Energy and Utility Savings With Vacuum and Abatement Systems

Jerome Boegner, Edwards Ltd.

Energy/Water efficient solutionsfor EUV and Epitaxial CVD processes

Evolution of ATLAS for high H2 processes

ATLAS

ATLAS - Combustion/wet abatement

• Burner/Washer system

• Unique “flameless” combustor– Reliability– Low NOx

• Proven PFC abatement performance

• World reference for the abatement of all Etch and CVD processes– Over 5,000 units in operation

Latest generation EPI and EUV processes – EHS challen ges

Edwards developed innovative & greener solutions to reduce

Footprint, Energy & Water consumption

Evolution of ATLAS for high H2 applications

Hydrogen (H2)

Hydrogen chloride (HCl)

Key abatement challengesKey abatement optimization

targets

EUVup to 400slm

per toolNone

1- Full combustion of H 2

2- Cooling of the burner exhaust3- Maintain tool Uptime

EPI4 PC

up to 500slm per tool

up to 120slm per tool

1- Full combustion of H 2

2- Cooling of the burner exhaust3- Scrubbing of HCl & avoid corrosion4- Maintain high Uptime

1- Minimize water & fuel gas consumption

2- Reduce footprint

Innovative solutions: ATLAS-Nova and ATLAS-Epi

Keep the StandardATLAS platform

No increasein footprint

Double H2 treatment capacity to 500slm

�Advanced inlet nozzle design�Modulated CDA/O2 injection�Up to 6 inlets

Double coolingCapacity &

Use anti-corrosion material

���� Increase water re-circulation rate���� PCW-fed heat exchanger

���� High efficiency spray tower& water spray nozzles

New ATLAS Solutions for High Hydrogen processes

Utility savings EUV

0

5,000

10,000

15,000

20,000

25,000

30,000

35,000

40,000

Natural gas (m3) Water (m3)

ATLAS "Evolution" Standard ATLAS

New ATLAS for EUV & EPI – Footprint, Energy & Water

69% reduction

26,000m3/yr

25% reduction

4,000m3/yr

Up to 19 Tons/yr of Carbon saved

Utility savings Epi CVD

0

10,000

20,000

30,000

40,000

50,000

60,000

Natural gas (m3) Water (m3)

ATLAS "Evolution" Standard ATLAS

76% reduction

40,000m3/yr

39% reduction

15,000m3/yr

50% reduction in Footprint

New ATLAS for EUV & EPI – Savings summary

Utility cost% m3/year % m3/year USD per year

EUV 69% 26,280 25% 4,205 $10,222

EPI 39% 14,717 76% 39,946 $14,372

Natural Gas Water

• Latest EPI and EUV process � severe abatement challenges– Hydrogen, exhaust cooling and corrosion

• The ATLAS abatement has evolved to deal efficiently with this type of process whilst achieving significant improvement in:– Sub-fab space utilization (50% footprint reduction)– Energy and water consumption– Operating cost

Integrated vacuum and abatement

Use of Green Modes to reduce Energy and Utility consumption

Field data - Cost savings during the Ramp-up phase

Idle Mode Communication to initiate Green Mode

EZenith in a 40kwpm Foundry Fab (USA)

Idle mode triggers a Green modein the sub-fab equipment

~ 400 process tools

81% idle mode capable

FabWorks Dry Pump Power Logging

Three Chamber Etch Tool - Abatement Fuel savings

A Summary Look at Four Examples

• Total expected annual savings is $5000 - $8,000 per tool– Verification will improve tracking– CVD tools with larger pumps and N2 will show larger savings– Continuous Improvement Plans will increase savings

• Savings expected to decrease as fab ramps

Utility General expectations

Etch 1 Etch 2 Etch 3 Etch 4

($/yr) ($/yr) ($/yr) ($/yr) ($/yr)

Pump Power $100-300 $280 $1293 $342 $64

On a per pump basis, Etch2 (with larger pumps) savings is higher. Etch 4 had low idle rates and uses highly efficient pumps. CVD pumps have N2 savings capabilities.

Atlas fuel $2000-$4000(total)

$3472 $5027

Higher idle time. Scrubber wastewater and process cooling water savings not counted.

Conclusion – Benefits of Green Mode

• During the ramp-up phase savings between $5,000 and $8,000 per tool can be expected

• Savings will decrease when the fab is used to its full capacity– Decrease in idle time

• As more Green Mode data is collected, further savings will be reported, accounting for:– Abatement water, drain and cooling water savings– Pump process cooling water savings– Use of larger pumps in CVD– Continuous Improvement - allowing further reduction in pump

speed during idle period

• Full details can be found in the article from the Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI:

– “Green Mode: Equipment Interface to Reduce Semicondu ctor Sub-Fab Utility Consumption” byAdrienne Pierce, Edwards Vacuum, Inc., Santa Clara, CA USA