ee105 – fall 2015 microelectronic devices and...

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1 EE105 – Fall 2015 Microelectronic Devices and Circuits: Basic Semiconductors Prof. Ming C. Wu [email protected] 511 Sutardja Dai Hall (SDH) Excellent Reference for Module 2: Chenming Hu, Modern Semiconductor Devices for Integrated Circuits, 2010 downloadable from: https://people.eecs.berkeley.edu/~hu/Book-Chapters-and-Lecture-Slides-download.html

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Page 1: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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EE105 – Fall 2015Microelectronic Devices and Circuits:

Basic Semiconductors

Prof. Ming C. Wu

[email protected]

511 Sutardja Dai Hall (SDH)

Excellent Reference for Module 2:Chenming Hu, Modern Semiconductor Devices for Integrated Circuits, 2010

downloadable from:https://people.eecs.berkeley.edu/~hu/Book-Chapters-and-Lecture-Slides-download.html

Page 2: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Silicon: Group IV Element

P-typedopant

N-typedopant

Page 3: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Resistivity of Typical Materials

• Conductors– Copper: 1.7 x 10-6 Ω-cm (or 1.7 x 10-8 Ω-m)– Aluminum: 2.8 x 10-6 Ω-cm

• Insulators– SiO2: 1018 Ω-cm

• Semiconductor– Silicon: 10-3 to 103 Ω-cm – A wide range of resistivity, – Can be controlled by “doping” of impurities or electrical

bias

Page 4: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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From Atoms to Crystals

Decreasing atomic separation

Ener

gy

p

s

isolated atoms lattice spacing

valence band

conduction bandPauli exclusion principle

• Energy states of Si atom (a) expand into energy bands of Si crystal (b).

• The lower bands are filled and higher bands are empty in a semiconductor.

• The highest filled band is the valence band.• The lowest empty band is the conduction band

(a) (b)

Page 5: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Energy Band Diagram of Various Materials

Page 6: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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SiliconCrystalline Structure

(Diamond Cubic)Schematic Two-Dimensional

Representation

At 0 Kelvin, all electrons are “locked” in covalent bonds→ Behave like insulator

Page 7: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Electrons and Holes

• At room temperature, thermal energy breaks some covalent bonds, creating free electrons and “holes”

• Hole: empty space left by electron

– Hole “moves” as adjacent electron move into its space

– Treat hole like a positively charged particle

Page 8: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Intrinsic Semiconductor

Page 9: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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N-Type Semiconductor

Page 10: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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P-Type Semiconductor

Page 11: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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How Electron (or Hole) Move

No Electric Field

Page 12: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Mobility of Common Semiconductors

Page 13: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Mobility vs Dopant Concentration

Page 14: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Current: Movement of Charged Particles (Electrons and Holes)

Page 15: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Current in Semiconductor (1):Drift Current

Page 16: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Resistivity vs Dopant Concentration

Page 17: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Current in Semiconductor (2):Diffusion Current - Holes

Hole Diffusion

Page 18: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Current in Semiconductor (2):Diffusion Current - Electrons

Electron Diffusion

Page 19: EE105 – Fall 2015 Microelectronic Devices and Circuitsee105/fa17/lectures/Module_2-1...Microelectronic Devices and Circuits: Basic Semiconductors ... Chenming Hu, Modern Semiconductor

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Einstein Relationship