Expert Day
Manager Advanced Process Control
Company wide integration projects for automation, SPC and FDC solutions
Data mining and modeling for root cause analysis and model development
Data governance for data driven decision making
Integration of software solutions in existing data landscape for Frontend and Backend
Tilo Bormann
Manufacturing IT Migration
Legacy Fab Automation Challenges and Opportunities
Tilo Bormann 2014/01/23
About Vishay
Challenges
Opportunities
Automation landscape @ VISHAY Siliconix Itzehoe
Example I – SPC integration by SYSTEMA
Example II – genericPROMIS by VISHAY
Conclusion
Outline
Vishay at a glance
• Headquarter in Malvern, Pennsylvania/USA
• Founded in 1962 by Dr. Felix Zandman
• Global active manufacturer of passive components and discrete Semiconductors
• Production locations in 17 countries
• Worldwide: approx. 25000 employees
Siliconix operation Main production location - Itzehoe
Singapore
Wafer Foundry (LVM & Auto)
Greater China
Wafer Foundry (HVM) Wafer Foundry (IC )
Wafer Fab (LVM, Auto & HVM) R&D PowerMOS & IGBT
Fraunhofer Research Institute
Itzehoe Germany
Wafer foundry (LVM + HVM)
Israel & Japan
Santa Clara California, USA
Siliconix Corporate Headquarters Wafer Fab (LVM & Auto)
Research and Development Hi-Rel Operations
LVM, Auto & IC Mosfet Assembly
Shanghai China
Analog ICs, Hi-Rel, and Discrete
Manila Philippines
Assembly Operations High Voltage Mosfets
Xian China
Package Development LVM, Auto, IC & New Package
Production
Kaohsiung Taiwan
Singapore
Assembly and subcontractor Back End Operations Management
4
Equipment capacity 5.150 wafers/week 8“ 262K wafers yearly base
Epi capacity 6.300 wafers/week 8“ 320K wafers yearly base Work mode 24 hours/day 7 days/week 360 days/year Smallest Die approx. 200.000 Dies/Wafer 0,2 X 0,2 mm Largest Die approx. 870 Dies/Wafer 3,2 X 5,4mm
Consumer •Game Consoles •Class D-Home Audio Systems • Satellite Receivers •Digital Camera /Camcorders • LCD-PDP Monitor & TVs •MP3 Players • e Readers •GPS
Industrial • Power Supplies • Lighting •Welding •Renewable Energy • Battery Chargers
Computer •Notebooks • Tablet PCs • Peripheral / Displays •Desktop / Workstation / Servers •HDD
• Power Management • Power conversion • Load switching • Battery Management • Voltage Regulation
Communication • Fixed and Wireless
Network Infrastructure • Switches and Routers • Cell /Smart Phones
Automotive • Body Electronics EPAS, 48 V Bus, Door Modules • Power Steering •Driver Information (GPS, PC, Display) • Engine Management • Transmission Control • ABS, Airbags
Application Fields
5
Challenges in a legacy fab environment
• penny market products
Low cost fab
• Refurbished second source tools • Hard to get supplier support for tools • Often 3rd party support
Many different tool types
• > 1000 products • > 100 parallel in line • > 10 technologies
High product mix
• Only a few with HSMS • Mostly serial SECS I/II • Some with only disc connection • Some without any connection
Different types of interfaces
• Material tracking • Tiny packages w/o any markings
backend
• Just a few systems have to be considered • Automation solution can be designed with just some
boundary conditions • Flexible business processes, can be adopted from easily
(MES changes vs. Changes in Automation)
Very flexible environment (open minded)
• Very high number of different tool recipes
Fool proofing
• example SPC integration • example generic PROMIS
Unique software infrastructure
Opportunities
Common interface (client server frame work)
Full tool connection
semi tool connection
No tool connection
AMAT Endura N&K
Thermawave
Canon i5 Stepper Electrical Tester
EPI furnances RS 75
EQS
EQC EQC EQC
File access human
3rd party applications (SPC, genericPROMIS, FDC, etc.)
Gateway
Only one interface to maintain
Traffic control
Load balancing
Automation landscape
Overall Fab schematic
Global infrastructure
VSIG SCLA SHAN
HEIL BURG Division 2
Division 1
Division wide bus
Division wide bus
Glo
bal b
us
Benefits from using a standardized framework Basic workflow
• Several verifications before lot start • Connection to the SPC tool • Change equipment state in PROMIS if needed • Track-in/out • Data collection
Adapters for different Tool types (manual, semi, full) • Data collection from tool, from file or from manual entries • Same implementation of SPC-CA for all tool types
Adapters for 3rd party tools (SPC, FDC, R2R, homebrews) • All 3rd parties have to use unique interface to EI / PROMIS • Custom solution can use queries to the single components of the frame
work Standardization
• Easy roll out to other fabs • As many generic solutions as possible (configuration instead of coding) • Easy customization and adoption of any other data system
Standardization – Pick and Replace
EI
MES
SPC
R2R
FDC
custom
Site connecter
VMS
Site connector
Custom solutions
MES
SPC
EI R2R FDC
old design new design
Since there are well defined interfaces, the new design allows to replace parts of the
manufacturing environment
Situation in the past • PROMIS internal SPC system • Terminal based, poor graphical representation of graphs • Poor data mining capabilities • No graphical tool matching or chamber matching • Very limited opportunities for tool interaction (stop tools)
Switch to 3rd party SPC product • Very sophisticated graphical solution • Flexible corrective actions (CA) • Tool and chamber matching possible • Reduced number of hold lots in the line due to semi automatic CA
Constraints • Integration with SYSTEMA • The EI will handle all data communications (data upload) • And handling of corrective actions • Supplier has to be use the SYSTEMA gateway instead of its own
solution
Example I – SPC integration
SPC integration Timing I
SPC integration Timing II
EI = key component
Very flexible solution
• Implementation of corrective actions can be adopted to PROMIS very easily without changes in the SPC system
• Custom Parameters for SPC system can be easily configured
Core element SYSTEMA EI High user acceptance
• workflow state is transparent at any time for operators Very stable no major issues since start 1 year ago Business and PROMIS workflow were adjusted to get best
results. Connection of tool types with manual data entries as well
• Generic customized Workflow
Conclusion SPC integration
Example 2 – Parameter substitution problem
PART ABC • Procedure (FE)
– Procedure Module 1 – Procedure Module 2
› Execute Recipe A » PARAMETER
› Execute Recipe B • Procedure (BE)
PART XYZ • Procedure (FE)
– Procedure Module 1 – Procedure Module 2
› Execute Recipe A » PARAMETER
› Execute Recipe B • Procedure (BE)
To produce PART ABC
The PARAMETER has to be
FOO
To produce PART XYZ
The PARAMETER has to be
BAR
Question: where to set the parameter
Solution I
PART ABC • PARAMETER: $PAR = FOO • Procedure (FE)
– Procedure Module 1 – Procedure Module 2
› $PAR = XXX › Execute Recipe A › Execute Recipe B
• Procedure (BE)
PART XYZ • PARAMETER: $PAR = BAR • Procedure (FE)
– Procedure Module 1 – Procedure Module 2
› $PAR = XXX › Execute Recipe A › Execute Recipe B
• Procedure (BE)
Problem: 1) You cannot reuse the parameter name because it‘s global 2) Limited number of parameters on part level
Solution II
PART ABC • Procedure (FE1)
– Procedure Module 1 – Procedure Module 2.1
› $PAR = FOO › Execute Recipe A › Execute Recipe B
• Procedure (BE)
PART XYZ • Procedure (FE2)
– Procedure Module 1 – Procedure Module 2.2
› $PAR = FAR › Execute Recipe A › Execute Recipe B
• Procedure (BE)
Problem: 1) you have to create 2 versions of Module 2 2) FE Procedures are different
Vishay decided for Solution II years ago
Solution III – gernericPROMIS PART ABC
• Procedure (FE) – Procedure Module 1 – Procedure Module 2
› $PAR = XXX › Execute Recipe A › Execute Recipe B
• Procedure (BE)
PART XYZ • Procedure (FE)
– Procedure Module 1 – Procedure Module 2
› $PAR = XXX › Execute Recipe A › Execute Recipe B
• Procedure (BE)
Solution: 1) The Parameters will be stored in an external database. 2) The Parameters will be set in real time for every lot when it jumps into the procedure. 3) If the lot returns from procedure all parameters will be deleted. 4) Reuse Parameters possible
Part Procedure Parametername Parameter wertABC Module2 $PAR FOOXYZ Module2 $PAR BARABC Module5 $PAR FOO BAR
Enabler: SYSTEMA client server frame work
• Concept, Demonstrator, Test and Roll out within 3 months Reduces number of Procedures to the very minimum
• Contains only structural differences Increases the speed of creating new parts by a factor of 10
• New parts will be copied from a suitable template • Update parameter in the database • Approval loop • Done
Key for success: • Having a open minded community to allow such implement such
dramatic changes in the business process in a very short time • Having a partner providing you with the software solution to drive
the change
Solution III – Benefits
Conclusion Keys for success
• Open minded atmosphere for changes in workflows and business process
• Software framework allows you to implement services in a flexible, easy and fast manner
• Standardization, standardization, standardization • Be generic • Configuration instead of coding • Well defined Interfaces between applications
Q & A
Thank you for attention
Any Questions ?