Expert Day

Manager Advanced Process Control

Company wide integration projects for automation, SPC and FDC solutions

Data mining and modeling for root cause analysis and model development

Data governance for data driven decision making

Integration of software solutions in existing data landscape for Frontend and Backend

Tilo Bormann

Manufacturing IT Migration

Legacy Fab Automation Challenges and Opportunities

Tilo Bormann 2014/01/23

About Vishay

Challenges

Opportunities

Automation landscape @ VISHAY Siliconix Itzehoe

Example I – SPC integration by SYSTEMA

Example II – genericPROMIS by VISHAY

Conclusion

Outline

Vishay at a glance

• Headquarter in Malvern, Pennsylvania/USA

• Founded in 1962 by Dr. Felix Zandman

• Global active manufacturer of passive components and discrete Semiconductors

• Production locations in 17 countries

• Worldwide: approx. 25000 employees

Siliconix operation Main production location - Itzehoe

Singapore

Wafer Foundry (LVM & Auto)

Greater China

Wafer Foundry (HVM) Wafer Foundry (IC )

Wafer Fab (LVM, Auto & HVM) R&D PowerMOS & IGBT

Fraunhofer Research Institute

Itzehoe Germany

Wafer foundry (LVM + HVM)

Israel & Japan

Santa Clara California, USA

Siliconix Corporate Headquarters Wafer Fab (LVM & Auto)

Research and Development Hi-Rel Operations

LVM, Auto & IC Mosfet Assembly

Shanghai China

Analog ICs, Hi-Rel, and Discrete

Manila Philippines

Assembly Operations High Voltage Mosfets

Xian China

Package Development LVM, Auto, IC & New Package

Production

Kaohsiung Taiwan

Singapore

Assembly and subcontractor Back End Operations Management

4

Equipment capacity 5.150 wafers/week 8“ 262K wafers yearly base

Epi capacity 6.300 wafers/week 8“ 320K wafers yearly base Work mode 24 hours/day 7 days/week 360 days/year Smallest Die approx. 200.000 Dies/Wafer 0,2 X 0,2 mm Largest Die approx. 870 Dies/Wafer 3,2 X 5,4mm

Consumer •Game Consoles •Class D-Home Audio Systems • Satellite Receivers •Digital Camera /Camcorders • LCD-PDP Monitor & TVs •MP3 Players • e Readers •GPS

Industrial • Power Supplies • Lighting •Welding •Renewable Energy • Battery Chargers

Computer •Notebooks • Tablet PCs • Peripheral / Displays •Desktop / Workstation / Servers •HDD

• Power Management • Power conversion • Load switching • Battery Management • Voltage Regulation

Communication • Fixed and Wireless

Network Infrastructure • Switches and Routers • Cell /Smart Phones

Automotive • Body Electronics EPAS, 48 V Bus, Door Modules • Power Steering •Driver Information (GPS, PC, Display) • Engine Management • Transmission Control • ABS, Airbags

Application Fields

5

Challenges in a legacy fab environment

• penny market products

Low cost fab

• Refurbished second source tools • Hard to get supplier support for tools • Often 3rd party support

Many different tool types

• > 1000 products • > 100 parallel in line • > 10 technologies

High product mix

• Only a few with HSMS • Mostly serial SECS I/II • Some with only disc connection • Some without any connection

Different types of interfaces

• Material tracking • Tiny packages w/o any markings

backend

• Just a few systems have to be considered • Automation solution can be designed with just some

boundary conditions • Flexible business processes, can be adopted from easily

(MES changes vs. Changes in Automation)

Very flexible environment (open minded)

• Very high number of different tool recipes

Fool proofing

• example SPC integration • example generic PROMIS

Unique software infrastructure

Opportunities

Common interface (client server frame work)

Full tool connection

semi tool connection

No tool connection

AMAT Endura N&K

Thermawave

Canon i5 Stepper Electrical Tester

EPI furnances RS 75

EQS

EQC EQC EQC

File access human

3rd party applications (SPC, genericPROMIS, FDC, etc.)

Gateway

Only one interface to maintain

Traffic control

Load balancing

Automation landscape

Overall Fab schematic

Global infrastructure

VSIG SCLA SHAN

HEIL BURG Division 2

Division 1

Division wide bus

Division wide bus

Glo

bal b

us

Benefits from using a standardized framework Basic workflow

• Several verifications before lot start • Connection to the SPC tool • Change equipment state in PROMIS if needed • Track-in/out • Data collection

Adapters for different Tool types (manual, semi, full) • Data collection from tool, from file or from manual entries • Same implementation of SPC-CA for all tool types

Adapters for 3rd party tools (SPC, FDC, R2R, homebrews) • All 3rd parties have to use unique interface to EI / PROMIS • Custom solution can use queries to the single components of the frame

work Standardization

• Easy roll out to other fabs • As many generic solutions as possible (configuration instead of coding) • Easy customization and adoption of any other data system

Standardization – Pick and Replace

EI

MES

SPC

R2R

FDC

custom

Site connecter

VMS

Site connector

Custom solutions

MES

SPC

EI R2R FDC

old design new design

Since there are well defined interfaces, the new design allows to replace parts of the

manufacturing environment

Situation in the past • PROMIS internal SPC system • Terminal based, poor graphical representation of graphs • Poor data mining capabilities • No graphical tool matching or chamber matching • Very limited opportunities for tool interaction (stop tools)

Switch to 3rd party SPC product • Very sophisticated graphical solution • Flexible corrective actions (CA) • Tool and chamber matching possible • Reduced number of hold lots in the line due to semi automatic CA

Constraints • Integration with SYSTEMA • The EI will handle all data communications (data upload) • And handling of corrective actions • Supplier has to be use the SYSTEMA gateway instead of its own

solution

Example I – SPC integration

SPC integration Timing I

SPC integration Timing II

EI = key component

Very flexible solution

• Implementation of corrective actions can be adopted to PROMIS very easily without changes in the SPC system

• Custom Parameters for SPC system can be easily configured

Core element SYSTEMA EI High user acceptance

• workflow state is transparent at any time for operators Very stable no major issues since start 1 year ago Business and PROMIS workflow were adjusted to get best

results. Connection of tool types with manual data entries as well

• Generic customized Workflow

Conclusion SPC integration

Example 2 – Parameter substitution problem

PART ABC • Procedure (FE)

– Procedure Module 1 – Procedure Module 2

› Execute Recipe A » PARAMETER

› Execute Recipe B • Procedure (BE)

PART XYZ • Procedure (FE)

– Procedure Module 1 – Procedure Module 2

› Execute Recipe A » PARAMETER

› Execute Recipe B • Procedure (BE)

To produce PART ABC

The PARAMETER has to be

FOO

To produce PART XYZ

The PARAMETER has to be

BAR

Question: where to set the parameter

Solution I

PART ABC • PARAMETER: $PAR = FOO • Procedure (FE)

– Procedure Module 1 – Procedure Module 2

› $PAR = XXX › Execute Recipe A › Execute Recipe B

• Procedure (BE)

PART XYZ • PARAMETER: $PAR = BAR • Procedure (FE)

– Procedure Module 1 – Procedure Module 2

› $PAR = XXX › Execute Recipe A › Execute Recipe B

• Procedure (BE)

Problem: 1) You cannot reuse the parameter name because it‘s global 2) Limited number of parameters on part level

Solution II

PART ABC • Procedure (FE1)

– Procedure Module 1 – Procedure Module 2.1

› $PAR = FOO › Execute Recipe A › Execute Recipe B

• Procedure (BE)

PART XYZ • Procedure (FE2)

– Procedure Module 1 – Procedure Module 2.2

› $PAR = FAR › Execute Recipe A › Execute Recipe B

• Procedure (BE)

Problem: 1) you have to create 2 versions of Module 2 2) FE Procedures are different

Vishay decided for Solution II years ago

Solution III – gernericPROMIS PART ABC

• Procedure (FE) – Procedure Module 1 – Procedure Module 2

› $PAR = XXX › Execute Recipe A › Execute Recipe B

• Procedure (BE)

PART XYZ • Procedure (FE)

– Procedure Module 1 – Procedure Module 2

› $PAR = XXX › Execute Recipe A › Execute Recipe B

• Procedure (BE)

Solution: 1) The Parameters will be stored in an external database. 2) The Parameters will be set in real time for every lot when it jumps into the procedure. 3) If the lot returns from procedure all parameters will be deleted. 4) Reuse Parameters possible

Part Procedure Parametername Parameter wertABC Module2 $PAR FOOXYZ Module2 $PAR BARABC Module5 $PAR FOO BAR

Enabler: SYSTEMA client server frame work

• Concept, Demonstrator, Test and Roll out within 3 months Reduces number of Procedures to the very minimum

• Contains only structural differences Increases the speed of creating new parts by a factor of 10

• New parts will be copied from a suitable template • Update parameter in the database • Approval loop • Done

Key for success: • Having a open minded community to allow such implement such

dramatic changes in the business process in a very short time • Having a partner providing you with the software solution to drive

the change

Solution III – Benefits

Conclusion Keys for success

• Open minded atmosphere for changes in workflows and business process

• Software framework allows you to implement services in a flexible, easy and fast manner

• Standardization, standardization, standardization • Be generic • Configuration instead of coding • Well defined Interfaces between applications

Q & A

Thank you for attention

Any Questions ?