angstrom sciences-cylindrical magnetrons
DESCRIPTION
Advanced profiled Magnetic Design for optimal utilization and uniformity Gas Integration OptionsTRANSCRIPT
For more info . . .www.angstromsciences.com
Angstrom Sciences-Cylindrical Magnetrons
Business for over 20 yearsBusiness for over 20 yearsNumerous US Patents including
Profiled MagnetsTurbulent water flow
Complete Cylindrical CathodesTCO, Reactive, and Metal ApplicationsTCO, Reactive, and Metal Applications
For more info . . .www.angstromsciences.com
37 Employees37 Employees
10 CNC 10 CNC MachinistsMachinists
8 Engineering 8 Engineering StaffStaff
Angstrom Angstrom SciencesSciences
InIn--House House R&D R&D
LaboratoryLaboratory
OnOn--Site Site ManufacturingManufacturing
LaboratoryLaboratory
85% or greater target utilizationLonger run times
N V FlNarrow Vapor FluxClean and efficient sputtering
Average 20% Power SavingsAverage 20% Power SavingsOperates at lower power level
Advanced profiled Magnetic Design for optimal utilization and uniformityGas Integration Options
Argon and Reactive gas inputsArgon and Reactive gas inputsDC, Pulsed DC and MF PowerVertical and Horizontal mounting optionsAnode assembly is available
Can accommodate existing system layoutRecommendation for Optimal Uniformity
Magnet bar length: 6” overhang on each side of substrate2”-4” source to substrate
For more info . . .www.angstromsciences.com
2 4 source to substrate
Magnetics:
Profiled magnets naturally conform to the curvature of
cylindrical target
For more info . . .www.angstromsciences.com
Rotating Cylindrical Magnetron Solutions:
Rotating Cylindrical Magnetron Solutions:
R t ti C li d i l M t S l tiRotating Cylindrical Magnetron Solutions:
Rotating Cylindrical Magnetron Solutions:
Cathode Drive Overview:Cathode Drive Overview:
Cathode Drive Overview:Cathode Drive Overview:
Target Assembly Overview:Target Assembly Overview:
Target Assembly Overview:Target Assembly Overview:
Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)Assumptions:
Non Reactive ProcessFilm Density = Target Densityy g y1 Cathode Putting down film layer
Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)
Assumptions: Non Reactive ProcessFilm Density = Target DensityFilm Density = Target Density
Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)
Calculating Target Lifetime (Example)Calculating Target Lifetime (Example)
Calculating Sputter Deposition RateCalculating Sputter Deposition Rate
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays
2D Magnetic Field Modeling
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays3D Magnetic Field Modeling
Magnet Assemblies have “interchangeable” turnaround designs that b f t d t ifi t f t tmay be manufactured to your specific type of target.
Substrate
Chamber/Zone Shielding
ASI’s patented profiled magnets reduce the gdistance between the racetracks in comparison to more conventional approaches
Cylindrical Ma
More material is directed to the substrate dramatically reducing build up
approaches
More material is directed to the substrate, dramatically reducing build-up on shields and resulting in a cleaner and more stable process that requires les power to achieve a specific deposition rate!
Static Deposition Profile for a Single Cylindrical Magnetron (10.5 deg racetrack separation for ASI vs. 14.7 deg for a “typical” cylindrical magnetron)
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays
1
Normalized Deposition Profile For a Dual Rotatable Magnetron
0.8
0.9
1
ASI cylindrical racetrack
separation of 10.5
"Typical" conventional cylindrical
0.6
0.7
Typical 14.7
ASI 10.5
pdegrees results in~ 14% of material deposited on
shields
yracetrack
separation of 14.7 degrees results in~21% of material deposit on shields
0.4
0.5
0.1
0.2
0.3
STANDARD COAT ZONE SHIELDING WIDTH
0-300 -200 -100 0 100 200 300
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays
3.5m Magnet Arrays for architectural Glass Coaters
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays
Angstrom Sciences Cylindrical Magnetron ArraysAngstrom Sciences Cylindrical Magnetron Arrays
NdFeB, Profiled magnetsd l D iModular Design
Greater target utilization (85% guaranteed!)Improved uniformityStainless steel encapsulation
Solid ConstructionSolid Construction304 Stainless Steel6061 Aluminum
DesignCompact Drive Assemblyp yQuick Target changes
2 Year WarrantyNo-cost maintenance training
“Great all around service and product” Great all around service and product Aura-Gemini Observatory
“Excellent Customer Service and contact with your Technical Staff” Staff
Eliovac
“The quality of work was exceptional, excellent custom built cathode of high quality. Greatly appreciate the time frame you g q y y pp ywere able to deliver”
Power Films, Inc.
“The product has met all our expectations. We were very The product has met all our expectations. We were very impressed with the fast completion of the project. Thank you for the extra effort and satisfactory results”
Nexx Systems