I

FACULTY OF ENGINEERING

LAB SHEET

EEE3106

PROCESSING AND FABRICATION

TECHNOLOGY

TRIMESTER 2 2013/2014

PFTI - NMOS Processing Simulation

PFT2 - PMOS Processing Simulation

*Note: On-the-spot evaluation will be carried out during or at the end of the experiments.

Questions regarding metal oxide semiconductor (MOS) device processing and fabrication,

as well as device simulation will be asked during the evaluation. Students are advised to read through this lab sheet before doing experiment. Your

individual performance during on-the-spot evaluation, participation in the lab simulation work, teamwork effort, and learning attitude will count towards the lab marks, in addition

to the lab report. Please bring along your USB stick for data files saving purpose.

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INTRODUCTION:

Complementary metal-oxide-semiconductor (CMOS) is a major class of integrated

circuits. CMOS technology is used in chips such as microprocessors, microcontrollers,

static RAM, and other digital logic circuits. CMOS technology is also used for a wide

variety of analog circuits such as image sensors, data converters, and highly integrated

transceivers for many types of communication. CMOS is also sometimes explained as

complementary-symmetry metal-oxide-semiconductor. The words "complementary-

symmetry" refer to the fact that the typical digital design style with CMOS uses

complementary and symmetrical pairs of p-type and n-type MOSFETs for logic functions.

Two important characteristics of CMOS devices are high noise immunity and low static

power supply drain. Significant power is only drawn when its transistors are switching

between on and off states; consequently, CMOS devices do not produce as much heat as

other forms of logic such as TTL (transistor-transistor logic). CMOS also allows a high

density of logic functions on a chip.

In this simulation, the fundamentals of MOS chip fabrication will be discussed and the

major steps of the process flow will be examined. The emphasis will be on the general

outline of the process flow and on the interaction of various processing steps, which

ultimately determine the device and the circuit performance characteristics. This

simulation shows that there are very strong links between the fabrication process and the

device performance. Hence, the circuit designer must have a working knowledge of chip

fabrication to create effective designs and to optimize the circuits with respect to various

manufacturing parameters.

The following discussion will concentrate on the well-established CMOS fabrication

technology, which requires that both the n-channel (nMOS) and p-channel (pMOS)

transistors be built on the same chip substrate. To accommodate both nMOS and pMOS

devices, special regions must be created in which the semiconductor type is opposite to

the substrate type. These regions are called wells or tubs. A p-well is created in an n-type

substrate or, alternatively, an n- well is created in a p-type substrate. In the simple n-well

CMOS fabrication technology presented, the nMOS transistor is created in the p-type

substrate, and the pMOS transistor is created in the n-well, which is built-in into the p-

type substrate. In the twin-tub CMOS technology, additional tubs of the same type as the

substrate can also be created for device optimization.

The simplified process sequence for the fabrication of CMOS integrated circuits on a p-

type silicon substrate is shown in Fig. 1. The process starts with the creation of the n-well

regions for pMOS transistors, by impurity implantation into the substrate. Then, a thick

oxide is grown in the regions surrounding the nMOS and pMOS active regions. The thin

gate oxide is subsequently grown on the surface through thermal oxidation. These steps

are followed by the creation of n+ and p+ regions (source, drain and channel-stop

implants) and by final metallization (creation of metal interconnects).

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Figure-l: Simplified process sequence for fabrication of the n-well CMOS integrated

circuit with a single polysilicon layer, showing only major fabrication steps.

The process flow sequence pictured in Fig.l may at first seem to be too abstract, since

detailed fabrication steps are not shown. To obtain a better understanding of the issues

involved in the semiconductor fabrication process, we first have to consider some of the

basic steps in more detail.

Fabrication Process Flow - Basic Steps

The integrated circuit may be viewed as a set of patterned layers of doped silicon,

polysilicon, metal and insulating silicon dioxide. In general, a layer must be patterned

before the next layer of material is applied on chip. The process used to transfer a pattern

to a layer on the chip is called lithography. Since each layer has its own distinct

patterning requirements, the lithographic sequence must be repeated for every layer,

using a different mask.

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To illustrate the fabrication steps involved in patterning silicon dioxide through optical

lithography, let us first examine the process flow shown in Fig. 2. The sequence starts

with the thermal oxidation of the silicon surface, by which an oxide layer of about I

micrometer thickness, for example, is created on the substrate (Fig. 2(b)). The entire

oxide surface is then covered with a layer of photoresist, which is essentially a light-

sensitive, acid-resistant organic polymer, initially insoluble in the developing solution

(Fig. 2(c)). If the photoresist material is exposed to ultraviolet (UV) light, the exposed

areas become soluble so that they are no longer resistant to etching solvents. To

selectively expose the photoresist, we have to cover some of the areas on the surface with

a mask during exposure. Thus, when the structure with the mask on top is exposed to UV

light, areas which are covered by the opaque features on the mask are shielded. In the

areas where the UV light can pass through, on the other hand, the photoresist is exposed

and becomes soluble (Fig. 2(d)).

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Figure-2: Process steps required for patterning of silicon dioxide.

The type of photoresist which is initially insoluble and becomes soluble after exposure to

UV light is called positive photoresist. The process sequence shown in Fig. 2 uses

positive photoresist. There is another type of photoresist which is initially soluble and

becomes insoluble (hardened) after exposure to UV light, called negative photoresist. If

negative photoresist is used in the photolithography process, the areas which are not

shielded from the UV light by the opaque mask features become insoluble, whereas the

shielded areas can subsequently be etched away by a developing solution. Negative

photoresists are more sensitive to light, but their photolithographic resolution is not as

high as that of the positive photoresists. Therefore, negative photoresists are used less

commonly in the manufacturing of high-density integrated circuits.

Following the UV exposure step, the unexposed portions of the photoresist can be

removed by a solvent. Now, the silicon dioxide regions which are not covered by

hardened photoresist can be etched away either by using a chemical solvent (HF acid) or

by using a dry etch (plasma etch) process (Fig. 2(e)). Note that at the end of this step, we

obtain an oxide window that reaches down to the silicon surface (Fig. 2(f)). The

remaining photoresist can now be stripped from the silicon dioxide surface by using

another solvent, leaving the patterned silicon dioxide feature on the surface as shown in

Fig. 2(g).

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The sequence of process steps illustrated in detail in Fig. 2 actually accomplishes a single

pattern transfer onto the silicon dioxide surface, as shown in Fig. 3. The fabrication of

semiconductor devices requires several such pattern transfers to be performed on silicon

dioxide, polysilicon, and metal. The basic patterning process used in all fabrication steps,

however, is quite similar to the one shown in Fig. 2. Also note that for accurate

generation of high-density patterns required in sub-micron devices, electron beam (E-

beam) lithography is used instead of optical lithography. In the following section, the

main processing steps involved in the fabrication of an n-channel MOS transistor on p-

type silicon substrate will be examined.

Figure-3: The result of a single lithographic patterning sequence on silicon

dioxide, without showing the intermediate steps. Compare the unpatterned structure (top)

and the patterned structure (bottom) with Fig. 2(b) and Fig. 2(g), respectively.

The process starts with the oxidation of the silicon substrate (Fig. 4(a)), in which a relatively thick silicon dioxide layer, also called field oxide, is created on the surface (Fig. 4(b)). Then, the field oxide is selectively etched to expose the silicon surface on which the MOS transistor will be created (Fig. 4(c)). Following this step, the surface is covered with a thin, high-quality oxide layer, which will eventually form the gate oxide of the MOS transistor (Fig. 4(d)). On top of the thin oxide, a layer of polysilicon (polycrystalline silicon) is deposited (Fig. 4(e)). Polysilicon is used both as gate electrode material for MOS transistors and also as an interconnect medium in silicon integrated circuits. Undoped polysilicon has relatively high resistivity. The resistivity of polysilicon can be reduced, however, by doping it with impurity atoms.

After deposition, the polysilicon layer is patterned and etched to form the interconnects

and the MOS transistor gates (Fig. 4(f)). The thin gate oxide not covered by polysilicon is

also etched away, which exposes the bare silicon surface on which the source and drain

junctions are to be formed (Fig. 4(g)). The entire silicon surface is then doped with a high

concentration of impurities, either through diffusion or ion implantation (in this case with

donor atoms to produce n-type doping). Figure 4(h) shows that the doping penetrates the

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exposed areas on the silicon surface, ultimately creating two n-type regions (source and

drain junctions) in the p-type substrate. The impurity doping also penetrates the

polysilicon on the surface, reducing its resistivity. Note that the polysilicon gate, which is

patterned before doping actually defines the precise location of the channel region and,

hence, the location of the source and the drain regions. Since this procedure allows very

precise positioning of the two regions relative to the gate, it is also called the self-aligned

process.

Figure-4: Process flow for the fabrication of an n-type MOSFET on p-type silicon.

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Once the source and drain regions are completed, the entire surface is again covered with

an insulating layer of silicon dioxide (Fig. 4(i)). The insulating oxide layer is then

patterned in order to provide contact windows for the drain and source junctions (Fig. 4(j)). The surface is covered with evaporated aluminum which will form the interconnects (Fig. 2.4(k)). Finally, the metal layer is patterned and etched, completing the interconnection of the MOS transistors on the surface (Fig. 4(l)). Usually, a second (and third) layer of metallic interconnect can also be added on top of this structure by creating another insulating oxide layer, cutting contact (via) holes, depositing, and patterning the metal.

The schematic cross-section of a simple CMOS inverter circuit constituted by an n-

channel MOS transistor and a p-channel MOS transistor is shown in Fig. 5 below. The

CMOS integrated circuit can be accomplished by fabricating the n-channel and p-channel

MOS devices on the same substrate, following the fabrication processes discussed in Fig. 1-4.

Figure-5: Schematic cross-section of a CMOS inverter constituted by an n-channel MOS

transistor and a p-channel MOS transistor.

References:

1. Houda Graoui and Amir Al-Bayati, Accuracy of Doping and Process Optimization

for 0.18um PMOS technology, IEEE. Ion Implantation Tech., pg.189-192, 2002.

2. W. Maly, Atlas of IC Technologies, Menlo Park, CA: Benjamin/Cummings, 1987.

3. A. S. Grove, Physics and Technology of Semiconductor Devices, New York, NY:

John Wiley & Sons, Inc., 1967.

4. G. E. Anner, Planar Processing Primer, New York, NY: Van Nostrand Rheinhold,

1990.

5. T. E. Dillinger, VLSI Engineering, Englewood Cliffs, NJ: Prentice-Hall, Inc., 1988.

6. S.M. Sze, VLSI Technology, New York, NY: McGraw-Hill, 1983.

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PFTI - NMOS Processing Simulation

OBJECTIVES:

• To design 0.50 µm NMOS

• To analyze NMOS I-V curves under different influent factors

SIMULATION SOFTWARE: Silvaco TCAD

METHODOLOGY: Basic MOS ATHENA to ATLAS interface example simulating an Id/Vgs curve and extracting threshold voltage and other SPICE parameters. This experiment demonstrates:

• Process simulation of a MOS transistor in ATHENA

• Process parameter extraction (eg. oxide thickness)

• Auto interface between ATHENA and ATLAS

• Simple Id/Vgs curve generation with Vds=0.1V

• IV curve parameter extraction for Vt, Beta and Theta

The extract statement at the end of the file is used to measure the threshold voltage and

other SPICE parameters. The results from the extract statements are printed in the run-

time output, saved to a file called results.final and optionally used in the optimizer. One

operator of particular use in NMOS device extraction is abst). This takes the absolute

value of a variable and can be used to make all PMOS and NMOS extractions equivalent.

Part A: Simulation of the existing NMOS example 1. Double click on 'deckbuild' icon. 2. Right click on 'Main Control' and choose 'Examples'.

3. Double click on '1 MOS1: MOS Application Examples'.

4. From the examples, double click on '1.1 mos1ex01.in:NMOS: Id/Vgs and Threshold

Voltage Extraction'.

5. Read the function of this example and left click on 'Load example' to load the

commands of this example. Choose 'Confirm' from the popup notice.

6. From the trace in middle, click 'run' to simulate the example.

7. After a while, NMOS structure and its Id/Vgs curve will be simulated on pop-up

"TonyPlot" platform.

8. You can zoom in the NMOS structure by drawing a rectangle at the desired portion.

9. The NMOS structure and the Id/Vgs curve can be saved on computer desktop, in a

folder named "tcad8's Home" as postscript files by clicking the "Print" option on the

"TonyPlot" platform. The postscript files named "print.out.0" can be viewed at

Windows-operated computer using any online-downloaded postscript viewers, or

microsoft word document by "inserting" the "postscript files" into the doc. From the

postscript viewer, the NMOS structure and the Id/Vgs curve can then be saved as

image files (JPEG or TIFF). One of the examples of online postscript viewers is

available at: http://view.samurajdata.se/

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10. In your report, sketch the Id/Vgs curves. The raw data of Id/Vgs curve can be

obtained from the "tcad8's Home" folder, from a file with ".log" extension. 11. In your report, record the extraction values from the 'result.final' file. (eg. gate oxide

thickness, Vt)

Part B: Effects of different influent factors on NMOS structure and Ids/Vgs curve

Bl. Effects of Source/Drain Concentration

1. In ANTHENA, change S/D concentration to 5e12cm-3

#S/D implant

implant arsenic dose=5.0e15 energy=50 pearson implant

2. Click on "run" button to start simulation.

3. Save the simulated structure and graph generated

4. Repeat step 2 and 4 with S/D concentration of 8e17 cm-3

5. Compare and discuss the structure, Id-VgS curve simulated

B2. Effects of Threshold Voltage Adjust Implant Concentration

1. In ANTHENA, alter the Vt adjust concentration to 9.5e10cm-3

#vt adjust implant

implant boron dose=9.5e11 energy=10 pearson boron

2. Click on "run" button to start simulation.

3. Save the simulated structure and graph generated

4. Repeat step 2 and 4 with Vt adjust implant concentration of 9.5e12 cm-3

5. Compare and discuss the structure, Id-VgS curve simulated

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PFT2 - PMOS Processing Simulation

OBJECTIVES:

• To design 0.50 µm PMOS

• To analyze PMOS I-V curves under different influent factors

SIMULATION SOFTWARE: Silvaco TCAD

METHODOLOGY: Basic MOS ATHENA to ATLAS interface example simulating an Id/Vgs curve and extracting threshold voltage and other SPICE parameters. This experiment demonstrates:

• Process simulation of a MOS transistor in ATHENA

• Process parameter extraction (eg. oxide thickness)

• Auto interface between ATHENA and ATLAS

• Simple Id/Vgs curve generation with Vds=-0.1V

• IV curve parameter extraction for Vt, Beta and Theta

The extract statement at the end of the file is used to measure the threshold voltage and

other SPICE parameters. The results from the extract statements are printed in the run-

time output, saved to a file called results.final and optionally used in the optimizer. One

operator of particular use in PMOS device extraction is abst). This takes the absolute

value of a variable and can be used to make all PMOS and NMOS extractions equivalent.

Part A: Simulation of the existing PMOS example 1. Double click on 'deckbuild' icon. 2. Right click on 'Main Control' and choose 'Examples'.

3. Double click on '1 MOS1: MOS Application Examples'.

From the examples, double click on '1.8 mos1ex08.in:PMOS: Id/Vgs and Threshold

Voltage Extraction'.

4. Read the function of this example and left click on 'Load example' to load the

commands of this example. Choose 'Confirm' from the pop-up notice.

5. From the trace in middle, click 'run' to simulate the example.

6. After a while, PMOS structure and its Id/Vgs curve will be simulated on pop-up

"TonyPlot" platform.

7. You can zoom in the PMOS structure by drawing a rectangle at the desired portion.

8. The PMOS structure and the Id/Vgs curve can be saved on computer Desktop, in a

folder named "tcad8's Home" as postscript files by clicking the "Print" option on the

"TonyPlot" platform. The postscript files named "print.out.0" can be viewed at

Windows-operated computers using any online-downloaded postscript viewers, or

microsoft word document by "inserting" the "postscript files" into the doc. From the

postscript viewer, the PMOS structure and the Id/Vgs curve can then be saved into

image files (JPEG or TIFF). One of the examples of online postscript viewers is

available at: http://view.samurajdata.se/

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9. In your report, sketch the Id/Vgs curves. The raw data of Id/Vgs curve can be obtained

from the "tcad8's Home" folder, from a file with ".log" extension. 10. In your report, record the extraction value from the 'result.final' file. (eg. gate oxide

thickness, Vt)

Part B: Effects of different influent factors on PMOS structure and Ids/Vgs curve

Bl: Effect of the doping concentration of phosphorus in silicon 1. Scroll down the PMOS commands until you find the lines below:

# Start off by defining silicon with 1e14 phos doping.

# Decrease the following space.mult parameter for a denser

# mesh and more accuracy...

init orientation=100 c.phos=1e14 space.mult=2

2. In the last line of the above commands, change the value of c.phos to 1e15, for

example, 'c.phos=1e15'.

3. Simulate the newly created PMOS commands and notify the changes on both PMOS

structure and Ids/Vgs curve.

4. Repeat step 2 and 3 for different doping.

B2: Effect of the BF2 dose in PLDD implant amorphous 1. Look for the commands below:

# PLDD implant amorphous

implant amorphous bf2 dose=2.0e14 energy=50 pearson

2. Change bf2dose=2.0e14 to 2.0e16, for example 'bf2 dose=2.0e16'

3. Simulate the newly created PMOS commands and notify the changes on both PMOS

structure and Ids/Vgs curve.

4. Repeat step 2 and 3 for different bf2 dose.

Part C: Device design and evaluation of NMOS/PMOS with different dimensions

1. You should carry out preparation work including literature reviews and trial

simulations prior to the PFT2 lab session, so that you can deliver a more efficient

device design of the NMOS (n-channel MOSFET) or PMOS (p-channel MOSFET)

within the lab session of the PFT2.

2. You are required to design and simulate a 0.30 µm NMOS or PMOS.

3. You are expected to evaluate the performance of a 0.30 µm NMOS or PMOS in

terms of device characteristics such as subthreshold slope, threshold voltage and

charge carrier mobility. 4. Based on your evaluations, compare the device performance of the 0.30 µm NMOS

or PMOS with that of a 0.50 µm NMOS or PMOS.

5. Compare and discuss your results.

Marking Scheme

Lab (10%)

Assessment Components

Details

Hands-On & Efforts (20%)

The hands-on capability of the students and their efforts during the lab sessions will be assessed.

On the Spot Evaluation (20%)

The students will be evaluated on the spot based on the laboratory experiments and the observations on the

device characteristics.

Lab Report PFT1 & PFT2

combined (60%)

Each student will have to submit his/her lab final report within 10 days of performing the lab experiment PFT2.

The report should cover the followings:

1. Introduction, which includes background

information on monolithic integrated MOSFETs

processing and device simulation.

2. Experimental section, which includes the general

summary of the lab experiment work in PFT1

and PFT2.

3. Results and Discussions, which include the

device simulation results, analysis, and

evaluations, with neat graphs/images of the

results and recorded data, as well as the

discussion on the device design of the 0.30 and

0.50 µm MOSFETs.

4. Conclusion, which includes a conclusion on the

experimental and design work. 5. List of References, which includes all the

technical references cited throughout the entire lab report.

The report must have references taken from online

scientific journals (e.g. www.sciencedirect.com,

http://ieeexplore.ieee.org/xpl/periodicals.jsp,

http://www.aip.org/pubs/) and/or conference

proceedings (e.g.

http://ieeexplore.ieee.org/xpl/conferences.jsp).

Format of references: The references to scientific

journals and text books should follow the following

standard format:

Examples:

[1] William K, Bunte E, Stiebig H, Knipp D,

Influence of low temperature thermal annealing on

the performance of microcrystalline silicon thin-film

transistors, Journal of Applied Physics, 2007, 101, p.

074503.

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[2] Hodges DA, Jackson HG, Analysis and design of

digital integrated circuits, New York, McGraw-Hill

Book Company, 1983, p. 76.

Reports must be typed and single-spaced, and adopt a

12-point Times New Roman font for normal texts in the

report.

Any student found plagiarizing their reports will have

the assessment marks for this component (6%) forfeited.

The lab report has to be submitted to the

Nanotechnology lab staff. Please make sure you sign the

student list for your submission. No plagiarism is

allowed. Though the transistor structures and the

Ids/Vgs curves for the students from the same group can

be similar, the report write-up cannot be duplicated for

group members. Please make sure you join/form the

same group for both lab sessions (PFT1 and PFT2). The

single report presenting PFT1 and PFT2 lab experiments

has to be submitted within 10 days from the date of your

lab session for the PFT 2. No late submission is allowed

(strictly).

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