an introduction to sims and the minisims tof © millbrook instruments limited blackburn, uk
TRANSCRIPT
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An Introduction
to SIMS and
the MiniSIMS ToF
© Millbrook Instruments Limited Blackburn, UK
www.millbrook-instruments.com
www.minisims.com
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Secondary Ion Mass Spectrometry (SIMS)
&
The Millbrook MiniSIMS
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The SIMS Process
simulation courtesy of Dr Postawa Zbigniew
at the Jagiellonian University in Poland
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A Conventional SIMS System
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The MiniSIMS Instrument
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Design Objectives
• Increase routine use of Surface Analysis
– more affordable– more accessible
• Not a replacement for conventional SIMS
– not state-of-the-art performance– restricted analysis conditions
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Transform one of these …..
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….. into one of these.
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Operational Strengths
• Low Capital & Running Costs
• Fast, On-Site Analysis
• Compact Design, Single Electrical Supply
• Full Automation & Control for Ease of Use
• High Reliability
• Rapid Sample Throughput
• Simplified Data Interpretation
• Remote Control via Internet
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Typical Application Areas
• Surface Coatings
• Surface Treatments
• Electronic Components
• Semiconductors
• Electrodes & Sensors
• Catalysts
• Adhesives
• Lubricants
• Packaging Materials
• Corrosion Studies
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Alternatives to a MiniSIMS ?
• No Other Benchtop SIMS Instrument
• Conventional SIMS Systems
– much more complex and expensive
• Contract Analysis Laboratories
– not convenient, contamination during transport
• Other Surface Analysis Techniques
– generally less sensitive
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Comparison of
SEM / EDS and SIMS
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Advantages of SEM / EDS
• High magnification physical image
• Quantitative elemental information
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Advantages of SIMS
• Surface specific analysis
• Organic structure identification
• Profiling for depth distribution
• Light element detection
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EDX sampling depth is typically 1 micron
For many applications surface sensitivity is needed…
Not 10 xNot 100 xBut 1000 x – SIMS can offer true surface analysis
509 m
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Conclusions
• SIMS & EDS give complementary information
• SIMS has advantages for
– Organic surface contamination– 3 dimensional analysis of multi-layer structures
• SEM / EDS has advantages for
– High magnification physical imaging– Quantitative analysis
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MiniSIMS ToF
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Typical Applications for the MiniSIMS ToF
• Analysis of unknown samples (failure analysis)
• Analysis of unique samples
• Improved analysis of organic materials
• Smaller area static SIMS analysis
• Retrospective experiments
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MiniSIMS ToF
• Advantages over Quadrupole Instrument
– Smaller area static SIMS analysis
– Extended mass range
– Higher mass resolution (organic v inorganic)
– Retrospective experiments
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MiniSIMS ToF
• Use of Continuous Primary Beam
– Fast analysis (= low cost per sample)
– No loss of image resolution in pulsing
– Simplified depth profiling (single beam)
• Fast & simple static / imaging / dynamic
SIMS in one instrument
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Static SIMS (Surface Analysis)
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Polycarbonate (Bisphenol–A)
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Characterisation of Layer
Structurally significant peaks
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Characterisation of Layer
Structurally significant peaks
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Effect of Decreasing Area
Analysis Area
Dimension
Mass Scale
Quadrupole Data
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Effect of Decreasing Area
Analysis Area
Dimension
Mass Scale
Time of Flight Data
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Higher Mass Resolution
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Higher Mass Resolution
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High Mass Peaks (KI)
0
100
200
300
400
350 550 750 950 1150 1350
Mass
Inte
nsi
ty
Extended Mass Range
K9I8
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Extended Mass Range
ToF –ve ion mode: Irganox molecular ion at m/z = 1175 Da
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Imaging SIMS (Spatial Analysis)
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Surface Organic Contaminant Analysis
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Retrospective Analysis
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Retrospective Analysis
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Retrospective Analysis
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Dynamic SIMS (Depth Analysis)
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Multi-Layer Coating
(Three Dimensional Analysis)
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Retrospective Profiling
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Conventional Profile
Sodium high at surface
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Retrospective Cross-Section
Sodium inclusion in layer
Sodium high at surface
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Retrospective Profiling
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Retrospective Analysis
Horizontal Image of inclusion
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Summary
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MiniSIMS Summary
• SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films
• Information easily available by SIMS may be difficult or impossible by any other technique
• SIMS is especially valuable for the detection of:-– organic species (e.g. silicones, fluorocarbons)
– light elements (lithium, beryllium, boron …)
– group IA & IIA metals, group VII halides
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MiniSIMS Summary
• SIMS is a fast analysis technique, especially for imaging applications
• MiniSIMS ToF is most effective for a comparative analysis of samples
• Desktop MiniSIMS means SIMS is now affordable and accessible to all
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ToF MiniSIMS( v conventional ToFSIMS )
• Use of Continuous Primary Beam– Fast analysis (= low cost per sample)
– No loss of image resolution in pulsing
– Simplified depth profiling (single beam)
• Fast & simple static / imaging / dynamic
SIMS in one instrument
• Upgrade path from Quadrupole to TOF
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ToF MiniSIMS( v quadrupole MiniSIMS )
• Improved Static SIMS from smaller areas• Retrospective Experiment
– 2D Imaging– 3D Imaging / Depth Profiling
• Extended Mass Range• Higher Mass Resolution
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