1

Alan Ong

Asia Pacific Ops

January 2007

Welcome to the Company Presentation ofNanofocus AG

Corporate Headquarters:

Lindnerstrasse 98,

46149 Oberhausen, Germany

2

Alan Ong

Asia Pacific Ops

January 2007

Location

Oberhausen

Headquarter

Ettlingen

Sales Office

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Alan Ong

Asia Pacific Ops

January 2007

Organisation

DevelopmentJ. Valentin

Prod. & ApplicationM. Grigat

Marketing & SalesDr. R. Brodmann

NanoFocus AGBoard

CEO Dr. H.H. Schreier

• 1994 NanoFocus GmbH founded in Duisburg

• 1996 OM Engineering GmbH founded in Duisburg

• 1998 Introduction of the confocal System µSurf

• 1999 Introduction of the Laserprofilometer µScan

• 2000 Merger of NanoFocus and OM Engineering to NanoFocus AG

• 2001 Founded NanoFocus Inc. in USA

• 2002 Founded Sales Office in Singapore

• 2006 30 Employees, about 350 installed systems

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Alan Ong

Asia Pacific Ops

January 2007

Key Data of Nanofocus AG

Employees: 30Turnover in 2006 in Mio. €: 4.7Total assets in Mio. €: 10Systems installed: about 350Patents and Trademarks: 30

Sites:(Corporate Headquarters) (Sales Office)Lindnerstrasse 98 Nobelstr. 9-1346149 Oberhausen 76275 EttlingenGermany GermanyTel.: +49 (0) 208 62 000 0 Tel.: +49 (0) 7243 7158 3Fax: +49 (0) 208 62 000 99 Fax: +49 (0) 7243 7158 59Email: info@nanofocus.de Email: ettlingen@nanofocus.de

(Asia Pacific Operation)Alan Ong Showroom: 5012, Ang Mo Kio Avenue 5,

Techplace 2 #05-06F, Singapore 569876Mobile: +65 9684 9735Email: alan.ong@nanofocus.de

Co-operation Network: IVAM (MEMS), Zenith, OptoNet, BMBF

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Alan Ong

Asia Pacific Ops

January 2007

3D Measurement Systems

Confocal microscope µSurf

• area technique

• Nanometer resolution

• for MEMS, 3D surface analysis

Scanning profilometer µScan

• moving x/y-stages

• different z-probes(autofocus, confocal, chromatic)

• for profile, flatness co-planarity,

µScanµSurf

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Alan Ong

Asia Pacific Ops

January 2007

NanoFocus Customers

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Alan Ong

Asia Pacific Ops

January 2007

References and Applications

Selected References:

• Jenoptik MEMS Germany• Daimler Chrysler Automotive Germany• Thyssen Krupp Tribology Sheet Metal Germany• Siemens Electromechanical Parts Germany• Bosch Fuel Injection Germany• Qimonda (Formerly Infineon) IC-Packaging Malaysia• Qimonda (Formerly Infineon) Process-Control China• Rofin Baasel Laser marking Singapore• Motorola Electronic components USA• Lintec LCD coating Japan• Siemens Medical Solder Bumps Singapore• GemPlus Smart Cards France• TIT Micro-mechanics Japan• ITRI Electronic Parts Taiwan• KJIST MEMS Korea• Topcon MEMS & Microlens Japan• Huyck Fabric Australia

Total installed Systems: about 350

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Alan Ong

Asia Pacific Ops

January 2007

Software representation and analysis

Example: Micropump

measurement with µScan

Micro pump

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Alan Ong

Asia Pacific Ops

January 2007

0.0 2000.0 4000.0 6000.0 8000.0 10000.0[ ]탆

60.00

-20.00

100.00

220.00

340.00

460.00

580.00

[ ]탆

OM Engineering GmbH

Y = 506,698

Y = 387,265

Y = 500,721

w3=540,5w4=968,3a5=0,42

a6=0,46a7=0,00

Example: Micropump

Geometrical calculation

Data analysis

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Alan Ong

Asia Pacific Ops

January 2007

Example: Micropump

Zoom function

Data Analysis

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Alan Ong

Asia Pacific Ops

January 2007

Example: Micropump

Radius measurement

Data Analysis

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Alan Ong

Asia Pacific Ops

January 2007

Example: Micropump

Roughness calculation

Data Analysis

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Alan Ong

Asia Pacific Ops

January 2007

Applications MEMS

Silicon Technology

Laser structures Micro injection molding

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Alan Ong

Asia Pacific Ops

January 2007

Optical waveguides

53.3 탆

0.699 mm

0.659 mm

Alpha = 309 Beta = 25

µm

-50

-40

-30

-20

-10

0

10

20

30

40

0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 0.55 0.6 0.65 mm

0 1

0-1Horizontal distance : 0.038 mmVariation in height : 49.8 µm

38 µ

50 µ

optical star coupler

µSurf 3D result

SEM pictureIMM, Mainz

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Alan Ong

Asia Pacific Ops

January 2007

Microfluidic

Measurement of small injection molded channels

Automatic productioncontrol with µSurf Pro

0 . 0 0 0

70 µm

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Alan Ong

Asia Pacific Ops

January 2007

Bio Science

Measurement of coating thickness on stents

20

10

µm

30

0

µm

Thickness

Topography

0,3 mm

Courtesy Boston Scientific

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Alan Ong

Asia Pacific Ops

January 2007

Hot Embossing 1

0.0 276.0 552.0 828.0 1104.0 1380.0[ ]탆

4.00 탆

-32.00

-24.00

-16.00

-8.00

0.00

8.00

[ ]탆

NanoFocus AG

Profil

w0=49,0

h1=-20,021

Width = 49.0 µm

Depth = 20.021 µm

Courtesy Jenoptik, Jena

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Alan Ong

Asia Pacific Ops

January 2007

Hot Embossing 2

0.0 402.0 804.0 1206.0 1608.0 2010.0[ ]탆

40.00 탆

-280.00

-200.00

-120.00

-40.00

40.00

120.00

[ ]탆

NanoFocus AG

Profil

h0=-79,772

h1=-199,373

w2=980,5

Courtesy Jenoptik, Jena

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Alan Ong

Asia Pacific Ops

January 2007

Hot Embossing 3

0.0 372.0 744.0 1116.0 1488.0 1860.0[ ]탆

2.00 탆

-10.00

-6.00

-2.00

2.00

6.00

10.00

[ ]탆

NanoFocus AG

Rauheit

Filter = DIN EN ISO 11562LC (CutOff) = 0,800 mmLr (Einzelstrecke) = 0,800 mmNeedle Filter = 0,000 mmAnzahl Lr N = 2

Conform with DIN EN ISO 4288Ra = 0,770 µmRz = 5,540 µmRt = 6,239 µmRq = 1,009 µmRmax = 6,220 µm

SEP 1940II (prEN 10049 C1=C2=0,5µm)Rpc = 156,318 1/cm

Roughness calculation

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Alan Ong

Asia Pacific Ops

January 2007

MEMS Structure

0.0 58.0 116.0 174.0 232.0 290.0[ ]탆

0.20 탆

-1.00

-0.60

-0.20

0.20

0.60

1.00

[ ]탆

NanoFocus AG

Profile

Y = 0,363Y = 0,404

h2=0,188

0.0 56.0 112.0 168.0 224.0 280.0[ ]탆

0.20 탆

-1.00

-0.60

-0.20

0.20

0.60

1.00

[ ]탆

NanoFocus AG

Profile

h0=-0,302

h1=0,080h2=0,086w3=66,7

Height Evaluation / uSurf

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Alan Ong

Asia Pacific Ops

January 2007

Microlens (pitch calculation)

0.0 31.9 63.9 95.8 127.8 159.7[ ]탆

0.20 탆

-1.00

-0.60

-0.20

0.20

0.60

1.00

[ ]탆

NanoFocus Messtechnik

Prof ile

27.6

Width = 27.6 µm

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Alan Ong

Asia Pacific Ops

January 2007

Microlens (zoom function)

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Alan Ong

Asia Pacific Ops

January 2007

Microlens (radius calculation)

material: polymer and silicon

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Alan Ong

Asia Pacific Ops

January 2007

Silicon Test structures

Measured with µSurf

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Alan Ong

Asia Pacific Ops

January 2007

Silicon Test structures

Measured with µSurf

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Alan Ong

Asia Pacific Ops

January 2007

DVD Laser

0.0 139.7 279.5 419.2 558.9 698.6[ ]탆

25.00 탆

-10.00

40.00

90.00

140.00

190.00

240.00

[ ]탆

NanoFocus AG

Profile

a0=-0,50

geometry of chip and packaging

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Alan Ong

Asia Pacific Ops

January 2007

DVD Laser

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Alan Ong

Asia Pacific Ops

January 2007

Textured Carbody Sheet Metal

EBT structure measured with µSurf stitching procedure

4199.8

3359.8

2519.9

1679.9

840.0

0.0

[µm]

0.0 840.0 1680.0 2520.0 3360.0 4200.0

[µm]

0.0 95.7 191.5 287.2 382.9 478.6[µm]

0

-3.00

-1.80

-0.60

0.60

1.80

3.00

[µm]

g g

20,63°

0.000

384.0

[µm]

Courtesy Neudecker, Popp, LFT Erlangen

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Alan Ong

Asia Pacific Ops

January 2007

Wafer Backside grinding

Confocal System µSurf 100x optics

Ra = 0.005 µmRz = 0.038 µm

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Alan Ong

Asia Pacific Ops

January 2007

IC-Packaging

• Bump/Ball Coplanarity

• Glue top height

• Warpage of substrate

• Laser marking depth

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Alan Ong

Asia Pacific Ops

January 2007

BGA Packaging

3D measurement of a BGA package module.

Yellow area: 150 µm

Green area: 70 µm

Blue area: 40 µm

Co-planarity evaluation in an Excel sheet by ASCII export

Left: touchplane

Right: mean plane

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Alan Ong

Asia Pacific Ops

January 2007 Courtesy Celestica, Italy

SMT Solderpaste

FR4 board with ultra fine pitch solder bumps

Automatic program for measurement and volume evaluation

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Alan Ong

Asia Pacific Ops

January 2007 Courtesy Infineon, Dresden

Measurement of ...

TSOP Packaging

Lead co-planarity

Spread

Lead profile

Encapsulation warpage

Roughness

Wirebond

Die

Encapsulation

Die attach adhesiveLeadframe

Bond Pad

34

Alan Ong

Asia Pacific Ops

January 2007 Courtesy Infineon, Dresden

Measurement of a TSOP package

Results

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Alan Ong

Asia Pacific Ops

January 2007

Lasermarking

Yellow area: +10 µm

Red area: -6 µm

Blue area: -40 µm

Measurement of lasermarking and warpage QFP

Profile selection shows warpand laser marking

36

Alan Ong

Asia Pacific Ops

January 2007 Courtesy, University of Dresden

Laserprofilometer µScan CF 2001

Wafer Bumps

• Co-planarity

• Height

• Tilt after assembling

37

Alan Ong

Asia Pacific Ops

January 2007

Laserprofilometer µScan in thethickfilm production

Courtesy TT Wellwyn AB Mikroelektronik

Automotive electronicsproduction at AB in Salzburg

Thickfilm production

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Alan Ong

Asia Pacific Ops

January 2007

Thickfilm production

3D Measurement for

development and failure analysis

Measured with µScan AF 2000

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Alan Ong

Asia Pacific Ops

January 2007

Hybridmaster Software Packagefor Production Environment

Automatic measurement of

printed resistors or conducting lines

• Height, width and pitch

• Teach in module

• SPC analysis

Thickfilm production

40

Alan Ong

Asia Pacific Ops

January 2007

Assembling of GHz modules

Example SMT glue

to fix IC chips

0.000

5020.0

[µm]

5020.0

[µm]

0.0 1002.0 2004.0 3006.0 4008.0 5010[µm]

-10.00

30.00

70.00

110.00

150.00

190.00

[µm]

NanoFocus AG

Courtesy Marconi, Germany

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Alan Ong

Asia Pacific Ops

January 2007

3D Animation

Courtesy Marconi, Germany

Example SMT glue

For GHz modules

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Alan Ong

Asia Pacific Ops

January 2007

Micromechanics

0 0.1 0.2 mm

mm

0

0.05

0.1

0.15

0.2

0.25

탆

0

1

2

3

4

5

6

7

Master0 0.1 0.2 mm

mm

0

0.05

0.1

0.15

0.2

0.25

탆

0

1

2

3

4

5

6

7

Replica

Injection molding process

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Alan Ong

Asia Pacific Ops

January 2007

Micromechanics

Analysis of the molding process

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Alan Ong

Asia Pacific Ops

January 2007

Form measurement by µScan AF

0.0 1447.7 2895.5 4343.2 5791.0 7238.7[ ]탆

50.00 탆

-15.00

85.00

185.00

285.00

385.00

485.00

[ ]탆

NanoFocus AG

Profile

a0=10,21

w2=4556,9

Y = 392,547

3D measurement5.5 x 5.5 mm

45

Alan Ong

Asia Pacific Ops

January 2007

Example wear measurement on a plastic part

ZUV Uni Basel

0.000

642.2

[µm]

619.7

[µm]

0.0 128.2 256.4 384.7 512.9 641.1[µm]

0.50 µm

-4.00

-3.00

-2.00

-1.00

0.00

1.00

[µm]

NanoFocus AG

Profile

56,8

Y = -2,949

Y = -1,423

Y = -1,021

Y = -0,005

Tribology Research

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Alan Ong

Asia Pacific Ops

January 2007

Tribology Research

Sheet Metal

Friction test

* Neudecker, Popp, LFT Erlangen

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Alan Ong

Asia Pacific Ops

January 2007

Razor blade

Ra = 0.009µm

Rz = 0.075µm

µSurf measurement

0.000

98.1

[µm]

95.2

[µm]

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Alan Ong

Asia Pacific Ops

January 2007

Motor Cylinder

Honing structure of a motor cylinder

Profile selection

3D Profile angle analysis

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Alan Ong

Asia Pacific Ops

January 2007

Sensors on µScan

3D technique by x/y-samplescanning and differentsensors for z-measurement

1. Autofocus Sensor AF2range: 1.5mmaccuracy: 0.1 microndata rate: 10 kHzstand-off: 2mm

2. Confocal Sensor CF4range: 1.0 mmaccuracy: 0.2 microndata rate: 0.8 kHzstand-off: 4mm

3. Chromatic Sensor CRTrange: 0.3 - 3 mm* accuracy: 0.1 micron*data rate: 1 - 30 kHz*stand-off: 5 - 16 mm*

•Depends on model used

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Alan Ong

Asia Pacific Ops

January 2007

Principle of Autofocus sensor

High precision measurement with 1 µm laser spot by means of a focus detector with nanometer resolution and a glass scale with an absolute accuracy of 0.025 µm

51

Alan Ong

Asia Pacific Ops

January 2007

Principle of Confocal sensor

An illuminated pinhole is imaged onto the surface to be measured. The detector registered a surface signal only if the focal plane matches with a real surface point. The objective therefore has to be moved by small vertical steps. In case of a signal the position of the objective is measured with a displacement transducer. Based on special interpolation technique the accuarcy of the system could be better then 10nm.

Laser Diode

52

Alan Ong

Asia Pacific Ops

January 2007

Principle of Chromatic sensor

Similiar to laser confocal techniques however for this case it is using white light.

No moving parts inside sensor as it make use of an objective lens with extended axial chromatism on a series of monochromatic point images in the measurement space.

Due to the confocalconfiguration, only the focused wavelength will pass through the spatial filter.

53

Alan Ong

Asia Pacific Ops

January 2007

Principle of Whitelight Confocal sensor

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Alan Ong

Asia Pacific Ops

January 2007

uSurf in Action

α

Δ z

Δ z

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Alan Ong

Asia Pacific Ops

January 2007

Specification

AutofocusAF 2

ConfocalCF 4

ChromaticCRT

µSurfx100

Working distance(d) mm 2 4 5 - 16 3.4

Vertical range (∆z) mm 1.5 1 0.3 – 3 0.35

Vertical resolution(z) µm 0.01 0.02 0.01 – 0.075 0.001

Lateral resolution(x/y) µm 1.5 1.5 4 - 8 0.3

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Alan Ong

Asia Pacific Ops

January 2007

Optic module 10x 20x 50x 100x

Measurement area(x/y) (µm) 1600 800 320 160

Working distance/ meas. range (d) mm

10 12 * 10 * 3.4 *

Vertical resolution(z) nm 20 5 ** 2 ** 1 **

Lateral resolution(x/y) µm 3 1.5 0.6 0.3

* With Long Distance Objective

** with piezo movement

Specification µSurf

57

Alan Ong

Asia Pacific Ops

January 2007

Stitching procedure

Software µSoft plus

Example: sheet metal

58

Alan Ong

Asia Pacific Ops

January 2007

Software on Nanofocus Equipment

NanoFocus Software-Kernel

Standard-Software Application with VBA

• Manual measurement

• Manual evaluation

• Flexible visualisation

• Teach In

• Automatic measurementand evaluation

• Automatic documentation

Export to External analysis

59

Alan Ong

Asia Pacific Ops

January 2007

Statistical Process Control (SPC)

ProcessAdjustment

Design and development

Improving theprocess stepsand processredesign

Processknow-how

Off-line inspection

WarpageHeightVolumePosition

Stress analysis

Production

Process 2

Production

Process 3

Production

Process 1

60

Alan Ong

Asia Pacific Ops

January 2007

Failure Cost Analysis

100 %

Failed parts

Inspectioncosts

Inspection tools

Status now

Failed parts

Inspectioncosts

Cost Saving

Goal

Inspection machinefor SPC

Investment in quality control machines improves the yield and reduces total cost of inspection

61

Alan Ong

Asia Pacific Ops

January 2007

µSurf® Results

Lotus effect

self cleaning of surfacesby water

62

Alan Ong

Asia Pacific Ops

January 2007

6262

µSurf® Results

Lotus effect

Measured with NanoFocus µSurf

2 µm

Lotus Effect

63

Alan Ong

Asia Pacific Ops

January 2007

Wafer Level Hermetic Leak Detector

0 500 1000 1500 2000 2500-14-12-10-8-6-4-202

t0 t0+7 min t0+14 minm

embr

ane

defle

ctio

n in

arb

itrar

y un

its

Scan axis in 탆

64

Alan Ong

Asia Pacific Ops

January 2007

µSurf CyclinderInspector

Measurement of engine block

65

Alan Ong

Asia Pacific Ops

January 2007

µSurf Mobile

Measurement of sheet metal or bulky sample which cannot be bought into laboratory.

66

Alan Ong

Asia Pacific Ops

January 2007

Thank you for your attention

NanoFocus AG

Im Lipperfeld, 32

46047 Oberhausen, Germany