applying cga g13- rev 2015 to gas delivery equipment

Gas Cabinets and Valve Manifold Boxes:

Applying CGA G13- Rev 2015 to Gas Delivery Equipment

The Standard Governing the Storage & Use of Silane:Compressed Gas Association’s Publication CGA G-13 2015:

“Storage and Handling of Silane and Silane Mixtures”1. Outdoor Storage & Use – Section 62. Indoor Storage & Use – Section 73. System Configuration for Cylinder Sources – Section 84. System Configuration for Bulk Sources – Section 95. Piping & Components – Section 106. Gas & Flame Detection – Section 117. Fire Protection System – Section 128. Ventilation System – Section 139. Venting & Treatment – Section 1410.Purge Gas System – Section 1511.Electrical Requirements – Section 1612.Fundamental Supervisory Control Requirements – Section 17

The Standard Governing the Storage & Use of Silane:Compressed Gas Association’s Publication CGA G-13 2015:

Why You Must Follow the Standard with this Gas

2005 Silane Explosion - Taiwan

Result of the Explosion:

Gas Cabinet Explosions:Silane released into a Gas Cabinet followed by an Explosion:

• Germany, 1976 – 1 fatality

• Japan, 1989 – 1 fatality & 1 injury

• Japan, Dec. 1989 – 2 fatalities & 2 injuries

• US, Jan 1992 – 1 injury

• US, 1996 – No injuries

• Japan, 1996 – 1 fatality

• US, 2003 – No injuries

• US, 2005 – 2 injuries

• Taiwan, 2005 – 1 fatality

• India, 2007 – 1 fatality

• China, 2009 – 1 injury

• China, 2010 – 1 Injury

* Data from 2012 Silane Safety Seminar

Why is Critical Systems Presenting on this Topic?

• CSI’s History – 17 years Supplying Gas Delivery & Abatement Equipment

• CSI’s Background – High Production Semiconductor Fabs

• What we Hear when we talk with Potential Customers

• What we See when we go to Customer’s Sites

• Dangers of Silane & Desire to Promote Safety

Focus of the Presentation:

1. Tubing & Components

2. Gas Cabinets for Cylinder Use

3. Gas Rack Units

4. Valve Manifold Boxes / Enclosures

Tubing & Components Required per CGA G-13:1. Tubing Connections – Section 10.1.2

a. Welded Fittings & VCR Acceptable – No Compression!b. Metal Gaskets Only – No Teflon or PCTFE



2. COAX– Not Required Unless Silane is Mixed with a Toxic – Section 10.1.3

3. Process Valves – Diaphragm or Bellows Only - Section 10.2.1

4. Check Valves – Cannot be Sole Means of Backflow Prevention - Section 10.2.2.1

5. Regulators – Section 10.2.2.2a. Metal Diaphragms Requiredb. Bonnet Relief Vents Required

6. Restricted Flow Orifice is Required – Max Size 0.010 – Section 10.2.4

Tubing & Components Required per CGA G-13:




2. COAX– Not Required Unless Silane is Mixed with a Toxic – Section 10.1.3

3. Isolation Valves – No Packed Valves - Section 10.2.1

4. Check Valves – Spring Opposed, Positive Shutoff - Section 10.2.2.1a. Cannot be sole means of preventing backflow

5. Regulators – Section 10.2.2.2a. Metal Diaphragms b. Bonnet Relief Vents Required


7. Excess Flow Control Required – Section 10.2.5a. Valves, Control Devices, Flow Control Systems are Allowedb. Capable of Manual Reset AFTER Corrective Action

Gas Cylinder Cabinets:

Gas Cylinder Cabinet CGA G-13 Requirements:1. G-13 Definition of Gas Cabinet–Section 8.2.2

1. Cabinet/Enclosure, Controller, Gas Panel2. Connected to Scrubbed Exhaust3. Lockable Windows to View & Operate Gas Panels4. Control System Outside the Cabinet5. Controller enables Auto-Purge Procedures

2. 2 Cylinders in a Gas Cabinet– Separation Plates / Single Cabinets- Section 10.2.2.1

3. Gas Monitoring – All Connections Must be Monitored for Leaks - Section 11.1.2a. Indoor Storage – Gas Monitoring or Optical Flame Detection Systemb. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1

a. Not Less than 5 Duct Diameters Downstream of Enclosure Connectionc. Alarm @ 50 ppm – Shutdown V0, Local Alarm, Transmit to Constantly Attended Location –

Sections 11.1.4.1; 11.1.5.1 & 11.1.6

1. G-13 Definition of Gas Cabinet–Section 8.2.21. Cabinet/Enclosure, Controller, Gas Panel2. Connected to Scrubbed Exhaust3. Lockable Windows to View & Operate Gas Panels4. Control System Outside the Cabinet5. Controller enables Auto-Purge Procedures

2. Less than 30 psi Cylinder Pressure – Don’t need a Gas Cabinet– Section 7.11

3. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2a. On the Cylinder or Close Coupled to the Cylinder Connectionb. Remote Shutdown - ESO Button (Sec 6.4.1) - Gas Monitor - UVIR (Sec 6.4.1.2)




Sections 11.1.4.1; 11.1.5.1 & 11.1.6

Gas Cylinder Cabinet CGA G-13 Requirements:







Sections 11.1.4.1; 11.1.5.1 & 11.1.6


6. Flame Monitoring– Shuts the Gas Supply at the Source - Section 11.2.2a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1b. Inside the Gas Cabinet or Enclosure – Required - Sec 11.2.2.2

7. Fire Protection System– Quick Response Sprinkler Head - Water Only– Section 12.3.1a. Desire is to Keep the Cylinder Cool and Not put out the Fire

8. Emergency Power – Delivery Systems Must Fail Safe – Section 16.2

9. Supervisory Control Requirements – Section 17.1a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Offb. Piping with Breakable Connections – Gas Monitor & Flame Detection


6. Flame Monitoring– Shuts the Gas Supply at the Source - Section 11.2.2a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1b. Inside the Gas Cabinet or Enclosure – Required - Sec 11.2.2.2

7. Fire Protection System– Quick Response Sprinkler Head - Water Only– Section 12.3.1a. Desire is to Keep the Cylinder Cool and Not put out the Fire

8. Emergency Power – Delivery Systems Must Fail Safe – Section 16.2

9. Supervisory Control Requirements – Section 17.1a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Offb. Piping with Breakable Connections – Gas Monitor & Flame Detection

10. Ventilation System–Section 13.2a. Continuous Exhaust - Requiredb. Non-combustible Ductwork - Requiredc. Required Airflow 250:1 Volume Ratio – Section 13.2.3d. Failure in Ventilation System – Local Alarm & Transmission to Constantly Attended Locatione. Enclosures Designed to Prevent Pocketing – Section 13.2.4f. Unattended Operations – Table 6


11. Silane Venting & Treatment - Section 14a. If No Toxics - Gas from Cycle Purging dilute with Inert Gas, Open Air Disposal - Sec 14.2b. Mixed with Toxics – Abate with Appropriate Scrubberc. Treatment System Must be designed for Silane - Section 14.3d. Vent into Ducts - < 25% of the LFL or 0.34% if Ignition is Only Concern– Section 14.4e. Must have a Dedicated Process Vent – Section 14.5f. Vent Stack Designed to Prevent Thermal Radiation from Causing Harm - Section 14.5g. Purge through Venturi on Gas Panel must be Continuous – Section 14.5.1


12. Purge Gas System - Section 15a. Must use Vacuum in Combination with Purge Gas – Section 15.1b. Must use a Dedicated Purge Bottle – Section 15.2


12. Purge Gas System - Section 15a. Must use Vacuum in Combination with Purge Gas – Section 15.1b. Must use a Dedicated Purge Bottle – Section 15.2c. Cannot use House Gas for Purging – Section 15.2.1d. Can use House Gas for Venturi Vents – Section 14.5e. Must have a Check Valve before the Venturi – Section 15.4.2f. Panel Consists of Dedicated Supply, Regulator, Relief Valve, Check Valve & Low Purge

Gas Alarm – Section 15.3


Purge Gas Panel:

CGA G-13 Requirements for Gas CabinetsContainers > 14 liters & Concentrations > 1.36%• Automatic Shutdown (Cabinet & 1 Remote)• Z-Purge in Controller• Vacuum Venturi for Purge/Vent• Exhaust Monitor• Sprinkler – Quick Response Head• UVIR Flame Monitor / Gas Monitor• Dedicated Purge System• Excess Flow Switch or Valve• Regulator Bonnet Vent Line• Low Purge Gas Pressure Alarm• Check Valve on Purge Panel• AOP on Cylinder or Close Coupled Shutoff Valve• Cylinder Isolation - Separate Cabinet or Steel Plate• High Flow Gas Cabinet Vents• Enclosure Designed to Eliminate Pocketing

Gas Rack Units:

Gas Rack Unit G-13 Requirements:1. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2

a. On the Cylinder or Close Coupled to the Cylinder Connectionb. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec 6.4.1.2)

2. Separation Plates between Cylinders - Section 6.4.2a. 1/4” Thick Steel Plates – Minimum 18” Below & 6” Above Centerline of Valve or “Other

Means of Providing Equivalent Protection”

3. Purge Panel Requirements – Same as Gas Cabinets – Section 8.1.3

4. Gas Monitoring – Not Required - Section 11.1.1

5. Flame Detection – Section 11.2.1a. Required in Potential Leak Zonesb. Approved for Outdoor Silane use with no False Trips from Artificial Sources

6. Ventilation Systems – Section 13.1.1a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces

7. Supervisory Control Requirements – Section 17.1a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Usedb. Flame Detection with Source Shutdownc. Emergency Shut off at Exits

1. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2a. On the Cylinder or Close Coupled to the Cylinder Connectionb. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec 6.4.1.2)

2. Separation Plates between Cylinders - Section 6.4.2a. 1/4” Thick Steel Plates – Minimum 18” Below & 6” Above Centerline of Valve or “Other

Means of Providing Equivalent Protection”

3. Purge Panel Requirements – Same as Gas Cabinets – Section 8.1.3

4. Gas Monitoring – Not Required - Section 11.1.1

5. Flame Detection – Section 11.2.1a. Required in Potential Leak Zonesb. Approved for Outdoor Silane use with no False Trips from Artificial Sources

6. Ventilation Systems – Section 13.1.1a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces

7. Supervisory Control Requirements – Section 17.1a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Usedb. Flame Detection with Source Shutdownc. Emergency Shut off at Exits

Gas Rack Unit G-13 Requirements:

Typical Outdoor Cylinder Layout:

Setback Distances and Openness Requirements–Section 6a. Distances to Exposure for Outdoor Cylinders – Section 6, Table 3

Containers > 14 liters & Concentrations > 1.36%• Automatic Shutdown (Cabinet Sensors & Remote)• Z-Purge in Controller• Emergency Shutoff• Sprinkler• Vacuum Venturi for Purge/Vent• UVIR Flame Monitor• Excess Flow Switch• Low Pressure Purge Gas Alarm• AOP Cylinder Shutoff Valve (Close Coupled is OK)• Check Valve on Purge Gas• 1/4” Steel Plate (6” Above/18” Below – Centerline

of Cylinder Valve

CGA G-13 Requirements for Rack Units

Valve Manifold Boxes / Enclosures:

Valve Manifold Box CGA G-13 Requirements:1. Description–Nothing in Code says you can’t use a Manual VMB - Section 8.2.4.1

a. CAN BE Controlled Automaticallyb. Emergency Gas Shutoff & Purging MAY BE Accomplished with Automated VMB

2. Branch Purging –from Non Dedicated Source if Backflow Prevention - Section 8.2.4.2

3. Gas Monitoring –Section 8.2.4.3a. Same as Gas Cabinet per - Section 11.1.2b. Activation of Gas Monitoring Shuts Source of Gas (at VMB or Cabinet)

4. Flame Detection – Section 11.2.2a. Same as Gas Cabinet per - Section 11.2.2b. Activation of Flame Monitoring Shuts Source of Gas (at Cabinet)

5. Fire Protection – VMBs not Mentioned – Section 12.3

6. Ventilation Systems – Section 13.2a. Same as Gas Cabinet Requirements – See Table 6 for Exhaust Flow Rates

7. Supervisory Control Requirements – Section 17.1a. Exhaust & Gas Monitoring, Flame Detection

• Individual Stick Shutdown• Z-Purge in Controller• Tool Gas Monitoring Shuts Down Stick -

VMB Gas Monitoring Shuts Down the Cabinet • Emergency Shutdown• Exhaust Monitoring • Enclosure Design to Eliminate Pocketing• UVIR Flame Monitor• High Flow Enclosure

CGA G-13 Requirements for Valve Manifold Boxes

Silane Gas Installation Supplement:

• Supplement from UNIDOCS based on California Fire Code helps when applying for Silane permit.

• Covers Key Code Aspects of Silane Systems and points to where in your submittals they reside.

Summary of Air Products Internal Safety Requirements for Silane(note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place)

U.S. RequirementsAll SilaneSystems

Additional Requirementsfor Enclosed Systems

AdditionalRequirements for SourceSystems

• UVIR Detector • Gas Monitor• Exhausted Enclosure for Indoor Equipment• Dedicated Purge System • High Pressure not liquid bulk (Purge Source) • Overpressure Protection• Process Vent Dedicated to Silane• Continuous Purge on Vent Line• Electrical Hazardous Area Protection• Secondary Containment (recommended)

• Access / View Port for Distribution Systems• Access Port for Source Systems• Exhaust Monitor• Automatic Door and Window Closures• Ventilation > 250 times potential Leak Rate

• RFO in Source Container Valve• 0.010” RFO Max for Cylinders• Sprinkler• Captured Bonnet Relief Vents• Emergency Shutoff System• Excess Flow Protection• Metal Separation Plates• Remote Emergency Stop

• Trickle Purged Vent Header• Welded Fittings / Breakable Connections• Process Vent• Vacuum System• Backflow Prevention• Cylinder Isolation Valves• Pressure Indication• Compatible Materials• Equipment and Hazard Labels

• Separation Plates or Individual Cabinets• 150 ft/min Min – Open Window Velocity• 200 ft/min Ave – Open Window Velocity• No Pocketing in Enclosure

• 12 gauge Sheet Metal for Enclosures• Pressure Regulation • Controller• Cylinder Restraints• Provisions for Seismic Anchoring• All-Welded Pigtail• Automated Purging• High Pressure Leak Test

Summary of Air Products Internal Safety Requirements for Silane(note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place)

U.S. RequirementsAll SilaneSystems

Additional Requirementsfor Enclosed Systems

AdditionalRequirements for SourceSystems

• UVIR Detector – Sec 11.2.2• Gas Monitor – Sec 11.1.2• Exhausted Enclosure for Indoor Equipment – Sec 7.11• Dedicated Purge System – Sect 15.2• High Pressure not liquid bulk (Purge Source) – Sec 15• Overpressure Protection – Sec 10.2.6• Process Vent Dedicated to Silane - Sec 10.1.4.3• Continuous Purge on Vent Line – Sec 14.5.1• Electrical Hazardous Area Protection – Sec 16 & 17.1• Secondary Containment (recommended) - Sec 10.1.3

• Access / View Port for Distribution Systems• Access Port for Source Systems – Sec 8.2.2• Exhaust Monitor – Sec 13.2.5• Automatic Door and Window Closures• Ventilation > 250 times potential Leak Rate – Sec 13.2.3

• RFO in Source Container Valve – Sec 10.2.4• 0.010” RFO Max for Cylinders – Sec 10.2.4.1• Sprinkler – Sec 12.3.1• Captured Bonnet Relief Vents – Sec 10.2.2.3• Emergency Shutoff System – Sec 10.2.3• Excess Flow Protection – Sec 10.2.5• Metal Separation Plates – Sec 6.4.2• Remote Emergency Stop – Sec 10.2.3

• Trickle Purged Vent Header• Welded Fittings / Breakable Connections – Sec 10.1.2• Process Vent – Sec 10.1.4.3 & Sec 14• Vacuum System – Sec 13.2• Backflow Prevention – Sec 10.2.2 & Sec 15.3.1• Cylinder Isolation Valves – Sec 8.1.2 & Sec 9.3.2• Pressure Indication – Sec 15.3.2• Compatible Materials – Sec 7.10 & Sec 10.1.4.3• Equipment and Hazard Labels – Sec 8.2.2.2 & 10.1.6• Check Valves on Purge Gas - Sec 15.4.2

• Separation Plates or Individual Cabinets - Sec 6.4.2• 150 ft/min Min – Open Window Velocity – Table 6• 200 ft/min Ave – Open Window Velocity – Table 6• No Pocketing in Enclosure – Sec 13.2.4

• 12 gauge Sheet Metal for Enclosures• Pressure Regulation – Sec 10.2.2.2• Controller – Sec 6.4.1 & Sec 6.4.1.2• Cylinder Restraints• Provisions for Seismic Anchoring• All-Welded Pigtail -Sec 10.1.2• Automated Purging – Sec 15.1• High Pressure Leak Test - Sec 10.1.5

In Closing:1. Silane can be Deadly

2. Your local AHJ “Authority Having Jurisdiction” needs to be involved in the process before you bring this gas in – Provide “Silane Gas Installation Supplement” for headache relief

3. Always enlist a qualified Engineering Firm – knowledgeable about Silane - to help design and assure compliance with all Applicable Standards & Codes

• ANSI/CGA G-13 - NFPA 318 & 55 – IFC Chapters 18, 27, 30 & 41

• FM Global 7-7 - EMI S18

4. In conjunction with your Engineering Firm, develop a Silane Procedures Manual and Train your Technicians how to operate/maintain the systems properly

5. Don’t sidestep a Quality Gas System because it’s more expensive than you budgeted.

a. Find companies like ours that manufacture high quality systems and are familiar with Code and Safety requirements

b. Make sure that their systems are CGA Code G13 Compliant

6. Purchase a copy of the Standard and read it.

http://www.criticalsystemsinc.com/

applying cga g13- rev 2015 to gas delivery equipment

Documents