Challenges For fab and maintenance managers who do not have up-to-date equipment data and flexible scheduling capabilities, equipment maintenance can be inefficient and costly. The high cost of operating equipment in facilities requires more predictable parts and consistent maintenance management procedures.

Enterprise resource planning (ERP) systems offer maintenance management software modules, but they do not have equipment-centric data and knowledge essential to derive optimum maintenance schedules. To arrive at an optimum equipment maintenance schedule, factory equipment information is crucial, which is not available in ERP systems.

Solution DescriptionApplied Xsite is an equipment-centric computerized maintenance management system (CMMS) that automates maintenance management of capital equipment and assets in a fab. It provides comprehensive maintenance scheduling, enables factory-wide creation of unscheduled maintenance, generates alarms, and tracks maintenance activities, resources and materials based on input from equipment, people, MES and ERP systems, and other factory systems.

Unlike many preventive maintenance (PM) modules included with ERP systems, which have limited capabilities for semiconductor operations, Xsite is the only equipment maintenance asset management product developed specifically for the semiconductor industry, providing in-depth semi equipment hierarchy, configurability and state modeling essential for consistently achieving optimum equipment maintenance schedules. MES InTEgRATIon. Xsite can be integrated with any MES. To optimize manufacturing, Xsite is fully integrated with FACToRYworks®—working on the same factory model. It improves throughput and production by tracking equipment states and activities down to individual chambers in cluster tools. With this information, the MES can more accurately assess the availability of tools even in downgraded yet operational states. Xsite is also integrated with the Applied E3™ and APF RTD® solutions, providing real-time scheduling, new requests, current job activity and upcoming maintenance data to support work in process reallocation when necessary.

APPLIED XsiteTM

ComPutErIzED mAIntEnAnCE mAnAgEmEnt SyStEm (CmmS)

The only maintenance management product developed specifically for the semiconductor industry that manages factory equipment throughout the entire maintenance life cycle and enables factory-wide creation of schedules.

Industries > Semiconductor wafer manufacturing

> Display manufacturing

Features > Planned, scheduled and unscheduled maintenance management

> Comprehensive maintenance scheduling options

> Cluster & complex tool management

> graphical visualization of factory equipment status

> Provision of data for audit compliance and continuous improvement

> Integration with Applied Materials software & other MES & ERP solutions

Benefits > Increases factory equipment (asset) availability and efficiency

> Reduces labor and parts costs

> Enables equipment maintenance work consistency

> Improves record keeping of equipment maintenance activities

Xsite manages manufacturing assets through the entire maintenance life cycle. It provides equipment-centric data and knowledge essential for developing

and tracking optimum maintenance schedules.

XsiteTM

APPLIED XsiteTM

ComPutErIzED mAIntEnAnCE mAnAgEmEnt SyStEm (CmmS)

3050 Bowers Avenue, Santa Clara, CA 95054-3298 (408) 727-5555© Applied Materials, Inc. 2014. Applied Materials, the Applied Materials logo and Applied Global Services is a trademark of Applied Materials, Inc. in the U.S. and other countries. All rights reserved. All other trademarks are the property of their respective owners. Printed in the U.S.A., AGS-APG-0610-009

This status board displays graphical images of the equipment with indicators that show current status.

APPlIED MATERIAlS EXPERTISE. Applied Material has domain experts who can support business improvement initiatives in maintenance management. With a deep knowledge base and a rich history of providing products and solutions specifically addressed to the semiconductor industry, our experts provide services to deliver turnkey solutions for enhancing manufacturing value in a timely manner. These solutions are backed by strong development and support teams who are available to ensure continuous product growth, providing customers with low cost of ownership.

This sample report shows the percentage of time that the specified equipment has been in various states (Production, Standby, Engineering, Scheduled Down and so forth).

Xsite supports integration with multiple MES products, including FACTORYworks, PROMIS and SiView. Interfaces are also available between Xsite and E3, APF RTD and SPACE.

Xsite Capabilities for Effectively Automating Maintenance Management

Integration with key factory systems

Integrates with key factory systems, including equipment cost tracking, technician tracking & scheduling, spare parts inventory, equipment APC, technician certification system and MES WIP processing. Xsite controls assets, people and tasks throughout the complete asset life cycle.

Spare parts management optimizes spare parts inventory management across the enterprise using real-time integration with ERP packages.

Equipment asset configuration

Provides equipment and work templates so users can significantly reduce the effort required to configure overall maintenance procedures.

Maintenance task scheduling

Provides multiple methods for maintenance scheduling—calendar-based, usage-based, condition-based, multiple triggers, grouping and the ability to create custom scheduling methods.

Business process customization

Enables users to extend or add new maintenance management rules to meet the needs of dynamic manufacturing environments.

Equipment reporting & analysis

Provides extensive reporting and analysis, including standard reports on equipment status, preventive maintenance jobs, costs, resource usage and replacement part evaluation. It also offers real-time information on equipment uptime, utilization, availability, repair parts stock and MTTR/MTBF using SEMI E10 standard calculations.

From the Xsite Factory Modeling window, users can track maintenance for equipment. This example shows various equipment with corresponding PMs that are due based on the selection in the left pane. Operators can clock-on, clock-off, delay jobs and view additional work order details such as checklists and parts/resources.

Integration and Data Sharing