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    MATE580 Spring2010 CLJ Lecture 6

    Phase Contrast and High-resolution TEM

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    MATE580 Spring2010 CLJ Lecture 6

    Student presentations

    WEEK 1 MAR 29 NoneWEEK 2 APR 5 Stephanie and JJ HAADFWEEK 3 APR 12 Steven and Amalie Lorentz EM

    Chris W and Asher CBED

    WEEK 4 APR 19 Chris Dennison, Ertan Agar, Viral Chhasatiaand Eric Wargo Electron Tomography

    WEEK 5 APR 26 Matt & Andrew Cs Correction & NCSIWEEK 6 MAY 3 Babak & Michael Strain Mapping

    Kavan & Hasti TEM-CathodoluminescenceWEEK 7 MAY 10 Chris Barr & Michael Coster - ???

    WEEK 8 MAY 17 Ioannis & Greg in situ nanoindentationWEEK 9 MAY 24 Ed & Tim - ???WEEK 10 MAY 31 Memorial Day (No Class)WEEK 11 JUN 7 ???WEEK 12 JUN 14 Finals Week (No Class)

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    MATE580 Spring2010 CLJ Lecture 6

    Phase contrast:

    Multi-beamimaging

    When electron waves pass through the sample their phase is shifted(diffraction) w.r.t. the incident wave in different ways. When severalwaves are allowed to interact the phase differences manifestthemselves in the 2-D interference pattern in the image plane: thephase-contrast image.

    Phase contrast images can be difficult to interpret (even though theysometimes look very straight forward) because many factorscontribute to the phase shifts: thickness, orientation, scattering factor,focus, and astigmatism can all change the appearance of the image.

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    MATE580 Spring2010 CLJ Lecture 6

    Origin of lattice fringe

    ...32102

    3

    2

    2

    2

    1

    2 rgr

    g

    r

    g

    r

    0GGG iiiiT eeee

    rkg

    rk

    0

    DI ii ezez 22 )()(

    rewrite the wave equation for just two beams

    'gksgkK g IID

    Az )(0

    iBez )(g

    eff

    eff

    s

    tst

    B

    sin

    g

    effts

    2

    somesubstitutions

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    MATE580 Spring2010 CLJ Lecture 6

    )'2(2

    rgrk ii

    BeAeI

    )'2()'2(22 rgrg ii eeABBAI

    )'2cos(222 rgABBAI take g to beparallel to x

    )'2sin(222 stxgABBAI

    Therefore, the intensity is a sinusoidal oscillation (this is the latticefringe!) normal to g, with a periodicity that depends on excitation error(s) and thickness (t)

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    MATE580 Spring2010 CLJ Lecture 6

    O

    G

    O

    G

    -G

    s = 0 and g = g s 0

    off-axis lattice

    fringe imaging

    on-axis 3-beam

    imaging

    O

    G

    -G

    on-axis many-

    beam imaging

    s 0

    Resist the temptation of interpreting the spots in the image as atoms!

    All this is a some of the individual fringes. Proof on the next slide.

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    MATE580 Spring2010 CLJ Lecture 6

    d004 = 0.14 nm

    0.13 nm fringe spacing in a0.25 nm resolution TEM?

    generated by interference of

    113 fringes

    Not really atomic planes: 2nd order interference between 113 lattice fringes

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    MATE580 Spring2010 CLJ Lecture 6

    Gaussian image plane

    Cs 0

    Plane of least confusion

    High-resolution TEM requiressampling high spatial frequenciesin the specimen

    To sample high spatial

    frequencies, we must includebeams scattered to (relatively)high angles

    This means that off-axisaberrations (mainly Cs anddefocus) become very important

    High frequencies = high aberrations

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    MATE580 Spring2010 CLJ Lecture 6

    High-resolution TEM

    any point on the specimen function f(x,y) becomes an extended region (disk)g(x,y) in the image

    yxf ,

    rgyxg ,

    optical system

    Af Bf

    Ag Bg

    '

    ''

    rrr

    rrrrr

    hf

    dhfg

    functionspreadpointrh

    signals from fA and fBoverlap informationfrom fB in the sample ismixed with the signalfrom fA

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    MATE580 Spring2010 CLJ Lecture 6

    Specimen Transmission Function f(r)

    ),(exp),(),( yxiyxAyxf I

    A(x,y) (=1) is the amplitude and I(x,y) is the phase (function of thickness)

    A(x,y) = 1 for the incident wave amplitude and the phase changedepends on the specimen potential V(x,y,z)

    t

    t dzzyxVyxV0

    ),,(),( Projected potential

    meEh

    2

    ),,((2'

    zyxVEmeh

    wavelength of electron wavelength of electron in the sample

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    MATE580 Spring2010 CLJ Lecture 6

    Phase shift from the specimen

    dzdzd 2

    '2

    dzzyxVE

    d ),,(

    meE

    h

    2

    ),,((2'

    zyxVEme

    h

    wavelength of electron wavelength of electron in the sample

    E

    yxVdzzyxVd t where),(),,(

    interaction constant

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    MATE580 Spring2010 CLJ Lecture 6

    ),(),(exp),( yxyxViyxf t

    Phase object approximation (POA) includes absorption term (x,y)

    if the specimen is very thin then absorption can be ignored

    for thinspecimens

    ),(1),( yxViyxf t Weak Phase ObjectApproximation (WPOA)

    The WPOA states that (if the specimen is very thin)

    the transmitted wave function is linearly related to theprojected potential of the specimen

    Model for interpreting* what we see in HRTEM images*through image simulation and comparison

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    MATE580 Spring2010 CLJ Lecture 6

    Applying the WPOA

    )(sin2)()()( uuuu EAT

    new transfer function (objective lens transfer function in W&C) notequal to the contrast transfer function H(u)

    Note: this is commonly also called the phase-contrast transferfunction almost everywhere (i.e., on the internet).

    Whatever we call it, T(u) tells us what our HRTEM imagesshould look like

    T(u) < 0 means positive phase contrast (dark atoms)

    T(u) = 0 means no information in the image for this u

    T(u) > 0 means negitive phase contrast (bright atoms)

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    MATE580 Spring2010 CLJ Lecture 6

    )()( uu AT first well ignore theenvelope function E(u)and the aberrationfunction sin X(u)

    T(u)

    0u1 u

    Ideal form of T(u):

    T(u) = 0 foru = 0

    T(u) is negative and constant out to a frequency u1

    T(u+u1) = 0

    Aperture Function

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    MATE580 Spring2010 CLJ Lecture 6

    X(u) (phase distortion function) gives the phase shift caused byspherical aberration, defocus, and astigmatism

    )(sin)( uu T

    if X(u) = n /2 (where n is an odd integer), then CTF has maxima

    if X(u) = n /2 (where n is an even integer), then CTF is zero

    T(u)

    0

    u = /2

    u

    3/2

    2 uA

    aperture

    5/2

    3

    Oscillating sign of T(u)not so good (someatoms dark and somebright)

    Luckily sin X(u) is morecomplicated than sin x

    simple sine wave

    Aberration Function

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    MATE580 Spring2010 CLJ Lecture 6

    X(u) in terms of Cs and f (assuming corrected astigmatism)

    fCs 3)(

    24)()(

    24

    0

    fCdD s integrate over arange of

    gnd BB 2sin2

    24

    2)(

    2)(

    2244 uf

    uCD s

    u

    432

    2

    )( uCuf s

    u

    point in the object becomesdisk with diameter() in theimage

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    MATE580 Spring2010 CLJ Lecture 6

    432

    2)( uCuf s

    u

    T(u) = sin X(u)

    0u

    sin X(u) = 0 for u = 0

    decreases with increasing u (for small u, f dominates)when Cs takes over the sin X(u) becomes zero thenpositivefor higher u, sin X(u) begins a sinusoidal oscillation thatcontinues to infinity

    curve for negative fand positive Cs

    interpretable contrast

    balance between Csand f

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    MATE580 Spring2010 CLJ Lecture 6

    Scherzer Defocus: best CTF by balancing Cs and f

    2/1)(2.1 sSch Cf

    All diffracted beams have nearly constant phase out to the first zero

    This is known as the instrumental resolution limit

    Be careful when interpreting images if they include information atfrequencies higher than the frequency defined by the instrumentalresolution

    Generally, its best not to include this information at all!

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    MATE580 Spring2010 CLJ Lecture 6

    3322 uCufdud

    s derivative of X(u)

    22

    0 uCf s

    432

    23

    2uCuf s

    2/1

    3

    4

    sSch Cf

    Derivation of Scherzer Defocus

    sin -/2 = -1 and-2/3 to - /3 is near -1

    dX/du is zero when

    sin X(u) is flat

    Scherzer Defocus (4/3)1/2 = 1.2

    43

    41

    66.0 sSch Cr Best resolution at fSch

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    MATE580 Spring2010 CLJ Lecture 6

    Envelope Damping Functions give the effects of finite spatial and temporalcoherence

    )()()()( uuuu aceff EETT

    spatial

    temporal

    Spatial coherence: limited by thedemagnified source size andconvergence

    Temporal coherence: limited byenergy spread of the electrons

    Envelope functions impose a virtualaperture in the BFP that limitsinformation transfer to the image

    This is called the information limit

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    MATE580 Spring2010 CLJ Lecture 6

    Other defocus settings: Minimum contrast and Passbands

    2/144.0 sMC Cf Minimum contrast focuscan be easily identified

    2/1

    2

    38

    sn

    P Cn

    f

    sin X(u)

    0u

    Passband

    Higher order passbands are used toget contrast at specific frequencies(specific Bragg reflections)

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    MATE580 Spring2010 CLJ Lecture 6

    Aberration-free focus condition

    2

    23.042 24

    3

    dd

    Cmf snAFF

    m = 0, 1, 2, 3, 4d = d-spacing

    This gives maxima in the CTF for desired reflections andextends the resolution of the microscope beyond theinstrumental resolution

    Caution: Using this or other higher order passband focussettings can give inaccurate images (must know the crystalwell and the crystal must be perfect)

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    MATE580 Spring2010 CLJ Lecture 6

    Simulations with CTF explorer: http://www.maxsidorov.com/ctfexplorer/

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    MATE580 Spring2010 CLJ Lecture 6

    Cautions for best HRTEM:

    Most specimens are not weak phase objects (if you see a thicknessfringe then the WPOA does not apply)Fresnel effects can confuse imageInelastic scattering can confuse image

    Considerations for best HRTEM:

    Best instrument: low Cs and small

    Well aligned and stable (electronics and moving parts)Repeatedly check beam tiltWork in thin, flat, clean areas of specimensAlign crystal to a zone axisRepeatedly check astigmatism correction

    Find fMC and then record a focus series of imagesRecord the DP at the same condenser setting to calculate convergenceCompare images with simulations

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    MATE580 Spring2010 CLJ Lecture 6thickness

    Perfect alignmentScherzer defocus

    Two-fold

    astigmatism

    Beam tilt

    Beam tilt and 2-fold astigmatism

    3-foldastigmatism

    3-fold and 2-foldastigmatism

    Crystal tilt

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    MATE580 Spring2010 CLJ Lecture 6

    Field Emission Sources and Delocalization

    2max

    2uCfuR s

    1to0.75Mwhere2

    max

    2

    uMCf sopt

    3

    max

    3

    min

    4

    1uCR s

    As Cs decreases, delocalization decreasesAs decreases (voltage increases), delocalization decreases

    Delocalization is always a problem in FEG unless you have Cs corrector

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    MATE580 Spring2010 CLJ Lecture 6

    Image simulation

    image simulations dont agree with

    experiment this time the theory wasright and the experiment wrong

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    MATE580 Spring2010 CLJ Lecture 6

    Model microscope:just like our drawing of the objective lens

    I = incident wave

    E = exit wave

    D = diffractionpattern

    Im = image

    High voltage, e- gun,illumination system

    all post specimenoptics reduced to an

    objective lens

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    MATE580 Spring2010 CLJ Lecture 6

    Multislice Method

    Incidentbeam

    Projectionplane 1

    Projectionplane 2

    Projectionplane 3

    Projectionplane 4

    Projectionplane 5

    propagate

    propagate

    propagate

    propagate

    calculatebeams

    1. divide the sample up into thinslices

    2. project the potential of a sliceonto a plane within that slice:this a phase grating

    3. calculate the amplitudes andphases of all the beamsresulting from the incidentbeam interacting with theprojected potential

    4. propagate these beamsthrough the microscope untilthey reach the next slice

    5. Calculate a new set of beams

    calculatebeams

    calculatebeams

    calculatebeams

    calculatebeams

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    MATE580 Spring2010 CLJ Lecture 6

    Image Processing: Computer manipulation of HRTEM images

    1. To improve the appearance of the image2. Quantify and/or extract data from the image

    DigitalMicrograph (GATAN$) and ImageJ (free!) most common

    image processing software for TEM

    Always be careful to report any processing you have done on an image

    and dont do it if you dont need to

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    MATE580 Spring2010 CLJ Lecture 6

    Fourier Filtering

    Digital image FFT Apply mask FFT-1 Filtered image

    Region of interest and masks act as virtual selected area andobjective apertures, respectively

    Demo in DM

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    MATE580 Spring2010 CLJ Lecture 6

    Diffractogram (FFT) analysis: Objective lens astigmatism and drift

    0 nm

    14 nm

    80 nm

    0.3 nm

    Astigmatism Drift

    0.5 nm

    0 nm

    Whats wrong with this picture?

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    MATE580 Spring2010 CLJ Lecture 6

    432

    2)( uCuf s u

    sin X(u) = 1 when X(u) = n /2 where n is odd (bright ring)sin X(u) = 0 when X(u) = n /2 where n is even (dark ring)

    Diffractogram (FFT) analysis: Spherical aberration and defocus

    aberration function

    fuCu

    ns 2

    23

    2bmxy

    1. collect image of amorphous material (with internal standard) at highmagnification

    2. compute the digital diffractogram

    3. assign n = 1 to first bright ring and n= 2 to first dark ring, and so on

    4. calculate u from calibration standard

    5. plot nu-2 against u2 and the slope = Cs

    3 and intercept = 2f

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    MATE580 Spring2010 CLJ Lecture 6

    Diffractogram (FFT) analysis: Beam tilt

    Making controlled (equal and opposite) beam tilts in the TEM whileobserving the live FFT of an amorphous material can give the beam tilt

    Notice that beam tilt and astigmatism have similar effects on the

    diffractogram

    Typically correct beam tilt by modulating the objective lens current(current center) or voltage (voltage center)

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    MATE580 Spring2010 CLJ Lecture 6

    Through-focus Series Reconstruction: several images collected atdifferent defocus values and used to reconstruct exit surfacewave (computer aberration correction)

    Crystallographic Image Processing: collect HRTEM and SAEDpatterns at different zone axes and combine to calculate the 3Dcrystal structure (analogous process to X-ray crystallography butincludes images and small areas)

    Strain mapping: Measuring phase shifts (not of the beams) oflattice fringes in an image through Fourier processing (geometricphase analysis) or finding peaks in HRTEM images andcomparing shifts of those peaks around defects (peak-finding orpeak-pairs analysis) Babak and Michael will tell us more

    Other image processing techniques for Quantitative HRTEM

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    MATE580 Spring2010 CLJ Lecture 6

    Moir fringe