Introduction to Microelectronics

Lecture 9 Transistor + scaling

School of Microelectronics

Dr. Mo Ting Ting

2

Previously on the this course

Silicon, electron-hole

Doping, P-type , N-type

Drift & Diffusion

PN junction, depletion region, with reverse bias

and forward bias

MOSFET

3

Outline of today

MOSFET (continue)

MOSFET as switches for digital circuits

MOSFET as amplifiers for analog/RF circuits

History of the first transistor

New transistor (FinFET)

Transistor scaling

线性区 Triode region

tGSDS VVV

])(2[2

2

DSDStGS

ox

oxn

D VVVVL

W

tI

tGS VV

5

Close look at channel

6

夹断! Pinch-off

7

饱和区 saturated region

NMOS transistor (Saturation Region)

tGSDS VVV

2)(2

tGS

ox

oxn

D VVL

W

tI

8

N型MOS管性能总结

Summary of NMOS behavior

Cutoff Region

Linear Region

Saturation Region

tGS VV

tGS VV tGSDS VVV

])(2[2

2

DSDStGS

ox

oxn

D VVVVL

W

tI

tGS VV tGSDS VVV

2)(2

tGS

ox

oxn

D VVL

W

tI

9

晶体管用作开关 (关)

Transistor as switch ( off)

10

晶体管用作开关 (开)

Transistor as switch ( on)

11

晶体管用作放大器

Transistor as amplifier

)(-

)(2-)(2

)(2

)(2

2

GS

2

2

2

tGSGS

ox

oxn

tGSGStGS

ox

oxnD

tGSGS

ox

oxnD

tGS

ox

oxnD

VVVL

W

tI

VVVVVVL

W

tII

VVVL

W

tII

VVL

W

tI

12

首个晶体管广告

First transistor AD

13

点接触式晶体管

The point contact transistor

John Bardeen Walter Brattain

1947 Dec.

The miracle month

November 17-December

23, 1947

http://www.pbs.org/transistor/album1/i

ndex.html

14

小剧场 It’s show time!

http://www.nobelprize.org/educational/physics/tr

ansistor/function/pointcontact.html

http://www.engineerguy.com/videos/video-

transistor-point-contact.htm

the first transistor

15

结型晶体管

The junction(sandwich) transistor

1948-1951

William Shockley

• Carriers NOT Just on the Surface

• Growing Crystals (pure and thin)

By Gordon Teal

• Growing Even Better Crystals (doping)

By Morgan Sparks

16

现代CMOS工艺

Modern CMOS technology Complementary Metal-Oxide-Semiconductor-Field effect transistor

17

3D transistor: FinFET

18

Why scaling: (first guess)

ɛox

ɛox

19

How to scale down

20

scale down effect

W

21

Benefit of scaling down

W

22

Transistor scaling: reality

23

阅读作业：Reading assignment 2

Reading material

• http://www.nobelprize.org/nobel_prizes/physics/laure

ates/1956/bardeen-lecture.pdf

• http://www.nobelprize.org/nobel_prizes/physics/laure

ates/1956/shockley-lecture.pdf

• http://www.nobelprize.org/nobel_prizes/physics/laure

ates/1956/brattain-lecture.pdf