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Title: Micro-Engineering with Lasers by Chris Chatwin 1 , Serge Corbel 2 , Rupert Young 1 1 Engineering and Information Technology, University of Sussex, UK 2 CNRS-DCPR, Groupe de Recherche et Applications en Photophysique et Photochimie UMR 7630, FRANCE Industrial Technology Programme 3 rd Sept 2002 10:00 Whytes Room

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Page 1: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Title: Micro-Engineering with Lasersby

Chris Chatwin1, Serge Corbel2, Rupert Young1

1Engineering and Information Technology,

University of Sussex, UK

2 CNRS-DCPR, Groupe de Recherche et Applications en

Photophysique et Photochimie UMR 7630, FRANCE

Industrial Technology Programme 3rd Sept 2002 – 10:00 –Whytes Room

Page 2: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Summary

• A brief review of our Microstereolithography System, which led us to be invited into the BRITE EuRAM project

• A brief review of some of the results from the BRITE- EuRAM project which used optical and laser systems to Manufacture Macro/Micro Ceramic components.

• After de-binding and sintering ceramic parts with relative densities of 95% have been produced.

Page 3: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Experimental Set-up

UV LASER

(351 or 363nm)

Sh

utt

er

Frame Grab(Ultra-II drive)

IBM PC

(Main control)

Translation

Stage

En

cod

er

Mo

du

le

I/O

In

terf

aci

ng

(AT

-MIO

-16D

E-1

0)

Network (ftp) or GPIB Interfacing

En

cod

er d

rive

rC

ard

(3

7-1

03

9)

SL

M

SunSparc(DUCT CAD/CAM)

Slice Images

m-component

Resin Bath

T132 Shutter

controller

RS-232

Sync.

PolarizerD.O.E

(0.1ms resolution)

I/O Ports(PC-DIO-10)

DDIInterface of data

acquisition

(15)

(7)

(6)

lens

SerialParallel

Microstereolithography System Diagram

Page 4: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Micro-component Prototyping

SVGA SLM 800x600 pixels

Microstereolithography System

Page 5: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Micro-components

Micro-motor case (50 micron layers)A micro-gear (50 micron layers) A helix (50 micron layers)

Double helix (50 micron layers) Micro-pyramid (35 micron layers) Micro-pyramids (50 micron layers)

Page 6: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

MicroSLA System

Page 7: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Fabrication of Dense Ceramic Micro -

Components

2 3

Ceramic

Powder 50%

Al2O3

Dispersant

1.5 % Solvent 50%

MEK/Et

Photopolymerizable

•monomer HDDA

•Initiator : DMPA - 0.5%

Deagglomerated

powder with

adsorbed dispersant

dry/grindMixing

3 Pa.s.

Suspension

Forming by

stereolithography

Green part

Debinding-Sintering

Monomer: hexane-diol-

diacrylate (HDDA)

Photoinitiators:

Irgacure 651 (DMPA) absorbs

300-390 nm – 0.5%

Irgacure 819 absorbs up to

450 nm – 0.5%

50 mJ/cm2 for 100 mm cure

depths, resolution of 50 mm

Dispersant: Phostphate ester 1.5% wrt Al2O3

Solvent: Ethanol or Acetone 50%

Page 8: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Alumina Powder

Aggregate of Al203 powderAlumina (Al203) Powder: Average

diameter 0.5mm; Refractive index 1.7

Page 9: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Photoinitiators Cover Emission peaks from:

- Hg Lamp - 365nm, 405nm;

- Argon Ion Laser – 363nm;

- Pulsed YAG Lasers - 355nm.

They are soluble up to 5 wt. % into the monomer,

0.5% seems about optimum

340 360 380 400 420 440 460 480 500

0

1

2

3

4

Ab

sorb

ance

Wavelength l(nm)

Irgacure 819

300 320 340 360 380 4000.0

0.5

1.0

1.5

2.0

2.5

Abso

rban

ce

Irgacure 651

Wavelength l (nm)

DMPA

Absorption spectra of photoinitiators for

0.25 wt.% of dispersant in HDDA

Page 10: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Cure Depth Versus Dose for three Sources

1 10 100 1000 100000

50

100

150

200

250

300

350

400

Cd

(µm

)

E (mJ/cm2)

Laser

Lamp

Ar+

Laser YAG

Cure depth versus dose (80 wt.% alumina, 1 wt.% DMPA)

Pulsed YAG Laser - 355nm

Hg Lamp - 365nm

Argon Ion Laser – 363nm

Cure depth Cd (µm)

Dp : is the penetration depth,

E : the exposure or energy at the surface,

Ec : is the critical energy or the minimal

exposure dose for the resin to gel.

)ln(c

pdEEDC

Page 11: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Effect of Photoinitiator on Penetration

0.0 0.5 1.0 1.5 2.00

10

20

30

40

Dp (µm)

% DMPA

Penetration depth versus wt.% photoinitiator ;

irradiation with an argon laser at 363 nm

Optimum about 0.5 wt.%

Page 12: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Irradiation

Conditions

Laser UV

(364 nm)

Laser Visible

(488 nm)

Composition in wt. %

Alumina 80

Suspension 2:

85

Suspension 1:

80

wt.% Initiator (I 784) 2 3 2.2

Dp (mm) 31 69 105

Influence of the radiation wavelength on the

depth of penetration in alumina suspension

Page 13: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Debinding/Sintering Process

~ 1~

15

~ 1

~ 1

5

~ 1

5

~ 0.1 °C/min

~ Time (hours)

~ T

em

pera

ture

(°C

)

3 33 36 41

220

400

1200

1350

1550

Debinding

Sintering

Typical thermal treatment for the debinding/sintering process in air

Debinding must be done with

a low heating ramp to avoid

swelling, distortion and

cracking of parts.

Page 14: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Cracks appear at the Interface between

layers if Debinding is too Rapid

to layers

to layers

Debinding at 5°C/min up to 220°C/10

hours in air

Debinding at 5°C/min up to 600°C/50 min.

in air

Page 15: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Relative Density and Shrinkage Versus

Temperature

1500 1550 1600

Temperature (°C)

90

95

100

Rela

tive

De

nsity :

D/D

o (

%)

15

20

25

Lin

ear S

hrin

ka

ge (%

)

to layers

to layers

Page 16: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

13 Layer Cylinder with 100 micron layers

Demonstration parts sintered at 1600°C for 5 hours

Before Sintering After Sintering

Some deformation due to faults in

deposition layers and bad recoating

11% Shrinkage 17% Shrinkage

Page 17: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Monolayer - Typical Lateral Resolution 50 microns

Mask

8mm x 8mm 120 micron thick polymerised layer,

resolution 50 microns; 80 wt% alumina, 0.5 wt%

DMPA wrt HDDA monomer

Cured at 365 nm

with Hg Lamp

Page 18: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Demonstration Sintered Parts

2 mm

Demonstration part sintered at 1600°C

for 5 hours

Ceramic parts produced with visible source

and CRL XGA mask

Page 19: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Conclusions

• It is possible to formulate highly loaded suspensions containing

well-dispersed colloidally stable alumina particles.

• The practical limit for the suspension viscosity, which is about

3 Pa.s, is reached for 85 wt.% of alumina with respect to the

photopolymer resin content.

• It has been shown that with an optimised photoinitiator

fraction above 0.5 wt. %, and energy densities less than

50 mJ/cm2 ; 100 µm cured depths can be obtained.

• A good lateral resolution of 50 mm has been demonstrated.

Page 20: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

Conclusions

• The modification of the formulation by changing the amount of

photoinitiator allows the depth of penetration to be increased

by a factor 2 or 3 depending on the alumina loading.

• Satisfactory parts with 100 mm thick layers were built with a

20 seconds exposure and a laser power of 2 W.

• Ceramics with relative densities up to 95% have been

produced.

• Some sample cracking occurred during the final thermal

processes, the control of this process requires further

investigation.

Page 21: Title: Micro-Engineering with Laserssro.sussex.ac.uk/id/eprint/55005/1/Copy_of_Photon2... · Title: Micro-Engineering with Lasers by Chris Chatwin 1, Serge Corbel2, Rupert Young 1Engineering

References1) C Chatwin, M Farsari, S Huang, M Heywood, P Birch, R Young, “UV microstereolithography system that uses spatial light

modulator technology,” Applied optics 37 (32), 7514-7522, 1998

2) M Farsari, S Huang, RCD Young, MI Heywood, PJB Morrell, CR Chatwin, “Holographic characterization of epoxy resins at 351.1

nm,” Optical Engineering 37 (10), 2754-2759, 1998

3) M Farsari, S Huang, RCD Young, MI Heywood, PJB Morrell, CR Chatwin, “Four-wave mixing studies of UV curable resins for

microstereolithography,” Journal of Photochemistry and Photobiology A: Chemistry 115 (1), 81-87, 1998

4) M Farsari, S Huang, P Birch, F Claret-Tournier, R Young, D Budgett, “Microfabrication by use of a spatial light modulator in

the ultraviolet: experimental results,” optics letters 24 (8), 549-550, 1999

5) CR Chatwin, M Farsari, S Huang, MI Heywood, RCD Young, PM Birch, “Characterisation of epoxy resins for

microstereolithographic rapid prototyping,” The International Journal of Advanced Manufacturing Technology 15 (4), 281-286,

1999

6) GD Ward, IA Watson, DES Stewart‐Tull, AC Wardlaw, CR Chatwin, “Inactivation of bacteria and yeasts on agar surfaces with

high power Nd: YAG laser light,” Letters in applied microbiology 23 (3), 136-140, 1996

7) M Farsari, S Huang, RCD Young, MI Heywood, CD Bradfield, CR Chatwin, “Holographic cure monitoring of the DuPont Somos TM

7100 stereolithography resin,” Optics and lasers in engineering 31 (3), 239-246, 1999

8) M Farsari, F Claret-Tournier, S Huang, CR Chatwin, DM Budgett, “A novel high-accuracy microstereolithography method

employing an adaptive electro-optic mask,” Journal of Materials processing technology 107 (1), 167-172, 2000

9) P Birch, R Young, C Chatwin, M Farsari, D Budgett, J Richardson, “Fully complex optical modulation with an analogue

ferroelectric liquid crystal spatial light modulator,” Optics communications 175 (4), 347-352, 2000

10) PM Birch, R Young, D Budgett, C Chatwin, “Two-pixel computer-generated hologram with a zero-twist nematic liquid-crystal

spatial light modulator,” Optics letters 25 (14), 1013-1015, 2000

11) P Birch, R Young, M Farsari, C Chatwin, D Budgett, “A comparison of the iterative Fourier transform method and evolutionary

algorithms for the design of diffractive optical elements,” Optics and Lasers in engineering 33 (6), 439-448, 2000

12) P Birch, R Young, D Budgett, C Chatwin, “Dynamic complex wave-front modulation with an analog spatial light modulator,”

Optics letters 26 (12), 920-922, 2001