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SUSS MICROTEC INVESTOR PRESENTATION May 2012

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SUSS MICROTEC INVESTOR PRESENTATION

May 2012

DISCLAIMER

2

This presentation contains forward-looking statements relating to the business, financial performance

and earnings of SUSS MicroTec AG and its subsidiaries and associates. Forward-looking statements

are based on current plans, estimates, projections and expectations and are therefore subject to

risks and uncertainties, most of which are difficult to estimate and which in general are beyond the

control of SUSS MicroTec AG. Consequently, actual developments as well as actual earnings and

performance may differ materially from those which explicitly or implicitly assumed in the forward-

looking statements. SUSS MicroTec AG does not intend or accept any obligation to publish updates

of these forward-looking statements.

SUSS MicroTec Investor Presentation

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

TABLE OF CONTENT

3 SUSS MicroTec Investor Presentation

SUSS MicroTec: A global leader in

semiconductor equipment

Our equipment and process solutions create

the micro structures that build and connect

micro electronic devices

We are focused on high growth market

segments: Semiconductors, MEMS, LEDs

Key Data:

Stock Exchange Symbol: SMHN

TecDAX

Share price*: 10.50 €

Market Cap*: 201 € million

Net Cash, March 2012: 38.5 € million

SUSS MICROTEC AT A GLANCE

4

* April 30, 2012

SUSS MicroTec Investor Presentation

Sternenfels

Development/production :

Bonder

Coater and Developer

Photomask Equipment

Core competencies:

Wet processing

Wafer bonding

Garching

SUSS MicroTec HQ

Development/production:

Mask Aligner

Bond Aligner

Core competencies:

Exposure

(proximity exposure)

Alignment

Corona

Development/production:

Stepper/Scanner

Laser Technology

Core competencies:

Exposure

(UV projection lithography)

Laser Ablation

MAIN PRODUCTION SITES

SUSS MicroTec Investor Presentation

Germany

5

USA

SUSS MICROTEC – A GLOBAL PLAYER

Sales

Sunnyvale, US

Corona, US Shanghai, CN Singapore, SG

Hwaseong City, KR

Hsin Chu, TW

NORTH AMERICA EUROPE ASIA

Yokohama, JP

Garching, DE

Sternenfels, DE

Neuchâtel, CH

Lyon, FR

Coventry, UK Production

Headquarters

6 SUSS MicroTec Investor Presentation

SALES BY SEGMENT AND REGION 2011

7 SUSS MicroTec Investor Presentation

23%

17%

7%

53%

Europe

North America

Japan

Rest of Asia

Sales by Region

175.4 €

million*

* w/o Tamarack Scientific Co. Inc.

64%

21%

12% 3%

Lithography

Photomask Equipment

Substrate Bonder

Others

Sales by Segment

175.4 €

million*

TABLE OF CONTENT

8

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

SUSS MicroTec Investor Presentation

ACQUISITION OF TAMARACK SCIENTIFIC CO. INC.

Tamarack Scientific at a Glance:

Founded in 1966

Headquarter in Corona, California, USA

Tamarack Scientific develops, manufactures and distributes UV projection lithography systems and laser micro-structuring tools

Key Markets: Advanced Packaging, 3D Integration, MEMS and LED as well as flexible electronics and medical applications

Installed base: >1,100 systems

Financials: - Revenue level: ~10 million € - 63 employees

Key data of the acquisition:

Purchase of all Tamarack shares

Total purchase price 9.34 million $ (plus additional variable earn-out component)

9 SUSS MicroTec Investor Presentation

STRATEGIC REASONS FOR THE ACQUISITION

Increasing chip performance requires adoption of innovative lithography

technologies in the semiconductor backend

Not one technology fits all needs

Add new and highly complementary product line with the core technologies

UV projection lithography and laser micro-structuring

SUSS MicroTec„s global sales and support structure plus Tamarack„s technology

offering enable the expansion of SUSS MicroTec‟s lithography footprint

SUSS MicroTec as a financially strong and globally positioned company

can unlock the potential of Tamarack and enable high future growth

SUSS MicroTec Investor Presentation 10

11

EXPOSURE SOLUTIONS

SUSS MicroTec Investor Presentation

Proximity Exposure

Projection- Lithography

Nano-imprint

Laser Ablation

Flip Chip:

Solder Bumping

WLCSP:

Fine pitch RDL

WLCSP:

Fanout WLP

LED:

Photonic Crystals

TABLE OF CONTENT

12

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

SUSS MicroTec Investor Presentation

Key player in providing state-of-the-art semiconductor manufacturing equipment

Development of highly innovative process solutions with industry and R&D partners

Components for electronic devices like cell phones, PCs and tablet computers are

produced on SUSS MicroTec‟s equipment

SUSS MICROTEC IN THE VALUE CHAIN

13 SUSS MicroTec Investor Presentation

SEGMENTS AND PRODUCTS

MaskTrack Pro

Wafer Bonder

Process

Steps

Coater/Developer

Coating

Developing

Bond Alignment

Permanent Bonding

Temporary Bonding

Photomask

Cleaning

Products Exposure Systems

Segments Photomask Equipment Lithography Substrate Bonder

Sales: 36.3 € million

EBIT: 5.3 € million

*Sales: 111.5 € million

*EBIT: 25.4 € million

Sales: 20.5 € million

EBIT: -11.1 € million

Key figures

2011

14 SUSS MicroTec Investor Presentation

Frontend Backend

Stepper, Scanner

(UV projection)

Laser Ablation

Mask Aligner

(proximity exposure)

Nano Imprinting

* w/o Tamarack Scientific Co., Inc.

SEGMENTS AND MARKETS

MaskTrack Pro

Wafer Bonder

Process

Steps

Markets

Coater/Developer

Coating

Developing Bond Alignment

Permanent Bonding

Temporary Bonding

Photomask

Cleaning

Products

Mask Manufacturing

Advanced Packaging

MEMS

15 SUSS MicroTec Investor Presentation

Frontend Backend

LED

Segments Photomask Equipment Lithography Substrate Bonder

Exposure Systems

3D Integration

Stepper, Scanner

(UV projection)

Laser Ablation

Mask Aligner

(proximity exposure)

Nano Imprinting

SEGMENTS AND PRODUCTION SITES

Corona

16 SUSS MicroTec Investor Presentation

Production

Sites Sternenfels Sternenfels

MaskTrack Pro

Wafer Bonder

Products

Segments Photomask Equipment Lithography Substrate Bonder

Process

Steps Bond Alignment

Permanent Bonding

Temporary Bonding

Photomask

Cleaning

Frontend Backend

Coater/Developer

Coating

Developing

Garching

Exposure Systems

Stepper, Scanner

(UV projection)

Laser Ablation

Mask Aligner

(proximity exposure)

Nano Imprinting

KEY MARKETS

17 SUSS MicroTec Investor Presentation

Research and Development

Mask Manufacturing

Photomask Cleaning

TABLE OF CONTENT

18

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

SUSS MicroTec Investor Presentation

MEGA TRENDS DRIVING THE INDUSTRY

Global mega-trends drive the microelectronics

industry and create long term opportunities

Micro chips, MEMS und LEDs are the building blocks

for the technological product advancement

SUSS MicroTec„s focus is to offer development and

manufacturing solutions for these components in

markets that have a sustainable long term growth

perspective

Digital lifestyle

E-mobility

Energy efficiency

Digital Lifestyle

E-Mobility

Energy efficiency

19 SUSS MicroTec Investor Presentation

Technical challenges and limitations make it increasingly more difficult and expensive

to reduce the feature size of integrated circuits (shrinking)

Alternative technologies like 3DIC Integration and Wafer Level Packaging (WLP) allow

increasing density and functionality at lower cost

This trend extends beyond the conventional shrink roadmap and is called "More than

Moore"

Packaging becomes the key enabler for scaling

Manufacturing value is shifting from silicon to the package

SUSS MicroTec is one of the few companies offering a comprehensive solution

spectrum for WLP

SCALING TECHNOLOGIES

2D Integration 3D Integration

20 SUSS MicroTec Investor Presentation

SUSS MicroTec's portfolio of equipment addresses fast growing

target markets:

3D Integration / Advanced Packaging, LED and MEMS

With its strong market position SUSS MicroTec will benefit from the

expected market developments:

Advanced Packaging (wafer level packaging and flip chip) remains more robust

than the overall market, primarily driven by advanced applications for smart

phones and tablets

TSV processes expected to transition to production volume in the years to come

Compound Semi (LED, MEMS, RF, Optoelectronics, III-V Power) are expected

to remain robust based on smartphone and tablet growth and will drive further

demand for advanced packaging solutions

EXPECTED MARKET DEVELOPMENTS

SUSS MicroTec Investor Presentation 21

Segment growth 2011 - 2016E CAGR ~ 15% (Gartner and industry estimates)

ENABLING SEMICONDUCTOR TRENDS

The further increase in complexity and performance of future semiconductor

device generations demands the continuous progress in scaling of these devices

SUSS MicroTec„s equipment and process solutions enable the 2-dimensional

reduction of feature sizes ("Moore's Law") as well as the 3-dimensional stacking

of integrated circuits ("More than Moore")

15 SUSS MicroTec Investor Presentation

Three product lines under one roof

Photomask Equipment - Coater / Developer - Bonder

Modern production facility (15,000 m²) with two large clean rooms supporting

future business expansion

STERNENFELS – SITE FOR VOLUME PRODUCTION

23 SUSS MicroTec Investor Presentation

TABLE OF CONTENT

24

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

SUSS MicroTec Investor Presentation

39 MONTHS BUSINESS DEVELOPMENT

25 SUSS MicroTec Investor Presentation

39.0

24.5

38.232.1

48,349.556.9

50.6

32.332.424.123.9

15.9

Order Entry in € million

Order Backlog in € million

Sales in € million

99.883.7

103.5109.8130.5

116.1108.0

89.975.4

57.057.6

57.759.2

0

25

50

75

100

125

150

31.2

44.9

22.5 24.6 23.533.3

21.9

37.7 37.042.5

32.0

52.745.9

0

25

50

75

Q1/2009 Q2/2009 Q3/2009 Q4/2009 Q1/2010 Q2/2010 Q3/2010 Q4/2010 Q1/2011 Q2/2011 Q3/2011 Q4/2011 Q1/2012

EBIT, FREE CASH FLOW AND NET CASH DEVELOPMENT

26 SUSS MicroTec Investor Presentation

38.542.0

40.1

35.535.134.6

23.525.618.415.3

13.811.6 11.0

Q1/2009 Q2/2009 Q3/2009 Q4/2009 Q1/2010 Q2/2010 Q3/2010 Q4/2010 Q1/2011 Q2/2011 Q3/2011 Q4/2011 Q1/2012

0.31.54.5

10.3

7.3

3.31.72.11.9

-0.3-1.3 -2.2 -2.2

-5

0

5

10

15

200.0

3.94.15.9

3.51.51.1

-0.8

1.0

8.1

-0.15.0

2.5

Net cash* in € million

Free Cash Flow* in € million

EBIT* in € million

*continuing operations

60 %

5 %

15 %

20 %

68 %

15 %

3 %14 %

ORDER ENTRY AND ANALYSIS Q1 2012

27 SUSS MicroTec Investor Presentation

26 %

20 %

21 %

33 %

Europe North America Japan Rest of Asia

69 %

14 %

3 %

14 %

Photomask Equipment Lithography

Substrate Bonder Others

Order Intake by Segment

Sales by Segment

Order Intake by Region

Sales by Region

€ 39.0

million

€ 39.0

million

€ 31.2

million € 31.2

million

KEY FINANCIALS

28

* Before consideration of purchase or sale of available-for-sale securities and before consideration of extraordinary

items from purchase or sale of subsidiaries

** incl. interest-bearing securities and after acquisition of Tamarack Scientific

SUSS MicroTec Investor Presentation

in € million Q1 2012 Q1 2011 in %

Order Intake 39.0 48.3 -19.3%

Order Backlog 3/31 99.8 130.5 -23.5%

Revenue 31.2 32.0 -2.5%

EBIT 0 2.5 --

EBIT in % of Sales 0% 7.8% --

Free Cash Flow* 0.3 -2.2 --

Net cash** 38.5 35.1 +9.7%

Earnings after tax (continuing operations) -0.2 2.4 --

Earnings after tax 1.3 2.4 -46%

EPS in € 0.07 0.13 -46%

Employees 3/31 687 647 6.2%

CASH FLOW STATEMENT Q1 2012

29

* before consideration of purchased interest-bearing securities

** incl. stock of interest-bearing securities

in € million Q1 2012 Q1 2011

Net profit or loss 1.3 2.4

Cash Flow

from operating activities

Cash Flow

from investing activities

Free Cash Flow* 0.3 -2.2

Cash Flow

from financing activities

Cash and cash equivalents

at the end of period

Net Cash** 38.5 35.1

20.3 17.9

0.9 -1.0

-17.2 -17.0

-0.2 -0.2

SUSS MicroTec Investor Presentation

SUSS MICROTEC SHARE PRICE DEVELOPMENT

30 SUSS MicroTec Investor Presentation

(Price of the SUSS MicroTec Share at December 30, 2011, € 5.63)

Average daily trading volume 2012: 171,000

80

90

100

110

120

130

140

150

160

170

180

190

200

Jan. Feb. M rz. Apr. M ai.

SÜ SS M icroTec, indexed TecD A X , indexed Prime IG Semiconduct or, indexed

Major Shareholders:

DWS Germany 8.68%

Credit Suisse Switzerland 3.35%

TABLE OF CONTENT

31

I. SUSS MicroTec at a Glance

II. Acquisition of Tamarack Scientific Co. Inc.

III. Products and Markets

IV. Growth Opportunities

V. Financials

VI. Outlook

SUSS MicroTec Investor Presentation

GUIDANCE AND INVESTMENT CASE

32 SUSS MicroTec Investor Presentation

Guidance*

Investment Case

Strong fundamental growth in target markets

Strong competitive positioning: first or second in the target markets

Leading equipment company in the semiconductor backend, enabling “Moore‟s Law” as well as “More than Moore”

Significant mid term revenue opportunity

Play active role in the consolidation of the backend

FY 2012: - Sales of more than 155 € million - EBIT-margin 5% – 10%

Q2 2012: - Order Intake € 30 - 40 million

* includes Tamarack Scientific Co., Inc.

33 SUSS MicroTec Investor Presentation

Tel.: +49 (0) 89-32007- 161

Fax.: +49 (0) 89-32007- 451

Email: [email protected]

SÜSS MicroTec AG

Schleissheimer Strasse 90

85748 Garching (Munich)

Germany

www.suss.com

Franka Schielke

Contact Financial Calendar 2012

INVESTOR RELATIONS INFORMATION

DZ Bank Photonics Conference, Frankfurt/Main May 23

Shareholders‟ Meeting, Haus der Bayerischen

Wirtschaft, MunichJune 20

Close Brothers Seydler Investment Conference, Paris June 25/26

Interim Report 2012 August 7

UBS Best of Germany Conference, New York September 12/13

UniCredit/Kepler Investment Conference, Munich September 25/26

Baader Investment Conference, Munich September 27

German Equity Forum, Frankfurt/Main November 12 - 14

Nine-month Report 2012 November 8

SÜSS MicroTec AG

Schleissheimer Str. 90

85748 Garching

www.suss.com

34 SUSS MicroTec Investor Presentation