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The top documents tagged [maskless lithography]
Nanoimprint lithography (NIL) 1.Overview. 2.Thermal NIL resists. 3.Residual layer after NIL. 4.NIL for large features (more difficult than small one)
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Nanoimprint lithography (NIL)
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832311
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From Algorithms to Systems-on-a-Chip in a Semester E225C - 2000 Borivoje Nikolić
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Scanned-Spot-Array Optical Lithography A Strategy for Bridging the NGL Technology Gap 10/19/20111K. Johnson
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Nanoimprint lithography (NIL)
91 views