© 2018 TSMC, Ltd

TSMC Property

0

Jyun-Ying Lin, H.L. Cheng, J.H. Yang, L.S. Jeng, Chen-Hao Huang,

Eva Su, T.C. Hsu, Felix Tsui, Shih-Fen Huang, Alexander Kalnitsky

Ultra High Density Capacitor for

Power Management Applications

Taiwan Semiconductor Manufacturing Company,

Hsin-Chu, Taiwan.

© 2018 TSMC, Ltd

TSMC Property

1

Outline

TSMC deep trench capacitor (DTC)

Equivalent series resistance and inductance

Surface mount capacitor

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TSMC Property

2

TSMC DTC characteristics Density,

nF/mm2 Breakdown

Voltage, V TDDB, V

Operation

Voltage, V

250 14.3 8 5.0

600 5.5 4 1.5

950 4.2 1.7 1.2

1500 5.1 1.6 1.2

Op

era

tio

n v

olt

ag

e

0

1

2

3

4

5

6

0 500 1000 1500 2000

Cap Density

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TSMC Property

3

DTC Voltage Coefficient

MLCC

C1

C2

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TSMC Property

4

DTC Temperature Coefficient

MLCC

C1

C2

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TSMC Property

5

DTC Frequency Response

C5

C4

C3

C2

C1

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TSMC Property

6

Outline and Summary

TSMC deep trench capacitor (DTC)

1500nF/mm2 is demonstrated for 1.2V operation voltage.

TCC and VCC are better than commercial capacitor.

Equivalent series resistance and inductance

Surface mount capacitor

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TSMC Property

7

Capacitor in parallel

…

n

C

ESR

ESL

Single Capacitor Parallel Capacitors

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TSMC Property

8

DTC Equivalent Series Resistance

C5

C4

C3

C2

C1

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TSMC Property

9

DTC equivalent series inductance

C5

C4

C3

C2

C1

© 2018 TSMC, Ltd

TSMC Property

10

Outline and Summary

TSMC deep trench capacitor (DTC)

1500nF/mm2 is demonstrated for 1.2V operation voltage.

TCC and VCC are better than commercial capacitor.

Equivalent series resistance and inductance

Capacitor with in-parallel DTC cells can provide excellent

ESR and ESL.

Surface mount capacitor

© 2018 TSMC, Ltd

TSMC Property

11

Surface Mount Capacitor

Top view

Total height

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TSMC Property

12

DTC Equivalent Series Inductance

MLCC

C1

C2

0.2uF

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TSMC Property

13

DTC Equivalent Series Resistance

MLCC

C1

C2

0.2uF

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TSMC Property

14

0.001

0.01

0.1

1

10

100

1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10

Imp

ed

ance

(O

hm

)

Frequency (Hz)

DTC Impedance

MLCC

C1

C2

0.2uF

© 2018 TSMC, Ltd

TSMC Property

15

Summary

TSMC deep trench capacitor (DTC)

1500nF/mm2 is demonstrated for 1.2V operation voltage.

TCC and VCC are superior to commercial capacitors.

Equivalent series resistance and inductance

Capacitor with in-parallel DTC cells can provide excellent

ESR and ESL.

Surface mount capacitor

Low ESR and ESL can be achieved by interconnection

optimization.

DTC process offers thin IPD thickness (<70um).