alpha-se specifications - quantum design latin america€¦ · 5 alpha-se specification sheet...
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The alpha-SE® is the ideal spectroscopic ellipsometer for fast routine thin film measurements. It was designed to provide a perfect balance of accuracy, speed and price.
645 M Street, Ste 102, Lincoln, NE 68508 • Ph: 402.477.7501 • Fx: 402.477.8214 • www.jawoollam.com
© 2015 J.A. Woollam Co.
alpha-SE Specification Sheet
alpha-SE® Specifications
Patented Rotating CompensatorEllipsometer (RCE) TechnologyRCE technology overcomes the limitations of otherellipsometers. No other combination provides fullspectra as quickly as RCE configuration.
RCE RAE RPE Phase Modulated
Measure all Ψ/∆ accurately
Yes No No * Requires 2 measurements
Measure ∆ handedness Yes No No Yes
Combine with fast CCD detection Yes Yes Yes No
CompactEverything contained in one small package. Fits easily on your benchtop. Easy connection to your computer via USB.
Fast CCD DetectionThe alpha-SE® uses a CCD detector for simultaneous measurement of hundreds of wavelengths.
Auto AlignmentAlignment is integrated into the data acquisition routine.Automated Z-translation alignment for easy data acquisition. Simply place your sample on the stage and the alpha-SE does the rest.
Powerful SoftwareEllipsometry is an effective characterization technique, but requires powerful software to get full benefit from the measurement. The CompleteEASE software automates this process for most common applications.
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alpha-SE Specification Sheet
Features
Angles of Incidence65°, 70°, 75° (off sample)90° (straight through)
Spectral Range380nm to 900nm (180 wavelengths)
Pixel Resolution0.01eV
Data Acquisition RateFast (3 seconds*)Standard (10 seconds*)Long (30 seconds*)* for complete spectrum
Beam DiameterApproximately 2mm
Measurable QuantitiesEllipsometry: Ψ (0°-90°) and Δ (0°-360°)Transmission intensity: %TransmissionReflection intensity: % ReflectionDepolarization: % DepolarizationMueller-matrix: Measure and fit 11 normalized elements of the Mueller-matrix. Useful for samples that are both anisotropic and depolarizing.
Sample SizeSample dimensions from 5mm up to 200mm.Maximum substrate thickness = 16mm
Typical AccuracyStraight-through measurement of empty beam: Ψ = 45°± 0.1 tan(Ψ) = 1 ± 0.0035 Δ = 0° ± 0.2 cos(Δ) = 1 ± 0.000006
*Met by 98% of the measured wavelengths with ten second averaging time.
Typical RepeatabilityThirty repeated measurements of SiO2 (2nm)/Si at 70°angle and ten second averaging with fixed sample: δthickness = 0.01nm *1-standard deviation
Oxide Thickness Std. Dev. of 30measurements
2 nm ±0.01nm25 nm ±0.01nm60 nm ±0.01nm
120 nm ±0.005%500 nm ±0.005%
1000 nm ±0.005%
2.7
2.71
2.72
2.73
2.74
2.75
2.76
2.77
2.78
2.79
2.8
0 200 400 600 800 1000 1200 1400Time in Minutes
Thic
knes
s(n
m)
Thickness (nm)
2.7
2.71
2.72
2.73
2.74
2.75
2.76
2.77
2.78
2.79
2.8
0 200 400 600 800 1000 1200 1400Time in Minutes
Thic
knes
s(n
m)
Thickness (nm)
-0.3
-0.2
-0.1
0
0.1
0.2
0.3
300 400 500 600 700 800 900 1000
Wavelength in nm
Del
ta in
deg
rees
Delta in °
Specificationfor 98% of
wavelengths
44.8
44.9
45
45.1
45.2
300 400 500 600 700 800 900 1000
Wavelength in nm
Psi
in d
egre
es
Psi in °
Specificationfor 98% of
wavelengths
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alpha-SE Specification Sheet
System Specifications
System Configuration (in order)Light SourceFixed PolarizerSampleStep Scan Rotating CompensatorFixed AnalyzerSpectrometer and Detector
Light SourcesQuartz Tungsten Halogen (QTH) lamp
Fixed PolarizerAll alpha-SE® systems use calcite Glan-Taylor polarizers. Beam deviation: <1 arcmin. Extinction ratio: 1x10-6
Fixed AnalyzerSame as fixed polarizer.
CompensatorSpectroscopic compensator operates over entirewavelength range, from 380-900nm. Rotation rate: Step-scan Beam deviation: <1 arcmin.
VacuumVacuum chuck holds sample firmly on stage.
Liquid Cell (optional)• 500 µL liquid capacity• 70° angle of incidence• Designed for glass slides and 1” or 2” wafers
CompleteEASE® Software
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alpha-SE Specification Sheet
Component Specifications
Make your selections and press measure.
Get results in seconds.
Determine optical constants.
Operating EnvironmentTable able to hold ellipsometer (39lbs.) and computer.Note: Vibration isolation table is not required.
Power100/240 VAC, 47-63Hz, <1 Amp
DimensionsWidth 19”Depth 12”Height 12”Weight 39 lbs.Note: Not including computer
Table LayoutRecommended size: Width 60” Depth 30” Height 36”
Ambient LightingRCE technology allows accurate measurements under normal room light conditions.
Operator Computer (Minimum specifications, subject to change without notice.)Core i7-4790 Processor (Quad Core, 8MB, 3.60GHz w/HD4600 Graphics)4GB RAM, 500GB Hard Drive, Windows 7Pro16x DVD+/-RW Drive, 19” FPD monitorMicrosoft Office Home and Business 2013MiniTower Case
Side ViewDimensions given in inches (cm)
Front ViewDimensions given in inches (cm)
Computer, Monitor, Mouse, and Keyboard
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alpha-SE Specification Sheet
Facility Requirements
Greg Long, PhD. (alpha-SE & M-2000)Hewlett PackardPrinting Technology Development LabsPhone: (541) 360-5496E-mail: [email protected]
Alex Mueller (alpha-SE)Los Alamos National LaboratoryAdvanced Diagnostics and InstrumentationPhone: (505) 606-1551E-mail: [email protected]
Prof. Daeyeon Lee (alpha-SE)University of PennsylvaniaDepartment of Chemical and Biomolecular EngineeringPhone: (215) 573-4521E-mail: [email protected]
Prof. Maarij Syed (alpha-SE)Rose-Hulman Institute of TechnologyPhone: (812) 877-8957E-mail: [email protected]
Seth King (alpha-SE)University of Wisconsin La CrosseDept. of PhysicsPhone: (608) 785-8671E-mail: [email protected]
645 M Street, Ste 102, Lincoln, NE 68508 • Ph: 402.477.7501 • Fx: 402.477.8214 • www.jawoollam.com
© 2015 J.A. Woollam Co.
alpha-SE Specification Sheet
alpha-SE® References