an introduction to sims and the minisims alpha © millbrook instruments limited blackburn, uk
TRANSCRIPT
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An Introduction
to SIMS and
the MiniSIMS alpha
© Millbrook Instruments Limited Blackburn, UK
www.millbrook-instruments.com
www.minisims.com
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Secondary Ion Mass Spectrometry (SIMS)
&
The Millbrook MiniSIMS
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The SIMS Process
simulation courtesy of Dr Postawa Zbigniew
at the Jagiellonian University in Poland
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A Conventional SIMS System
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The MiniSIMS Instrument
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Design Objectives
• Increase routine use of Surface Analysis
– more affordable– more accessible
• Not a replacement for conventional SIMS
– not state-of-the-art performance– restricted analysis conditions
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Transform one of these …..
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….. into one of these.
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Operational Strengths
• Low Capital & Running Costs
• Fast, On-Site Analysis
• Compact Design, Single Electrical Supply
• Full Automation & Control for Ease of Use
• High Reliability
• Rapid Sample Throughput
• Simplified Data Interpretation
• Remote Control via Internet
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Static SIMS (Surface Analysis)
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Static SIMS (Surface Analysis)
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Characterisation of Layer
Structurally significant peaks
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Characterisation of Layer
Structurally significant peaks
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Light Element Detection
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Dynamic SIMS (Depth Analysis)
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Dynamic SIMS (Depth Analysis)
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Before Annealing
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After Annealing
Copper has
diffused into
silicon oxide
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Profile Before Annealing
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Profile After Annealing
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Imaging SIMS (Spatial Analysis)
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Imaging SIMS (Spatial Analysis)
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Distribution of Organic Film
• Incomplete coverage of both organic and inorganic components in a battery electrode
• CxHyOz- (blue) and Li+
(red) on Al+ (green)
• Image size 4.5 mm x 4.5 mm
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Distribution of Metal Overlayer
• Uneven coverage of the silver coating on the contacts of a semiconductor connection frame
• Cu+ (red) and Ag+
(green)
• Image size 3.0 mm x 3.0 mm
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Typical Applications for the MiniSIMS alpha
• Repetitive analysis (quality monitoring)
• Large area organic surface contamination
• Fast imaging of millimetre scale areas
• 3 dimensional analysis of multi-layer structures
• Comparative rather than quantitative analysis
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Typical Application Areas
• Surface Coatings
• Surface Treatments
• Electronic Components
• Semiconductors
• Electrodes & Sensors
• Catalysts
• Adhesives
• Lubricants
• Packaging Materials
• Corrosion Studies
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Alternatives to a MiniSIMS ?
• No Other Benchtop SIMS Instrument
• Conventional SIMS Systems
– much more complex and expensive
• Contract Analysis Laboratories
– not convenient, contamination during transport
• Other Surface Analysis Techniques
– generally less sensitive
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Comparison of
SEM / EDS and SIMS
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Advantages of SEM / EDS
• High magnification physical image
• Quantitative elemental information
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Advantages of SIMS
• Surface specific analysis
• Organic structure identification
• Profiling for depth distribution
• Light element detection
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EDX sampling depth is typically 1 micron
For many applications surface sensitivity is needed…
Not 10 xNot 100 xBut 1000 x – SIMS can offer true surface analysis
509 m
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Conclusions
• SIMS & EDS give complementary information
• SIMS has advantages for
– Organic surface contamination– 3 dimensional analysis of multi-layer structures
• SEM / EDS has advantages for
– High magnification physical imaging– Quantitative analysis
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Summary
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MiniSIMS Summary
• SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films
• Information easily available by SIMS may be difficult or impossible by any other technique
• SIMS is especially valuable for the detection of:-– organic species (e.g. silicones, fluorocarbons)
– light elements (lithium, beryllium, boron …)
– group IA & IIA metals, group VII halides
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MiniSIMS Summary
• SIMS is a fast analysis technique, especially for imaging applications
• MiniSIMS alpha is most applicable for running routine repetitive analyses
• Desktop MiniSIMS means SIMS is now affordable and accessible to all
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