Sideband Cooling Micromechanical Motion to the Quantum Ground State

J. D. Teufel,1 T. Donner,2 Dale Li,1 J. W. Harlow,2, 3 M. S. Allman,1 K. Cicak,1

A. J. Sirois,1 J. D. Whittaker,1 K. W. Lehnert,2, 3 and R. W. Simmonds1

1National Institute of Standards and Technology, Boulder, CO 80305, USA2JILA, National Institute of Standards and Technology and the University of Colorado, Boulder, CO 80309, USA

3Department of Physics, University of Colorado, Boulder, Colorado 80309, USA

The advent of laser cooling techniques revolutionizedthe study of many atomic-scale systems. This has fu-eled progress towards quantum computers by prepar-ing trapped ions in their motional ground state [1],and generating new states of matter by achieving Bose-Einstein condensation of atomic vapors [2]. Analogouscooling techniques [3, 4] provide a general and flexiblemethod for preparing macroscopic objects in their mo-tional ground state, bringing the powerful technology ofmicromechanics into the quantum regime. Cavity opto-or electro-mechanical systems achieve sideband coolingthrough the strong interaction between light and mo-tion [5–15]. However, entering the quantum regime,less than a single quantum of motion, has been elu-sive because sideband cooling has not sufficiently over-whelmed the coupling of mechanical systems to theirhot environments. Here, we demonstrate sideband cool-ing of the motion of a micromechanical oscillator to thequantum ground state. Entering the quantum regimerequires a large electromechanical interaction, which isachieved by embedding a micromechanical membraneinto a superconducting microwave resonant circuit. Inorder to verify the cooling of the membrane motioninto the quantum regime, we perform a near quantum-limited measurement of the microwave field, resolvingthis motion a factor of 5.1 from the Heisenberg limit[3]. Furthermore, our device exhibits strong-couplingallowing coherent exchange of microwave photons andmechanical phonons [16]. Simultaneously achievingstrong coupling, ground state preparation and efficientmeasurement sets the stage for rapid advances in thecontrol and detection of non-classical states of motion[17, 18], possibly even testing quantum theory itself inthe unexplored region of larger size and mass [19]. Theuniversal ability to connect disparate physical systemsthrough mechanical motion naturally leads towards fu-ture methods for engineering the coherent transfer ofquantum information with widely different forms ofquanta.

Mechanical oscillators that are both decoupled fromtheir environment (high quality factor Q) and placed in thequantum regime could allow us to explore quantum me-chanics in entirely new ways [17–21]. For an oscillator tobe in the quantum regime, it must be possible to prepareit in its ground state, to arbitrarily manipulate its quantumstate, and to detect its state near the Heisenberg limit. In or-der to prepare an oscillator in its ground state, its tempera-

ture T must be reduced such that kBT < ~Ωm, where Ωm

is the resonance frequency of the oscillator, kB is Boltz-mann’s constant, and ~ is the reduced Planck’s constant.While higher resonance frequency modes (> 1 GHz) canmeet this cooling requirement with conventional refriger-ation (T < 50 mK), these stiff oscillators are difficult tocontrol and to detect within their short mechanical life-times. One unique approach using passive cooling has suc-cessfully overcome these difficulties by using a piezoelec-tric dilatation oscillator coupled to a superconducting qubit[22]. Unfortunately, this method is incompatible with thebroad range of lower frequency, high Q, flexural mechani-cal modes. In order to take advantage of the attractive me-chanical properties of these oscillators, an alternative activecooling method is required, one that can reduce the oscil-lator’s temperature below that of the surrounding environ-ment.

Cavity opto- or electro-mechanical systems [4] natu-rally offer a method for both detecting mechanical mo-tion and cooling a mechanical mode to its ground state[23, 24]. An object whose motion alters the resonancefrequency ωc of an electromagnetic cavity experiences aradiation pressure force governed by the parametric inter-action Hamiltonian: Hint = ~Gnx, where G = dωc/dx,n is the cavity photon number, and x is the displacementof the mechanical oscillator. By driving the cavity at afrequency ωd, the oscillator’s motion produces upper andlower sidebands at ωd±Ωm. Because these sideband pho-tons are inelastically scattered from the drive field, theyprovide a way to exchange energy with the oscillator. Ifthe drive field is optimally detuned below the cavity res-onance ∆ ≡ ωd − ωc = −Ωm, photons will be prefer-entially up-converted to ωc because the photon density ofstates is maximal there (Fig 1b). When an up-convertedphoton leaves the cavity, it removes the energy of one me-chanical quantum (one phonon) from the motion. Thus,the mechanical oscillator is damped and cooled via thisradiation-pressure force. Because the mechanical motion isencoded in scattered photons exiting the cavity, a quantum-limited measurement of this photon field provides a nearHeisenberg-limited detection of mechanical motion [25].

While there has been substantial progress in cooling me-chanical oscillators with radiation pressure forces, side-band cooling to the quantum mechanical ground state hasbeen an outstanding challenge. Cavity optomechanical sys-tems have realized very large sideband cooling rates [8–

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103.

2144

v1 [

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] 1

0 M

ar 2

011

2

12, 14, 15]; however, these rates are not sufficient to over-come the larger thermal heating rates of the mechanicalmodes. Because electromechanical experiments use muchlower-energy photons [5–7, 13], they are naturally compat-ible with operation below 100 mK, but have consequentlysuffered from weak electromechanical interactions and in-efficient detection of the photon fields.

Here, we present a cavity electromechanical systemwhere a flexural mode of a thin aluminum membrane isparametrically coupled to a superconducting microwaveresonant circuit. Unlike previous microwave systems, thisdevice achieves large electromechanical coupling by con-centrating nearly all the microwave electric fields near themechanical oscillator [16]. The oscillator is a 100 nm thickaluminum membrane with a diameter of 15 µm, suspended50 nm above a second aluminum layer on a sapphire sub-strate [26] (see Fig. 1). These two metal layers form avariable parallel-plate capacitor that is shunted by a 12 nHspiral inductor. This combination of capacitor and induc-tor creates a microwave cavity whose resonance frequencydepends on the mechanical displacement of the membraneand is centered at ωc = 2π×7.54 GHz. The device is oper-ated in a dilution refrigerator at 15 mK, where aluminum issuperconducting, and the microwave cavity has a total en-ergy decay rate of κ ≈ 2π × 200 kHz. As expected fromthe dimensions of the membrane, Ωm = 2π×10.56 MHz,and we find an intrinsic damping rate of Γm = 2π×32 Hz,resulting in a mechanical quality factor Qm = Ωm/Γm =3.3× 105. The oscillator mass m = 48 pg implies that thezero-point motion is xzp =

√~/(2mΩm) = 4.1 fm. With

a ratio of Ωm/κ > 50, our system is deep in the resolved-sideband regime and perfectly suited for sideband coolingto the mechanical ground state [23, 24].

To measure the mechanical displacement, we apply a mi-crowave field, which is detuned below the cavity resonancefrequency by ∆ = −Ωm, through heavily attenuated coax-ial lines to the feed line of our device. The upper sidebandat ωc is amplified with a custom-built Josephson parametricamplifier (JPA) [27, 28] followed by a low-noise cryogenicamplifier, demodulated at room temperature, and finallymonitored with a spectrum analyzer. The thermal motionof the membrane creates an easily resolvable peak in themicrowave noise spectrum. As described previously[28],this measurement scheme constitutes a nearly shot-noise-limited microwave interferometer with which we can mea-sure mechanical displacement with minimum added noiseclose to fundamental limits.

In order to calibrate the demodulated signal to the mem-brane’s motion, we measure the thermal noise spectrumwhile varying the cryostat temperature (Fig. 1c). Here aweak microwave drive (∼ 3 photons in the cavity) is usedin order to ensure that radiation pressure damping and cool-ing effects are negligible. When Ωm κ Γm and∆ = −Ωm, the displacement spectral density Sx is re-lated to the observed microwave noise spectral density Sby: Sx = 2(κΩm/Gκex)2S/Po, where κex is the cou-

pling rate between the cavity and the feed line, and Po isthe power of the microwave drive at the output of the cav-ity. According to equipartition, the area under the reso-nance curve of displacement spectral density Sx must beproportional to the effective temperature of the mechani-cal mode. This calibration procedure allows us to convertthe sideband in the microwave power spectral density toa displacement spectral density and to extract the thermaloccupation of the mechanical mode. In Fig. 1c we showthe number of thermal quanta in the mechanical resonatoras a function of T . The linear dependence of the inte-grated power spectral density with temperature shows thatthe mechanical mode equilibrates with the cryostat evenfor the lowest achievable temperature of 15 mK. This tem-perature corresponds to a thermal occupancy nm = 30,where nm = [exp(~Ωm/kBT ) − 1]−1. The calibra-tion determines the electromechanical coupling strengthG/2π = 49 ± 2 MHz/nm. With the device parameters,we can investigate both the fundamental sensitivity of ourmeasurement as well as the effects of radiation pressurecooling.

The total measured displacement noise results from twosources: the membrane’s actual mean-square motion Sth

x

and the apparent motion Simpx due to imprecision of the

measurement. Fig. 2a demonstrates how the use of low-noise parametric amplification significantly lowers Simp

x ,resulting in a reduction in the white-noise background by afactor of more than 30. This greatly increases the signal-to-noise ratio of the membrane’s thermal motion, reducing therequired integration time to resolve the thermal peak by afactor of 1000. To investigate the measurement sensitivityin the presence of dynamical backaction, we regulate thecryostat temperature at 20 mK and increase the amplitudeof the detuned microwave drive while observing modifica-tions in the displacement spectral density. We quantify thestrength of the drive by the resulting number of photons nd

in the microwave cavity. As shown in Fig. 2b, the measure-ment imprecision Simp

x is inversely proportional to nd. Atthe highest drive power (nd ≈ 105), the absolute displace-ment sensitivity is 5.5× 10−34 m2/Hz.

As expected, the increased drive power also damps andcools the mechanical oscillator [3, 23, 24]. The total me-chanical dissipation rate Γ′m is the sum of the intrinsic dis-sipation Γm and the radiation-pressure-induced dampingresulting from scattering photons to the upper/lower side-band Γ = Γ+ − Γ−, where Γ± = 4g2κ/[κ2 + 4(∆ ±Ωm)2]. Here, g is the coupling rate between the cavityand the mechanical mode, which depends on the ampli-tude of the drive: g = Gxzp

√nd. Fig. 2c shows the

measured values of κ, g and Γ′m as the drive increases.The radiation-pressure damping of the mechanical oscil-lator becomes pronounced above a cavity drive amplitudeof approximately 75 photons, at which point Γ = Γm andthe mechanical linewidth has doubled.

While the absolute value of the displacement impre-cision decreases with increasing power, the visibility of

3

the thermal mechanical peak no longer improves oncethe radiation-pressure force becomes the dominant dissi-pation mechanism for the membrane. By expressing theimprecision as equivalent thermal quanta of the oscillatornimp = Γ′mS

impx /8x2

zp, we see that the visibility of thethermal noise above the imprecision no longer improvesonce the drive is much greater than nd ≈ 100 (Fig. 2d).This is because a linear decrease in Simp

x is balanced bya linear increase in Γ′m due to radiation-pressure damp-ing. The asymptotic value of nimp is a direct measure ofthe efficiency of the microwave measurement. Ideally, fora lossless circuit, a quantum-limited microwave measure-ment would imply nimp = 1/4. The incorporation of thelow-noise JPA improves nimp close to this ideal limit, re-ducing the asymptotic value of nimp from 70 to 1.9 quanta.This level of sensitivity is crucial, as we will now use thismeasurement to resolve the residual thermal motion of themembrane as it is cooled into the quantum regime.

Beginning from a cryostat temperature of 20 mK and athermal occupation of nT

m = 40 quanta, the fundamen-tal mechanical mode of the membrane is cooled by theradiation-pressure forces. Figure 3a shows the displace-ment spectral density of the motional sideband as nd isincreased from 18 to 4,500 photons along with fits to aLorentzian lineshape (shaded area). As described above,this increased drive results in three effects on the spectra:lower noise floor, wider resonances and smaller area. As itis the area that corresponds to the mean-square motion ofthe membrane, it directly measures the effective tempera-ture of the mode. At a drive intensity that corresponds to4,000 photons in the cavity, the thermal occupation is re-duced below one quantum of mechanical motion, enteringthe quantum regime.

Observing the noise spectrum over a broader frequencyrange reveals that there is also a second Lorentzian peakwith linewidth κ whose area corresponds to the finite ther-mal occupation nc of the cavity. Over a broad frequencyrange it is no longer valid to evaluate the cavity parame-ters at a single frequency to infer the spectrum in units ofSx. Instead, Fig. 3b shows the noise spectrum in units ofsideband power normalized by the power at the drive fre-quency, S/Po. These two sources of noise originating fromeither the mechanical or the electrical mode interfere witheach other and result in noise squashing [13] and eventu-ally normal-mode splitting [29] once 2g > κ/

√2. Us-

ing a quantum-mechanical description applied to our cir-cuit [13, 25], the expected noise spectrum is

S/~ω =1

2+ nadd +

2κex

[κnc(Γ

2m + 4δ2) + 4Γmn

Tmg

2]

∣∣∣4g2 +(κ+ 2j(δ + ∆)

)(Γm + 2jδ)

∣∣∣2(1)

where δ = ω − Ωm, ∆ = ωd + Ωm − ωc, and nadd

is added noise of the microwave measurement expressedas an equivalent number of microwave photons. Fig. 3bshows the measured spectra and corresponding fits (shadedregion) to Eq. 1 as the electromechanical system evolves

first into the quantum regime (nm, nc < 1) and then intothe strong-coupling regime (2g > κ/2). The results aresummarized in Fig. 3c, where the thermal occupancy ofboth the mechanical and electrical modes are shown as afunction of nd. For low drive power, the cavity shows noresolvable thermal population (to within our measurementuncertainty of 0.05 quanta) as expected for a 7.5 GHz modeat 20 mK. While it is unclear whether the observed popula-tion at higher drive power is a consequence of direct heat-ing of the substrate, heating of the microwave attenuatorspreceding the circuit, or intrinsic cavity frequency noise,we have determined that it is not the result of frequency oramplitude noise of our microwave generator, as this noiseis reduced far below the microwave shot-noise level withnarrow-band filtering and cryogenic attenuation (see Sup-plementary Information). Sideband cooling can never re-duce the occupancy of the mechanical mode below that ofthe cavity. Therefore, in order for the system to access thequantum regime, the thermal population of the cavity mustremain less than one quantum. Assuming Ωm κ, thefinal occupancy of a mechanical mode is [29]

nm = nTm

(Γm

κ

4g2 + κ2

4g2 + κΓm

)+nc

(4g2

4g2 + κΓm

). (2)

This equation shows that for moderate coupling (√κΓm

g κ) the cooling of the mechanical mode is linear in thenumber of drive photons. Beyond this regime, the onset ofnormal-mode splitting abates further cooling. Here the me-chanical cooling rate becomes limited not by the couplingbetween the mechanical mode and the cavity, but insteadby the coupling rate κ between the cavity and its environ-ment [29]. Thus, the final occupancy of the mechanicalmode can never be reduced to lower than nT

mΓm/κ, anda stronger parametric drive will only increase the rate atwhich the thermal excitations Rabi oscillate between thecavity and mechanical modes. For our device we achievethe desired hierarchy: as the coupling is increased, we firstcool to the ground state and then enter the strong-couplingregime (nT

mΓm < κ < g). Once nd exceeds 2 × 104, themechanical occupancy converges toward the cavity popu-lation, reaching a minimum of 0.34± 0.05 quanta. At thehighest power drive power (nd = 2 × 105) the mechan-ical mode has hybridized with the cavity, resulting in thenormal-mode splitting characteristic of the strong-couplingregime [16]. This level of coupling is required to utilizethe hybrid system for quantum information processing, asit is only in the strong-coupling regime that a quantum statemay be manipulated faster than it decoheres from the cou-pling of either the electromagnetic or mechanical modes tothe environment.

Together the measurements shown in Fig. 2 and 3 quan-tify the overall measurement efficiency of the system. TheHeisenberg limit requires that a continuous displacementmeasurement is necessarily accompanied by a backactionforce [3, 12, 25], such that

√Simpx SF ≥ ~, where SF is the

force noise spectral density. From the thermal occupancy

4

and damping rate of the mechanical mode, we extract thetotal force spectral density SF = 4~ΩmmΓ′m(nm + 1/2).This places a conservative upper bound on the quantumbackaction by assuming that it alone is responsible forthe finite occupancy of the mechanical mode. This ex-periment achieves the closest approach to Heisenberg-limited displacement detection to date [14, 25] witha lowest imprecision-backaction product

√Simpx SF =

4~√nimp(nm + 1/2) = (5.1 ± 0.4)~. Thus, this me-

chanical device simultaneously demonstrates ground-statepreparation, strong-coupling and near quantum-limited de-tection.

Looking forward, this technology offers a feasible routeto achieve many of the longstanding goals for quantum me-chanical systems. These prospects include a direct mea-surement of the zero-point motion, observation of the fun-damental asymmetry between the rate of emission and ab-sorption of phonons [1], quantum nondemolition measure-ments [3] and generation of entangled states of mechanicalmotion [17, 18]. Furthermore, combining this device with asingle-photon source and detector (such as a superconduct-ing qubit [22, 30]) would enable preparation of arbitraryquantum states of mechanical motion as well as observa-tion of a single excitation as it Rabi oscillates between a7 GHz photon and a 10 MHz phonon [20]. Because theinteraction between the mechanical mode and the cavityis parametric, the coupling strength is inherently tunableand can be turned on and off quickly. Thus, once a quan-tum state is transfered into the mechanical mode, it can bestored there for a time τth = 1/(nT

mΓm) > 100 µs be-fore absorbing one thermal phonon from its environment.As this timescale is much longer than typical coherencetimes of superconducting qubits, mechanical modes offerthe potential for delay and storage of quantum information.Lastly, because mechanical oscillators can couple to lightof any frequency, they could serve as a unique intermediarythat transfers quantum information between the microwaveand optical domains [21].

These measurements demonstrate the power of sidebandtechniques to cool a macroscopic (∼ 1012 atoms) mechan-ical mode, beyond what is feasible with conventional re-frigeration techniques, into the quantum regime. Thesebroadly applicable methods for state preparation, manipu-lation and detection, pave the way to access the quantumnature of a wide class of long-lived mechanical oscilla-tors. Through the strong interaction between photons andphonons, mechanical systems can now inherit the experi-mental and theoretical power of quantum optics, openingthe field of quantum acoustics.

ACKNOWLEDGEMENTS

We thank A. W. Sanders for taking the micrograph inFig. 1a and thank the JILA instrument shop for fabrication

and design of the cavity filter. This work was financiallysupported by NIST and the DARPA QuASAR program.T.D. acknowledges support from the Deutsche Forschungs-gemeinschft (DFG). Contribution of the U.S. government,not subject to copyright.

AUTHOR INFORMATION

Reprints and permissions information is available atwww.nature.com/reprints. The authors declare no com-peting financial interests. Correspondence and re-quests for materials should be addressed to J.D.T(john.teufel@nist.gov).

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6

b

ω d

a

0.1

1

10

100

1000

0.1 1 10 100

Mec

hani

cal O

ccup

ancy

, n

Γ=Γ − Γ + -

Γ +

Γ -

ω d ω + Ω d mω − Ω d m

m

Cryostat Temperature (mK)

c

2 µm

FIG. 1. Schematic description of the experiment. a, Colorized scanning electron micrograph showing the aluminum (grey) elec-tromechanical circuit fabricated on a sapphire (blue) substrate, in which a 15 µm diameter membrane is lithographically suspended50 nm above a lower electrode. The membrane’s motion modulates the capacitance, and hence, the resonance frequency of the super-conducting microwave circuit. b, A coherent microwave drive inductively coupled to the circuit acquires modulation sidebands due tothe thermal motion of the membrane. The upper sideband is amplified with a nearly quantum-limited Josephson parametric amplifierwithin the cryostat. c, The microwave power in the upper sideband provides a direct measurement of the thermal occupancy of the me-chanical mode, which may be calibrated in situ by varying the temperature of the cryostat. The mechanical mode shows thermalizationwith the cryostat at all temperatures, yielding a minimum thermal occupancy of 30 mechanical quanta without employing sideband-cooling techniques. The inset illustrates the concept of sideband cooling. When the circuit is excited with a detuned microwave drivesuch that ∆ = −Ωm, the narrow line shape of the electrical resonance ensures that photons are preferentially scattered to higher energy,providing a cooling mechanism for the membrane.

7

ba

d

c

400

300

200

100

0

Sx (

fm2 /H

z)

-400 0 400(ω −Ω m )/2 π (Hz)

1

10

100

1000

n im

p

100 10

2 104

nd

10-34

10

-32

10-30

10

-28

S xim

p (

m2 /H

z)

100 10

2 104

nd

101

102

103

104

105

Cou

plin

g R

ates

(H

z)

100 10

2 104

nd

κ/2π g/πΓm'/2π

FIG. 2. Displacement sensitivity in the presence of radiation-pressure damping. a, The displacement spectral density measuredwith (red) and without (blue) the Josephson parametric amplifier. As the parametric amplifier greatly reduces the total noise of themicrowave measurement, the time required to resolve the thermal motion is reduced by a factor of 1000. b, As the microwave drivepower is increased, the absolute displacement sensitivity, Simp

x improves, reaching a minimum of 5.5 × 10−34 m2/Hz at the highestpower. c, The parametric coupling g between the microwave cavity and the mechanical mode increases as √nd. This coupling dampsthe mechanical mode from its intrinsic linewidth of Γm = 2π × 32 Hz until it is increased to that of the microwave cavity κ. d, Therelative measurement imprecision, in units of mechanical quanta, depends on the product of Simp

x and Γ′m. Thus, once the poweris large enough that radiation-pressure damping overwhelms the intrinsic mechanical dissipation, nimp asymptotically approaches aconstant value (nimp = 1.9), which is a direct measure of the overall efficiency of the photon measurement.

8

ba

0.1

1

10

100

Occ

upan

cy

100 101 102 103 104 105

Drive Photons, nd

nm nc

10-32

10-31

10-30

10-29

S x (

m2 /H

z)

10.55810.556Frequency (M Hz)c

n =27m

n =22m

n =8.5m

n =2.9m

n =0.93m

n =18d

n =71d

n =280d

n =1,100d

n =4,500 d

10-15

2

4

68

10-14

2

4

10-13

S/P o

(1/

Hz)

10.710.610.510.410.3Frequency (M Hz)

n =0.93m

n =0.55m

n =0.36m

n =0.34m

n =0.42mg /π

n =4,500 d

n =11,000d

n =28,000d

n =89,000d

n =180,000d

FIG. 3. Sideband cooling the mechanical mode to the ground state. a, The displacement noise spectra and Lorentzian fits (shadedregion) for five different drive powers. With higher power, the mechanical mode is both damped (larger linewidth) and cooled (smallerarea) by the radiation pressure forces. b, Over a broader frequency span, the normalized sideband noise spectra clearly show both thenarrow mechanical peak and a broader cavity peak due to finite occupancy of the mechanical and electrical modes, respectively. Asmall, but resolvable, thermal population of the cavity appears as the drive power increases, setting the limit for the final occupancy ofthe coupled optomechanical system. At the highest drive power, the coupling rate between the mechanical oscillator and the microwavecavity exceeds the intrinsic dissipation of either mode, and the system hybridizes into optomechanical normal modes. c, Starting inthermal equilibrium with the cryostat at T = 20 mK, sideband cooling reduces the thermal occupancy of the mechanical mode fromnm = 40 into the quantum regime, reaching a minimum of nm = 0.34± 0.05. These data demonstrate that the parametric interactionbetween photons and phonons can initialize the strongly coupled, electromechanical system in its quantum ground state.

9

Supplementary Information for “Sideband Cooling Micromechanical Motion to the QuantumGround State”

NOISE SPECTRUM OF AN OPTOMECHANICALSYSTEM

A mechanical degree of freedom that parametrically cou-ples to the cavity resonance frequency modifies the poweremerging from the cavity by scattering photons to the up-per or lower mechanical sidebands. To calculate the fullnoise spectrum of the optomechanical system, we followthe general method of input-output theory [1]. We defineg = Gxzp

√nd, where G = dωc/dx, xzp =

√~/2mΩm,

m is the mass, ωc is the cavity resonance frequency, Ωm

is the mechanical resonance frequency and nd is the num-ber of photons in the cavity due to a drive at frequency ωd.Furthermore, we define the response functions of the me-chanical and cavity modes as χ−1c = κ/2 + j(δ + ∆) andχ−1m = Γm/2 + jδ, where Γm is the mechanical dissipa-tion rate, κ is the cavity dissipation rate, δ = ω − Ωm,∆ = ωd − ωc + Ωm and j =

√−1. κ is total cavity dissi-

pation rate due to both the intentional coupling to the trans-mission line κex and the intrinsic losses κ0. From these pa-rameters, we define the optomechanical self-energy [2, 3]as a function of δ:

Σ(δ) = −jg2 [χc(δ)− χ∗c(δ + 2Ωm)] (S1)

≈ −jg2χc(δ) (S2)

The approximation assumes that the drive is near the opti-mal detuning for cooling (|∆| Ωm) and the system issufficiently in the good-cavity limit (Ωm κ) such thatthe cavity response at (δ + 2Ωm) may be neglected. Nowthe effective mechanical response function χm includingthe optomechanical effects is:

χm =χm

1 + jχmΣ(S3)

≈ χ−1c

g2 + χ−1m χ−1c

(S4)

The noise at the output of the cavity is characterized bythe noise operator bout, which is related to the cavity fieldoperator a by bout =

√βκexa. β is a dimensionless factor

that depends on the geometry. Our circuit (shown schemat-ically in Fig. S1) couples power from the cavity equallyto the output and back to the input so here β = 1/2. Inprinciple, this fraction could be engineered by couplingasymmetrically to the input and the output, or by using asingle port cavity (β = 1). Following directly the the-oretical analysis of previous work [3, 4], we consider thenoise operators ηm and ηc associated with the mechanicaland cavity modes respectively, which satisfy the relations

input output

cavity

dissipation to environment

κex

κ0

ωc

FIG. S1. Cavity coupling block diagram.

〈η†mηm〉 = nTm and 〈η†c ηc〉 = nc. Thus, the output noise is[4]

bout =−√βκexχc

√κ(1− g2χmχc

)ηc

−√βκexχc

√Γm (jgχm) ηm.

In the frequency domain, the power spectral density of thenoise at the output (in units of W/Hz) is S = ~ω〈b†outbout〉,

S =4~ωβκex(Γ2

m + 4δ2)κnc∣∣∣4g2 +(κ+ 2j(δ + ∆)

)(Γm + 2jδ)

∣∣∣2+

16~ωβκexg2Γmn

Tm∣∣∣4g2 +

(κ+ 2j(δ + ∆)

)(Γm + 2jδ)

∣∣∣2 .The first term simply represents the thermal noise of a

cavity with occupancy nc whose spectral weight is dis-tributed over the ‘dressed’ cavity mode. The ‘dressed’ cav-ity mode includes the effect of optomechanically inducedtransparency [7? ? ] and reduces to a single Lorentzianlineshape in the limit of weak coupling (g

√κΓm).

The second term is the thermal noise of the mechanicalmode with its modified mechanical susceptibility. Unlikeprevious derivations [4], we have not assumed the weak-coupling regime. Thus, as this equation is valid in boththe weak- and strong-coupling regimes, it gives a unifieddescription of the thermal noise spectrum even in the pres-ence of normal-mode splitting. Finally, the total noise atthe output of the measurement including the vacuum noiseof the photon field and the added noise of the measurementis

S

~ω=

1

2+n′add+

4βκex [κnc(Γ2m + 4δ2) + 4Γmn

Tmg

2]∣∣∣4g2 +(κ+ 2j(δ + ∆)

)(Γm + 2jδ)

∣∣∣2 ,(S5)

10

Electro-mechanical

circuit

300 K

4 K

15 mK

Spectrum analyzer

Filtercavity

50

50

50

5050

50

50

50 20 d

B6

dB

20 d

B6

dB

20 d

B10

dB

50

20 dB 20 dB

20 dB

Josephsonparametric amplifier

Variableattenutor

& phase shifter

Super-conducting

coaxialcable

CryogenicHEMT

amplifier

Directional coupler

50 ΩTermination

Circulator

FIG. S2. Detailed schematic diagram. A microwave generator creates a tone at the drive frequency. This signal is filtered with aresonant cavity at room temperature and split into two arms. The first arm excites the cavity through approximately 53 dB of cryogenicattenuation. In order to avoid saturating the low-noise amplifier with the microwave drive tone, the second arm is used to cancelthe drive before amplification. A computer-controlled variable attenuator and phase shifter are run in a feedback loop to maintaincancellation at the part per million level. A second microwave generator is used to provide the pump tone for the Josephson parametricamplifier (JPA) as well as the reference oscillator for the mixer. This pump tone is 1.3 MHz above ωc so that the JPA is operated asa non-degenerate parametric amplifier, which measures both quadratures of the electromagnetic filed at the upper sideband frequency.The last stage of attenuation on all lines occurs inside a 20 dB directional coupler, which allows us to minimize the microwave powerdissipated on the cold stage of the cryostat. The JPA is a reflection amplifier; a signal incident on the strongly coupled port of the JPAis reflected and amplified. A cryogenic circulator is used to separate the incident and reflected waves, defining the input and outputports of the JPA. The other circulators are used to isolate the cavity from the noise emitted from the amplifier’s input.

where n′add is the total added noise of the measurement inunits of equivalent number of photons. For an ideal mea-surement (i.e. for a quantum-limited measurement of bothquadratures of the light field), n′add = 1/2.

Before the onset of normal-mode splitting, one can di-rectly relate the measured microwave power spectrum S tothe displacement spectral density Sx. Assuming ∆ = 0,

nc nm and g, δ κ,

S

~ω=

1

2+ n′add + 4β

κex

κΓ

ΓmnTm

(Γm + Γ)2

+ 4δ2(S6)

=1

2+ n′add +

2βG2nd

κ

κex

κSx, (S7)

where Γ = 4g2/κ is the optomechanical damping rate.

11

MICROWAVE MEASUREMENT AND CALIBRATION

The detailed circuit diagram for our measurements isshown in Fig. S2. In order to calibrate the value of g0 =Gxzp for this device, we applied a microwave drive op-timally red-detuned (∆ = 0) and measured the thermalnoise spectrum of the mechanical oscillator as a functionof cryostat temperature. Here we restricted nd ≈ 3 in or-der to ensure that radiation pressure effects are negligible.With the value of g0 now determined, we increase the driveamplitude and measure the thermal noise spectrum at eachdrive power. The noise spectra are recorded and averagedwith commercial FFT spectrum analyser. Each spectrumis typically an average of 500 traces with a measurementtime of 0.5 s per trace. The cavity response is then mea-sured with a weak probe tone with a vector network anal-yser to determine precise cavity parameters at each mi-crowave drive power, including the precise detuning andκ. For larger microwave drive powers where the cavityspectrum exhibits optomechanically induced transparencyeffects [7? ? ], this spectrum also serves as a direct mea-sure of g. Finally, using additional calibration tones, eachnoise spectrum is calibrated in units of absolute microwavenoise quanta and fit with Eq. 5 to determine the occupancyof both the cavity and mechanical modes.

For our measurements, we infer that our entire measure-ment chain has an effective added noise of n′add = 2.1.This value is consistent with the independently measuredvalue for the added noise of the JPA (nadd = 0.8) and the2.5 dB of loss between the output of the cavity and the JPA[8, 9].

ω d /2 π

-50

-40

-30

-20

-10

0

Filt

er T

rans

mis

sion

(dB

)

7 .557.547.537.52Frequency (GHz)

ω c /2 π

FIG. S3. Measured transmission of filter cavity. A tunableresonant cavity was implemented at room temperature in order tosuppress noise ∼ 10 MHz above the drive frequency. As shownhere, this cavity reduces the noise at the cavity frequency by morethan 40 dB, ensuring that the phase or amplitude noise of thegenerator is not responsible for the finite occupancy of the cavityat large drive power.

In order to ensure that the amplitude or phase noise ofthe signal generator was not responsible for the finite oc-cupancy of the cavity at high drive power, we designed and

built a custom filter cavity [4]. As shown in Fig. S3, whenthe filter cavity is tuned to precisely the frequencies of ourcircuit, it provides an addition 40 dB of noise suppressionat the cavity resonance frequency. The phase and ampli-tude noise of our signal generator alone are specified by themanufacturer to be less than -150 dBc at Fourier frequen-cies 10 MHz away from the drive. With the addition of fil-ter cavity, we lower this noise to well below the shot-noiselevel of our microwave drive. Furthermore, even withoutthe filter cavity, we could not resolve an appreciable differ-ence in the cavity occupation. Thus, while we do not knowthe precise mechanism for this occupancy, we conclusivelydetermine the generator noise is not the cause.

INFERRING CAVITY PARAMETER AND NUMBER OFDRIVE PHOTONS

The measured microwave cavity parameters may be in-ferred from the transmitted power spectrum. The power atthe output of the cavity Po is related to the input power Pi

by [7]

Po = Pi

(κ20 + 4∆2

κ2 + 4∆2

), (S8)

where ∆ = ωd − ωc is the difference between the fre-quency of the drive ωd and the cavity resonance frequencyωc. κ is the total intensity decay rate of the cavity (fullwidth at half maximum) with κ = κ0 + κex. κ0 is thecoupling rate to the dissipative environment, and κex is thecoupling rate to the transmission line used to excite andmonitor the cavity.

The number of photons in the cavity due to a coherentinput drive at detuning ∆ may be calculated from the storedenergy E in the cavity.

nd =E

~ωd

=2Pi

~ωd

κex

κ2 + 4∆2(S9)

For our circuit, κex = 2π × 133 kHz. Thus, when thedrive is optimally detuned such that ∆ = −Ωm, the inputpower required to excite the cavity with one photon is Pi ≈2~ωdΩ2

m/κex ≈ 50 fW.

FUNDAMENTAL LIMITS OF SIDEBAND COOLING

Equation 2 in the main text gives an expression for thefinal occupancy of a mechanical mode, assuming that themicrowave drive is optimally detuned (∆ = −Ωm). Thisexpression is only the lowest order approximation in thesmall quantities g/Ωm and κ/Ωm. Up to second order, the

12

final occupancy is [10]

nm = nTm

(Γm

κ

4g2 + κ2

4g2 + κΓm

)[1 +

g2

Ω2m

4g2 + κΓm

4g2 + κ2

]+ nc

(4g2

4g2 + κΓm

)[1 +

8g2 + κ2

8Ω2m

4g2 + κΓm

4g2

]+

8g2 + κ2

16Ω2m

.

The last term represents the fundamental limit for sidebandcooling and demonstrates the importance of the resolved-sideband regime. For our system, Ωm κ, g; and hencethis last term only contributes negligibly to the final occu-pancy of the mechanical mode (< 10−4 quanta).

Measurement imprecision and backaction

Throughout the main text and this supplementary infor-mation, we use the “single-sided” convention for all spec-tral densities in which for any quantity A, the mean-squarefluctuations are 〈A2〉 =

∫∞0SA(ω)dω

2π. This yields the fa-

miliar classical result that an oscillator coupled to a thermalbath of temperature T will experience a random force char-acterized by the force spectral density SF = 4kBTmΓm.More generally,

SF = 4~Ωm

(nTm +

1

2

)mΓm , (S10)

where nTm is the Bose-Einstein occupancy factor given by

nTm = [exp(~Ωm/kBT )− 1]−1.Independent of any convention for defining the spec-

tral density, the visibility of a thermal mechanical peak ofgiven mechanical occupancy above the noise floor of themeasurement represents a direct measure of the overall ef-ficiency of the detection. As shown in Fig. S4, ratio ofthe peak height to the white-noise background allows usto quantify the imprecision of the measurement in units ofmechanical quanta [9], nimp ≡ Simp

x mΩmΓ′m/(4~). In-spection of Eq. S6 implies

nimp =1

4β

κ

κex

4g2 + κΓm

4g2

(1

2+ n′add

)(S11)

Once the drive is strong enough that g √κΓm), nimp

no longer decreases with increasing drive. It is preciselybecause we are measuring with a detuned drive that alsodamps the mechanical motion, that nimp asymptotically ap-proaches a constant value [3, 11]. For an ideal measure-ment (β = 1, κ = κex, and n′add = 1/2), nimp → 1/4.Implicit in obtaining this optimal value for n′add and hencenimp is that all the photons exiting the cavity are measured.Any losses between the cavity and the detector can be mod-eled as a beam-splitter that only transmits a fraction η of the

photons to the detector and adds a fraction (1− η) of vac-uum noise. So the effective added noise n′add accountingfor these losses becomes

n′add =nadd

η+

(1− ηη

)1

2, (S12)

Thus, shot-noise limited detection of the photons (nadd =1/2) is a necessary, but not sufficient, condition for reach-ing the best possible level of precision.

Quantum mechanics also requires that a continuous dis-placement measurement must necessarily impart a forceback on the measured object. For an optimally detuneddrive (∆ = 0) in the resolved-sideband regime, this back-action force spectral density Sba

F approaches a constantvalue as a function of increasing drive strength and asymp-totically approaches Sba

F = 2~ΩmmΓ′m. Again, express-ing the spectral density in units of mechanical quanta givesnba ≡ Sba

F /(4~ΩmmΓ′m)→ 1/2.Fundamentally, the Heisenberg limit does not restrict the

imprecision Simpx or the backaction SbaF alone, but rather it

requires their product has a minimum value [3, 12]√Simpx SbaF = 4~√nimpnba ≥ ~. (S13)

An ideal cavity optomechanical system can achieve thislower limit for a continuous measurement with a driveapplied at the cavity resonance frequency. When con-sidering the case where the drive is instead applied de-tuned below the cavity resonance (∆ = 0), this productnever reaches this lower limit [3, 11] and is at minimum√Simpx SbaF = ~

√2.

To estimate these quantities for our measurements, wecan infer the total force spectral density experienced by

3

2

1

0

S x (

arb.

)

10.55910.55810.55710.556Frequency (M Hz)

nm

nimp

FIG. S4. Measurement imprecision in units of mechanicalquanta.

13

our oscillator as StotalF = 4~ΩmmΓ′m(nm + 1/2). As

this total necessarily includes the backaction, we may makethe most conservative assumption that it was solely dueto backaction that our oscillator remained at finite occu-pancy. Hence, nba ≤ nm + 1/2. The low thermal oc-cupancies attained in this work allow us to place an upperbound on how large the backaction could possibly be, andhence quantify our measurement in terms of approach to

the Heisenberg limit. Thus,√Simpx SbaF = 4~√nimpnba ≤

4~√nimp(nm + 1/2). At nd = 3 × 104, we simulta-

neously achieve nm = 0.36 and nimp = 1.9 (StotalF =

1.6 × 10−34 N2/Hz and Simpx = 1.7 × 10−33 m2/Hz)

yielding an upper limit on the measured product of back-action and imprecision of 5.1 ~. As stated above, the bestpossible backaction-imprecision product is ~

√2 when us-

ing red-detuned excitation; thus our measurement is only afactor of 3.6 above this limit. It may also be noted that thisfactor would have been 1.8 except that our chosen geome-try losses half of the signal back to the input (β = 1/2). Infuture experiments, using a single-port geometry (β = 1)will improve this inefficiency.

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