dual-mode silicon single-photon 256 × 256 avalanche …voxtel-inc.com/files/vis-spad-sensor.pdf ·...

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Voxtel Literature Dual-mode SPAD Sensor 26Jul2018 ©. Voxtel makes no warranty or representation regarding its products’ specific application suitability and may make changes to the products described without notice. DUAL-MODE SILICON SINGLE-PHOTON AVALANCHE-DIODE SENSOR FOR PASSIVE 2D IMAGING AND ACTIVE 3D LIDAR RANGING 256 × 256 DUAL-MODE SPAD SENSOR Voxtel’s 256 × 256 silicon single-photon avalanche diode (SPAD) sensor is a dual-mode device capable of active single-photon lidar (3D) range imaging and passive single-photon-counting (2D) imaging, eliminating the need for a separate 2D sensor, typically required in many lidar applications. Each 30-μm x 30-μm pixel includes a single-photon-sensitive SPAD detector, an 11-bit photon counter, a 10-bit range processor, and logic to switch between pixel operating modes. The imager is adaptable. On the fly, it can switch between pixel operating modes, allowing for sequential full-frame passive photon-count integration and time-resolved single-photon flash lidar imaging. Region-of-interest (ROI) operation allows the camera to simultaneously operate in both modes, so that while passive images are acquired, select pixels may be enabled for time-of-flight range measurements. This allows performance of regional or scanned lidar operations while collecting video-rate passive single-photon images. Co-registration of the passive and active image capabilities allows for easy image fusion and processing. Dual-mode operation enables reconfigurable imaging processing, allowing for passive or active object detection and dynamic imager reconfiguration. This facilitates efficient extraction of relevant data, enables efficient use of laser power, and reduces data bandwidth. To enable rapid evaluation and cost-effective integration with OEM systems, Voxtel offers the dual-mode SPAD camera (part number T7TV- 000A) with easy-to-use graphical user interface to evaluate the sensor performance. Extended near-infrared (NIR) spectral range options are under development. FEATURES Dual-mode: Sequential single- photon-counting (2D) & 3D time-of- flight ranging (3D) operation Image Dimension: 256 × 256 (65,536 pixels) Dynamic Range: 11-bit passive photon integration & 10-bit time-of- flight photon ranging Max Frame Rate (full frame): o 230 fps for imaging o 298 fps for 3D lidar Region of Interest Operation: Single or multiple rows at up to 8 kHz Depth Precision: 3 cm APPLICATIONS Short-Range Lidar Underwater Lidar 3D Gesture User Interface Security and Surveillance Fluorescence Lifetime Imaging (FLIM) Fluorescence Correlation Spectroscopy (FCS) Single-Photon Counting CONTACT INFO VOXTEL INC. 15985 NW SCHENDEL AVE #200 BEAVERTON, OR 97006 971-223-5642 WWW.VOXTEL-INC.COM [email protected]

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Page 1: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

Voxtel Literature Dual-mode SPAD Sensor 26Jul2018 ©. Voxtel makes no warranty or representation regarding its products’ specific application suitability and may make changes to the products described without notice.

DUAL-MODE SILICON SINGLE-PHOTON AVALANCHE-DIODE SENSOR FOR

PASSIVE 2D IMAGING AND ACTIVE 3D LIDAR RANGING

256 × 256 DUAL-MODE

SPAD SENSOR

Voxtel’s 256 × 256 silicon single-photon avalanche diode (SPAD) sensor is a dual-mode device capable of active single-photon lidar (3D) range imaging and passive single-photon-counting (2D) imaging, eliminating the need for a separate 2D sensor, typically required in many lidar applications. Each 30-μm x 30-μm pixel includes a single-photon-sensitive SPAD detector, an 11-bit photon counter, a 10-bit range processor, and logic to switch between pixel operating modes.

The imager is adaptable. On the fly, it can switch between pixel operating modes, allowing for sequential full-frame passive photon-count integration and time-resolved single-photon flash lidar imaging. Region-of-interest (ROI) operation allows the camera to simultaneously operate in both modes, so that while passive images are acquired, select pixels may be enabled for time-of-flight range measurements. This allows performance of regional or scanned lidar operations while collecting video-rate passive single-photon images.

Co-registration of the passive and active image capabilities allows for easy image fusion and processing. Dual-mode operation enables reconfigurable imaging processing, allowing for passive or active object detection and dynamic imager reconfiguration. This facilitates efficient extraction of relevant data, enables efficient use of laser power, and reduces data bandwidth.

To enable rapid evaluation and cost-effective integration with OEM systems, Voxtel offers the dual-mode SPAD camera (part number T7TV-000A) with easy-to-use graphical user interface to evaluate the sensor performance. Extended near-infrared (NIR) spectral range options are under development.

FEATURES Dual-mode: Sequential single-

photon-counting (2D) & 3D time-of-flight ranging (3D) operation

Image Dimension: 256 × 256 (65,536 pixels)

Dynamic Range: 11-bit passive photon integration & 10-bit time-of-flight photon ranging

Max Frame Rate (full frame): o 230 fps for imaging o 298 fps for 3D lidar

Region of Interest Operation: Single or multiple rows at up to 8 kHz

Depth Precision: 3 cm

APPLICATIONS Short-Range Lidar Underwater Lidar 3D Gesture User Interface Security and Surveillance Fluorescence Lifetime Imaging

(FLIM) Fluorescence Correlation

Spectroscopy (FCS) Single-Photon Counting

CONTACT INFO VOXTEL INC.

15985 NW SCHENDEL AVE #200 BEAVERTON, OR 97006

971-223-5642 WWW.VOXTEL-INC.COM [email protected]

Page 2: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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ORDERING INFORMATION Description Part Number (PN) 256 X 256 Dual-mode SPAD sensor – Bare Die S7TQ-EA0A 256 X 256 Dual-mode SPAD sensor – PGA Package S7TQ-EPBA Dual-mode SPAD Camera (without lens) with power adapter and software T7TV-000A

SPECIFICATIONS (PRELIMINARY)

Parameter Min. Typ. Max. Notes Single-photon Integrated Images

Resolution 256 × 256 Number of pixels (65,536) Pixel pitch 30 μm2 Size of each pixel Pixel fill factor 9% Photosensitive area/pixel

area Photon detection probability (PDP)i

28% 19% 4%

@ 480 nm @ 532 nm @ 800 nm

Dark count rate (DCR) < 10 Hz Per pixel Afterpulsing < 0.01% With 36 ns dead time Optical crosstalk < 0.1% Between nearest pixels Photon-counting dynamic range

11 bits In-pixel counter bits

Range gate (programmable)

30 ns 100 ns 1000 ns 4.5 – 150 meters (15 – 500 feet)

Timing precision 197 ps RMS timing jitter Range precision 30 mm Frame rate (2D mode) 230 fps Full frame. Up to 8k fps with

smaller region of interest. Frame rate (3D mode) 298 fps Full frame. Up to 8k fps with

smaller region of interest. SPAD Bias -19 V

i Without microlens or antireflective coating

SPAD PERFORMANCE

Dark Count Rate Photon Detection Probability

Typical room-temperature SPAD performance at 2.25V excess voltage.

Page 3: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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ELECTRICAL INTERFACE

Pinout IC Pad

PGA Pin Signal Name Type Signal Description Nominal

1 B2 vL Analog Supply pixel reference low 0.5V 2 C2 vL Analog Supply pixel reference low 0.5V 3 B1 vSlope_Byp Bypass pixel voltage bypass - 4 C1 vSlope_Byp Bypass pixel voltage bypass - 5 D2 VDDD33 Digital Power digital power (ESD power) 3.3V 6 D1 WriteSRAM Digital Input SRAM strobe trigger - 7 E3 Calib Digital Input calibration frameset trigger - 8 E2 Readout Digital Input frame readout trigger - 9 E1 ArmAPD Digital Input arm pixel photo-diodes - 10 F2 Preset Digital Input reset pixel storage node - 11 F3 RstB Digital Input chip reset (active low) - 12 G3 SDin Digital Input digital serial interface -- scan input - 13 G1 SCLKin Digital Input digital serial interface -- scan clock - 14 G2 SLoad Digital Input digital serial interface -- data load - 15 F1 SDefB Digital Input digital serial interface -- default reset - 16 H1 VSSA Analog Ground analog ground GND 17 H2 GATE_lvdsn LVDS Input1 timing gate control - 18 J1 GATE_lvdsp LVDS Input1 timing gate control - 19 K1 TZ_lvdsn LVDS Input1 time zero trigger - 20 J2 TZ_lvdsp LVDS Input1 time zero trigger - 21 L1 VSSAPIX Pixel Ground (sub) digital ground (ESD ground) GND 22 K2 VDDD33 Digital Power digital power (ESD power) 3.3V 23 K3 VDDD Digital Power digital power 1.8V 24 L2 VSSD Digital Ground digital ground GND 25 L3 VSSA Analog Ground analog ground GND 26 K4 Vcm2_Byp Bypass adc voltage bypass 1.8V3 27 L4 Vrefn_Byp Bypass adc voltage bypass 1.0V3 28 J5 Vrefp_Byp Bypass adc voltage bypass 2.6V3 29 K5 Irn100uA_master Reference Current master bias current +100uA

Page 4: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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30 L5 VSSA Analog Ground analog ground GND 31 K6 VDDA Analog Power analog power 3.3V 32 J6 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 33 J7 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 34 L7 VSSD Digital Ground digital ground GND 35 K7 VDDD Digital Power digital power 1.8V 36 L6 CLK Clock Input system clock (20MHz) - 37 L8 data_out5 Digital Output DDR output - 38 K8 data_out4 Digital Output DDR output - 39 L9 data_out3 Digital Output DDR output - 40 L10 data_out2 Digital Output DDR output - 41 K9 data_out1 Digital Output DDR output - 42 L11 data_out0 Digital Output DDR output - 43 K10 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 44 J10 VSSA Analog Ground analog ground GND 45 K11 VDDA Analog Power analog power 3.3V 46 J11 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 47 H10 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 48 H11 INTERNAL USE INTERNAL USE Voxtel internal use (ground) - 49 F10 INTERNAL USE INTERNAL USE Voxtel internal use (ground) - 50 G10 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 51 G11 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 52 G9 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 53 F9 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 54 F11 VDDD33 Digital Power digital power (ESD power) 3.3V 55 E11 INTERNAL USE INTERNAL USE Voxtel internal use (float) - 56 E10 vH Analog Supply pixel reference high 2.1V 57 E9 vH Analog Supply pixel reference high 2.1V 58 D11 vScas_Byp Voltage Bypass pixel voltage bypass - 59 D10 vScas_Byp Voltage Bypass pixel voltage bypass - 60 C11 vSlope_Byp Voltage Bypass pixel voltage bypass - 61 B11 vSlope_Byp Voltage Bypass pixel voltage bypass - 62 C10 vL Analog Supply pixel reference low 0.5V 63 A11 vL Analog Supply pixel reference low 0.5V 64 B10 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 65 B9 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 66 A10 Det_Common Pixel Anode high-voltage SPAD bias -19V 67 A9 Det_Common Pixel Anode high-voltage SPAD bias -19V 68 B8 VDDAPIX Pixel Power pixel power connection 3.3V 69 A8 VDDAPIX Pixel Power pixel power connection 3.3V 70 B6 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 71 B7 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 72 A7 vL Analog Supply pixel reference low 0.5V 73 C7 vL Analog Supply pixel reference low 0.5V 74 C6 vL Analog Supply pixel reference low 0.5V 75 A6 vL Analog Supply pixel reference low 0.5V 76 A5 vL Analog Supply pixel reference low 0.5V 77 B5 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 78 C5 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 79 A4 VDDAPIX Pixel Power pixel power connection 3.3V 80 B4 VDDAPIX Pixel Power pixel power connection 3.3V 81 A3 Det_Common Pixel Anode high-voltage SPAD bias2 -19V 82 A2 Det_Common Pixel Anode high-voltage SPAD bias2 -19V 83 B3 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND 84 A1 VSSAPIX Pixel Ground (sub) analog ground (ESD ground) GND

Page 5: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

Voxtel Literature Dual-mode SPAD Imager 26July2018 ©. Voxtel makes no warranty or representation regarding its products’ specific application suitability and may make changes to the products described without notice.

DUAL-MODE SILICON SINGLE-PHOTON AVALANCHE DIODE

CAMERA

256 × 256 DUAL-MODE

SPAD CAMERA

Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode, visible SPAD sensor (part number S7TQ-EP0A). Each pixel of the SPAD sensor is fully digital and comprises an integrated single-photon avalanche diode (SPAD) detector and photon-counting and low-jitter timing circuitry.

The SPAD camera can be operated in two modes; 1) photon-counting (passive/2D imaging) mode; and 2) time-resolved (3D time-of-flight) mode. In 2D mode, the camera differs from the standard CCD and CMOS imagers since it creates the 2D image by counting the number of photons on the sensor within the acquisition time. In 3D mode, the camera can be used with an active, pulsed illumination source to create a 3D image based on the photon time of arrival captured on each pixel. The camera features the ability to switch between 2D and 3D mode on the fly, thus enabling capture of 3D range data, while collecting video-rate 2D images within user-defined gates and acquisition times, at fast frame rates. Frame rates of up to 8 kHz are possible by selecting a smaller region of interest.

The camera features a standard C-mount or CS-mount mechanical adapter that allows easy integration into common optical setups. It communicates with the PC via a Camera Link interface using a simple LabWindows software-based graphical user interface (MATLAB option available and DLLs for easy integration in most applications can be provided).

The camera can be used by original-equipment-manufacturers (OEM) interested in Voxtel’s SPAD sensor as a quick, low-cost, evaluation vehicle for the sensor, and by researchers and other end-users as a measurement instrument in a wide range of visible single-photon detection experiments and proof-of-concept demonstrations.

FEATURES Dual-mode: Sequential single-photon-

counting (2D) & 3D time-of-flight ranging(3D) operation

Image Dimension: 256 × 256 (65,536pixels)

Dynamic Range: 11-bit passive photonintegration & 10-bit time-of-flight photonranging

Max Frame Rate (full frame): o 230 fps for imaging o 298 fps for 3D lidar Region of Interest Operation: Single or

multiple rows at up to 8 kHz Depth Precision: 3 cm Hardware Interface: Camera Link Software: LabWindows & MATLAB

APPLICATIONS Short-Range Lidar Underwater Lidar 3D Gesture User Interface Security and Surveillance Fluorescence Lifetime Imaging (FLIM) Fluorescence Correlation

Spectroscopy (FCS) Single-Photon Counting

CONTACT INFO VOXTEL INC.

15985 NW SCHENDEL AVE #200 BEAVERTON, OR 97006

971-223-5642 WWW.VOXTEL-INC.COM [email protected]

Page 6: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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ORDERING INFORMATION Description Part Number (PN) Dual-mode SPAD Camera (without lens) with power adapter and software T7TV-000A 256 X 256 Dual-mode SPAD sensor—Bare Die S7TQ-EA0A 256 X 256 Dual-mode SPAD sensor—PGA Package S7TQ-EPBA

SPECIFICATIONS (PRELIMINARY)

Parameter Min. Typ. Max. Notes Single-Photon Integrated 2D Images

Resolution 256 × 256 Number of pixels (65,536) Pixel pitch 30 μm2 Size of each pixel Pixel fill factor 9% Photosensitive area/pixel

area Photon detection probability (PDP)i

28% 19% 4%

@ 480 nm @ 532 nm @ 800 nm

Dark count rate (DCR) < 10 Hz Per pixel Photon-counting dynamic range

11 bits In-pixel counter bits

Range gate 30 ns 100 ns 1000 ns 4.5 – 150 meters (15 – 500 feet)

Timing precision 197 ps RMS timing jitter Range precision 30 mm Frame rate (2D mode) 230 fps Full frame. Up to 8k fps with

smaller region of interest. Frame rate (3D mode) 298 fps Full frame. Up to 8k fps with

smaller region of interest. Camera power 12 V SPAD bias (~-19V) to be

supplied by user via SMA connector

Lens connector C-mount or CS-mount

i Without microlens or antireflective coating

SPAD PERFORMANCE

Dark Count Rate Photon Detection Probability

Typical room-temperature SPAD performance at 2.25V excess voltage.

Page 7: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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LABWINDOWS SOFTWARE GRAPHICAL USER INTERFACE

Page 8: DUAL-MODE SILICON SINGLE-PHOTON 256 × 256 AVALANCHE …voxtel-inc.com/files/VIS-SPAD-Sensor.pdf · SPAD CAMERA Voxtel’s SPAD camera is based on Voxtel’s 256 X 256, dual-mode,

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MECHANICAL DRAWINGS (PRELIMINARY)