C08: Effect of on-chip magnetic shielding for C08: Effect of on-chip magnetic shielding for TES microcalorimetersTES microcalorimeters

Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi,

T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),,

K. Tanaka 3)

Department of Physics, Tokyo Metropolitan Univ.

2) ISAS/JAXA, 3) SII Nano-Technology

350 µm

SII-182

a

b

SiNx membraneAl

Nb Ti/Au

Au Abs.ba

Cross Section

Si

SiO2 membrane

On-chip Mag shieldCurrent

TES calorimeter needs TES calorimeter needs a magnetic shielda magnetic shieldto work stably.to work stably.

300T

0T

6T0T

26T

300T

100T

SII-14b

SII-182

SII-14b(no shield)

SII-182On-chip shield