confidential © 2009 cymer, inc. ibp – gts product catalog – understanding information provided...

CONFIDENTIAL © 2009 Cymer, Inc.

IBP – GTS

Product Catalog – Understanding Information Provided

Marcus Osibov 2013-01-28

Training Agenda


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Understanding the Product Catalogs

Oracle – How to identify laser configuration

Laser Configuration – FRU Support

DUV Product Catalog


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Documents approved laser configuration to be built in CYMER Factory

Documents approved laser configurations in the field.

Approved configuration will be supported by Engineering, Software, Logistic, and Technical Support Department.

DUV Product Catalogs:XLR-500i & XLR-600ix: 153234XLA-300 & XLA-400: 153236XLA-100 & XLA-200: 175597ELS-6000 & ELS/NL-7000: 149832ELS-5000: 189303

DUV Product Catalog


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Cover Page Tab: Product Line Management Director, Document OwnerNew Product Technical Support ManagerNew Product Technical Support EngineerParts, Planning & Analysis ManagerQuality Assurance DirectorBusiness Manager, Account Management - ASMLSr Business Manager, Account Management - Nikon

Revision History Tab: RevisionDate of CO releaseCO numberCO OwnerDescription of changes

Purpose Tab:Definitions:

End User IdentificationHardwareSoftware FeaturesCYMER Spare Contracts

Product Catalog – Laser Model Tab


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Two Laser Configuration Categories• CSD Build

• Field

Laser Model Tab is broken into 7 sections:

• Model Number

• New Laser / End User Configuration

• WSO Spares (Supporting FRU list)

• Upgrade

• Direct Customer

• Hardware

• Software Activation

Laser Model Name


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Model Name - Reference only. Displays full laser configuration naming. Within CYMER data bases, the model name may be broken into sub components.

New models name is created due to the following reasons:Delta Hardware from Base modelDelta software activationService ContractLaser Performance Specification (Hardware or software feature)End User + Process

New Model designator – “F” + number, Example: F01XLA-340 (Initial release of laser model)XLA-340-F03 (New feature)

Laser Model Name


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XLA-340: Field base models are identified from CSD Build configurations.

XLA-340-B: “B” identifies billable contract to the customer

XLA-340-I-1268: “I” identifies Intel, and Intel process

XLA-340-I-1270-B

Laser configuration names may consist of 4 components.

1. Base model: laser configurations shipped from CSD

2. End User: Identify End User with copy exact policy. Example: Intel

3. End User Process: Identifies End User manufacturing process if End User has copy exact policy

4. Spare Contract: identifies lasers with Billable or Non-Billable Service / Material contracts.

Joining the above information (1-4) creates the Model Name

World Service Organization (WSO)


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FRU Hardware Feature: Identifies FRU list (hardware modules) to be used to support laser configuration. Factory Orderable (Laser Model): Yes or No. There are more field configurations due to field upgrade, then configurations which direct customers can purchase. Not all laser configurations can be

ordered from the factory.

Spare (FRU) Support by: Manufacturing: Support CSD laser builds.

WSO Logistics: Uses agile released FRU lists – “Evaluation” or “Production” status.

Engineering: Support beta configuration, only beta test modules. Released modules will be support by WSO Logistic (standard support plan).

(Field) Upgrade


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Upgrade List / Kits: Kits required to create laser configuration from Base

Configuration model. Upgrade List: List of parts or kits required to be ordered for

upgrade.Upgrade Kit: Kit containing module / hardware for upgrade and list of Software keys

Upgrade Orderable: Yes or No

Base Configuration: - as shipped from CYMER San Diego.

Direct Customer


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Direct Customer P/N: Direct Customer order number for specific laser configuration.

Direct Customer Model Name: Model name used by Direct Customer, which may or may not match CYMER model name.

Hardware


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Delta Core Module from Baseline Model: List hardware delta from base configuration.

Module part numbers are reference only. Product catalog does not get revised when module part number are changed.

Software Activation


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Software featured which require activation key. Activation keys are sold to the customer.

E95: Measure of integrated spectral energy content (contains 95% of energy)

ASC: Active Spectral Control - A feature to maintain a low variation of E95

ABS: Advanced Bandwidth Stabilization

TABS: Tunable Advanced Bandwidth Stabilization

GLX: Gas Life Extension - A feature to minimized downtime associated with gas refills by extending the time between required gas refills. GLX 1 = 1 billion shot or GLX 2 = 2 billion shots between refills

FD: Focus Drilling

iGLX: Extended gas life extension.

ETC: Energy Timing Control (ASML) only.

HPA: High Power Arf (Power Switching) XLR 90-120W

D69 Value: Each software activation has a bit value, D69 indicates total bit value of software

activation which are “on”.

Frequently Asked Questions (FAQ)

Why is my configuration not listed in the product catalog?

1. Laser is not an approved configuration. Mostly likely an unauthorized software key is “activated”. D69 value does not match in the product catalog.

Action: Change laser to an approved configuration.

2. CSD missed a configuration and needs to up date the product catalog.

Action: Product catalog will be updated

3. Laser is in a “Beta” test configuration. Laser configuration is being controlled by CSD engineering department.

Action: No action required while laser is in “Beta” test configuration.

After test is complete either Product Catalog will be updated or laser will return to an approved configuration.

Contact Technical Support for clarification of laser configuration (item #1 or item #2).

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Who decides what is an Approved configuration?

CSD program manager and marketing department decides what is an approved configuration.


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Why do we limit laser configurations?

1. Marketing strategy

2. Cost to support laser configuration.

3. Laser hardware being obsoleted.


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How often does the Product Catalog get updated?

Product catalog is schedule for quarterly review, but could be updated as required.


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What happens if laser configuration is not correctly identified in Oracle?

Logistic FRU determination program (SPO) will create

demand for incorrect parts to be manufactured and deliver incorrect spares to local warehouse.

Long down event may occur when the required part is not available.


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Why do we use “Fxx” identification on laser names?

“-Fxx” identification is required because CYMER data bases requires unique laser name for each laser configuration.

New laser configuration is required if laser specifications, Software Features or Hardware is different then base configuration.

“Fxx” numbers are added after base configuration

“Fxx” number configuration may not be identical between laser models. Refer to Product Catalog for correct laser configuration


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CYMER Product Catalog(Base)

Impact from Product Catalog and the three initial documents that need be created.

IBPIBP LogisticsLogistics SoftwareSoftwareEngineeringEngineering MfgMfg FinanceFinance

Oracle Laser ID FRU List

G/P List *

1. Top Assy

2. Product Matrix *

Field ID Service Planning and Optimization

(SPO)

Demand

DistributionLocal

Warehouse

G/P list

ReportsCustomer

Billing

Base = One Laser Configuration (Hardware & Software)

* = Additional customer requirements upon each hardware / feature configuration

QualityQuality

Reports


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Documentation Requirements

IBPIBP LogisticsLogistics EngineeringEngineering MfgMfg FinanceFinance

Upgrade Procedure

Module R&R

Field Installation

FRU

Oracle

Training Development

Import / Export

Cost

Build Instructions

Module Assy

Module Testing

Optical Test

FRU – mapping

Spare Demand

Top Assy

Module - testing

G/P list


Supporting Documentation For Field Service Engineers Product Matrix

Marcus Osibov 2013-01-22

D69 worksheet


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eLibrary link: http://cymernet/elibrary/duv/Lists/FSL/DispForm.aspx?ID=14364

D69 worksheet

Product Matrix


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Product Matrix


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confidential © 2009 cymer, inc. ibp – gts product catalog – understanding information provided...

Documents

laser model nameconfidential

laser configuration

factory orderable laser

cymer data bases

product catalog confidential

end user process

approved configuration

end user manufacturing