an emerging dimension of internet-of - things...
TRANSCRIPT
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An Emerging Dimension of Internet-of-Things System – Chemical MEMS Sensors
Chih-Ting LinAssociate Professor
Department of Electrical EngineeringNational Taiwan University
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Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors
• Conclusion
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Introduction
• 3S in 3C– Simple– Secure– Smart
• IBM: smart planet – Ability to harness data giving competitive
advantages
• Intel: extended computing technology– Connect and enrich the lives on earth
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How to be Smart?• Learning from natures
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Proposed Systems• Internet of Things (IoT)•Machine-to-Machine
(M2M)
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Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors
• Conclusion
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Devices for Internet-of-Thing System
• Scalable– Orders of magnitude more (volume and variety)
• Sustainable– Orders of consumption less
• Smart– Autonomous and self-regulated
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Technologies in IoT Devices•Nature of de-centralization• Trend of miniaturization•Ubiquity of installation
8
Sensing
Communication
ComputationCos
t/mea
sure
men
t
Performance
9
90
250
MCU (MSP430)RF (Zigbee)
Gas Sensor (Fiagro)
Unit: mW
9
90
2.5 MCU (MSP430)
RF (Zigbee)
Gas Sensor (inkjet printed)
Unit: mW
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MEMS Devices• Boost the wave of smart technologies
– Acceleration, pressure, and gyros– Developed with over 20-year MEMS research– Major at the physical quantity sensing
Freescale accelerometer STMicro gyroscope MicroSesnorSystemPressure sensor
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Something Missing…
•Another dimension of worlds: chemical sensing– An emerging research field and market– Sensitivity, selectivity, and reliability
• In networking system– Limited resources– Local calibration– Collaborative sensing
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Outline
• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System
– MEMS Chemical Sensors– CMOS-MEMS Chemical Sensors
• Conclusion
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Why Chemical Sensing in MEMS?
•Harness the momentum of CMOS industries– MEMS
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MEMS Chemical Sensors• Surface acoustic wave (SAW) sensors
– Based on piezoelectric resonators– Different recognition materials to promote
selectivity
Afzal, et al., Analytica Chimica Acta, 2013
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E-Nose Based on SAW Sensors•Multiple sensing devices for different targets
Hao et al., Sensors Actuators B, 2010Pietrantonio et al., Biosensors Bioelectronics, 2013
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MEMS Chemical Sensors• Piezoresistive membrane with recognition
polymers
Guo et al., Sensors Actuators B, 2011
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MEMS Chemical Sensors• Capacitive micromachined ultrasonic
transducer (CMUT)
Park et al., Sensors Actuators B, 2011
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CMOS-MEMS Chemical Sensors• CMOS-MEMS capacitive humidity sensors
Lazarus et al., J Microelectromechanical Systems, 2010
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CMOS-MEMS Biomolecular Sensors• CMOS compatible biomolecular detection
technology– Microcantilever biosensors
Zheng, et al., Nature Biotechnology, 2005Boisen and Thundat, Materials Today, 2009
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Fully Integrated Microcantilever Biosensors
• CMOS Integrated Design– Piezoresistor can be used to monitor micro-
cantilever deflection
P-type (100) Silicon substrateField oxide 2900AWSix/Poly 1 2750A
Oxide 370AN+ Poly 2 (Resistance) 1800A
ILD-BPTEOS 4280A
M1 : TiN(ARC)/Al/TiN&Ti(glue layer) 6650A
Au/Ti 3000A+500A14430A
Etching position
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Fully Integrated Microcantilever Biosensors
Huang et al., Sensors Actuators B, 2013
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Fully Integrated Microcantilever Biosensors
Huang et al., Sensors Actuators B, 2013
• Fully integrated with CMOS circuits– Analog interface circuit– Full functional micro-controller
(8051 core)– 433MHz OOK TX/RX– Micro-cantilever biosensing
capability
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Conclusion
• IoT systems offer a value-up momentum for MEMS technologies
• A paradigm shift for sensor designs is needed in IoT– Communication promotes collaborative sensing
• MEMS platform offers a vehicle for devices in IoTsystems– Low cost, low power, and high computational capability
• CMOS-MEMS chemical sensor is an emerging direction to enrich IoT systems