The CuTTing edge of innovaTion

COLLEGE OF ENGINEERING

A PlAce For Progress

Inside The University of Texas at Arlington’s

Nanotechnology Research and Education

Center, engineers, students, and other

researchers are collaborating to generate

new knowledge and inspire groundbreaking

discoveries.

The center is the preeminent university-based

nanotechnology research, development, and

teaching facility in North Texas. Thanks to its

class 100 cleanroom, it’s also the cleanest in the

region. Open to scientists within and outside

of the University, the facility is an invaluable

resource that promotes collaboration across

disciplines and between academia and industry.

fasT faCTs • Open 24 hours a day, 365 days a year • Contains a 10,000-square-foot, class 100 cleanroom • Offers 39,000-square-feet of total research space • Has an annual research impact of more than $4 million • Used by more than 30 faculty and 100 graduate students • Has nanometer-scale definition capability and sub- nanometer scale characterization capability

Powering sCienTifiC Knowledge UT Arlington’s 39,000-square-foot, two-story Nanotechnology Research and Education Center contains a variety of specialized research and teaching sections. This includes a 10,000-square-foot, class 100 cleanroom that is comparable to those found at top research institutions such as Stanford and Cornell. An additional 4,800-square-foot space is devoted to laboratories containing particular equipment—such as an SEM, an STM, and an E-Beam writer—plus two wet chemical labs, two optoelectronics labs, a nano-giga electronics lab, a cryoelectronics lab, a nano-device lab, and testing facilities. Research activities are conducted through mutually beneficial associations of faculty, graduate students, and research assistants from chemistry, electrical engineering, mechanical and aerospace engineering, materials science, and physics at UT Arlington. The center is also host to collaborative research conducted with investigators at other universities and in the private sector.

• NoiseandReliabilityinElectronicDevices • ScalableNanomanufacturing • SensorsandDetectorsonFlexible Substrates for Smart Skin • Bendable,StretchableNanoelectronics • Wafer-LevelPackaging • Nano-Electro-MechanicalSystems • Wavelength-Division-MultiplexingOptical Components and Networking • Quasi-OpticalWirelessCommunication/ Radar Components and Systems • Micro-ScaleHeatTransportand Conversion • AdvancedSolarCellMaterials • SingleElectronDevices • CarbonNano-TubeDevices • OpticalBioandChemicalSensor Nanofabrication • DiffractiveOptics • OpticalFilters • Thin-FilmOptics • WaveguideOptics • HolographicInterferometry • SemiconductorLasers • Bio-MEMS • Nano-Fluidics • NovelOpticalAmplifiers • Nano-Photonics • PhotonicCrystals • Bio-Sensors • MagneticFilmsinBiomedicalandStorageDevices • SiliconPhotonicsandPhotonicIntegration • Tag-FreeMultiparametricBiosensorTechnology

addressing iMPorTanT ToPiCs Researchers at the Nanotechnology Research and Education Center are dedicated to furthering knowledge and promoting development and education across all sciences and engineering disciplines in micrometer and nanometer scale. Among the research topics our faculty and users pursue are:

• NanoporesandMicroporesforDNAandCancer CellIdentification • PlasmonicNanostructures • VibrationalEnergyHarvestingDevices • MicrosensorsforStructuralHealthMonitoring

Characterization • Dimension5000AFM • ElectricalTestStation • HP4061ATestStation • KLA-TencorAlpha-StepIQProfilometer • NomarskiMicroscope • OceanOpticsNC-UV-VISReflectometer • ZeissLSM5PascalConfocalMicroscope

Deposition • AJAATCOrionSeriesThermalEvaporation System • AJAATCOrionSeriesEvaporationSystem • AJAATCOrionSeriesUHVSputteringSystem • CHAElectron-BeamEvaporator • CressingtonGoldSputteringDeposition • Home-BuiltSputterSystem • KJLLAB18Sputtering • NeoceraPulsedLaserDepositionFacilities • NickelElectroplating • TrionOrionIIPECVD/LPCVDSystem

Etching-Ashing • DienerElectronicsAsher • PlasmaQuestPlasmaEtcher • PlasmathermEtcher • SupercriticalPointDryer • TechnicsMicro-RIESeries800PlasmaSystem • TrionDeepReactiveIonEtchingSystem • TrionMinilockIIRIESystem

Dicing and Bonding • EVG520ISWaferBonder • DiscoDAD3220AutomaticDicingSaw,160mm • Microautomation1100DicingSaw • WestBondModel7476E-79WedgeWireBonder • Kulicke&SoffaModel4524BallBonder • Kulicke&SoffaModel4124-2BallBonder

Teaching Facilities • ElectricalTestStation–TFAB • GaertnerEllipsometer • HeadwaySpinner • JandelFour-PointProbeSystemwithRM3Test Unit • LindbergOxidationFurnace

• MinibruteDiffusionFurnace • MJB3KarlSussMaskAligner • NRCThermalEvaporator • VeecoFPP-5000Four-PointProbe

Photolithography • DevelopHood(Bay1) • OAIModel806ManualFront/BacksideContact Mask Aligner • NanonexNX-B200Nano-Imprinter • Blue_MIGP6680InertAtmosphereOven • SpinnerHood&WaferBakeHotplates • ChemicalHoodsandMilliporeDIWater System • EVG620Aligner • AcidHood • SolventHood • AcidHood(Bay1) • AcidHood(Bay4)

Furnaces • LPCVDNitride-Tystar • TystarTytanMini3600ThreeStackHorizontal FurnaceSystem • TystarFurnace • MinibruteFurnaces • AXICJetFirst150RapidThermalAnneal • AGAssociatesHeatpulse210RapidThermal Annealing System

FIB and E-Beam Writer • ZEISS1540XBCrossBeamE-BeamWriter andOrsayFocusIonBeam

SEM • ZEISSSupra55VPScanningElectron Microscope

STM • RHKUHV3000ScanningTunneling Microscope

For detailed information on the equipment available at the Nanotechnology Research and Education Center, visit www.uta.edu/nano.

uTiliZ ing sTaTe-of-The-arT Tools TheNanotechnologyResearchandEducationCentercontains75majorpiecesofequipmentforallareasof fabrication and characterization.

THEUNIVERSITYOFTEXASATARLINGTON NANOTECHNOLOGYRESEARCHANDEDUCATIONCENTER Box19072 Arlington,TX76019

for More inforMaTion: Nanotechnology Research and Education Center ZeynepCelik-Butler,Ph.D.,Director 500 S. Cooper Street Arlington,Texas76019 817-272-1536 nanofab@uta.edu uta.edu/engineering/nano

C O L L E G E O FE N G I N E E R I N G