linear motor stage lms - pi usa...linear motor stage lms-180 linear motor stage lms-230 linear motor...

Linear Motor Stage LMS-180

Linear Motor Stage LMS-230 Linear Motor Stage LMS-80

Linear Motor Stage LMS-60

Linear Motor Stage LMS

www.pimicos.com // [email protected] // 508.832.3456 East 949.679.9191 West // www.pi-usa.us

Ultra Precision Stage UPS-150

Error and technical modifications are subject to change

Load characteristics

FACTS

Fx(N) Fy(N) Fy Peak(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k÷x(µrad/Nm) k÷y(µrad/Nm)

LM-015 75 22 88 150 50 100 50 25 20

4.080 Ultra Precision Stage UPS-150

TECHNICAL DATA

Travel range (mm) 52 102 155 205 305

Straightness / Flatness (µm) ± 0.5 ± 0.75 ± 1 ± 1.25 ± 1.75Pitch (µrad) ± 15 ± 20 ± 25 ± 30 ± 40Yaw (µm) ± 20 ± 20 ± 20 ± 20 ± 20Weight (kg) 4.7 5.5 6.3 7.1 8.7

MotorLinear scale

LM-015LS-011 LS-020

Speed max. (mm/sec) 600Resolution calculated (µm) 0.015 0.001Resolution typical (µm) 0.02 0.015Bi-directional Repeatability (µm) ± 0.035 ± 0.025Uni-directional Repeatability (µm) 0.025 0.015Nominal Current (A) 1.4

Accuracy on requestVelocity range (mm/sec) 0.0005 ... 600Material Aluminum, black anodized

Note: FS = full step, RE = rotary encoderMore info: Detailed information concerning motors and encoders, see appendix.

KEY FEATURES

■ Linear motor■ Travel range up to 305 mm (12")■ Uni-directional repeatability down to 0.015 µm■ Maximum speed 600 mm/sec■ Load capacity up to 15 kg■ Integrated inductive limit switches■ Integrated linear scale (center mounted)■ High long-term stability

The UPS-150 ultra-precision linear stagewas specifically designed for sub-surfacewafer inspection, fiber alignment, highprecision robotics and for all tasks wherea maximum positioning accuracy andreliability is absolutely mandatory. AllUPS-150 ultra precision stages areequipped with a linear scale which iscentrally mounted between the guides.The high-quality cross-roller bearingsinsure a high load capacity and a smoothmotion. The UPS-150 stage is driven by aniron-less linear motor and provides highacceleration and speed. A systemaccuracy below 1 µm / 100 mm travel and abi-directional repeatability of less than

0.025 µm is guaranteed. The ultraprecision stages are supplied withcertificate of performance (flatness,straightness, pitch, yaw & position). Themeasurement is made with the stagemounted and unloaded on a granite tablewith a flatness < 1µm.

The UPS-150 ultra-precision linear stagewas specifically designed for sub-surfacewafer inspection, fiber alignment, highprecision robotics and for all tasks wherea maximum positioning accuracy andreliability is absolutely mandatory. AllUPS-150 ultra precision stages are

equipped with a linear scale which iscentrally mounted between the guides.The high-quality cross-roller bearingsinsure a high load capacity and a smoothmotion. The UPS-150 stage is driven by aniron-less linear motor and provides highacceleration and speed. A systemaccuracy below 1 µm / 100 mm travel and abi-directional repeatability of less than0.025 µm is guaranteed. The ultraprecision stages are supplied withcertificate of performance (flatness,straightness, pitch, yaw & position). Themeasurement is made with the stagemounted and unloaded on a granite tablewith a flatness < 1µm.

X

LS-020

LS-011

mm

I

100

H

G

100

M6 x12

10

0

75

F

n6.6

n42x H7 x6

100o

100

50

15

5

50

E

Dx50

19

.5

80

n42x x6F

55

B

vØ11 / Ø6.6

14

~A

C

50 50

M64x x7

M6 x9

X

X

A 83 108 133 158 208B 198 238 288 338 454C 151 201 251 301 401D - - - 5 7E - 150 150 150 150F 75.5 105.5 130.5 155.5 205.5G - - - 250 250H - - 200 200 300I 125 150 150 150 150

52 102 155 205 305Travel (mm)

6840-9-Order No.LM-015 1

52 mm (2") 1

102 mm (4") 2

155 mm (6") 3

205 mm (8") 4

305 mm (12") 5

LS-011, Linear steel scale 1

LS-020, Linear glass scale 2

Ultra Precision Stage UPS-150 4.081


http://www.pimicos.commailto:[email protected]://www.pi-usa.us



FACTS

Fx(N) Fy(N) Fy Peak(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm)

LM-051 25 7 31 30 4 4 10

LM-054 25 7 31 30 4 4 10

4.100 Linear Motor Stage LMS-60

TECHNICAL DATA

Travel range (mm) 25 65

Straightness / Flatness (µm) ± 1 ± 2Pitch (µrad) ± 80 ± 100Yaw (µm) ± 80 ± 100Weight (kg) 1 1.8

MotorLinear scale

LM-051 LM-054LS-070

Speed max. (mm/sec) 500 500Resolution calculated (µm) 0.015Resolution typical (µm) 0.1Bi-directional Repeatability (µm) ± 0.1Uni-directional Repeatability (µm) 0.1Nominal Current (A) 0.32 0.64

Accuracy on requestVelocity range (mm/sec) 0.001 ... 500Material Steel


KEY FEATURES

■ Linear motor■ Travel range 65 mm (LM-054)■ Maximum speed 500 mm/sec■ Load capacity up to 3 kg■ Integrated hall limit switches■ Integrated linear scale

The linear stage LMS-60 was designed forindustrial applications with high speedrequirements within and limited spaceconditions. Linear stages LMS-60 aredriven by linear motors and are equippedwith a linear scale. The very small height of14 mm allows very compact setups. AllLinear Stages of the LMS-60 series areequipped with limit switches forprotection against damage.

The linear stage LMS-60 was designed forindustrial applications with high speedrequirements within and limited spaceconditions. Linear stages LMS-60 aredriven by linear motors and are equippedwith a linear scale. The very small height of14 mm allows very compact setups. AllLinear Stages of the LMS-60 series areequipped with limit switches forprotection against damage.

mm

454x M3 x4

34

5

14

A

B

3.4n

n3.4

X

X

X

360

D

C

830

80

D

LS-070

A 75 60B - 120C 145 185D 68.5 88.5

25 65Travel (mm)

6841-9-Order No.25 mm (LM-051) 1

65 mm (LM-054) 2


HLS-020, Hall limit switches 1

0

Linear Motor Stage LMS-60 4.101




FACTS

Fx(N) Fy(N) Fy Peak(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm)

LM-052 40 7 34 50 30 15 20


TECHNICAL DATA

Travel range (mm) 120

Straightness / Flatness (µm) ± 4Pitch (µrad) ± 150Yaw (µm) ± 150Weight (kg) 2.5

MotorLinear scale

LM-052LS-070

Speed max. (mm/sec) 500Resolution calculated (µm) 0.015Resolution typical (µm) 0.1Bi-directional Repeatability (µm) ± 0.1Uni-directional Repeatability (µm) 0.1Nominal Current (A) 0.7

Accuracy on requestVelocity range (mm/sec) 0.001 ... 500Material Steel


KEY FEATURES

■ Linear motor■ Travel range 120 mm■ Maximum speed 500 mm/sec■ Load capacity up to 5 kg■ Integrated hall limit switches■ Integrated linear scale

The LMS-80 linear stage was designed forindustrial applications with high speedrequirements in a limited space. AllLMS-80 linear stages are driven by linearmotors and are equipped with a linearscale. The very small height of 16 mmallows extremely compact setups. TheLMS-80 linear stage is equipped with limitswitches for protection against damage.Other travel ranges on request.

The LMS-80 linear stage was designed forindustrial applications with high speedrequirements in a limited space. AllLMS-80 linear stages are driven by linearmotors and are equipped with a linearscale. The very small height of 16 mmallows extremely compact setups. TheLMS-80 linear stage is equipped with limitswitches for protection against damage.Other travel ranges on request.

X

mm

40

1206

0

40

144

20

300

8x M3 x81

6

60

150

240

54

n3.512x

3

3.5n X

X

LS-070

6842-9-Order No.LM-052 1

120 mm 1


HLS-020, Hall limit switches 1





FACTS


LM-010 480 50 176 450 65 120 65 80 60


TECHNICAL DATA

Travel range (mm) 155 205 305 408 508

Straightness / Flatness (µm) ± 2 ± 3 ± 4 ± 5 ± 6Pitch (µrad) ± 40 ± 50 ± 60 ± 70 ± 80Yaw (µm) ± 50 ± 50 ± 50 ± 50 ± 50Weight (kg) 10.2 10.4 11.5 12.8 14.2

MotorLinear scale

LM-010LS-011

Speed max. (mm/sec) 500Resolution calculated (µm) 0.015Resolution typical (µm) 0.04Bi-directional Repeatability (µm) ± 0.1Uni-directional Repeatability (µm) 0.05Nominal Current (A) 1.8



KEY FEATURES

■ Linear Motor■ Travel range up to 508 mm (20")■ Uni-directional repeatability down to 0.05 µm■ Maximum speed 500 mm/sec■ Integrated inductive limit switches■ Integrated linear scale (center mounted)

The LMS-180 linear stage series isdeveloped for advanced electronicproduction and laser applications.Combined with the PI miCos UPR direct-driven rotation stage series, highly-dynamic and precise positioning systemscan be configured resulting in an efficientproduction line. The LMS-180 linear stageare driven by iron-less linear motors. Thevery high accuracy linear scale is installedbetween the guides so that higher systemaccuracy can be achieved. The LMS-180series excels with very quiet, dynamic andsmooth motion. All LMS-180 linear stagesare equipped with inductive limit switchesfor protection against damage.

The LMS-180 linear stage series isdeveloped for advanced electronicproduction and laser applications.Combined with the PI miCos UPR direct-driven rotation stage series, highly-dynamic and precise positioning systemscan be configured resulting in an efficientproduction line. The LMS-180 linear stageare driven by iron-less linear motors. Thevery high accuracy linear scale is installedbetween the guides so that higher systemaccuracy can be achieved. The LMS-180series excels with very quiet, dynamic andsmooth motion. All LMS-180 linear stagesare equipped with inductive limit switchesfor protection against damage.

LS-011

X

mm

100

Cx100

150

n6.6

150

D

n62x H7 x8

A

M6 x12

50

100o

150

180o

B

40

50

100

150

180

n42x H7 x6M628x x7

4x Ø6H7 x7

~15

0

LS-010

55 10

6.6Ø

25

X

X

A 235 260 310 360 410B 470 520 620 720 820C 3 3 5 5 5D 350 350 450 550 650

155 205 305 408 508Travel (mm)

6850-9-Order No.LM-010 1

155 mm (6") 1

205 mm (8") 2

305 mm (12") 3

408 mm (16") 4

508 mm (20") 5






FACTS


LM-050 75 22 88 150 50 100 50 25 20


TECHNICAL DATA

Travel range (mm) 52

Straightness / Flatness (µm) ± 0.5Pitch (µrad) ± 10Yaw (µm) ± 10Weight (kg) 13.5

MotorLinear scale

LM-050LS-021

Speed max. (mm/sec) 400Resolution calculated (µm) 0.001Resolution typical (µm) 0.005 0.005Bi-directional Repeatability (µm) ± 0.02Uni-directional Repeatability (µm) 0.01Nominal Current (A) 5.95



KEY FEATURES

■ Linear Motor■ Travel range 52 mm (2")■ Uni-directional repeatability down to 0.01 µm■ Maximum speed 400 mm/sec■ Load capacity up to 15 kg■ Integrated inductive limit switches■ Integrated linear scale (center mounted)

The Linear Motor Stage LMS-230 wasspecifically designed for dynamic filmexposing, high precision robotics and forall tasks where a maximum of positioningaccuracy and reliability is absolutelymandatory. The Linear Measuring StageLMS-230 is equipped with a linear scalewhich is centrally installed between theguides. Two limit switches protect againstaccidental over-travel. Due to high-qualitycross-roller bearings a maximum of loadcapacity and smooth motion isguaranteed. Special, stress-relieved,tempered aluminum-alloy guarantees ahomogeneous non-warping stagestructure. The Linear Measuring Stage

LMS-230 is driven by a linear motor andprovides high acceleration, high travelspeed and guaranteed a constant motion.System accuracy below 1 µm / 100 mmtravel and a bi-directional repeatability ofless than 0.1 µm is guaranteed. The LinearMeasuring Stage LMS-230 is suppliedwith certificate of performance (flatness,straightness, pitch, yaw & position).

The Linear Motor Stage LMS-230 wasspecifically designed for dynamic filmexposing, high precision robotics and forall tasks where a maximum of positioningaccuracy and reliability is absolutelymandatory. The Linear Measuring StageLMS-230 is equipped with a linear scalewhich is centrally installed between theguides. Two limit switches protect against

accidental over-travel. Due to high-qualitycross-roller bearings a maximum of loadcapacity and smooth motion isguaranteed. Special, stress-relieved,tempered aluminum-alloy guarantees ahomogeneous non-warping stagestructure. The Linear Measuring StageLMS-230 is driven by a linear motor andprovides high acceleration, high travelspeed and guaranteed a constant motion.System accuracy below 1 µm / 100 mmtravel and a bi-directional repeatability ofless than 0.1 µm is guaranteed. The LinearMeasuring Stage LMS-230 is suppliedwith certificate of performance (flatness,straightness, pitch, yaw & position).

mm

18

.2

72

200

230

375

8x n6.6100

135

187.5 +/-25

264

135

200

100

250

2x n4H7 x 8

2x n4H7 x 8

8x M6 x12LS-0216854-9-Order No.

LM-050 1

52 mm (2") 1

LS-021, Linear glass scale 1

ILS-020, Inductive limit switches 1



Headquarters:PI miCos GmbHFreiburger Strasse 30D-79427 EschbachGERMANY

Phone: +49 7634 50 57 0Fax: +49 7634 50 57 393e-mail: [email protected]: www.pimicos.com

USA (East) & CANADA USA (West) & MEXICO

PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P.16 Albert St. 5420 Trabuco Rd., Suite 100Auburn, MA 01501 Irvine, CA 92620Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191Fax: +1 (508) 832 0506 Fax: +1 (949) 679 9292Email: [email protected] Email: [email protected] www.pi-usa.us

GERMANY

Physik Instrumente (PI)GmbH & Co. KGAuf der Römerstraße 176228 Karlsruhe/PalmbachTel: +49 (721) 4846-0Fax: +49 (721) 4846-1019Email: [email protected]

Call Us Today508.832.3456 (East)949.679.9191 (West)

mailto:[email protected]://www.pimicos.commailto:[email protected]:[email protected]://www.pi-usa.ushttp://www.pi-usa.usmailto:[email protected]://www.pi.ws

linear motor stage lms - pi usa...linear motor stage lms-180 linear motor stage lms-230 linear motor...

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