltd, 1981.Kennedy, A.J., Graphite as a Structural Materialin Conditions of High Thermal Flux. (Cranfield: TheCollege of Aeronautics, November 1959. [CoA ReportNo. 121]).

King, C.R., “Development of an ExperimentalTechnique to Thermally Shock Graphites,” Carbon,8 (1970), 479–484.Kingery, W.D., Introduction to Ceramics, New YorJohn Wiley & Sons, Inc., 1960.Kingery, W.D., Journal of the American CeramicSociety, 38 (1955).Liu, Y., Xue, J.S., Zheng, T. and Dahn, J.R.,“Mechanism of Lithium Insertion in HardCarbons Prepared by Pyrolysis of Epoxy Resins,” Carbon, 34, 193–200 (1996).Lockyer, G.E., Lenoe, E.M., Schultz, A.W., Investof Nondestructive Methods for the Evaluation ofGraphite Materials. (Lowell, Mass.: AVCO CorporSeptember 1966. [AFML-TR-66-101]).

Loison, R., Foch, P. and Boyer, A.,“Coke: Quality and Production,” Butterworths, London (1989).Marsh, H. et al., Introduction to Carbon Technolog(1997), pp. 4, 521.Marsh, H. and Diez, M.A.“Liquid Crystalline and

Mesomorphic Polymers,” Eds. V.P. Shibaev and L. LamCh. 7., Mesophase of Graphitizable Carbons, SprinVerlag, New York, 231–257 (1994).“Materials Selector 1987,” Materials Engineering,Cleveland, Ohio: Penton Publishing, December 19Matsumura, Y., Wang, S. and Mondori, J.,“Interactions

between Disordered Carbon and Lithium Ion Rechargeable Batteries,” Carbon, 33, 1457–1462(1995).Orr, C., Jr., “Application of Mercury Penetrationto Materials Analysis,” Publication 9-AN-1 fromMicromeritics Instrument Corporation, 8.Petroski, H.,“The Pencil – A History of Design andCircumstance,” Alfred A. Knopf, New York (1990).Reynolds, W.N., Physical Properties of Graphite, Amsterdam: Elsevier Publishing Co. LTD., 1968.Rossi, R.C., “Thermal-Shock Resistant Materials,”

Materials Science Research, 5 (1971), 12–136.Sato, S., Hwaji, H., Kawamata, K. and Kon, J.,“Resistance and Fracture Toughness Against Thermal

Shock of Several Varieties of Graphite,” The 22ndJapan Congress on Materials Research – MetallicMaterials, Mito, Japan: March 1979.Sato, S., Sato, K., Imamura, Y. and Kon, J., Carbo(1975).

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ENTEGRIS, INC. PROPERTIES AND CHARACTERISTICS OF GRAPHITE 37

APPENDIX C BIBLIOGRAPHY

Serlie, M. and Oye, H.A.,“Cathodes in Aluminium Electrolysis,” 2nd Edition, Dusseldorf, Germany, Aluminium-Verlag (1994).Spain, I.L., Electronic Transport Properties ofGraphite, Carbons, and Related Materials, Chemistryand Physics of Carbon, 16 (1981), p. 119.Taylor, R.E. and Groot, H., Thermophysical Propertiesof POCO Graphite. (West Lafayette, Indiana: PurdueUniversity, July 1978. [NTIS No. ADA060419]).Walker, P.L., Jr., Chemistry and Physics of Carbon,New York: Marcel Dekker, Inc., Vols.1–7, 1965–1971.Walker, P.L., Jr. and Thrower, P.A., Chemistry andPhysics of Carbon, New York: Marcel Dekker, Inc.,Vols. 8–17, 1973–1981.Washburn, E.W., Phys. Rev., 17, 273 (1921).Wirt, W.,“Specific Heat of POCO Graphite AXF-5Q at Several Temperatures Between 30–500°C,” Job No.84-826 Prepared for Maxwell Laboratories, AnalyticalService Center, September 18, 1984.Xue, J.S. and Dahn, J.R.,“Dramatic Effect of Oxidation on Lithium Insertion in Carbons Made from Epoxy Resins,” J. Electrochem. Soc., 142, 3668–3677 (1995).Zhao, J., Wood, J.L., Bradt, A.C. and Walker, P.L., Jr.,“Oxidation Effects on CTE and Thermal Shock Fracture Initiation in Polycrystalline Graphites,” Carbon, 19 No. 6, (1981), 405–408.

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Entegris® and the Entegris Rings Design® are registered trademarks of Entegris, Inc.POCO® is a registered trademark of Poco Graphite, Inc. ASTM® is a registered trademark of American Society for Testing and Materials.Mersen® is a registered trademark of Mersen Corporation of France.Micromeritics® is a registered trademark of Micromeritics Instrument Corp.Netzsch® is a registered trademark of Erich Netzsch GmbH and Company.SGL Group, The Carbon Company ® is a registered trademark of SGL Carbon AG Corp.Toyo Tanso USA® is a registered trademark of Toyo Tanso Corp

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