ibm graphene nanoelectronics technologies

IBM Research | Science & Technology

IBM Graphene NanoelectronicsTechnologies

C.Y Sung Program ManagerIBM T.J. Watson Research Center Science & Technology Strategy Department


C.Y Sung | IBM Confidential

Outline

�Motivation

�Synthesis (CVD and Epi)

�Device Fabrication and Performance

� Future Applications

�Conclusions

IBM Research

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IBM Research Worldwide

Ten Labs with >4,000Researchers Around The World

Ten Labs with >4,000Researchers Around The World


Technical Transition Plan

FundamentalResearch

Screen new materials & processes

IBM Almaden & Yorktown

Advanced Semiconductor

R&D

Innovation in integrated device & process technology

Albany Nanotech Center

TechnologyDevelopment

Multi-company co-located joint development

IBM East Fishkill

Manufacturing

Process synchronized fabricators (GDSII compatible)

USA


Frontiers of IT Nanosystem Vision

New systems enable us to

reach the greatest potential

for our creativity, innovation

and ingenuity.


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Defense and Security

Learning Systems Will Impact Every Sector


NRI Scope and Objectives

NRI Scope :

Discover New Switch Device for Beyond CMOS by 2020

NRI Objectives :

By 2020, discover and reduce to practice via technology transfer to industry non-CMOS devices, technologies and new manufacturing paradigms, which will provide a new scaling path and extend the historical cost / function reduction with increased performance and density for another several orders of magnitude beyond the limits of CMOS.



Outline

�Motivation

�Synthesis



�Conclusions



Carbon on Insulator (COI)

Graphene Attractive Properties:

•Extraordinary high e- and h+ mobility (20,000 cm2/Vs, >100X of Si)

Long carrier mean free paths (~a few µµµµm @ Room Temp.)->Enable High Performance Devices

•Ultra-thin body (one-atom thick) Ideal electrostatics: ->Enable Scaling Paths

•High thermal conductance and high current carrying capability->Allow Low Power Operations

•Linear energy dispersion and massless ballistics transport

->New Physics for New Devices•Planar structure

-> CMOS Process Compatible

12-22 nm



Outline

�Motivation

�Synthesis (Epi and CVD)



�Conclusions



Epi Graphene on SiC

IDS – VDS



Graphene Mono Atomic Layer on 2” SiC Wafer

100 µµµµm

1

0

Rela

tive G

-prim

e in

ten

sity

1-2 layers

1-2 layers 1-2 layers1-2 layers

1-2 layers

100 µµµµm

1

0

Rela

tive G

-prim

e in

ten

sity

1-2 layers

1-2 layers 1-2 layers1-2 layers

1-2 layers

Graphene

Buffer

SiC

Graphene on Si-face of SiC



Up to 12” Successfully Demonstrated

Roll-Based Producing Graphene Films

Cu

PMMA

Spin-on PMMA

Dissolve Cu

Cu

PMMA

Spin-on PMMA

Dissolve Cu

Place PMMA + graphene

on substrate

Dissolve PMMA

Place PMMA + graphene

on substrate

Dissolve PMMA

Graphene Growth on Cu Foils by CVD



Outline

�Motivation

�Synthesis



�Conclusions



220nm Single Atomic Layer GrapheneTransistor on 2” SiC Wafer

1

10

100

Curr

ent G

ain

|h

21|

1 10 100

Frequency [GHz]

gate length 240 nm 550 nm

100 GHz

VD = 2.5 V



Outline

�Motivation

�Synthesis



�Conclusions



Graphene Logic Devices (Innovative Concepts)

IDS – VDS



Veselago Lens Switches

� On/Off via electron focusing

� Speed Cheianov, Fal’ko & Altshuler,

Science (2007)



Graphene Optoelectronics

IDS – VDS



VDS

Eye-diagram

Or

Recovered waveform

Optical

amplifie

r

980 nm Pump

Pseudo-Random-Bit-Sequence

(PRBS) generator

Electrical Optical

modulator (E-O conversion)

1.55 µm continuous light in

Optic

al

Graphene photodetector(O-E conversion)

VG

OpticalBit stream

Trigger

Bias-teeRecovered

electrical signal Electricalamplifier

fG = 16 GHz

10 Gbit/s

Graphene

Paladiumcontact

Titaniumcontact

5 µm

1.55 µm light spot

Graphene

Paladiumcontact

Titaniumcontact

5 µm

1.55 µm light spot

1.4 mA/W

2.7 mA/W

Graphene Photodetector in 10 Gbit/s 1.55 µm

Optical Communication Link



Graphene Sensor and Energy Devices

IDS – VDS



Graphene RF Thin Film Sensors

Digital Contact Lens

Graphene Thin Film

Smart Graphene Bandage

Sensitive Sensor for toxic gases and proteins



Green applications: Photovoltaics/ Supercapacitors

• Graphene Energy Devices for Low Weight•High Performance Battery Cells•Supercapacitors.

•Graphene based photovoltaics device create more efficient cell.



Outline

�Motivation

�Synthesis



�Conclusions



Tablet Computer

Touch Screens/ Microelectronics

Scientific Background on the Nobel Prize in Physics 2010

Graphene

Compiled by the Class for Physics

of the Royal Swedish Academy Science

Communications

Composite Materials

Watches/Calendars

Electronics PaymentsMobile Phones

Thin Flexible Light Panel

ibm graphene nanoelectronics technologies

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