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2012 version
copyright reserve VTS Corporation
TSP & Solar & LED system
Total solution provider
VTS Corporation
Overview &
Product Presentation
VTS CORPORATION
VTS Corporation, a leader of Equipment industry based on the core technologies in Deadeok
Valley in Korea, will cope with the requirements of equipment and process and grow to “a
small-sized but large-hearted company with activities to think and practice the promise with
the customer first”.
General Information
Location
Incorporation Date
TEL / FAX
#1331, Gwanpyeong-dong, Yuseong-gu, Daejeon, Korea
6th, January, 2003
+82-42-634-8500 / +82-42-634-9595
Web site
www.vtsc.co.kr
Contact
2003 ~ Beginning
▶ Established VTS corporation
▶ Promising Small & Medium Enterprise
(KERI)
▶ Technology Transfer
(KRISS. Calibration & Pump Test system)
Company History
2007 ~ Mass Fabrication System Development
Accumulation of diverse R&D system
Technology
Roll to Roll sputter &
Solar-cell Metallization System development
▶ Established R&D center
▶ Venture Company Certification acquisition
▶ INNO-BIZ & ISO 9001 Certification acquisition
▶ Specialized in parts & materials confirmation
(Ministry of Commerce)
2010 ~ Actual Growth phase
Roll to Roll Annealing system &
Large-scaled MOCVD development
▶ Roll to Roll Sputter Export (S-company, China)
▶ C-Si Solar-cell Metallization system Export
(G company, China)
▶ Roll to Roll Annealing system sale
(E company, Korea / S company, China)
▶ 3Milion U.S dollars Export award
(Korea International Trade Association)
VTS Corporation
BUSINESS FIELD
Touch Screen Panel Solution
C-Si Solar cell Metallization System
Compound Semiconductor
R&D
Roll to Roll Sputter RaON series
Roll to Roll Annealing System RaON D series
Screen Printer SiMON-S series
Dry Equipment SiMON-D series
Firing Equipment SiMON-F series
Large-scaled MOCVD ZiON 2100
Evaporator DaON series
OLED system
PLD & ALD system
etc.
CE Certification
VTS Corporation
CERTIFICATION
3Million Dollars
Export award
Only 1! Number 1! World Best ! Happy VTS
Venture company Certification
Specialized in parts & materials Confirmation
ISO 9001 INNO-BIZ
VTS Corporation
PATENT
No Category
Evaporator
MOCVD
Sputter
Screen printer
Roll to Roll Sputter
Metallization
MOCVD
MOCVD
Roll to Roll Sputter
Roll to Roll Sputter
Name of Patent
Micro E-beam Source
Reactor for Chemical Vapor Deposition
The Magnetron Source and the Sputter system using the same
Paste Feeder
Roll to roll sputter device pumping efficiency improvements
Metallization device comprising inkjet multi-head module for metallization
The reactor for Chemical Vapor Deposition include multiple nozzle
The reactor for Chemical Vapor Deposition include insulator
Continuous heat treatment method of ITO film using IR heater
Vacuum roll for Roll to Roll Sputter
Division
Registration
Registration
Registration
Registration
Pending
Pending
Registration
Pending
Pending
Pending
Date
2008.10.02
2009.10.30
2010.08.03
2010.08.13
2011.01.17
2011.02.15
2011.03.31
2011.03.31
2011.10.20
2011.10.20
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5
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10
VTS CORPORATION
MASS PRODUCTION FACILITIES
PRESENTATION
/PRODUCT/■■■■■■
Roll to Roll Sputter system
PRODUCT #1.
Roll to Roll Sputtering system
RaON series
+ MODEL
RaON 550 FCCL
for FCCL production with max 550mm width film.
RaON 1300R
for R-type ITO film production with max 1300mm width film.
RaON 1300C
for index matched ITO film production with max 1300mm width film.
+ SALES RESULTS
RaON 550 FCCL
S company in Korea.
RaON 1300R
Zhuhai S company in China
Specification Roll to Roll Sputter system
RaON 1300R
+ Composition Vacuum chamber
Winding system
High vacuum pumping unit
Pre-treatment unit
Deposition unit
Control unit
Cooling system
Approx. 4,156mm
Approx. 4,060mm
Approx. 14,030mm
Approx. 50 MTW
+ Equipment Technique
The system consisting of zones for unwinding & heating,
pretreatment, buffer, coating, in- situ monitoring(applicable for
Oxide coating), rewinding
Continuous operation from roll to roll
Large cooling drum to cool the film during the coating process
Cooling/heating equipment for the coating drum
Pump equipment for short pump down with Polycold
Pre-treatment by glow discharge on separate cooling drum
4 Single magnetrons for ITO and 2 Dual magnetrons for reactive
sputter process
Electronically controlled winding system with 3 driving motors
which allows fully reversible winding
Continuous in-situ measurement for transmittance, non-contact
sheet resistance
Plasma Emission Monitor control for long-term stability of film
thickness and precise layer stoichiometry sputtered in reactive
mode
Specification Roll to Roll Sputter system
RaON 1300C
+ Composition Vacuum chamber
Winding system
High vacuum pumping unit
Pre-treatment unit
Deposition unit
Control unit
Cooling system
Approx. 4,755mm
Approx. 4,755mm
Approx. 16,000mm
+ Equipment Technique
Cathode
∙ 1-ion source
∙ 3-SMS (ITO, Ag)
∙ 7-DMS (Nb2O5, SiOX)
Independently, each drum’s temp. controlled.
Composition of vacuum pump : TMP, Booster, Rotary,
Polycold (4-kinds, 33sets)
Two-main drum, 1-chamber type
Rectangular shape main chamber
Separate 7-zone
Residual oxygen gas removing zone
Movable roll driving & cathode module
Mountable 1km length @ 188㎛
Specification Roll to Roll Sputter system
RaON 550 FCCL
+ Composition Vacuum chamber
Winding system
High vacuum pumping unit
Pre-treatment unit
Deposition unit
Control unit
Cooling system
+ Equipment Technique
One coating drum to cool the film during the coating
process
Cooling/heating port for coating drum
Pump equipment for short pump down with TMP
Electrically controlled winding system with 3 driving
motors (servo motor system UW,MR,RW)
Coating substrate: PI & PET film (12.5 ~ 200㎛)
Coating metallic materials stored in continuous roll form
Deposited to one side of the film to form a multi-layer
at high rate
Ion beam source is equipped with gas inlet system for
Ar &reactive gases
Approx. 9,070mm
Approx. 3,630mm
Approx. 3,120mm
/PRODUCT/■■■■■■
Roll to Roll Annealing system
PRODUCT #2.
Roll to Roll Annealing system
RaON D series
+ MODEL
RaON 550DD
for 550mm width double side ITO coating film.
Duplex type
RaON 1300D
for 1300mm width ITO coating film.
One story type
+ SALES RESULTS
RaON 550DD
E company in Korea
RaON 1300D
Zhuhai S company in China
Approx. 2,000mm
Approx. 14,000mm
Approx. 2,500mm
+ Equipment Technique
Excellent productivity in comparison with convection oven.
Excellent removal ability of outgassing of hard-coating film.
Minimize damage of film by no tension driving in heat-treatment
section.
Excellent temperature uniformity through individual control of total
91zone.
Heat-treat both side at a time by duplex type (RaON DD series)
Approx. 11,000mm
Approx. 2,000mm
Approx. 2,900mm
/PRODUCT/■■■■■■
Roll to Roll Annealing system
PRODUCT #2.
Roll to Roll Annealing system
RaON D series
1300D RaON
550DD RaON
+ Composition
Unwinding module
IR heating furnace & Conveyor module
Rewinding module
Test sheet Roll to Roll Annealing system
+ Electrical Characteristics
TEST Conditions
∙ Convection oven: 152℃ / 60min
∙ IR lamp heater: 161 ± 8 ℃ / 5min
∙ IR ceramic heater: 162 ± 3℃ / 5min
∙ Sheet resistance measure: RC2175
(4-point probe R-check)
Results
∙ Resistance tendency
IR ceramic > IR lamp > Convection oven 300
320
340
360
380
400
420
440
Before Annealing Convection Oven IR Lamp heater IR Ceramic heater
GNSAB
N7BB
CN7B
G1LA
Sheet Resistance
Sheet Resis
tance (Ω
/□
)
Test sheet Roll to Roll Annealing system
+ Optical Characteristics
TEST Conditions
∙ Convection oven: 152℃ / 60min
∙ IR lamp heater: 161 ± 8 ℃ / 5min
∙ IR ceramic heater: 162 ± 3℃ / 5min
∙ Optical characteristics measure: COH400
(Nippon Denshoku haze meter)
Results
∙ Transmittance tendency
IR ceramic > IR lamp > Convection oven 83.5
84
84.5
85
85.5
86
86.5
87
87.5
Before Annealing Convection Oven IR Lamp heater IR Ceramic heater
GNSAB
N7BB
CN7B
G1LA
Transmittance
Transm
itta
nce (%
)
Test sheet Roll to Roll Annealing system
+ Optical Characteristics
0
2
4
6
8
10
Before
Annealing
Convection
Oven
IR Lamp heater IR Ceramic
heater
GNSAB
N7BB
CN7B
G1LA
Haze
Haze
2.5
3
3.5
4
Before
Annealing
Convection
Oven
IR Lamp heater IR Ceramic
heater
GNSAB
N7BB
CN7B
G1LA
b *
b*
C-Si Solar-cell Metallization system
SiMON series
+ MODEL
SiMON-SB & ST series
Screen printer (Belt & Turn table type)
SiMON-D series
Electrode pattern dry system
SiMON-F series
Firing system
+ SALES RESULTS
SiMON-S
S company in Korea
SiMON-S & SiMON-D
G solar company in China
1MW R&D SiMON-S & SiMON-D
Korea university in Korea
1MW R&D SiMON-S
KIMM research in Korea
/PRODUCT/■■■■■■
Metallization system
PRODUCT #3.
Specification Metallization system
Technical Specification
● Throughput 2400wph max (Dual line)
● Max. Wafer size 156mm X 156mm (+/-1mm)
● Wafer thickness 180㎛ (+/-20㎛)
Process Parameters
● Print Speed 70 ~ 550mm/s
● Screen Alignment Motorized via actuators for X,Y and θ
● Alignment system 3 CCD camera vision system
Foot Print Information
● Approx Dimensions 2500mm(L) X 1700mm(W) X 1860mm(H)
● Align accuracy : ±10㎛
● Breakage rate: less than 0.2%
● Type : 3 stages, using flat belt in-feed and out-feed
● Now, we are developing turn table type screen printer. (Development completion in Sep. 2011)
SiMON-S
Feature
Specification Metallization system
● Max. Temperature rating 400 ˚C
● Operating temperature range 200˚C~300 ˚C
● Number of Heating zones 3 convection
● Total Heated Length 3000mm
● Number of cooling zones 1 forced cooling (FAN cooling system)
● Belt width 500mm
● Belt material SUS 310 Fine wire mesh
● Belt speed range 20mm/s ~ 70mm/s
● Control PLC, Temperature control by SCR
● User Interface 12.1” touch screen panel
● Working Dimensions 500mm wide (dual line)
● Conveyor height above the floor 1200mm +/-50mm
● Heater IR heater (800W, 72ea)
Specification
SiMON-D
Specification Metallization system
Specification
● Max. Temperature rating 1000 ˚C
● Operating temperature range 400˚C~900 ˚C
● Number of Heating zones independent heating zone , Firing furnace docked with Dryer
● Total Heated Length 10000mm (dryer 3000mm+ firing 7000mm)
● Number of cooling zones 1 forced cooling (water & air cooling system)
● Cooling Section 2000mm
● Belt width 500mm
● Belt material Inconel Fine wire mesh
● Belt Speed 20mm/s ~100mm/s
● Powered exhausts 6 top port
● Working Dimensions 500mm wide (dual line)
● Conveyor height above the floor 1200mm +/-50mm
● Electrical spec. 380V, 150A (3 phase)
● Heater Tungsten wire type
SiMON-F
/PRODUCT/■■■■■■
GaN MOCVD system
PRODUCT #4.
Compound Semiconductor
GaN MOCVD system
ZiON series
+ MODEL
ZiON 300 2inch substrate 3wafers
ZiON 600 2inch substrate 6wafers
ZiON 1900 2inch substrate 19wafers
ZiON 2100 2inch substrate 102wafers
+ FEATURE
Available applications
GaN based UHB LED production
Highest quality of epitaxial growth for GaN blue LED
Low material consumption
Re-productivity & Uniformity is excellent
Easy handling latest system design
Reactor chamber
RF induction heater providing excellent temp.
Specification GaN MOCVD system
+ Performance
Growth rate More than 2㎛/hr
Thickness uniformity Less than 3 %
Background doping level at room temp.
(Hall measurement)
Less than 1 x 1017
㎝-3
Mobility at room temperature
(Si-doped, n <1 x 1017
㎝-3)
More than 350 ㎠/Vs
HR-XRD FWHM (0002) Less than 250 arcsec
HR-XRD FWHM (1012) Less than 350 arcsec
Specification GaN MOCVD system
+ Specification
Reactor Horizontal
Temperature uniformity ± 1 ℃ @ 700 ℃
± 3 ℃ @ 1200 ℃
Heater type RF induction Heater Generator (300kW)
Gas flow Ring-type Gas injection
(Patented)
WF rotation Dual Rotation
Gas Feeding Side input injection shower head
Susceptor SiC Coated Graphite Planetary
disk
Pumping Center pumping with Dry pump
VTS CORPORATION
R&D SYSTEM
PRESENTATION
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
Thin Film Deposition R&D system
DaON series
+ MODEL
DaON 1000E E-beam Evaporator
DaON 1000T Thermal Evaporator
DaON 1000TE Thermal & E-beam Evaporator
DaON 1000IE Ion beam assisted E-beam Evaporator
+ SALES RESULTS
DaON series
∙ Korea Institute of Industrial Technology
∙ I company in Korea
∙ Korea Advanced Institute of Science Technology
∙ and more.
+ APPLICATION
Semiconductor, Solarcell, Optoelectrics device,
Magnetic material, IC, LSI, Super lattice, etc.
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
OLED R&D system
VTSEL system
+ MODEL
VTSEL 1000 OLED Deposition
+ SALES RESULTS
VTSEL 1000
∙ D company in Korea
∙ E company in Korea and more.
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
Sputter R&D system
DaON-S series
℃
+ SALES RESULTS
DaON-S series
∙ Hanbat university in Korea
∙ Dongshin university in Korea
∙ ETRI(Electronics and Telecommunications Research Institute)
and more.
+ MODEL
DaON-S 1000F Face to face Sputter
DaON-S 1000C Co-sputter
+ APPLICATION
Semiconductor, Solarcell, Optoelectrics device,
Magnetic material, IC, LSI, Super lattice, etc.
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
PLD R&D system
VTSL series
+ MODEL
VTSL 1000 1 inch Target carrousel type
VTSL 2000 2 inch Target carrousel type
+ SALES RESULTS
VTSL series
∙ Hanbat university in Korea
∙ Gunsan university in Korea
∙ Korea Advanced Institute of Science Technology and more.
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
Mini Sputter
DaON-MS series
+ SALES RESULTS
DaON-MS series
∙ KRICT(Korea Research Institute of Chemical Technology) in Korea
∙ Korea university in Korea
and more.
+ MODEL
DaON-MS 1000 SEM Metallizers
DaON-MS 2000 Mini Sputtering system
+ APPLICATION
Suitable SEM, Carbon package, Thin film deposition for R&D
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
Cluster system
Cluster system
+ APPLICATION
Sputter, E-beam evaporator and PECVD system for Solar-cell, Semiconductor, OLED
+ SALES RESULTS
Cluster system K company R&D center in Korea
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
RTP System
RtON series
±
+ SALES RESULTS
RtON series
∙ I company in Korea
∙ Hanbat university in Korea
∙ KIER(Korea Institute of Energy Research) in Korea
and more.
+ MODEL
RtON 2000 1 sheet of Dia. 2inch wafer
RtON 4000 1 sheet of Dia. 4inch wafer
+ APPLICATION
Rapid thermal oxidation, Semiconductor device fabrication,
Solar-cell fabrication
/PRODUCT/■■■■■■
R&D system
PRODUCT #5.
Vacuum Gauge Calibration System
VGCS series
+ CALIBRATION RANGE
Atmosphere pressure to 1 x 10-5
torr range
High vacuum calibration
+ SALES RESULTS
VGCS series
∙ Samsung in Korea
∙ Pakistan vacuum society in Pakistan
∙ KASTO(Korea Association of Standards & Testing
Organizations)
and more.
+ MODEL
VGCS 1000 Basic comparative calibration
VGCS 3000 2High grade direct & comparative calibration
Thank you!
www.vtsc.co.kr
VTS CORPORATION