all-in-one microscope for advanced imaging, recording, and ... · the vhx-950f provides a...

All-in-One Microscope for Advanced Imaging,

Recording, and Measurement

Digital MicroscopeVHX-950F Series

With an intuitive interface, anyone can easily view samples, capture images, and complete measurements.

The ease-of-use of the system helps to eliminate variation in imaging and analysis from user-to-user.

The VHX-950F greatly reduces the time needed to image samples, thus increasing accuracy and efficiency.

Intuitive operation,

sharp and full-focus imaging

2

Observation

P. 4

Recording

P. 6

Measurement

P. 8

All-in-One Design

P. 10

Quick Depth Composition and 3D display

P. 12

Industry Application Examples

P. 14

3

BASIC CONCEPT

ObservationThe imaging ability of a digital microscope is unrivaled by that of a conventional optical microscope.

1 Large depth-of-field

2 Multi-angle observation

Fully-focused images

The VHX-950F provides a depth-of-field up to 20 times larger than optical microscopes. Because

of this, the VHX-950F can observe targets with large changes in height entirely in focus, typically

impossible for conventional optical microscopes to achieve. Furthermore, the time required for

focus adjustment and observation is reduced considerably.

View a target from any angle and never miss another detail

VHX Series digital microscopes offer easy hand-held observation for larger targets. By using the

multi-angle observation system, users can reduce the time it takes to capture images of a target

at a variety of angles and positions. Using these two methods of observation, you will never miss

another detail in your observation.

Image captured with an optical microscope

Hand-held observation Multi-angle observation system

Pins (100×)Image captured with a digital microscope

0° 15°30°

45°

60°

75°

90

°

15°

30°

45°

60°

4

Without camera-shake correction With camera-shake correction

Full illuminationPartial illumination

The entire ring light is turned on.Only 1/4 of the ring light is turned on to enhance the surface texture of the object being viewed.

Metal surface (250×)

LCD color filter (500×)

Normal

Sharpening Image + Light Shift

Edge enhancement

Light Shift

Glare Removal

Monochrome

Sharpening Image

Glare Removal + Light Shift

ReliefCoin (50×)

Image Stabilization function

Light Shift function

Optimal Image function

Through advanced image processing, the

VHX-950F is able to correct misalignments in

an image at the sub-pixel level. This function

makes it possible to perform high-magnification

observation without being affected by

environmental vibration.

Using the Light Shift button on the console instantly changes the illumination mode. The lighting

will be switched from full illumination to partial illumination that enhances the projections and

depressions of the target.

By simply pushing the Optimize button, nine

different lighting scenarios are displayed.

From there, you can quickly select the image

that is ideal for observing your target. Since

the images are automatically generated,

users can consistently produce the same

image conditions.

ONEPUSH

ONEPUSH

ONEPUSH

3 Optimal Lighting Settings

Simply select the ideal image!

5

Solder separation test (50×)

Video recordings up to 3 hours long

BASIC CONCEPT

RecordingData saving to report generation

1 Saving images on-site

Save and manage data

Observed images can easily be recorded on-site using an integrated high-capacity 500GB HDD.

Our high-speed filing system ensures stress-free handling of a large quantity of images. Lens,

magnification, lighting, and measurement data can be saved on the VHX-950F and recalled later.

Video record/replay of chronological changes

The VHX-950F is equipped with a video record/replay function that can accurately and completely

record chronological changes and subtle movements of the target. Data can be recorded for up to

3 hours, at up to 30 frames per second. You can fast forward, advance the frame, and capture a

still image from the video. Moreover, the video is recorded as an AVI file that can be replayed with

the VHX-950F or any computer.

Timer function for long-term observation

The VHX-950F can automatically save images based on a

timer setting. Using the LAN function, you can observe the

images being captured by having them sent directly to your

personal computer.

Applicable file format: JPEG, TIFF, and WDP (Windows Media Photo)

Bacterial growth

6

Device: KEYENCE VHX-Series

OBSERVATION REPORT

File nameGrain.tif

Captured on**, **

Date**, **

Capturing conditionsMagnification: 500×Lens: VH-Z500

TitleSubtitlePrepared by

VHX-950F

Company LAN

Manufacturing/Engineering departments

Overseas offices

Quality assurance/Research/Development departments

Other factories

Network

2 Network compatible

3 PC mode for report preparation

Quick information sharing

The VHX-950F can be connected to a network via LAN. This allows quick and easy sharing of

images with other departments or remote locations. This image and data sharing ensures speedy

and accurate action in urgent situations.

Immediate report generation on-site

PC mode allows for Microsoft Word or Excel to be

installed on the VHX-950F. You can prepare reports on-

site immediately after observation or image capture.

Various antivirus software

programs supported

Various antivirus software programs can also be installed

as needed.

*Windows, Word and Excel are either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries.

7

BASIC CONCEPT

MeasurementThe digital microscope is equipped with various dimensional measurement tools with easy operation.

Real-time Measurement

TRIPLE‘R sensor automatically

recognizes lens/magnification

KEYENCE’s advanced sensor technology and

microscopy/optical expertise have been combined to

allow the VHX to recognize three types of information:

lens connection, lens type, and magnification. The system

will automatically adjust the stage movement speed and

calibration data when the magnification is changed.

Various measurement tools

Users can complete all measurements directly on the screen with just a few clicks of the mouse.

This is significantly easier and faster than systems that require a user to capture images, import

them to a PC, and then use external software to complete measurements on the sample.

With 21 measurement tools available, nearly any

feature of interest can be inspected with the VHX.

Also, with the added ability to re-position a

measurement point, it is easy to make quick changes

to measurements and confirm accuracy.

8

Edge detection function

When the measurement point selected on the image

is not perfectly on the edge, this function will adjust

the measurement point to the correct edge location.

This reduces variation between operators and

ensures highly-repeatable measurements.

Print pattern (150×)

Corrects the point automatically

3D Measurement Function

Using 3D data, the VHX-950F makes it

possible to measure at any targeted

point. Data can be collected to

calculate the profile, height, and volume

for any area within the field-of-view.

3D Measurement Tools

Console (50×)

Height Measurement Roughness Measurement

Height difference and distance can be measured

simply by clicking two points on the screen. Using

the auxiliary "Max. height" and "Min. height" tools,

users can measure the height difference and

distance between the highest or lowest points on

two objects.

Roughness measurement can be performed using

typical parameters such as Ra and Rz. Through line

roughness and surface roughness measurements,

users can quantify the differences in surface

conditions.

Processed metal component (50×) Standard roughness measurement scale (1500×)

9

DVD

23-inch full HD LCD

monitor

Light source

LAN

USB3.0

A l l - i n- One System

Observation, Recording, and Measurement have been

integrated into a single unit

The VHX-950F encompasses a 23-inch LCD monitor and high-capacity HDD. This unit is widely

used in various areas including research and development, quality assurance, failure analysis, and

manufacturing.

10

Wide magnification range from 0.1× to 5000×

The VHX-950F enables a wide range of observation from macro-scale stereoscopic imaging to

the detailed analysis of an SEM. Many techniques are also supported including transmitted and

polarized lighting, as well as differential interference contrast.

Stereoscopic microscope

Metallurgical microscope

Measuring microscopeElectron microscope

KEYENCE Optical Lenses

Continually Evolving

KEYENCE has been a leader in the digital microscope

industry for over 25 years. We have invested many

years developing optical lenses and aim to use the best

technology in the development of our digital microscope

lenses.

Highest Resolution in the Industry - RZ Lens

The design of the lens is the greatest contributing factor

in achieving high-resolution and large depth-of-field

imaging. KEYENCE has developed zoom lenses with the

highest resolution in the industry. These lenses minimize

chromatic aberrations and distortions, while also offering

superior telecentricity. Real Zoom Lens

Achieves 0.1× to 5000×with a single unit

11

Fully-focused image and 3D display.

Even when the target has an uneven surface, a fully-focused image can be obtained rapidly by

compiling images of different focus positions, impossible with conventional optical microscopes. The

3D display allows surface shape observation from various angles. When the Z-axis motorized stage is

used, this 3D image can be displayed easily by just pressing the button on the console.

Accurate D.F.D. methodWe have adopted a new algorithm that uses the fine changes in texture to estimate height data. Building on our depth-up feature, the D.F.D. method facilitates the accurate construction of a 3D model allowing for versatile observation in 3D.

D.F.D. = Depth from Defocus

The D.F.D. method is the process by which the VHX can 1) Compile a completely in-focus image

and 2) Generate data to compile a 3D model. The D.F.D. method analyzes the level of contrast,

or focus, at each level of the target. By using the degree of blurring, the D.F.D. method can

calculate height information for each pixel, thereby enabling the compilation of a 3D model and

a completely in-focus image. Even if a pixel cannot be captured in perfect focus, a calculation is

made to generate height data. The D.F.D. method exponentially increases the efficiency of a 3D

construction.

Just press the console button.

Conventional image Accurate D.F.D.

Focus position: Lowest plane

Objects with multiple planes of focus could never be observed completely in

focus at one time.

Focus position: Middle plane Focus position: Highest plane


Method in which accurately focused images are stacked

D.F.D. processed image

ADVANCED

FUNCTION

Fastest in industry Simple 2-step operation

Quick depth composition & 3D display function

12

Auto Adjust function

Use the Auto Adjust function to prevent edge

displacement and construct a fully-focused

image. This method is at least five times faster

and more accurate than conventional position

correction methods and obtains accurate

information even for easily distorted, low

magnification areas.

View highly reflective objects in 3D

Once applicable only to still

images, we’ve now enabled the

glare removal function to be used

on live images and 3D display.

By removing the reflectivity, an

accurate 3D display of highly

reflective objects becomes

possible.

Conventional image Adjusted by the Auto Adjust Function

Observing the target in complete focus allows for quick and

detailed analysis of the entire object.

Detailed topographical features not visible in two dimensions

are observed.

IMAGE AFTER DEPTH COMPOSITION 3D DISPLAY


Conventional image

Solder (200×)

Image subjected to glare removal and Quick 3D display processing

13

CMOS (15×) Wire bonding (300×)

Color filter (800×) ITO film (1000×)

Miniature bearing (10×) CVT gear (50×)

Metal structure (400×) Metal flow (10×)

Cross section of multilayer film (1000×) Nonwoven fabric (200×)

Insulation (50×) Fracture surface of glass (20×)

Semiconductor

Automotive/Metal

Material/Chemical

Solves Applications in Every Industry

14

Electronics

Pharmaceutical/

Packaging

Other Industries

Connector terminal (70×) BGA (50×)

Cross section of solder (1000×) Ink penetration (500×)

Injection needle (100×) Tear in package (100×)

Hair (3000×) Emulsion (2000×)

Bath agent (20×) Mica (500×)

Scarab beetle (30×) Ovary (200×)

15

VHX Series System Line Up

SYSTEM CONF IGURAT ION

FIBERSCOPE*6

VH-F61A

VH-F111A

BORESCOPE LENS *5

ZOOM LENS

LW LENS

RZ LENS *1

Polarization illumination adapter

OP-51649

High-resolutionzoom lens

Universal Zoom Lens

Universal Zoom Lens

Wide-range zoom lens

Ultra-small, high-performance zoom lens

High-performance low-range zoom lens

Middle-range zoom lens

Long-focal-distance,high-performance zoom lens

Dual-light High-magnificationzoom lens

VH-Z500R/Z500T

VH-Z100UR/Z100UT

VH-Z20UR/Z20UT

VH-Z100R/Z100T

VH-Z20R/Z20T

VH-Z00R/Z00T

VH-Z150

VH-B18

VH-B100

VH-B55VH-BA

VH-B40

VH-B27

VH-Z50L/Z50T

VH-Z250R/Z250T

Adjustable illumination adapter

OP-72404

Wide area illumination adapter

OP-87298*4

Super-diffuse illumination adapter

OP-42305

Contact adapter

OP-81880

Polarization observation set

OP-87821

Polarization illumination adapter

OP-72405*3

(OP-72407 is required for polarization)

Coaxial polarization adapter

OP-72406(OP-72407 is required for polarization)

Polarized illumination adapter

OP-87429

Multi-diffuse adapterOP-35469

Non-reflective illumination ring

OP-32009

Darkfield illumination adapter

OP-72402

Differential interference set

OP-86943


VH-K20

Non-contact diffusionOP-35414


VH-K150

Diffuse illumination adapter

OP-35324

Coaxial illumination adapter

OP-35416

Diffuse illumination adapter

OP-87299 DIC prism and filter set

OP-87297

Ring illumination unit for Z100/Z100U/Z20U

OP-88164

500× to 5000×

250× to 2500×

100× to 1000×

100× to 1000×

20× to 200×

20× to 200×

150× to 800×

50× to 500×

0.1× to 50×

Polarizer mount

OP-72407*2

Polarizing filter

OP-87800*2

16

Bayonet-typestandard attachment

OP-51478/OP-66871 *7

Bayonet-type C-mountattachment

OP-51479

Free-angle observation system

VH-S30F/S30BFree-angle observation system

VHX-S600E (Z motorized)X-Y measurement system

VH-M100EFree-angle observationsystem (motorized Z-axis)

VHX-S90F/VH-S30B

High-precision stand(with X-Y stage andtransmitted illumination)

VH-S5

VH lens mounting stand(with XY stage)

OP-25539OP-22124

*1 TRIPLE‘R compliant lenses VH-Z00T/Z20T/Z20UT/Z50T/Z100UT/Z100T/Z250T/Z500T are fitted with Automatic Lens/Zoom Recognition units and connection recognition mount, respectively. *2 OP-72407 is required when using VH-Z100R. Use OP-87800 when using the VH-Z100T/VH-Z100UR/VH-Z100UT.*3 OP-72407 and OP-72406 are required when coaxial illumination is used.*4 Included with the VH-Z20UR/Z20UT. *5 The optional bore fiber cable (OP-87201) is required.*6 The optional light guide attachment (OP-87790) is required.*7 OP-66871 is required when the VH-Z00R or Z20R is used. *8 A C-mount adapter suitable for the microscope is required.

OPT ION

*8

Camera lens (C-mount type)

Microscope

VH-F

3D shape measurementsoftware

VHX-H4M

XY measurement software

VHX-H2M2

PC

USB memory, etc.

LAN

CD-R/RW

USB

DVI

Hard disk drive

PC PC PC

3D profile measurement unit

VHX-S15CE

Monitor

A large screen monitor can be connected

when several people need to view a target

simultaneously. Since the target image is

magnified further on the large screen, it

can be viewed more easily.

Foot switch

Analysis software(2D measurement, 3D display software)

Lens jointVHX-J00T/J20T/J20UT/J50T/J100T/J250T/J500T

VHX-6020

VHX-950F

Free-angle observation system

VH-S300 (Manual)

17

BAS IC FUNCT IONS : CONTROL L ER

BAS IC FUNCT IONS : S TAGE

Model VHX-950F

Camera

Image sensor 1/1.8-inch CMOS image sensor Virtual pixels: 1600 (H) × 1200 (V)

Scanning system Progressive

Frame rate 50 fps (max.)

Image resolution Normal 1600 (H) × 1200 (V), Approx. 1000 TV lines

Gain Auto, Manual, Preset

Electronic shutter Auto, Manual, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19000

Supercharge shutter 0.02 to 4 s

White balance Push set, Auto, Manual, Preset (2700K, 3200K, 5600K, 9000K)

Back-focus adjustment Not required

LCD monitor*2

Size Color LCD (IPS) 23"

Screen size 509.184 (H) × 286.416 (V) mm 20.05"(H) × 11.28"(V)

Pixel pitch 0.2652 (H) × 0.2652 (V) mm 0.01"(H) × 0.01"(V)

Number of pixels 1920 (H) × 1080 (V) (FHD)

Display colors Approx. 16770000 colors*1

Brightness 300 cd/m2 (Center 1 Point, typical)

Contrast ratio 1000 :1 (typical)

Field of view ±89° (typ., horizontal), ±89° (typ., vertical)

CD-R/CD-RW/DVD drive unit

Unit DVD-ROM super-multi drive unit

Applicable disk CD-R/CD-RW/DVD±R/DVD±R DL/DVD±RW/DVD-RAM

Storage capacity 8.7 GB (when using DVD±R DL)

Hard disk drive unit Storage capacity500 GB (including 165 GB reserved area)

Approx. 1680000 images (when a 2-million-pixel image is compressed) to approx. 55000 images (when a 2-million-pixel image is not compressed)

Image format JPEG (with compression), TIFF (without compression)

Observable image size 1600 (H) × 1200 (V) pixels

Light sourceLamp High-brightness LED

Lamp life 40000 hours (reference)

Color temperature 5700K (typical)

Video outputOutput method DVI-I (1920 × 1080 pixels)

Scanning frequencySpecial LCD monitor 66 kHz (H), 60 Hz (V)

External monitor 66 kHz (H), 60 Hz (V)

InputMouse input USB mouse supported

Keyboard input USB keyboard supported

External remote input Pause/Recording, Non-voltage input (Contact/Noncontact)

InterfacesLAN RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 Series A 6 types

USB 3.0 Series A 2 types

Power supplyPower voltage 100 to 240 VAC, 50/60 Hz

Power consumption 280 VA

Environmental resistance

Ambient temperature +5 to 40°C 41 to 104°F

Relative humidity 35 to 80% RH (No condensation)

WeightController Approx. 12.5 kg

Camera unit Approx. 1.2 kg (VHX-6020)

Console Approx. 0.5 kg

Dimensions (Excluding the projected areas) 550 (W) × 470 (H) × 200 (D) 21.65"(W) × 18.50"(H) × 7.87"(D) (when stored)

*1. Approx. 16.77 million colors can be reproduced with the FRC processing of the display controller.

*2. The LCD monitor provided with the VHX Series is based on advanced technology. Rarely, an unlit pixel (black spot) or lit pixel (bright spot) may exist on the monitor screen. However, this is not an indication

of the LCD monitor being defective.

VHX-S90F/VH-S30B VH-S30F/S30B

XYθ stage

XY stage Manual Manual

XY-motorized stage motor – –

XY-motorized stage resolution – –

XY-motorized stage movement speed – –

XY stage moving range X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98" X: ±37.5 mm ±1.48", Y: ±25 mm ±0.98"

θ rotation angle 360° 360°

XYθ stage size Top surface: 180 mm × 136 mm7.09" × 5.35"

Top surface: 180 mm × 136 mm7.09" × 5.35"

Transmitted light-compatible magnification – –

Z stage

Z stage: Motorized/Manual Motorized Manual

Z-motorized stage motor 2-phase stepping motor –

Z-motorized stage resolution 1 μm (typical) –

Z stage moving range 29 mm 1.14" (electric)/33 mm 1.30" (manual) 28 mm 1.10"

RatingsPower supply voltage 12 VDC –

Power consumption 18 VA –

Environmental resistance

Ambient temperature +5 to 40°C 41 to 104°F –

Relative humidity 35 to 80% RH (No condensation) –

Weight 13.0 kg 12.0 kg

Load capacity 1 kg 1 kg

18

OTHER FUNCT IONS

Model VHX-950F Console compatibility

Observation functions

Auto-focus function Available ✓

Focus amount display function Available

Lighting switch function (Uneven surface enhancement)

Available (Full, partial, lateral, darkfield, brightfield, combination lighting)

✓

Camera-shake correcting function Available ✓

Display function

Full-screen display Available ✓

Screen segmentation function Vertical, horizontal, 2 × 2 split, 3 × 3 split, linked display function ✓

Real-time digital zoom 1.0× to 10.0× ✓

Comment display function Available

Image quality improvement function

Glare removal function Available ✓

Optimize mode (9 types) (Optimal image)

Available (Automatically lists 9 image modes, allowing optimal image selection)

Fine-shot function Available ✓

3D function

Quick composition & 3D function Available ✓

High-quality depth composition Available

3D display function Available

3D shape correction function Available (Slope/Sphere/Cylinder)

3D comparison function Available (Combination/Comparison/Difference display mode)

Recording function

Report output (Excel/Word) Available

Capture setting reproduction function Available

Timer capture function Available

Video recording/playback function 30 frames/sec. max. (Image size: 1600 × 1200, 800 × 600, 640 × 480)

Measuring functions

Distance, angle, radius, area, etc. Available ✓

Automatic edge detection Available

Scale display Available ✓

Automatic count and area measurement function

Available (Enables distance/area measurement through brightness/color extraction)

Automatic lens/zoom recognition function (TRIPLE‘R) Available

Auto calibration Available (No input of values required)

CSV storage Available

3D measurement function (VHX-H4M/VHX-S15 optional function)

3D profile measurement Available

Point height measurement Available

3D volume measurement Available

Roughness measurement Available

Manual XY measurement system (VHX-H2M2 optional function)

XY stage measurement Available

Wide image display function Available

Utilities

Simple mode Available ✓

Space-saving all-in-one design Available

Foot switch compatibility Available

User-specific setting memory Available

System protection setting Available

PC mode Available

Network connection function Available (Communication software / File sharing / FTP)

Function guide Available

Video help Available

PC software(Available free of charge)

Communication software Easily transmits image data between the VHX and the PC. (LAN)

3D image playback software for the PC Reproduces 3D images saved on the VHX using the PC.

HDR playback/measurement/stitched image playback software Performs measurement using the PC.

19

all-in-one microscope for advanced imaging, recording, and ... · the vhx-950f provides a...

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