ece606: solid state devices lecture 11 interface states...
TRANSCRIPT
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
ECE606: Solid State Devices
Lecture 11
Interface States Recombination
Carrier Transport
Gerhard [email protected]
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
2
1) SRH formula adapted to interface states
2) Surface recombination in depletion region
3) Conclusion
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Surface Recombination Current
3
( ) ( )
2
1 1
1 1i
bulk
p nT TN
np nR
n n p pc c N
−=+ + +
( ) ( ) ( )( ) ( )
2
1 1
1 1
−=
+ + +
s s i
s s s sp
T
s ns
Dn p nR E
n n pc c
E
p
E d
( )C
V
E
E
R R E dE= ∫
For single level bulk traps ….
( )( ) ( )
2
1 1
1 1i
p n
Tnp n
n n p pc c
N−=
+ + +
For single level interface trap at E …
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Case 1: Minority Carrier Recombination
4
( ) ( )( ) ( )( ) ( )
20 0
0 1 0 0
0 0
0 1
1 1
+ ∆
∆
+ ∆ − =+ + ∆+ + +
s s i
s s
s
s
s IT
s s sps ns
n p n
n
n p D E d
p
ER
pE
n n pc c
( )0
1
0
0
10
0
1
∆=
+ +
s IT
s ss
ps ps s ns s
s p D E dE
n pn
c c n c n
n
( )0
1 1
0 0
1
∆=
+ +
ps s IT
pss s
s ns s
c p D E dE
cn p
n c n
Donor doped
ns0+∆ns0
ps0+∆ps0
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Consider the Denominator …
5
( )
( )
( )
( )1i
F i
i
F i
ps
ns
E Ei
E E E Ei i
E Ei n ec
n
n
n
e
e ec− −
− − −
= + +β
β
β
β
1 1
0
1
0
11 1s s
ps ps
ns ns
ss s
D
s
D
n n
n n
c cD
c c
p p
N N= + + = + +
( ) ( )1 F FE E E Eps
ns
ce e
c− −= + +β β
( )1 x xFe ae x E E−= + + ≡ −β
ns0+∆ns0
ps0+∆ps0
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Consider the Denominator …
6
At 0 1 1 2psF i
ns
cE E E , x D small
c= > = = + + × ≈
FE 'FE
At 1 1psi ii
D ns D
cn nE E D
N c N= ⇒ = + + ≈
At 1 1 2F iE E ' E , D small= < = + + =
( ) ( )1
i iE E E Epsi i
D ns D
cn e n eD
N c N
β β− − −
= + +
iE
1
2
iEFE
D
FE '( ) ( )1 F FE E E Eps
ns
ce e
cβ β− −= + +
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Approximate the Denominator …
7
iE
FE 'FE
( ) ( )1
i iE E E Epsi i
D ns D
cn e n eD
N c N
− − −
= + +β β
iE
1
2
FE
D
FE '
1 for
otherwise
'F FE E E
D ≤ ≤
≈ ∞
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Integrated Recombination
8
( ) ( )0
1 1
0 0
1
∆= =
+ +
∫ ∫C C
V V
E Eps s IT
psE E s s
s ns s
c p D E dER R E
cn p
n c n
( )0≈ ∆∫F
'F
E
ps s
E
c p D E dE
FE 'FEiE
1
2D
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Surface Recombination Velocity
9
( )0≈ ∆∫F
F
E
ps s IT
E
R c p D E dE
Surface recombination velocity
( ) 0'
ps IT F F sc D E E p= − ∆
0sgs p= ∆
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
10
1) Nature of interface states
2) SRH formula adapted to interface states
3) Surface recombination in depletion region
4) Conclusion
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Case 2: Recombination in Depletion
11
( ) ( ) ( )( ) ( )
2
1 1
1 1
−=
+ + +
i IT
s sp
s s
s nss s
n p n D E
n
dER E
n pc c
p
( )
( )2 1
i
i
E E
ns IT iE Ens
ps
e dEc D n
ce
c
−
−= −
+
β
β
( )
( )2 1
C i
iV
E E E
ns IT iE EnsE
ps
e dER c D n
ce
c
−
−= −
+∫
β
β
ps~0
ns~0( ) ( ) ( )β β− − −= −+
i i
ii ITE E E E
i i
ps ns
nn D E dE
n e n e
c c
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Case 2: Recombination in Depletion
12
( )
( )2 1
i
i
E E
ns IT iE Ens
ps
e dEc D n
ce
c
β
β
+∞ −
−−∞
= −+
∫
( )
( )2 1
C i
iV
E E E
ns IT iE EnsE
ps
e dER c D n
ce
c
−
−= −
+∫
β
β
Ps~0
ns~0
20 1
psns IT i
ns
c dxc D n
c xφ
+∞
= −+∫
2ns ps IT ic c D nπβ= −
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Why do donors/acceptors not act as R-G
Centers?
13
( ) ( )0
1 1
0 0
1
ps sD
pss s
s ns s
c p D E dER E
cn p
n c n
∆=
+ +
FE 'FE iE
1
2D
( )0 0Dps
D
s Nc p
D E
∆= →
( ) ( )0
1 1
0 0
1
ps sA
pss s
s ns s
c p D E dER E
cn p
n c n
∆=
+ +
( )0 0Aps
A
s Nc p
D E
∆= →
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Summary
14
( )
Interface (depletion)2
Interface (minority)
Bulk (minority)
ns ps IT i
'ps IT F F s
p T
R c c D n
R c D E E p
R c N p
πβ= − ×
= − ∆
= ∆
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
ECE606: Solid State Devices
Lecture 12
Carrier Transport
Gerhard [email protected]
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
16
1) Overview
2) Drift Current
3) Physics of Mobility
4) High field effects
5) Conclusion
REF: Advanced Device Fundmentals, Pages 175- 192
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Current Flow Through Semiconductors
17
I
V
Depends on chemical composition, crystal structure, temperature, doping, etc.
Carrier Density
velocity
I G V
q n Av
= ×= × × ×
Transport with scattering, non-equilibrium Statistical Mechanics ⇒ Encapsulated into drift-diffusion equation with
recombination-generation (Ch. 5 & 6)
Quantum Mechanics + Equilibrium Statistical Mechanics ⇒ Encapsulated into concepts of effective masses
and occupation factors (Ch. 1-4)
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Non-equilibrium Systems
1
vs.
Chapter 6Chapter 5
I
V
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Summary of Transport Equations …
19
1∂ = − ∇ • − +∂
JP P P
pr g
t q
( )+ −∇ • = − + −D AD q p n N N
P P Pqp E qD pµ= − ∇J
1N N N
nr g
t q
∂ = ∇ • − +∂
J
J µ= + ∇N N Nqn E qD n
I
V
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
20
1) Overview
2) Drift Current
3) Physics of Mobility
4) High field effects
5) Conclusion
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Meaning of Effective Mass …
21
0m
*
nm
2 2
20
( ) (2
) ψ ψ
− + =
+ℏ
ecry xtsU Ud
xx Em dx
2 2
*0
2)
2( φ φ
− + =
ℏ
extU xd
Edxm
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Drift by Electric field ….
22
n nJ qnµ= E
* *( )υ υτ
= − −n n
n
d m mq
dtE
*( ) 1 ττυ
− = − −
n
t
n
n
qt e
mE x x x x
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Drift by Electric field ….
23
*( ) 1 ττυ
− = − −
n
t
n
n
qt e
mE
*( , 1-2 ps)
τ= − → ∞n
n
tq
mE
µ≡ nE
n nJ qnµ= Eυ
x x x x
time(Theory valid once t > 1-2 ps)
friction
1( )υ E
2( )υ E
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
24
1) Overview
2) Drift Current
3) Physics of Mobility
4) High field effects
5) Conclusion
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Mobility and Physics of Scattering Time
25
*
τµ =n
nn
q
m0m
*
nm
Fermi’s Golden rule …
2
1 *2( ) ( ) ( )
π ψ ψτ∞
−
−∞∫∼
ℏn x U x x dx
x x x x
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Phonon and Ionized Impurity Scattering
26
0m
*
nm
3 2~n Tτ −
Higher temperature, more phonon scattering
Ionized impurity
3 2
~nD
T
Nτ
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Multiple Scattering Events
27
1 1 1 1
phIIn s
= + + +⋯τ τττ
*
nm� Ionized impurity
� Phonon scattering� others ….
1 1 1
p IIn hµµ µ= +
*1 n
n n
m
qµ τ=
Matthession Rule ….
IIn
II
ph
ph
µµ
µµ
µ⇒ =
+
min minp
I
h
h
II
Ip
µµ
µ µµ
µ
= + − +
( )0
min
01 IN Nα
µµ
= + +
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Model for Ionized impurity Scattering
28
*
nm
( ),mi0,
0,
n1 nn
I n
nn
N Nαµ
µµ
= + +
,minnµ
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Temperature-dependent Mobility
29
3 2~n n Tµ τ −∼
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Outline
30
1) Overview
2) Drift Current
3) Physics of Mobility
4) High Field Effects
5) Conclusion
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Mobility at High Fields?
31
01*
1
τ µυ µ= ≡ ⇒
+
NN
nN n
C
q
mE E E
E
E
E
What causes velocity saturation at high fields?
Where does all the mobility formulain device simulator come from?
x x x x
( )υ E
cE
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Velocity Saturation in Si/Ge
3
10 0JJ J −+= = − =E
2 1c J JJ J−+= − >≪E E
3 2c JJ JJ −+≈ = − >E E
4 3c J JJ J−+= − ≈≫E E
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Velocity Overshoot & Inter-valley Transfer
33
What type of scattering would you need for inter-valley transfer?
Smaller m*
Larger m*
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Doping dependent Resistivity
34
ρ= JE
( )µ µ= +n pq n pJ E
1
( )n pq n pρ
µ µ=
+1
for n-typen Dq Nµ
= …
1= for p-type
p Aq Nµ…
J
V
Klimeck – ECE606 Fall 2012 – notes adopted from Alam
Conclusion
35
1) Poisson and drift-diffusion equations form a complete semi-classical transport model that can explain wide variety of device phenomena.
2) Drift current results from response of electrons/holes to electric field. The physics of mobility is complex and material dependent.
3) Constancy of low-field mobility can be checked by experiments.