universal microsystems, 3350 scott blvd. bldg 47, santa, clara, ca 95054 universal microsystems gas...
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Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Universal Microsystems
Gas Flow Restrictors for the Semiconductor Industry
Company founded in 1999
Partnership with TEM Filter
3350 Scott Blvd. Santa Clara, CA
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Uses for Gas Flow Restrictors
• Replace MFC in fixed process applications– steady pressure, single flow set point
• Safety — limit flow in case of line failure• Tamperproof needle valve replacement• Flow splitting
• eliminates multiple MFCs
• Back fill a chamber in a fixed time
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
UMS Gas Flow Restrictors
• Orifice inside 316L SS container
• High accuracy calibration (± 1.0%)
• Three orifice materials available
– SS, & Single crystal sapphire or silicon
• Quick turn production
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Orifice Flow vs Pressure
0
100
200
300
400
500
15 17 19 21 23 25 27 29 31 33 35Pressure, Psia
Flo
w,
sccm
Atmosphere Outlet
Sub-sonic
Sonic
Vacuum Outlet
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Orifice Characteristics
• Completely stable
• No Particle Generation
• Minimal dry down time
• Precision of flow at specified pressure– +/- 5% standard, +/- 2% available
• Orifice will not clog like a filter
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Restrictor body types available
• 1/4 “ Male/Male VCR
• 1/8” Male/Male VCR
• 1/4” Female/Male VCR
• 1/4” BulkHead VCR
• Ni media Filter/Restrictor Combination
• 1 1/8” surface mount sandwich
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
B-Series M/M VCR Flow Restrictor
1.55” .75”
.625”
22
-16
14
14
-00
• VCR Male Union • Flow Direction Arrow• External Part No. Label
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
F/M or M/F Versions
•Gland to gland 1.80”
•Diameter 0.75”
•Wrench Flats 5/8”
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Filter/Restrictor Combination
•SpecificationsNo more than 1 particle/ft3
Less than 10 ppb THCLess than 10 ppb moisture99.9999999% removal rating at rated flowHe leak check to 10-9 atm sccm/sec
Precise flow at a specified pressure
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Surface Mount Sandwich Restrictor
• Restrictor can be inserted into either port• 3 Port version available
2-port IGS configuration1 1/8” body size
Top
Flow¼”
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
UMS Flow Restrictor Specifications
• Surface finish, 7-8 Ra electropolish
• Base Material, 316L SS,
• Orifice material, Si, Sapphire, or SS
• Seal for Si (Viton or Kalrez)
• He leak check 10-9 atm-cc/sec
• Maximum pressure, 200 psia
• Temperature range, 50 to 250 oF
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Sapphire Orifices
Orifice diameters from 0.003” to 0.040”
Variation in diameter is +/- 2.5µm
Different manufacturing runs likely to see different means but tight distribution
-2.5 µm +2.5 µm
Cross-Section
Nozzle side
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Silicon Orifices
• Used for diameters < 0.003” – or non-integer .001” units
• Flow from nozzle side 10-15% greater
• Avoid placing downstream from F plasma
• Option: sputter deposit Al203 (both sides)
• Opportunity to enlarge undersized orifices– Oxidation and strip - 50 - 1000 nm
Cross-section nozzle side
50 µm
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Stainless Steel Orifices
• Mechanical drill OK down to 0.030”Use EDM down to 0.004”
• EDM precision is +/- 1.5% at .008”
• EDM most expensive of three types
Cross-section
250 µm
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
Standard Orifices & N2 flow @ 20 psig
• Flow range -15 sccm to 40 slm• Flow steps in ~ 10%• Sapphire orifices designated
with N or R, SS orifices with F and Si orifices with S
• N orifices nozzle side inletR orifices nozzle side outlet
Universal Microsystems, 3350 Scott Blvd. Bldg 47, Santa, Clara, CA 95054
How to find required orifice
• This procedure converts the application gas flow at the application pressure into the equivalent N2 flow at 20 psig
• Match the converted flow to the flow table