products & services overview january 24, 2013 · mcp7 with race track. iso 9001:2000 fm 74055...
TRANSCRIPT
ISO 9001:2000FM 74055
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Corporate Overview
� Founded 2001� Headquarters: Salt Lake City, Utah� Employees: 7� ISO Compliant since 2003� Strategic Partnership with Systema
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Core Competencies
� Material Control System (“MCS”)
� MES Integration
� AMHS, Equipment and PV Emulation
� SECS/GEM Equipment Interfaces
� FAB Optimization Assessments & Services
� Low Level AMHS Controls
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Products
Production Products
� Roma MD™ (Material Control System)
� RACE Track™ (Vehicle Controller)
� R-SPC™ (Stocker Purge Controller)
Test Environment Product
� RES-Q™ (Equipment & Factory Emulation)
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RACE™“Romaric Automation Control Engine”
NODEManager
CACHEManager
LOGManager
TRANSACTManager
EVENTManager
ACCESSManager
STATSManager
CYCLEManager
SCHEDManager GUI
HIGH THROUGHPUTJAVA 6 FRAMEWORK
DB
CARRIERManager
HOST I/F
Device Managers / Communication Drivers
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RACEThroughput Testing
� Supported 200K AMHS MPH� Roma MD with RES-Q
� Nearly 10x throughput capacity of the busiest semiconductor fabs in the world
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Roma MD™
� “Romaric Material Dispatcher”� Full-featured MCS
� IBSEM Interface (E82)
� Stocker SEM Interface (E88)
� Upgrade path for older MCS systems
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RACE Track™
� Vehicle Controller
� Upgrade for Daifuku MPC & PRI AeroTrak� Improved visibility to material movement
� Vehicle selection / control optimizations
� Enhanced statistical reporting
� Centralized control
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R-SPC™
� “Romaric’s Stocker Purge Controller”� Nitrogen or Clean Dry Air
� Reticle Stockers
� PLC Interface and controls
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RES-Q™
� “Romaric Emulation System for Quality”� Factory-In-A-Box
� AMHS Equipment
� Process / Metrology Equipment
� Manufacturing Execution System (MES)
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RES-Q™
Advantages of Equipment Emulation
� Pre-Installation Validation / Testing
� Parameter / Configuration Tuning
� Off-Line Troubleshooting
� Throughput Testing
� Reliability Testing
� “What If” Scenarios
� Training
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200mm Factory
� Daifuku AMHS Equipment
� ~ 35 Stockers
� ~ 50 Vehicles
� MCS from Auto-Soft / Brooks/ AMAT
� Max Throughput: 450 MPH
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Problem – 600 MPH Needed
� Currently 93% vehicle utilization at 450MPH
� Need to increase throughput to 600 MPH (33%)
� Desire normal vehicle utilization of 70%
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Solution Options
� Find means to decrease vehicle utilization to 53% at 450 MPH (43% improvement)
OR� Invest $$MM in additional AMHS
equipment
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Software Optimization Areas
� Route Selection
� Route Priority Settings
� Input to Track Port Direct Moves
� Shelf Selection
� Stocker Robot Efficiency
� Command Buffering
� Alternate Storage
� Fewer Error Conditions, Bug Fixes
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Anatomy of Stocker-Stocker Move
OperatorPick/Place
Index onConveyor
Input PortMove Queue
RM Moveto Shelf
Idle onShelf
Shelf MoveQueue
RM Moveto TFE
Wait forVehicle
TFETransfer
VehicleTravel
Wait for TFEDouble Switch
TFETransfer
TFE MoveQueue
RM Move toShelf/Output
1 2 3 4 5 6 7
8 9 10 11 12 13 14
Red indicates optimization through MCS software is possible
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Current Average Move Times(Fully Loaded, 450 MPH)
0 5 10 15 20 25 30 35
MINUTES
Average Move Time: 32.2 Minutes
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Observation
� No Statistical Reports Available
� Wrote Utilities to Read Log Files
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Actions Taken
� Reviewed AMHS Configuration in MCS Software and Made Modifications
� Reviewed MCS Parameter Settings and Made Modifications
� Wrote Some Utilities
� Made Suggestions to AMHS and MCS Vendors (not included in results)
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Improvement in AvgMove Time
0 5 10 15 20 25 30 35
MINUTES
Average Move Time: 19.8 Minutes
Savings: 39%
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Other Notables
� 640 MPH at 93% Vehicle Utilization (42% Improvement)
� 587 MPH at Desired Operating Level of 70% Vehicle Utilization
� About $1500 per each % Improvement
� Could Still Look at Specific Stocker-Stocker Movements
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200mm Factory
� IBSEM Track Controller (MCP7)
� Increased Throughput by 46% by replacing MCP7 with RACE Track
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Wait Time Waste
� Participation with ISMI
� Many areas of waiting and waste when transporting and storing wafers, especially in older fabs
� Romaric can help identify areas of improvement and the solutions