nanomanufacturing presentation for ut in silicon valley 2013
TRANSCRIPT
March 6th, 2013
Roger Bonnecaze, S.V. Sreenivasan, John Ekerdt
UT-Austin Silicon Valley Event
NASCENT 2
Agenda• NASCENT’s vision and transformational manufacturing
technologies– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on mobile computing– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication and computational nanomanufacturing– John Ekerdt, NASCENT Research Thrust Leader
UT Austin in Silicon Valley Event
NASCENT
Machines, Materials, Models
& Devices
NASCENT Vision
Systems
Enabling Technologies
Fundamental Knowledge
3UT Austin in Silicon Valley Event
Nano-Enabled Electronic, Energy & Healthcare
Device Needs
Nano-scale manufacturers
NASCENT
NASCENT Transformative Nanomanufacturing Systems
UT Austin in Silicon Valley Event 4
• Wafer-scale nanosculpting
• Roll-to-roll (R2R) self-aligned nanosculpting and nanomaterials
• Exfoliated silicon
• In-line nanometrology
NASCENT 5
• Low Waste– Near-zero waste ink jet functional and sacrificial material deposition– Efficient use of crystalline materials via exfoliation– Reuse of expensive materials such as copper in graphene fabrication
• Low Fiscal Cost– High throughput systems– Reliable precision systems – Enhanced process yields
Low Fiscal and Environmental CostsNASCENT Transformational Technologies
UT Austin in Silicon Valley Event
NASCENT 6
Research ThrustsNanoscale
Manufacturing and Metrology
Precision, reliability,metrology, and yield
Nano-Enabled Mobile DevicesOptimal design for
device performance and manufacturability
IntegratedNanomaterials
Processable materials for devices and
machines
MultiscaleManufacturing
ModelingValidated, UQ models
for scale-up and process control
High-ValuenMfg
UT Austin in Silicon Valley Event
NASCENT 7
Agenda• NASCENT’s vision and transformational manufacturing
technologies– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on mobile computing– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication and computational nanomanufacturing– John Ekerdt, NASCENT Research Thrust Leader
UT Austin in Silicon Valley Event
NASCENT
Generic Mobile Computing/Energy Devices• GOAL
Exploit NASCENT transformational nanomanufacturing systems to engineer device solutions for mobile computing/energy
– Wafer scale nanomanufacturing solutions– Roll-to-roll nanomanufacturing solutions
8UT Austin in Silicon Valley Event
NASCENT
Competitive Memory Landscape
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SRAM DRAM Flash (NOR)
Flash(NAND) FeRAM MRAM PRAM RRAM STT-RAM
Non-volatile No No Yes Yes Yes Yes Yes Yes Yes
Cell size (F2) 50-120 6-10 10 5 15-34 16-40 6-12 6-10 6-20
Read time (ns) 1-100 30 10 50 20-80 3-20 20-50 10-50 2-20
Write/Erasetime (ns) 1-100 15 1μs/
10 ms1 ms/ 0.1 ms 50/50 3-20 50/120 10-50 2-20
Endurance 1016 1016 105 105 1012 >1015 108 108 >1015
Write power Low Low Very high Very high Low High Low Low Low
Other power consumption
Current leakage
Refresh current None None None None None None None
High voltage required No 3 V 6-8 V 16-20 V 2-3 V 3 V 1.5-3 V 1.5-3 V <1.5 V
Ref: Grandis Existing Products Prototype
UT Austin in Silicon Valley Event
NASCENT 10
STT memory cellReference layer
Barrier
Storage layer
Universal bit line
Inter-STT-cell dielectric
memory plane
Si CMOS logic & interconnects
STT contact pad CMOS contact pad
Project 1: Low Power Logic using STTRAM
UT Austin in Silicon Valley Event
MULTI-BIT MEMORY
BASED ON STT-RAM
NASCENT
Generic Mobile Computing/Energy Devices• GOAL
Exploit NASCENT transformational nanomanufacturing systems to engineer device solutions for mobile computing/energy
– Wafer scale nanomanufacturing solutions– Roll-to-roll nanomanufacturing solutions
11UT Austin in Silicon Valley Event
NASCENT
Roll to Roll NanophotonicsSub-50nm Wire Grid Polarizers (WGP)
Backlighting
Large AreaWire Grid Polarizer
Brighter and higher contrast with less backlighting
• Improved Contrast Ratio• Longer Battery Life• Thinner Display• Reduced BoM
Second PolarizerFirst Polarizer
Traditional Organic Polarizer
Backlighting
Absorptive film that is laminated on LCD glass
Aluminum lines of a WGP
50nm half pitch
UT Austin in Silicon Valley Event 12
NASCENT
Smart Cameras:Graphene-Polymer Plasmonic Photodiode Architecture
UT Austin in Silicon Valley Event 13
NASCENT 14
Agenda• NASCENT’s vision and transformational manufacturing
technologies– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on mobile computing– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication and computational nanomanufacturing– John Ekerdt, NASCENT Research Thrust Leader
UT Austin in Silicon Valley Event
NASCENT
NASCENT Infrastructure
High Speed R2RFacility
Large Area Wafer-Scale Facility
Leveraged
• Distributed NNIN and Other Fabrication Facilities
• Texas Advanced Computing Center (TACC)
• NanoHUB Resource for Simulations
• Exfoliated single crystal films, nanomagneticmaterials, etc.
• Flex materials including carbon based & organic semiconductors
• Nanomanufacturing Process Development• Nano-Enabled Device Prototyping • Multiscale Modeling and Simulation
p gMultiscale Modeling and Simulation Facility
• Scale-Up and Real-Time Decision Making
NASCENT 16
Nanomanufacturing FacilityWafer-Scale and R2R Fabrication Facility
• Established processes complemented by NASCENT test-beds
– Example of wafer-scale fabrication facility
UT Austin in Silicon Valley Event
NASCENT
Machines, Materials, Models
& DevicesNanomanufacturing SystemsNano-Enabled
Needs
Nano-Enabled Electronic, Energy & Healthcare Device
Needs
Nano-scale manufacturers
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Cross-cutting Modeling Vision: Computational tools to rapidly create and evaluate nanomanufacturing processes and systems.
Goals:• Create multiscale process models for for scale-up, design
and optimization.• Derive reduced-order models suitable for fault detection
and process control.• Verify, validate and quantify uncertainty in model
predictions.
Outcome: Accelerated process development and deployment.
UT Austin in Silicon Valley Event
NASCENT
NASCENT Summary
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Transformative Research
Educating Innovators
IndustryPartners
UT Austin in Silicon Valley Event