NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 1

Trends in semiconductor technology

Jurriaan SchmitzChairholder of Semiconductor Components

MESA+ instituteUniversity of Twente

NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 2

The Microstrip Gas Counter and its application in the ATLAS inner tracker

Fragment of my introductory talk, October 14, 1994:

We want to use the MSGC in an experiment named ATLAS. Unfortunately this will only be conducted from the year 2002 onwards.

DISCLAIMER: Consider my upcoming statements on the future of CMOS as predictive as the above

NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 3

Contents

• MOSFET basics• The start of MOS technology• Moore’s Law• The ITRS roadmap• Modern CMOS technology• The challenges ahead• The role of academia

NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 4

Semiconductor essentials

n-type doped semiconductore.g. silicon with phosphorus impurityelectrons determine conductivity

p-type doped semiconductore.g. silicon with Al impurityholes determine conductivity

p-n junction: current can only flow one way!Semiconductor diode

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The field effect

+ + + + + + + +accumulation

- - - -depletion

- - - - - - - - - -inversion

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The field effect transistor

I d (

A)

VG (V)

- - - - - - - - - -

Gate voltage controls the current between source and drain

source draingate

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The first transistor (re-created)

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Kilby’s first IC1.5 mm x 1 mm

Germanium

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Fairchild’s flip-flop 19614 transistors, 5 resistorsNotice metal interconnect

1.5 mm

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RCA, 1962Logic chip, 16 transistors

First MOSFET IC

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1960 1965 1970 1975100

101

102

103

104

105

Year

GordonMoore 1965

Moore’s Law (1965)

Progress in technology:At the same cost, one can add more and more components on a chip.The number of components doubles each 1.5 years.

Num

ber

of c

ompo

nent

s pe

r ch

ip

Fairchild

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1976: Apple I motherboard1981: The first PC: IBM’s 5150 PCIntel microprocessorDOS operating system

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INTEL microprocessors

Year

Nu

mb

er o

f tr

ansi

sto

rs

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Reflections on Moore’s Law

• Exponential growth with time is universal:passenger airplanes, cargo ships, hard disk drives, nuclear fusion, …Collider energy? Luminosity?

• …but only for a while!• So: it’s not particularly Moore’s; and it’s not a law.

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Technology driven exponential progressV

elo

city

(km

/ho

ur)

year

Wright brothers

Concorde

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Impact of Moore’s Law

• Device dimensions shrink (scaling)• Cost per function decreases (~ 35% per year)• Power per function decreases• Speed increases• … application field of semiconductors increases!

(e.g. personal computers, handheld telephones, solid state audio, speech recognition)

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NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 20

You might still consider this big…

Modern transistor Influenza virus

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What does CMOS scaling bring us?

Lower power operationCheaper integrated circuits (25% p.y.)

100 200 300 500 70010

20

30

50 70 100

200

Gate Length (nm)

f T (

GH

z)

Higher frequency operation

1950, 6$ 2000, 145$

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But also…

Higher price for small quantities

Reduced static noise marginIncreased gate leakage

CMOS generation (nm)

180 120 90

J (A

/cm

2)

1e-8

1e-7

1e-6

1e-5

1e-4

1e-3

1e-2

1e-1

1e+0

1e+1

1e+2

1e+3

NMOSPMOS

• # Masks increases

• Mask cost increases

• Fab COO increases

• Lower supply voltage• Smaller devices, larger fluctuations

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Transistor Technology

Well Technology

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Transistor downscaling

• Reduction of gate length (lithography)• Increase of impurity concentrations• Decrease of gate dielectric• Reduction of source and drain dimensions

Brews’ Law:

Lmin = 0.4 [ xj tox (Ws + Wd)2 ]1/3

• Lmin: minimum gate length with normal behaviour

• xj: source and drain depth

• tox: gate dielectric thickness

• Ws, Wd: depletion widths of source and drain junctions

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Lithography

EUV prototype

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The interconnect shrink

0.5 µm technology 0.1 µm technology

Al

SiO2

W

Cu

Low-K

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The Red Brick Wall(s)

Further scaling of the circuit:• Atomic dimensions are in sight• Gate dielectric needs replacement• Gate electrode needs replacement• Interconnect becomes a speed and power bottleneck

The economy:• Fabrication plants get too expensive to build (3 B$)• Semiconductor market is too big to grow much further

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The power problem

Power per transistor decreases; but not the power density!

Fortunately, most ICs do better than Pentiums…

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Atomic dimensions and the loss of information

Dissipation problems

Quantum fluctuations

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Semiconductor economy

Traditional scaling can no longer facilitate the strong market growth seen in the past

1) The semiconductor industry has acquired a strong position in the total electronics market

2) New technology generations show progressively less benefits over their predecessor

NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 32

The design and verification gaps

Do we want nanotechnology?

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Semiconductor market development

0

50

100

150

200

250

19

97

19

98

19

99

20

00

20

01

20

02

Ann

ual t

urno

ver

(G$)

Memories

Microcomponents

Digital logic

Analog IC's

Discretes

Others

No clear trend - a mature market?

2000

2001

Actual (Dataquest)

2002 Forecast (6% growth)

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Research at MESA+

MESA+: 18 participating chairs from TN, CT, and EL

Nanotechnology, microsystems, materials science and microelectronics

~ 400 people, including over 200 PhD’s and postdocs

Yearly turnover ~ 31M€• 1250 m2 fully equipped clean room• A materials analysis laboratory• Several satellite laboratories

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Running projects

High-kALCVD

Cooldielectrics

IC-technology

Cu barriersALCVD

ESD inCMOS

Devices Reliability

MicroGas sensors

Deuteriumdielectrics

STW

Philips

EU

E-T-M ininterconnect

Plasmadamage

1/f noise STWSTWPhilips

FOM FOM

Reliable RF STW

Philips

Light fromSilicon

STW

Ends soonNEW NEW

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Submitted new projects

SmartOxides

IC-technology

Low Tempdevices

NBTI

Devices Reliability

High Kreliability

Vulcano STWSTW

Philips

STW

Planned new projects

EU

NIKHEF, July 4, 2003 Jurriaan Schmitz, University of Twente 37

Outlook

• There is still plenty of room at the bottom• Standard CMOS scaling will end soon• New technologies will emerge; NOT for ordinary computing• Light-silicon interaction: huge potential, physics?• Novel devices may well include particle detectors…