Study of SnS film formation by chemical bath deposition

Satoru Noge

Abstract, Tin sulfide (SnS) is attention substitute silicon (Si) as one of the solar cell absorber layer. We are testing preparation thin film by using Chemical bath deposition (CBD) method. In this study, we were considering SnS thin films preparation structure as setting effect of surface processing. As a result, it is found that the good conditions are deposition time: 3h, agitation speed: 720rpm and immersed position: the edge of beaker. It is confirmed that the substrate surface influence deposition of SnS by cleaning. Therefore, it is showed to prepare good flat films in reproducibility as first layer.

Key Words: SnS, Chemical bath deposition

Department of Electrical and Electronics Engineering

CBD CBD

SnSSnS Sn

S 2 SnS2

.

SnCl2 Sn2+ + 2Cl- (1) Sn2+ + TEA Sn[TEA]2+ (2) CH3CSNH2 + OH- HS- + CH3CONH2 (3) Sn[TEA]2++ HS- + OH- SnS + TEA + H2O (4)

100ml 2.26g ( ) 7.5ml

24.5ml0.75g 30ml25% 6.2ml

100ml SnS

60

1 CBD 2 Sn S 2

25沼津工業高等専門学校研究報告第52号，2018年1月

(a)Sn (b)S (c)SnS

SnSSnS

( : 1.0±0.05mm : 76 26mm )

3 CBD SnS

20 A B3

A B3 4 A

B

SnS

SnSSnS

1 3 531 3 5

55000 6

(Dektak XT)Ra

Ra

7SnS

SnS ZnORa

26 沼津工業高等専門学校研究報告　第 52 号

Ra (nm)

1 116.4

3 214.6

5 338.4

7

120rpm720rpm

8

8 (3 )

120rpmSnS

100ml A B9 .

chemical bath

A B 10

9

11 11A B

A : B :

10

11

SnSpH

pH.

27溶液成長法を用いたSnS膜形成法に関する基礎検討

SnS3

720rpm

pH

.

SnS

29

3

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