Accelerating Manufacturing Productivity

Copyright ©2010 SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

Mature Fabs –

ISMI Program

Scott KramerVP Manufacturing TechnologySEMATECH

SEMATECH Symposium JapanSeptember 15, 2010

2

ISMI

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ISMI is the only organization in the world to provide both tactical and strategic

solutions to manufacturing infrastructure, standards, and productivity improvement challenges.

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ISMI -

Focus on semiconductor manufacturing productivity

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The productivity challenge–

How to determine, achieve, and maintain world class fab productivity

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How to increase productivity today and into the future

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The cost reduction challenge–

How to continuously reduce costs in today’s fabs –

How to manage ever-increasing capital, manufacturing, and R&D costs

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The sustainability challenge–

How to reduce our environmental footprint•

Good for the environment, good for business

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Manufacturing solutions to improve productivity and reduce cost •

Benchmarking and shared learning forums for continuous productivity improvement of existing factories and equipment

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Industry standards and guidelines for manufacturing excellence in next generation factories and equipment

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Environment, safety, and health technology for resource conservation and manufacturing sustainability

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Development and evaluation of applications for advanced metrology technology

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Realization of a cost-effective 450 mm transition

450 mm Transition

MetrologyTechnology

Manufacturing

Capabilities

Councils and Forums

ESH Technology

ContinuousImprovement

SECS/GEMPort

Control

Interface APortData

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ISMI focus areas

450 mm Realization

AdvancedMetrology

Mature Fabs

Program

Manufacturing Capabilities

ESH Technology Center

450 mm Silicon Readiness

450 mm Test Wafer Operations

450 mm Supplier Engagement

450 mm Demonstration Test Methods and Metrics

450 mm Equipment Platform Development

450 mm Factory Integration Readiness

Defect Metrology

LithographyMetrology

Films Metrology

Operations councils

Business councils

Equipment forums

Workshops

Alternate Source Spare Parts

Predictive Preventive Maintenance

Data Collection

ESH GlobalStrategies

ESH ResourceConservation

ESH Technology and ERC

66

ISMI focus areas

450 mm Realization

AdvancedMetrology

Mature Fabs

Program

Manufacturing Capabilities

ESH Technology Center

450 mm Silicon Readiness

450 mm Test Wafer Operations

450 mm Supplier Engagement

450 mm Demonstration Test Methods and Metrics

450 mm Equipment Platform Development

450 mm Factory Integration Readiness

Defect Metrology

LithographyMetrology

Films Metrology

Operations councils

Business councils

Equipment forums

Workshops

Alternate Source Spare Parts

Predictive Preventive Maintenance

Data Collection

ESH GlobalStrategies

ESH ResourceConservation

ESH Technology and ERC

77

ISMI focus areas

450 mm Realization

AdvancedMetrology

Mature Fabs

Program

Manufacturing Capabilities

ESH Technology Center

450 mm Silicon Readiness

450 mm Test Wafer Operations

450 mm Supplier Engagement

450 mm Demonstration Test Methods and Metrics

450 mm Equipment Platform Development

450 mm Factory Integration Readiness

Defect Metrology

LithographyMetrology

Films Metrology

Operations councils

Business councils

Equipment forums

Workshops

Alternate Source Spare Parts

Predictive Preventive Maintenance

Data Collection

ESH GlobalStrategies

ESH ResourceConservation

ESH Technology and ERC

Companies can become a member of Mature Fabs

Program without being a full member of ISMI

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Mature Fabs program

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Mature Fabs program

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Large installed base of older fabs–

Productivity improvements needed, always

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Lack of consortia activity

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ISMI is ideal solution provider, covering all regions worldwide -

crosses international boundaries for

comparisons, assessments

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Value add for new members–

Access to shared learning from other IC makers

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Cost savings techniques ready for insertion to manufacturing

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ISMI mature fabs roadmap

Current Focus Topics New•

Fab manufacturing methods– Operations cost reduction– Equipment throughput– Maintenance practices

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Facilities operations•

Quality•

Reliability•

Supply chain management•

Probe and test development•

Fab, probe and final test yield•

Probe card•

Materials•

Logistics•

Supplier relations•

Statistics

Add new topic spaces for the mature fabs market:

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Manufacturing cost benchmarking

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Manufacturing execution systems (MES) and AEC/APC for mature fabs

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Automated material handling (AMHS)

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Broader OEM focus for equipment productivity improvements

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Non-product wafer (NPW) and engineering lot handling

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R&D management and manufacturability of new technologies

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Equipment alarms and message management

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ISMI councils Portfolio

Manufacturing Methods Council

OperationsCouncils

FacilitiesCouncil

Wafer ProbeCouncil

YieldCouncil

TestCouncil

BusinessCouncils

Critical Materials Council

ReliabilityCouncil

EquipmentProcurement Council

StatisticsCouncil

Failure Analysis (FA) Council

SemiconductorLogistics Forum

Assembly -Package Council

QualityCouncil

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How ISMI councils operate

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Two or three face-to-face meetings per year–

Rotated among Asia, Europe, US locations

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Common agenda attributes–

2 to 5 days, each session –

Site tour of functional area (eg. Fab, test floor)–

Member share presentations–

Supplier presentations and discussion–

Survey data review–

Best practice presentations–

Industry expert presentations–

Golden nugget reviews–

Networking

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ISMI councils Benchmarking: know where you stand

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Identify best-in-class

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Share best practices

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Communicate requirements to suppliers

3.4 4.

3 5.2 6.

56.

7 7 7.9 9.

49.

6 9.9 11

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15.5

16 16.4 17.2

17.7

18.2 20

.1 2124

.1

0

10

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Member Fabs Surveyed

Perc

ent

Example: Facilities Cost Survey

Allocated facilities spending as a percent of total fab operations spending

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Networking opportunities –

high value

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Manufacturing methods council -

example

Member share and benchmarking Industry influence and supplier direction

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3 metrics benchmarking surveys

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5 member requested mini surveys

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5 member share presentation sets

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Meeting roundtable discussion topics

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2 member company site visits

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Technology transfer reports

(members only)

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Supplier presentation/evaluations/visits

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Industry standards/guidelines/ roadmap/ presentations/ reports/white papers

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Expert presentations/training

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Symposium/conferences/workshop–

Joint workshop sponsorship (CIP)–

Economic downturn workshop 1Q09–

Maintenance workshop 2Q09

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Operational trends and ranking seen in annual council metrics surveys

Probe Council Benchmarking–

2009 Probe metrics benchmarking survey–

63 metrics related to probe technology and manufacturing

Semiconductor Logistics Forum Benchmarking–

2009 Distribution logistics benchmarking survey

Maximum Reported Probe Count - Bump (Single)

8500

1052210000

94619461

4600

4800

2400

24002400

0

2000

4000

6000

8000

10000

12000

2000 2001 2002 2003 2004 2005 2006 2007 2008 2009

Pins

Probe Count 2000 to 2009 Company Distribution Flow Comparisons

Example

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Fab energy consumption survey

2007 300mm Fab Energy

Fab wide energy studies highlight process tool energy reduction opportunities

Supportequipment

2.7%

Steam/hot water0.3%

Exhaust -

scrubbed1.9%

Chilled water20.1%

Fab process

equipment43.4%

Chemicaldispense0.0%

Bulk gas7.9%

cProcess cooling water2.9%

DI/UPW3.1%

DI/UPW (Hot)0.2%

Compressed air4.2%

Process vacuum0.4% Exhaust -VOC

0.4%Exhaust -

other0.5% Recirculation air

3.9%

Makeup air2.9%

Ind. wasterCollect treat

1.6%

Lighting -

fab1.4%hLighting -

fab support0.8%

AMHS1.5%

Energy Consumption for 300mm CVD by Component

Case Study: Vacuum pumps consume the most power on etch/CVD processes

Chamber, 1.41%

Heaters, 23.61%

Loadlock Pump, 10.25%LF RF Gen, 0.29%HF RF Gen, 4.14%

UPS, 3.30%

Other, 16.24%

Chamber Pump, 40.77%

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New project for ISMI -

fab

cost benchmarking

Member company benefits•

Improved cost / layer performance•

Relative cost structure

•

Fab level opportunities•

Maintenance cost performance•

Equipment group performance and targets

AnnualFab

SpendingFab

Investment

Average WSPM

Average numberof mask layers

Average costper mask layer

/

=

/

Capital Costs

Variable Costs

Tool depreciationPlant depreciationInsuranceTaxes

WafersResistChemicalsConsumablesSpare partsMaintenance contractsLaborUtilities

Original equipment costFab

ageAutomation

MaintenanceCosts

Equipment Group CIPs

Equipment improvement

targets

Goal-30% $$$

Average Cost per Pass

Tool Model

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ISMI's

equipment teams portfolio Equipment Productivity Forums

Wet process team

Metrology team

PVD team

Ion implant team

CVD team

Thermal process team

Dry etch team

Litho team

CMP team

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ISMI Equipment Productivity Forums

2010 Equipment Productivity Forums:•

Thermal (RTP and furnace) March 2010•

Ion Implant April 2010•

CVD (single wafer) June 2010•

Dry Etch July 2010•

Litho (exposure) Sept 2010•

Wet Process Sept 2010•

Metrology Oct 2010•

PVD Oct 2010•

CMP Nov 2010

A series of workshops where equipment suppliers, component suppliers, industry experts and fab

equipment owners collaborate to improve the productivity of install base equipment

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Equipment Productivity Forum Core elements

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3 day face-to-face meeting•

Member share–

Top issues, best known methods, equipment performance metrics

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Multi OEM engagement–

Separate session with each OEM

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Presentations–

Industry experts and alternate parts and services providers

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Supplier exhibition

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Lens Cleaning to improve procedures and reduce potential damage

Value example200mm Scanner : Lens Cleaning to improve procedures and reduce potential damage

(frequency and process BKM)•

Issue: Lens contamination caused through resist outgassing

-

leeching cause lens fowling and impact local dose control, CD and defectivity. Lens cleaning

is periodically required with special care procedures and if not followed can damage the lens.

•

EPITeam solution: Supplier has implemented both improved lens enclosure “purge hoods”

as well as improved lens cleaning procedure BKMs

where proper training is required. Clear alignment with between OEM and lens suppliers has resulted.

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Results: New purge hoods and improved cleaning procedures delay required cleaning periods. Frequency is now << less than once per year baseline (frequency user dependant: resist stacks, airborne contamination, etc.)

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Cost benefit:•

Implementation Value: Variable ~ $100,000 -

$200,000 per tool / year•

Member only benefits: Presentations and feedback are available to member companies from supplier only. Insight to purge hood upgrades, procedures, and training

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CMP 300mm: Platen shield Value example

300mm CMP : Solution for CMP 300mm Platen shield failures•

Issue: Platen shield lift cylinder failures are occurring due to CMP slurry solutions leaking through the bellows.

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EPITeam solution: Primary causes of slurry leaking through platen shields were identified due to seal installation, screw length variations, and bellows failures. Solutions of New Up & Down Platen Shield Sensors and new platen shield design and materials have eliminated lift cylinder failures.

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Results: Beta testing successfully completed at member company site. Improved bellow units, new platen shield sensors, and shield designs have passed

a 14 month period with no failures.

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Cost benefit:–

Implementation Value: Variable ~ $100,000 per tool / year

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Member only benefits: Presentations and feedback are available to member companies from supplier only. Insight to new Up & Down Platen Shield Sensors and new platen shield design and materials

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Mature fabs workshops

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Mature fab, fab-wide topic space forums for benchmarking, member sharing, expert learning, solving top issues and industry wide networking

Equipment component standards

Equipment alarms and message management

Other topics in development

Manufacturing costs

Maintenance practices

Alternates spares

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Mature fabs

workshops Core elements

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1 day face-to-face meeting

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Member share on specific topic using ISMI developed template

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Presentations–

Industry experts, OEM’s and alternate parts and services providers

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Workshops can be combined with equipment productivity forums

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ISMI members determine the workshop topic

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Economic workshop -

example

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March, in Austin–

38 attendees–

78 Golden nuggets were collected

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Topics: Facilities, equipment, labor, process

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Maintenance of mature tools workshop -

example

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19 attendees•

Major focus on mature tools: –

Spare Parts–

Documentation –

Training–

Success Stories

•

ISMI core, Project Updates

Common take aways•

58 golden nuggets

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All companies had similar problems and solutions maintaining mature tools

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Key concern was spare part availability

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Detailed survey on tool types

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AA Tour & presentation:–

Focus on maintenance–

Spare parts control was a major issues

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Alternative Parts and Services Project Objectives

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Identifying and registering parts and service suppliers in a searchable database

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Matching supplier capabilities to parts and services issues–

Quick Response Parts and Services Assistance–

Member Company Top 30 Issues

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Introducing suppliers to member companies–

Equipment Productivity Forum Events–

ISMI Symposia

To provide parts and services solutions to member companies by:

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Alternative Parts and Services Project Achievements

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Parts and services database currently contains 110 suppliers

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In 1H 2010, sixty-one suppliers participated in the Equipment Productivity Forum events

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ISMI Mature Fabs

Program structure

Operationscouncils

Businesscouncils

Fab

productivity workshops

Installed based equipment forums

Alternate source spare parts Project

Manufacturing & methods

Yield

Assembly & packaging

Facilities

Test

Probe

Quality

Reliability

Failure analysis

Critical materials

Equipment procurement

Statistics

Semiconductor logistics

Manufacturing costs

Maintenance practices

Alternate spares

Equipment component standards

Equipment alarms and messages standards

Thermal (RTP and furnace)

Ion implant

CVD (single wafer)

Dry etch

Litho (exposure)

Wet Process

Metrology

PVD

CMP

Comprehensive Database

Experts may participate in over 25 separate forum areas, where each forum may meet multiple times a year

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Value and participation

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ISMI’s

unique value proposition

•

Members determine programs and deliverables•

Industry wide benchmarking–

Critical mass of industry participants–

Provides a legal safe haven for competitive benchmarking–

Tried and true methods and procedures

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Facilitate shared learning–

Group discussions produce new and best known methods–

Learn from another company's ingenuity–

Share business process methodologies and approaches–

Secure member website for 24/7 IP access

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Peer networking–

Create structured interactions for value creation•

Industry experts •

Key industry supply base

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ISMI model for participation

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ISMI membership–

International SEMATECH Manufacturing Initiative–

Members participate only in manufacturing programs

•

Mature Fab program membership–

Members participate in individual program–

Membership open to chipmakers

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ISMI members

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Accelerating the next technology revolution

Research Development Manufacturing