FAB

VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS

PROJECTS

• START UP OF SVG 1

• IDLE TIME STUDY

• FILTER FLOW EXP (DOE)

• DI SUPPLY DIAGRAMS

• OTHER

START UP OF SVG1

• EXPLORE TRACK MECHANISM

• IDENTIFY PARTICLE ISSUE

• EXPERIENCE POINTS TO IDLE TIME

• IDLE TIME EXP

SVG TRACK PARTICLES•PR CRATERS•RESIST RESIDUE•ADD ON PARTICLES•SCRATCHES•OVAL/CIRCLES

IDLE TIME EXP RESULTS

Particles vs. Idle Time Wafers By Group

-2

0

2

4

6

8

10

12

14

16

18

0 2 4 6 8 10 12 14

Zero Hrs

1/2 Hrs

1 Hrs

1.6

1.5

2 Hrs

2.5 Hrs

4 Hrs

13 Hrs

-100

0

100

200

300

400

500

600

700

Col

umn

2 A

ctua

l

-100 0 100 200 300 400 500 600 700

Column 2 Predicted P=0.0007 RSq=0.29

RMSE=90.082

-1

01

23

45

67

89

Col

umn

2 A

ctua

l

-15 -10 -5 0 5 10

Column 2 Predicted P=0.2616 RSq=0.05

RMSE=1.8354

CONCLUSIONS ABOUT IDLE TIME

Lack Of Fit Source DF Sum of Squares Mean Square F Ratio Lack Of Fit 10 6970.46 697.0 0.0622 Pure Error 24 268934.00 11205.6 Prob > F Total Error 34 275904.46 1.0000 Max RSq 0.3091 Parameter Estimates Term Estimate Std Error t Ratio Prob>|t| Intercept -8.889624 16.98978 -0.52 0.6042 Column 1 0.0481929 0.012894 3.74 0.0007

Effect Tests Source Nparm DF Sum of Squares F Ratio Prob > F Column 1 1 1 113362.54 13.9698 0.0007

-100

0

100

200

300

400

500

600

700

Col

umn

2 A

ctua

l

-100 0 100 200 300 400 500 600 700

Column 2 Predicted P=0.0007 RSq=0.29

RMSE=90.082

-1

01

23

45

67

89

Col

umn

2 A

ctua

l

-15 -10 -5 0 5 10

Column 2 Predicted P=0.2616 RSq=0.05

RMSE=1.8354

Lack Of Fit Source DF Sum of Squares Mean Square F Ratio Lack Of Fit 7 11.555209 1.65074 0.4089 Pure Error 18 72.666667 4.03704 Prob > F Total Error 25 84.221876 0.8843 Max RSq 0.1805 Parameter Estimates Term Estimate Std Error t Ratio Prob>|t| Intercept 2.6035494 0.55549 4.69 <.0001 Column 1 -0.003854 0.003355 -1.15 0.2616 Effect Tests Source Nparm DF Sum of Squares F Ratio Prob > F Column 1 1 1 4.4447910 1.3194 0.2616

CONCLUSIONS ABOUT IDLE TIME

• TRACK PARTICLE ELIMINATION IS NOT JUST A FUNC OF IDLE TIME

• MINIMAL IDLE TIME IS DESIRED• TRACK SHOULD PURGE AFTER 1 HOUR

0

2

4

6

8

10

12

14

16

18

0 0.5 1 1.5 1.6 2 2.5 4 6 13.18

1st

2nd

3rd

SVG1 STARTUP• BEGAN WITH NON CRIT LEVEL EXP

ECN AND GREW TO FULL PROCESS CAPABILITY IN ONE ROOM

• INCREASED WORKCENTER CAPACITY BY 33 LOTS PER DAY

• ALL LITH PROCESSING STEPS ON THE FIRST FLOOR

RINSE EXPERIMENT

• BASED ON DEFECTS CONCLUDE RESIST DAMAGE

• EXPERIENCE ISOLATES RINSE MECHANISM

• EXPLORE FACTORS AFFECTING RINSE

POSSIBLE FACTORS:

• WAFER TEMP• BOWL COVER O/F• BAKE COVERS O/F• DEV DISP. TIME• DI DISP. TIME• SPIN SPEEDS• DEV DISP. POS.• DI DISP. POS.• BACKSIDE RINSE O/F• DI DISP. PRESSURE• TRACK IDLE TIME• IMPACT POINT• BUFFER WAFERS

• HISTORICAL DATA ELIMINATED SOME FACTORS

• OTHERS COULD NOT BE RIGOROUSLY MEASURED

• SOME COULD NOT BE CONTROLED

FACTOR CHOICES

• THEORY THAT RESIST DAMAGE IS PURELY MECHANICAL

S1: 6.2S5: 5.9

S1: 2.1S5: 1.6

13.7

20

40

60

80

FACTORS STUDIED

• DI DISP. TIME• DI DISP. HEIGHT• IMPACT POINT• RINSE SPIN SPEED• DI DISP. FLOW*

Response QTY Actual by Predicted Plot

-10

0

10

20

30

40

50

60

70

QT

Y A

ctu

al

-10 0 10 20 30 40 50 60 70

QTY Predic ted P=0.6720 R Sq=0.17

R MSE=9.1572

Summary of Fit RSquare 0.168932 RSquare Adj -0.05568 Root Mean Square Error 9.157161 Mean of Response 3.125 Observations (or Sum Wgts) 48 Analysis of Variance Source DF Sum of Squares Mean Square F Ratio Model 10 630.6667 63.0667 0.7521 Error 37 3102.5833 83.8536 Prob > F C. Total 47 3733.2500 0.6720

Lack Of Fit Source DF Sum of Squares Mean Square F Ratio Lack Of Fit 5 419.2500 83.8500 1.0000 Pure Error 32 2683.3333 83.8542 Prob > F Total Error 37 3102.5833 0.4336 Max RSq 0.2812

CONCLUSIONS ABOUT RINSE

THESE ARE STATISTICALLY DISPUTABLE:

• IMPACT POINT IS SIGNIFICANT FACTOR

• FLOW IS ALSO A SIGNIFICANT FACTOR ALTHOUGH NOT STUDIED

DI SUPPLY DIAGRAMS

• POTENTIAL CONTAMINATION SOURCES

• DOCUMENTATION

• COMPARISON

SVG 1 DI SUPPLY COMPONENTS

1) 1/8” CLEAR HOSE

2) ½” WHT NUT

3) ¼” HEADLESS HOLLOW SCREW

4) ½” WHT NUT

5) ¼” HEADLESS HOLLOW SCREW

6) 1” WHT NUT

7) ¼:” CLEAR HOSE

8) WHT NUT TO ½” SCREW

9) ½” HEADLESS HOLLOW SCREW

10) 1” WHT NUT

… 87) 1” WHT ½ THREADED SCREW

88) 1½” WHT CONNECTOR

89) 1” WHT TEFLON COVERED HOLLOW HEADLESS SCREW

90) 1” WHT NUT (SLIM)

91) 1” WHT TEFLON COVERED HOLLOW HEADLESS SCREW

92) GREY/BLACK “FLOW” CYLINDER

93) TEFLON COVERED GREY/BLCK THREADED CONNECTOR

94) GREY/BLACK PIPE ASSEMBLY (3”)

95) RED HANDLE

96) FLOOR

SVG 1 & 2*

FLOOR

To DI Spray Rinse

L

SVG2

Coolant Fluid Tank

SVG1

OTHER PROJECTS

• CHANGED DI DISP POS. ON SVG2

• DATA COLLECTION FOR J ANDRUS

• PROCESS SUPPORT THROUGH SVG 5 “CRISIS”

• RESPONSIBILITY FOR DAILY QUAL

SUMMARY

• START UP OF SVG 1

• IDLE TIME STUDY

• FILTER FLOW EXP (DOE)

• DI SUPPLY DIAGRAMS

• OTHER

ACKNOWLEDGEMENTS

• OPERATIONS STAFF IN LITH WORKCENTERS

• BRIAN HANDEL

• JOE SUMMA & ENGINEERS

• DAN FULLERTON & BRIAN HARDING

• ERIC PREY

• ANDREW WELSH