université lyon i nato/asi and euro summer school september 16-27, 2002 jm.m smasma optics in...
TRANSCRIPT
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Jean-Marie MACKOWSKI
Université Claude Bernard Lyon 1SMA-VIRGO
Bât 21322, Bd Niels Bohr
69622 Villeurbanne Cedex
[email protected] : + 33 04 72 43 26 69
Fax : + 33 04 78 89 19 36
Jean-Marie MACKOWSKI
Université Claude Bernard Lyon 1SMA-VIRGO
Bât 21322, Bd Niels Bohr
69622 Villeurbanne Cedex
[email protected] : + 33 04 72 43 26 69
Fax : + 33 04 78 89 19 36
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations TODAY MENU TODAY MENU
COATING DEPOSITION TECHNIQUES
VIRGO EXPERIENCE
VIRGO METROLOGY&
OPTICS PERFORMANCES
LIMITATIONS SOURCES
COATING DEPOSITION TECHNIQUES
VIRGO EXPERIENCE
VIRGO METROLOGY&
OPTICS PERFORMANCES
LIMITATIONS SOURCES
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
COATINGS DEPOSITION TECHNIQUESCOATINGS DEPOSITION TECHNIQUES
TODAY MENU TODAY MENU
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsION ASSISTED DEPOSITIONADION ASSISTED DEPOSITIONAD
coating
crucible
substrat
Assistance source
Vapor flow
material
Electron beam, Joule effect, Laser, …
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
O2
Ar
Ar
O2
Meissner Trap
Sample Holder ( Planetary Motion )
Ar
Targets
Quartz
Neutralizor(Filament, PBN)
Neutralizor
- -
- -
SputteringSource
++
++
++ -
---
AssistSource
-++++
+++
- -
---
SputteredParticles
Substrates
I.B.S. Deposition Principles
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsI.B.S. Deposition
Systems
Univ
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ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsC.V.D Plasma Deposition
Systems
Univ
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ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsFROM SOURCE TO SUBSTRAT
SURFACEFROM SOURCE TO SUBSTRAT
SURFACE
Source
TemperatureEmission law
Mediumpressure
Substrat
Temperature
Vapor flow:nature, direction, energy
Evaporation: 0.1 eV (1100K) m.s-1
Sputtering: 10 to 50 eV km.s-1
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
•Dimension: 2x2.2x2.2 m3
•Vacuum: 2.10-8 mBar
•DIBS technology
•Environment: Class 1
VIRGO LARGE COATER
VIRGO LARGE COATER
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsCLASS 1 CLEAN ROOM BEFORE INTEGRATIONCLASS 1 CLEAN ROOM BEFORE INTEGRATION
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO LARGE
COATERVIRGO LARGE
COATER
robot simple rotation
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Thickness uniformity (%)
-25
-20
-15
-10
-5
0
5
-400 -300 -200 -100 0 100 200 300 400
Position (mm)
C 01035 PC=50°C 01041 PC=50° Mask 1 C 01043 PC=50° Mask 2C 01047 PC=50° Mask 3
Ta2O
5
•3.10-3 with masking on 700 mm•6.10-3 without masking on 350 mm
COATING THICKNESS UNIFORMITY
COATING THICKNESS UNIFORMITY
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
SputteredAtoms
Masque
X
YRobot
Atomespulvérisés
Cible SiO2
Source d’ions
Miroir
InterféromètreContrôle du front d’onde
SiO2 Target
Sputtered
Atomes
Mask
Ion Source
Mirror
Interferometer
Robot
CORRECTIVE COATINGCORRECTIVE COATING
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
30 nm P.V.
0
14 nm P.V.
0
beforebeforecorrectioncorrection
afteraftercorrectioncorrection
6 nm R.M.S
1.5 nm R.M.S.
CORRECTIVE COATINGCORRECTIVE COATING
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsIBS COATERIBS COATER
Absorption @ 1064 nm : 0.2 / 1 ppmAbsorption @ 1064 nm : 0.2 / 1 ppm
Process Difffusion @ 1064 nm : 0.6 / 4 Process Difffusion @ 1064 nm : 0.6 / 4 ppmppm
Centring Wavelength repeatability : +/- Centring Wavelength repeatability : +/- 0.4 %0.4 %
Wavefront after Corrective Coating : <1 Wavefront after Corrective Coating : <1 nmnm
Absorption @ 1064 nm : 0.2 / 1 ppmAbsorption @ 1064 nm : 0.2 / 1 ppm
Process Difffusion @ 1064 nm : 0.6 / 4 Process Difffusion @ 1064 nm : 0.6 / 4 ppmppm
Centring Wavelength repeatability : +/- Centring Wavelength repeatability : +/- 0.4 %0.4 %
Wavefront after Corrective Coating : <1 Wavefront after Corrective Coating : <1 nmnm
Univ
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ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations TODAY MENU TODAY MENU
VIRGO EXPERIMENTVIRGO EXPERIMENT
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO VIRGO VIRGO VIRGO
FRANC0-ITALIEN PROJECT
11 Laboratories
5 in France 11 in Italy
200 people
100 M€
Antenna Located at PISA
FRANC0-ITALIEN PROJECT
11 Laboratories
5 in France 11 in Italy
200 people
100 M€
Antenna Located at PISA
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
LASER YAG:Nd3+
20 W
détecteur
AR
R<5.10-4
MIRROR
R=0.92
BSR=0.5
ARR<10
-3
ARR<5.10
-4
MIRRORR=0.88
MIRRORR=0.88
ARR<5.10
-4MIRROR HRR=0.99995
MIRROR HRR=0.99995
DETECTOR
3 km
3 km
MMRRMME2E2
MME1E1
MMI2I2
MMI1I1
B.S.B.S.
VIRGO INTERFEROMETER
VIRGO INTERFEROMETER
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO SITE VIRGO SITE
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO TUNNEL VIRGO TUNNEL
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO CENTRAL BUILDING VIRGO CENTRAL BUILDING
N
W
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsVIRGO SUSPENSIONS VIRGO SUSPENSIONS
Univ
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ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsBeam splitter
Univ
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ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations TODAY MENU TODAY MENU
VIRGO METROLOGY&
OPTICS PERFORMANCES
VIRGO METROLOGY&
OPTICS PERFORMANCES
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
• Bulk diameter : 350 mm
• Coating diameter : 330 mm
• Bulk Thickness : 96 mm
FIRST VIRGO MIRRORFIRST VIRGO MIRROR
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
•Absorption•Birefringence•Relative reflexion•Wave front (stitching)•Scattering •Transmission•Microroughness•Defect detection
METROLOGYMETROLOGY
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsUniv
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Lyon I
SMASMASMASMA
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
28W CW YAG:Nd3+ pump laser Mappings up to Ø400 mm
Mesurement of the coating absorption … … as well as the bulk absorption
ABSORPTION BENCHABSORPTION BENCH
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Sensitivity: 20 ppb0,63 0.07 ppm
Ø 150mm
COATING ABSORPTION (VEM04) @ 1064 nm on Ø 150 mm
COATING ABSORPTION (VEM04) @ 1064 nm on Ø 150 mm
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Sensitivity: 30 ppb.cm-10,74 0.05 ppm.cm-1
Ø 150mm
BULK ABSORPTION (VIM03) @ 1064 nm on Ø 150 mm
BULK ABSORPTION (VIM03) @ 1064 nm on Ø 150 mm
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Mesurement of the amplitude as
well as the principle axis direction.
Mappings up to Ø400 mm.
losses due to birefringence in P or S polarisation(log10)
BIREFRINGENCE BENCH
BIREFRINGENCE BENCH
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Amplitude. Sensitivity: 10-5 rad.cm-1 Principle axis direction
BIREFRINGENCE (VIM01) on Ø 150 mm
BIREFRINGENCE (VIM01) on Ø 150 mm
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
SENSITIVITY: R/R = 2.10-5
RELATIVE REFLEXION BENCH
RELATIVE REFLEXION BENCH
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsWAVE FRONT MEASUREMENTWAVE FRONT MEASUREMENT
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsWAVE FRONT (VEM04) on Ø 150
mm WAVE FRONT (VEM04) on Ø 150
mm
3.8 mn RMS29 nm PVØ 150mm
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsSTITCHINGSTITCHING
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations STITCHING WAVE FRONT
(VEM04) on Ø 280 mm STITCHING WAVE FRONT
(VEM04) on Ø 280 mm
11.6 mn RMS73.8 nm PVØ 280mm
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Multiplexeur Electronique
Détecteur
Echantillon
PlatineGoniométrique
RéflexionSpéculaire
Miroir de Focalisation
M1
M2
FiltreSpatial
Modulateur
Détecteurde référence
I risd'alignement
S
Laser(He- Ne, Yag, CO2)
Lumière Diffusée
I risd'alignement
SCATTERING MEASUREMENTSCATTERING MEASUREMENT
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
4 ppm150150 mm2
75
-75
0
0-75 - 37.5 37.5 75
37.5
- 37.5
SCATTERING (VEM04) on 150150 mm2SCATTERING (VEM04) on 150150 mm2
Univ
ers
ité
Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
42.9 0.2 ppmØ50mm
TRANSMISSION (VEM04) on 150150 mm2
TRANSMISSION (VEM04) on 150150 mm2
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
MICROROUGHNESS
DEFECT DETECTION
MICROMAPMICROMAP
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
SIDE Bmeasurements
VIRGOrequirements
SMA-VIRGOmeasurements
averagescattering
< 5 ppm4 ppm
150150 mm2
averagetransmission
10 < T < 50 ppm42,9 +/- 0,2 ppm
50 mm
averageabsorption
< 5 ppm0,63 +/- 0,07 ppm
150 mm
birefringence < 5.10-4 rad.cm-1 < 5.10-4 rad.cm-1
150 mm
wave frontflatness
< 8 nm RMS
150 mm3,8 nm RMS
150 mm
shapeconcave
3450 +/- 100 m
150 mm
concave3580 +/- 17 m
150 mm
END MIRROR (VEM04) OPTICAL PERFORMANCES
END MIRROR (VEM04) OPTICAL PERFORMANCES
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations TODAY MENU TODAY MENU
LIMITATION SOURCES
OF PERFORMANCE
LIMITATION SOURCES
OF PERFORMANCE
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsLIMITATION SOURCESLIMITATION SOURCES
SUBSTRATE (BULK)CHEMICALS USED FOR THE POLISHING PROCESS
CHEMICALS USED FOR THE CLEANING PROCEDURESPUTTERING TARGETS
COATER WALLSION SOURCES COMPONENTS
GAZ USED FOR DEPOSITION PROCESS, …
MATERIALS PURITYMATERIALS PURITY
ENVIRONNEMENTAL CONDITIONSENVIRONNEMENTAL CONDITIONS
PARTICULATE CONTAMINATIONSORGANIC CONTAMINATIONS
BOXES FOR TRANSFERT & TRANSPORTATION
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsLIMITATION SOURCES
MATERIALS PURITY &
MATERIALS PURITY &
ENVIRONNEMENTAL CONDITIONSCONTROL
ENVIRONNEMENTAL CONDITIONSCONTROL
PHYSICO-CHEMICAL ANALYSIS TOOLS
LIKE :
ESCA, RBS, AUGER, SEM, XTM, SIMS…
PHYSICO-CHEMICAL ANALYSIS TOOLS
LIKE :
ESCA, RBS, AUGER, SEM, XTM, SIMS…
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations SIMS PRINCIPLES SIMS PRINCIPLES
e-
Acquisition
Secondary Ions m/eElectron
beam (flood gun)
SAMPLE
Common Ions Sources
O+, Ar+, Cs+, Ga+…
Magnetic Quadrupole
Scintillator
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations MIRRORS :SIMS PROFILES MIRRORS :SIMS PROFILES
1,E+00
1,E+01
1,E+02
1,E+03
1,E+04
1,E+05
0 0,1 0,2 0,3 0,4 0,5profondeur (µm)
inte
nsi
té (
u.a
.)
Oxyde 1
Oxyde 2
Na+ 23
K+ 39
SiO2 Ta205
Na + 23 K +
39
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations
Ta+ Si+Ti+
MIRRORS :SIMS PROFILES MIRRORS :SIMS PROFILES
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
Limitations MIRRORS :SIMS PROFILES MIRRORS :SIMS PROFILES
Univ
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Lyon I
NATO/ASI and Euro Summer School September 16-27, 2002 JM.M
SMASMASMASMA
OPTICS IN ASTROPHYSICSOPTICS IN ASTROPHYSICSCoatings Performances &
LimitationsCoatings Performances &
LimitationsCONCLUSION
AT THIS STEP,OPTICAL LOSSES IMPROVEMENT
AT THIS STEP,OPTICAL LOSSES IMPROVEMENT
NEEDS BIG R&D EFFORTSNEEDS BIG R&D EFFORTS