Nanomanufacturing Using Imprint Lithography and Strain Engineering (NSF CMMI 1200241)

Hye Rin Kwag, Teena James, Qianru Jin, David H. Gracias (PI) Chemical and Biomolecular Engineering, Materials Science and Engineering, Johns Hopkins University, Baltimore, MD 21218

References

Motivation: New 3D Nanomanufacturing • Highly parallel and mass-producible 3D nanostructured materials and devices

[1] K. Malachowski, M. Jamal, Q.Jin, B. Polat, C. J. Morris, and D. H. Gracias, Self-folding single cell grippers, Nano Letters,(2014). * Highlighted in Nature and Nature Nanotechnology [2] J. Park, C. Yoon, Q. Jin , L. Chen and D. H. Gracias, Rolled-up nanoporous membranes by nanoimprint lithography and strain engineering, IEEE NEMS (2015) [3] T. James, K. Kan-Dapaah, M. S. Mannoor, M. C. McAlpine, W. O. Soboyejo, H. A. Stone and D. H. Gracias (2015)

Nanoimprint Self-folding

• Surface tension driven • Intrinsic stress driven

Nanoimprint lithography (NIL) and Lift-off metal patterning

1. Surface tension driven folding

• Nanoscale metal lines were patterned via NIL and lift-off metallization method

• Self-folding is induced when the tin (Sn) hinge between panels reflows and reduces its surface tension

Sn reflow assisted folding of 100 nm structures

• Functional nanostructures can potentially be used to transmit signals between cells and control their behavior and the environment

b c d

e f g

2. Intrinsic stress driven folding

• The difference of intrinsic stress between thin film layers can induce self-folding

• Thin film bilayers such as SiO/SiO2 , Cr/Cu are utilized for intrinsic stress driven folding

Prestressed bilayer folding of microstructures

• The grippers were used to capture a single red blood or breast cancer cell

Substrate

Thin film polymer

Master stamp Heat Pressure

Descum Etch

Metal deposition

Lift-off Silicon substrate

Metal 1 Metal 2

Resist

Methods of folding

Scale bar: 10 um

One application: Cellular nano-hybrids