c08: effect of on-chip magnetic shielding for tes microcalorimeters
DESCRIPTION
Cross Section. Au Abs. a. b. Ti / Au. Nb. SiO 2 membrane. Al. SiNx membrane. Si. C08: Effect of on-chip magnetic shielding for TES microcalorimeters. SII-182. a. TES calorimeter needs a magnetic shield to work stably. 350 µm. b. - PowerPoint PPT PresentationTRANSCRIPT
C08: Effect of on-chip magnetic shielding for C08: Effect of on-chip magnetic shielding for TES microcalorimetersTES microcalorimeters
Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi,
T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),,
K. Tanaka 3)
Department of Physics, Tokyo Metropolitan Univ.
2) ISAS/JAXA, 3) SII Nano-Technology
350 µm
SII-182
a
b
SiNx membraneAl
Nb Ti/Au
Au Abs.ba
Cross Section
Si
SiO2 membrane
On-chip Mag shieldCurrent
TES calorimeter needs TES calorimeter needs a magnetic shielda magnetic shieldto work stably.to work stably.
300T
0T
6T0T
26T
300T
100T
SII-14b
SII-182
SII-14b(no shield)
SII-182On-chip shield