status of the fmd
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DESCRIPTION
Status of the FMD. LHCC referees meeting, 10 October 2005 Børge Svane Nielsen Niels Bohr Institute. Prototype status. Hamamatsu sensor prototype: well within specs → Inner production started, delivery end November → Outer design done, prototype ordered IDEAS inner hybrid prototype: - PowerPoint PPT PresentationTRANSCRIPT
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Status of the FMD LHCC referees meeting, 10 October 2005Brge Svane NielsenNiels Bohr Institute
Brge Svane Nielsen, NBI
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Prototype statusHamamatsu sensor prototype:well within specs Inner production started, delivery end November Outer design done, prototype orderedIDEAS inner hybrid prototype: VA1_3 chips within specs, all produced 2nd hybrid prototype delivered and tested Hybrid production startingPrototype module (sandwich) status: MIP particles seen (680 MeV e-) Noise level as expected or better 2nd prototype tested in e- beam early OctoberReadout electronics status: Prototype VA1-Digitizer-RCU chain workingMechanics: TPC-ITS-T0-V0-FMD assembly test done
Brge Svane Nielsen, NBI
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Silicon sensors13cmBonding padsBonding padsLeakage current (specs < 3 A)Detector capacitance300 nA2 nFBias voltage300 VBias voltage300 VInner prototype: 300 m thick2 x 512 strips250 m pitch
Brge Svane Nielsen, NBI
Chart1
83.93104.684.68
138.65176.09139.6
181.6224.9182.9
200.5243.4201.9
213.7256215.5
223.8265.3225.8
231.5272.5233.8
238278.3240.5
243.8283.6246.2
249288.3251.6
254.2292.8256.8
258.7296.8261.3
262.8300.4265.4
266.6303.7269.2
270.1306.8272.8
273.4309.7276.1
276.5312.4279.2
279.4315282.2
282.1317.4284.9
284.7319.7287.5
287.1322290
289.5324292.3
291.7326294.5
293.9328296.7
295.9329.8298.8
297.8331.6300.8
299.8333.3302.7
301.5334.9304.6
303.3336.5306.3
305338.1308
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Current (nA)
Leakage currents
IV_CV_NGch_Vfd_thickness_PolySi
Leakage Current[nA]
Serial No.10V20V30V40V50V60V70V80V90V100V110V120V130V140V150V160V170V180V190V200V210V220V230V240V250V260V270V280V290V300V
183.9138.7181.6200.5213.7223.8231.5238.0243.8249.0254.2258.7262.8266.6270.1273.4276.5279.4282.1284.7287.1289.5291.7293.9295.9297.8299.8301.5303.3305.0
2104.6176.1224.9243.4256.0265.3272.5278.3283.6288.3292.8296.8300.4303.7306.8309.7312.4315.0317.4319.7322.0324.0326.0328.0329.8331.6333.3334.9336.5338.1
384.7139.6182.9201.9215.5225.8233.8240.5246.2251.6256.8261.3265.4269.2272.8276.1279.2282.2284.9287.5290.0292.3294.5296.7298.8300.8302.7304.6306.3308.0
I^2 [nA^2]
Serial No.10V20V30V40V50V60V70V80V90V100V110V120V130V140V150V160V170V180V190V200V210V220V230V240V250V260V270V280V290V300V
17044.219223.832978.640200.345667.750086.453592.356644.059438.462001.064617.666925.769063.871075.672954.074747.676452.378064.479580.481054.182426.483810.385088.986377.287556.888684.889880.090902.391990.993025.0
210941.231007.750580.059243.665536.070384.174256.377450.980429.083116.985731.888090.290240.292233.794126.295914.197593.899225.0100742.8102208.1103684.0104976.0106276.0107584.0108768.0109958.6111088.9112158.0113232.3114311.6
37170.719488.233452.440763.646440.350985.654662.457840.360614.463302.665946.268277.770437.272468.674419.876231.277952.679636.881168.082656.384100.085439.386730.388030.989281.490480.691627.392781.293819.794864.0
Detector Capacitance[pF]
Serial No.5V10V15V20V25V30V35V40V45V50V55V60V65V70V75V80V85V90V95V100V105V110V115V120V125V130V135V140V145V150V155V160V165V170V175V180V185V190V195V200V205V210V215V220V225V230V235V240V245V250V255V260V265V270V275V280V285V290V295V300V
19873.47930.27092.76572.25682.33832.13475.43211.83002.12828.82686.32573.72494.82452.32435.02427.62423.42420.52418.32416.12414.82413.32412.62411.92410.52410.42409.22408.52408.12407.22406.72406.12405.62405.42405.02404.42404.02404.02403.72403.02403.22402.82401.82401.62401.42401.12401.02401.02401.12400.82400.52400.32399.92400.02399.72399.32399.12399.12398.92398.8
29647.77717.96902.56354.15062.43764.83418.23161.42955.52787.52652.32549.32482.82449.72436.42430.02426.52423.92421.72420.22418.92418.22416.42415.82415.32414.62413.52413.02412.32411.92411.62411.22410.72410.32410.22409.12409.12409.02408.22408.32408.02408.02407.12407.12406.72406.62406.22405.72405.52405.42405.52405.32404.82404.92404.22404.72404.52404.32403.92403.8
39844.27919.77095.76574.55708.33836.03478.33214.63005.32831.12688.42575.22495.42451.62434.02426.42422.02418.92416.52415.62413.82412.52411.52410.72408.92408.62408.12406.82406.92406.12405.02404.72404.72404.22403.32403.02403.52402.12402.02402.02401.62400.82400.62401.02401.02399.82399.62400.32399.62399.72399.02399.32399.42398.72398.62398.42398.22398.42397.42397.6
1/C^2 *10^6 [pF^-2]
Serial No.5V10V15V20V25V30V35V40V45V50V55V60V65V70V75V80V85V90V95V100V105V110V115V120V125V130V135V140V145V150V155V160V165V170V175V180V185V190V195V200V205V210V215V220V225V230V235V240V245V250V255V260V265V270V275V280V285V290V295V300V
10.0100.0160.0200.0230.0310.0680.0830.0970.1110.1250.1390.1510.1610.1660.1690.1700.1700.1710.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1740.1740.1740.1740.1740.1740.1740.1740.1740.174
20.0110.0170.0210.0250.0390.0710.0860.1000.1140.1290.1420.1540.1620.1670.1680.1690.1700.1700.1710.1710.1710.1710.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.173
30.0100.0160.0200.0230.0310.0680.0830.0970.1110.1250.1380.1510.1610.1660.1690.1700.1700.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1740.1730.1730.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.174
NG-channelVfd[V]Thickness[um]Poly-Si[Mohm]
Serial No.NGch.Serial No.Serial No.Min.19.8
1Nothing1801323Max.24.1
2Nothing2752324AVG.21.3
3Nothing3803324
IV_CV_NGch_Vfd_thickness_PolySi
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Current (nA)
Leakage currents
168hr_stabiliby
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Capacitance (pF)
Detector capacitance
Plots
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
1/C^2 (10^-6 pF^-2)
1/C^2
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
I^2 (nA^2)
I^2
168hours stability check
hourIdTemp.(degree)
0.00182.125.7
0.25184.125.6
0.50186.825.6
0.75188.925.6
1.00190.625.6
1.25191.825.5
1.50193.025.6
1.75193.625.5
2.00194.725.5
2.25195.525.5
2.50196.425.6
2.75197.525.6
3.00198.625.6
3.25199.525.6
3.50199.925.6
3.75200.725.6
4.00201.525.6
4.25202.325.6
4.50203.025.7
4.75203.725.7
5.00204.125.6
5.25204.725.7
5.50205.225.7
5.75205.725.7
6.00205.925.7
6.25206.525.7
6.50206.725.7
6.75207.125.7
7.00207.225.7
7.25207.725.7
7.50207.625.7
7.75208.025.7
8.00208.025.7
8.25208.325.7
8.50208.325.7
8.75208.625.7
9.00208.425.7
9.25208.525.7
9.50208.625.7
9.75208.825.7
10.00208.725.7
10.25208.925.7
10.50208.825.7
10.75209.025.6
11.00208.925.7
11.25209.125.7
11.50209.025.7
11.75209.125.7
12.00209.125.7
12.25209.125.6
12.50209.125.7
12.75209.025.6
13.00209.125.7
13.25209.125.6
13.50209.325.7
13.75209.225.7
14.00209.625.7
14.25209.725.7
14.50209.825.7
14.75209.825.7
15.00209.925.7
15.25210.025.7
15.50210.125.7
15.75210.225.7
16.00210.425.8
16.25210.625.7
16.50210.625.8
16.75210.925.7
17.00210.825.7
17.25211.025.7
17.50210.725.7
17.75210.825.7
18.00210.525.7
18.25210.425.7
18.50210.425.7
18.75210.125.6
19.00210.325.8
19.25210.125.7
19.50210.325.7
19.75210.125.7
20.00210.325.7
20.25210.325.7
20.50210.625.7
20.75210.525.7
21.00210.725.7
21.25210.725.7
21.50210.625.7
21.75210.625.7
22.00210.425.7
22.25210.625.7
22.50210.625.7
22.75210.725.7
23.00210.525.7
23.25210.725.7
23.50210.425.7
23.75210.525.7
24.00210.325.7
24.25210.525.7
24.50210.225.7
24.75210.325.6
25.00210.125.7
25.25210.225.7
25.50210.225.7
25.75210.325.7
26.00210.325.7
26.25210.325.7
26.50210.425.7
26.75210.425.7
27.00210.525.7
27.25210.325.6
27.50210.425.7
27.75210.425.7
28.00210.525.7
28.25210.425.7
28.50210.425.7
28.75210.325.7
29.00210.325.6
29.25210.425.7
29.50210.525.6
29.75210.725.7
30.00210.625.7
30.25210.725.7
30.50210.725.7
30.75210.825.7
31.00210.725.7
31.25210.825.7
31.50210.825.7
31.75211.025.7
32.00211.025.7
32.25211.125.7
32.50210.925.7
32.75211.125.7
33.00210.925.7
33.25210.925.7
33.50210.925.7
33.75210.825.7
34.00210.825.7
34.25210.825.7
34.50210.725.7
34.75210.825.7
35.00210.725.7
35.25210.925.7
35.50210.725.7
35.75210.925.7
36.00210.925.7
36.25211.025.7
36.50210.925.7
36.75211.125.7
37.00211.025.7
37.25211.225.7
37.50211.125.7
37.75211.125.7
38.00210.825.7
38.25211.025.7
38.50210.825.7
38.75211.025.7
39.00210.825.7
39.25211.125.7
39.50211.025.7
39.75211.225.7
40.00211.125.7
40.25211.225.7
40.50211.125.7
40.75211.225.7
41.00211.025.7
41.25211.225.7
41.50211.125.7
41.75212.325.8
42.00212.225.7
42.25212.525.8
42.50211.325.7
42.75211.325.7
43.00211.025.7
43.25210.925.7
43.50210.725.7
43.75210.825.7
44.00210.525.6
44.25210.525.7
44.50210.325.7
44.75210.425.7
45.00210.225.7
45.25210.325.7
45.50210.125.7
45.75210.225.7
46.00210.025.7
46.25210.125.7
46.50210.025.7
46.75210.025.7
47.00210.025.7
47.25210.025.7
47.50209.925.7
47.75209.925.6
48.00209.725.7
48.25209.625.6
48.50209.525.7
48.75209.225.6
49.00209.125.7
49.25209.025.6
49.50208.725.7
49.75208.725.6
50.00208.725.7
50.25208.725.6
50.50208.525.6
50.75208.325.6
51.00208.225.7
51.25208.125.6
51.50208.025.6
51.75208.025.6
52.00207.825.6
52.25207.825.6
52.50207.725.6
52.75207.925.6
53.00207.825.6
53.25207.925.7
53.50207.925.7
53.75208.225.7
54.00207.825.6
54.25208.025.7
54.50207.625.6
54.75207.525.6
55.00207.225.7
55.25207.225.6
55.50207.125.7
55.75207.125.6
56.00206.925.6
56.25206.925.6
56.50206.725.6
56.75206.725.6
57.00206.525.6
57.25206.625.6
57.50206.525.6
57.75206.725.7
58.00206.425.6
58.25206.725.7
58.50206.425.6
58.75206.625.7
59.00206.325.6
59.25206.525.7
59.50206.325.6
59.75206.425.7
60.00206.225.6
60.25206.325.7
60.50206.225.6
60.75206.225.7
61.00206.225.6
61.25206.325.7
61.50206.225.6
61.75206.425.7
62.00206.425.6
62.25206.525.7
62.50206.525.6
62.75206.425.7
63.00206.525.6
63.25206.325.6
63.50206.225.6
63.75205.825.6
64.00205.525.6
64.25205.925.6
64.50205.725.5
64.75205.425.5
65.00205.225.5
65.25204.925.5
65.50205.125.5
65.75205.025.5
66.00204.925.5
66.25204.625.5
66.50204.625.5
66.75204.425.5
67.00204.325.5
67.25204.125.5
67.50204.125.5
67.75203.725.5
68.00203.025.5
68.25202.925.5
68.50203.425.5
68.75203.525.5
69.00203.725.5
69.25203.925.5
69.50203.825.5
69.75203.825.5
70.00203.725.5
70.25203.725.5
70.50203.625.5
70.75203.625.4
71.00203.525.5
71.25203.425.4
71.50203.325.4
71.75203.225.4
72.00203.125.4
72.25203.025.5
72.50203.025.5
72.75203.025.5
73.00203.025.5
73.25203.125.5
73.50203.125.5
73.75203.125.5
74.00203.325.5
74.25202.525.5
74.50202.625.5
74.75202.625.5
75.00202.925.5
75.25203.225.6
75.50203.725.6
75.75204.025.6
76.00204.625.7
76.25204.925.6
76.50205.325.7
76.75205.525.7
77.00206.025.7
77.25206.325.7
77.50206.225.8
77.75206.425.7
78.00206.425.7
78.25206.625.7
78.50206.625.7
78.75206.925.7
79.00206.725.7
79.25207.025.7
79.50206.925.7
79.75207.025.7
80.00206.925.7
80.25207.125.8
80.50207.025.7
80.75207.225.8
81.00207.025.7
81.25207.225.8
81.50207.125.7
81.75207.125.8
82.00207.225.7
82.25207.325.8
82.50207.425.8
82.75207.525.8
83.00207.625.7
83.25207.625.8
83.50207.725.7
83.75207.625.8
84.00207.825.8
84.25207.825.8
84.50207.825.8
84.75207.925.8
85.00208.025.8
85.25207.925.8
85.50208.125.8
85.75207.925.8
86.00208.125.8
86.25207.925.8
86.50208.125.8
86.75207.925.8
87.00208.125.8
87.25208.025.8
87.50208.025.8
87.75207.625.7
88.00208.025.7
88.25207.625.6
88.50207.325.7
88.75206.925.6
89.00206.525.6
89.25206.025.6
89.50205.625.6
89.75205.225.5
90.00205.525.6
90.25205.725.7
90.50206.225.7
90.75207.025.8
91.00207.425.8
91.25207.925.8
91.50208.125.8
91.75207.625.8
92.00207.625.8
92.25207.625.8
92.50207.725.8
92.75208.325.8
93.00208.325.8
93.25208.225.8
93.50208.125.8
93.75208.125.8
94.00208.025.7
94.25207.925.7
94.50207.825.7
94.75207.725.8
95.00207.625.7
95.25207.625.7
95.50207.325.7
95.75207.425.7
96.00207.225.7
96.25207.125.7
96.50207.025.7
96.75206.925.7
97.00207.025.7
97.25206.925.7
97.50206.925.7
97.75207.025.7
98.00206.925.7
98.25207.125.7
98.50207.125.7
98.75207.325.8
99.00207.525.8
99.25207.425.9
99.50207.625.8
99.75208.025.9
100.00208.225.9
100.25208.725.9
100.50209.025.9
100.75209.525.9
101.00209.725.9
101.25210.026.0
101.50210.226.0
101.75210.526.0
102.00210.726.0
102.25211.126.0
102.50211.226.0
102.75211.526.0
103.00211.626.0
103.25211.726.0
103.50211.826.1
103.75212.026.0
104.00212.126.1
104.25212.226.0
104.50212.426.1
104.75212.226.0
105.00212.526.0
105.25212.426.1
105.50212.526.0
105.75212.626.1
106.00212.526.0
106.25212.826.1
106.50212.726.1
106.75212.826.1
107.00212.826.1
107.25212.826.0
107.50212.826.1
107.75212.726.0
108.00212.826.1
108.25212.626.0
108.50212.826.1
108.75212.626.1
109.00212.726.0
109.25212.726.1
109.50212.726.0
109.75212.726.1
110.00212.626.0
110.25212.626.1
110.50212.526.0
110.75212.626.1
111.00212.426.0
111.25212.526.0
111.50212.126.0
111.75211.926.0
112.00212.126.0
112.25211.825.9
112.50211.425.9
112.75211.125.9
113.00210.825.9
113.25210.525.8
113.50210.525.9
113.75210.125.8
114.00209.825.8
114.25209.525.8
114.50209.425.8
114.75209.225.8
115.00209.025.8
115.25208.925.8
115.50208.825.8
115.75207.825.8
116.00207.625.8
116.25208.225.8
116.50208.025.8
116.75208.125.8
117.00208.225.8
117.25208.625.8
117.50208.525.8
117.75208.725.8
118.00208.725.8
118.25208.725.8
118.50208.825.8
118.75208.825.8
119.00208.825.8
119.25208.925.8
119.50208.925.8
119.75209.025.8
120.00209.025.8
120.25209.025.8
120.50208.825.8
120.75208.825.8
121.00208.825.8
121.25208.525.8
121.50208.025.8
121.75207.925.8
122.00207.825.8
122.25207.925.8
122.50207.825.8
122.75207.925.9
123.00208.125.8
123.25208.525.9
123.50208.725.9
123.75209.025.9
124.00209.426.0
124.25209.425.9
124.50209.725.9
124.75209.926.0
125.00210.025.9
125.25210.326.0
125.50210.426.0
125.75210.626.0
126.00210.726.0
126.25210.826.0
126.50210.926.0
126.75211.126.0
127.00211.026.0
127.25211.126.0
127.50211.126.0
127.75211.026.0
128.00211.126.0
128.25211.126.0
128.50211.126.0
128.75211.126.0
129.00211.126.0
129.25211.226.0
129.50211.126.0
129.75211.126.0
130.00211.026.0
130.25211.126.0
130.50211.226.0
130.75211.126.0
131.00211.226.0
131.25211.126.0
131.50211.226.0
131.75211.326.0
132.00211.226.0
132.25211.426.0
132.50211.326.0
132.75211.526.0
133.00211.626.0
133.25211.526.0
133.50211.626.0
133.75211.526.0
134.00211.726.0
134.25211.826.0
134.50211.726.0
134.75211.826.0
135.00211.726.0
135.25211.826.0
135.50211.626.0
135.75211.626.0
136.00211.625.9
136.25211.525.9
136.50211.325.9
136.75210.925.9
137.00210.925.9
137.25210.825.9
137.50210.525.9
137.75210.125.9
138.00210.025.9
138.25210.325.9
138.50210.225.9
138.75210.625.9
139.00210.725.9
139.25211.025.9
139.50211.226.0
139.75210.826.0
140.00210.125.9
140.25210.125.9
140.50210.425.9
140.75210.325.9
141.00210.925.9
141.25211.025.9
141.50211.026.0
141.75211.226.0
142.00211.626.0
142.25212.026.0
142.50212.226.0
142.75212.226.0
143.00212.326.0
143.25212.226.0
143.50212.126.0
143.75211.825.9
144.00211.525.9
144.25211.125.9
144.50210.725.9
144.75210.325.8
145.00209.025.8
145.25208.825.8
145.50208.625.8
145.75208.425.8
146.00208.325.8
146.25208.125.8
146.50207.925.8
146.75208.025.8
147.00208.225.8
147.25208.525.9
147.50208.825.9
147.75209.326.0
148.00209.625.9
148.25210.126.0
148.50210.226.0
148.75210.626.0
149.00210.726.0
149.25211.026.0
149.50211.026.0
149.75211.226.0
150.00211.226.0
150.25211.426.0
150.50211.526.1
150.75211.426.0
151.00211.526.0
151.25211.426.0
151.50211.426.0
151.75211.426.0
152.00211.626.0
152.25211.526.0
152.50211.626.0
152.75211.726.0
153.00211.826.0
153.25211.826.0
153.50212.026.0
153.75212.026.0
154.00212.126.0
154.25212.026.0
154.50212.226.1
154.75212.226.0
155.00212.326.1
155.25212.326.0
155.50212.426.1
155.75212.326.0
156.00212.526.1
156.25212.526.0
156.50212.526.1
156.75212.526.0
157.00212.526.1
157.25212.426.0
157.50212.526.1
157.75212.326.0
158.00212.426.1
158.25212.226.0
158.50212.326.1
158.75212.226.0
159.00212.226.1
159.25212.126.0
159.50211.925.9
159.75211.525.9
160.00211.025.9
160.25211.225.9
160.50210.825.9
160.75210.525.9
161.00210.125.9
161.25210.025.8
161.50209.625.8
161.75209.525.8
162.00209.225.8
162.25209.025.8
162.50208.925.7
162.75208.625.8
163.00208.625.8
163.25208.425.8
163.50208.325.8
163.75207.425.8
164.00207.325.8
164.25207.325.8
164.50207.225.8
164.75207.925.8
165.00--
165.25208.225.8
165.50208.225.8
165.75208.225.8
166.00208.325.8
166.25208.525.8
166.50208.325.8
166.75208.525.8
167.00208.425.8
167.25208.525.9
167.50208.425.8
167.75208.525.8
168.00208.525.8
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
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0
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0
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0
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0
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0
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0
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0
0
0
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0
0
0
0
0
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0
0
0
0
0
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0
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0
0
0
0
0
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0
0
0
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0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
Serial no 1 ?
Time (hours)
Leakage current (nA)
Stability test
182.1
184.1
186.8
188.9
190.6
191.8
193
193.6
194.7
195.5
196.4
197.5
198.6
199.5
199.9
200.7
201.5
202.3
203
203.7
204.1
204.7
205.2
205.7
205.9
206.5
206.7
207.1
207.2
207.7
207.6
208
208
208.3
208.3
208.6
208.4
208.5
208.6
208.8
208.7
208.9
208.8
209
208.9
209.1
209
209.1
209.1
209.1
209.1
209
209.1
209.1
209.3
209.2
209.6
209.7
209.8
209.8
209.9
210
210.1
210.2
210.4
210.6
210.6
210.9
210.8
211
210.7
210.8
210.5
210.4
210.4
210.1
210.3
210.1
210.3
210.1
210.3
210.3
210.6
210.5
210.7
210.7
210.6
210.6
210.4
210.6
210.6
210.7
210.5
210.7
210.4
210.5
210.3
210.5
210.2
210.3
210.1
210.2
210.2
210.3
210.3
210.3
210.4
210.4
210.5
210.3
210.4
210.4
210.5
210.4
210.4
210.3
210.3
210.4
210.5
210.7
210.6
210.7
210.7
210.8
210.7
210.8
210.8
211
211
211.1
210.9
211.1
210.9
210.9
210.9
210.8
210.8
210.8
210.7
210.8
210.7
210.9
210.7
210.9
210.9
211
210.9
211.1
211
211.2
211.1
211.1
210.8
211
210.8
211
210.8
211.1
211
211.2
211.1
211.2
211.1
211.2
211
211.2
211.1
212.3
212.2
212.5
211.3
211.3
211
210.9
210.7
210.8
210.5
210.5
210.3
210.4
210.2
210.3
210.1
210.2
210
210.1
210
210
210
210
209.9
209.9
209.7
209.6
209.5
209.2
209.1
209
208.7
208.7
208.7
208.7
208.5
208.3
208.2
208.1
208
208
207.8
207.8
207.7
207.9
207.8
207.9
207.9
208.2
207.8
208
207.6
207.5
207.2
207.2
207.1
207.1
206.9
206.9
206.7
206.7
206.5
206.6
206.5
206.7
206.4
206.7
206.4
206.6
206.3
206.5
206.3
206.4
206.2
206.3
206.2
206.2
206.2
206.3
206.2
206.4
206.4
206.5
206.5
206.4
206.5
206.3
206.2
205.8
205.5
205.9
205.7
205.4
205.2
204.9
205.1
205
204.9
204.6
204.6
204.4
204.3
204.1
204.1
203.7
203
202.9
203.4
203.5
203.7
203.9
203.8
203.8
203.7
203.7
203.6
203.6
203.5
203.4
203.3
203.2
203.1
203
203
203
203
203.1
203.1
203.1
203.3
202.5
202.6
202.6
202.9
203.2
203.7
204
204.6
204.9
205.3
205.5
206
206.3
206.2
206.4
206.4
206.6
206.6
206.9
206.7
207
206.9
207
206.9
207.1
207
207.2
207
207.2
207.1
207.1
207.2
207.3
207.4
207.5
207.6
207.6
207.7
207.6
207.8
207.8
207.8
207.9
208
207.9
208.1
207.9
208.1
207.9
208.1
207.9
208.1
208
208
207.6
208
207.6
207.3
206.9
206.5
206
205.6
205.2
205.5
205.7
206.2
207
207.4
207.9
208.1
207.6
207.6
207.6
207.7
208.3
208.3
208.2
208.1
208.1
208
207.9
207.8
207.7
207.6
207.6
207.3
207.4
207.2
207.1
207
206.9
207
206.9
206.9
207
206.9
207.1
207.1
207.3
207.5
207.4
207.6
208
208.2
208.7
209
209.5
209.7
210
210.2
210.5
210.7
211.1
211.2
211.5
211.6
211.7
211.8
212
212.1
212.2
212.4
212.2
212.5
212.4
212.5
212.6
212.5
212.8
212.7
212.8
212.8
212.8
212.8
212.7
212.8
212.6
212.8
212.6
212.7
212.7
212.7
212.7
212.6
212.6
212.5
212.6
212.4
212.5
212.1
211.9
212.1
211.8
211.4
211.1
210.8
210.5
210.5
210.1
209.8
209.5
209.4
209.2
209
208.9
208.8
207.8
207.6
208.2
208
208.1
208.2
208.6
208.5
208.7
208.7
208.7
208.8
208.8
208.8
208.9
208.9
209
209
209
208.8
208.8
208.8
208.5
208
207.9
207.8
207.9
207.8
207.9
208.1
208.5
208.7
209
209.4
209.4
209.7
209.9
210
210.3
210.4
210.6
210.7
210.8
210.9
211.1
211
211.1
211.1
211
211.1
211.1
211.1
211.1
211.1
211.2
211.1
211.1
211
211.1
211.2
211.1
211.2
211.1
211.2
211.3
211.2
211.4
211.3
211.5
211.6
211.5
211.6
211.5
211.7
211.8
211.7
211.8
211.7
211.8
211.6
211.6
211.6
211.5
211.3
210.9
210.9
210.8
210.5
210.1
210
210.3
210.2
210.6
210.7
211
211.2
210.8
210.1
210.1
210.4
210.3
210.9
211
211
211.2
211.6
212
212.2
212.2
212.3
212.2
212.1
211.8
211.5
211.1
210.7
210.3
209
208.8
208.6
208.4
208.3
208.1
207.9
208
208.2
208.5
208.8
209.3
209.6
210.1
210.2
210.6
210.7
211
211
211.2
211.2
211.4
211.5
211.4
211.5
211.4
211.4
211.4
211.6
211.5
211.6
211.7
211.8
211.8
212
212
212.1
212
212.2
212.2
212.3
212.3
212.4
212.3
212.5
212.5
212.5
212.5
212.5
212.4
212.5
212.3
212.4
212.2
212.3
212.2
212.2
212.1
211.9
211.5
211
211.2
210.8
210.5
210.1
210
209.6
209.5
209.2
209
208.9
208.6
208.6
208.4
208.3
207.4
207.3
207.3
207.2
207.9
0
208.2
208.2
208.2
208.3
208.5
208.3
208.5
208.4
208.5
208.4
208.5
208.5
Serial no 1 ?
Time (hours)
Leakage current (nA)
Stability test
0.01025815310.01074377540.0103191412
0.01590138690.01678832360.0159436599
0.0198780770.02098883960.0198616639
0.02315160480.02476774350.0231356202
0.03097085610.03901936720.0306888302
0.06809816340.07055273810.0679597637
0.08279143460.08558846250.0826567666
0.09693879210.10005743020.0967736067
0.11095645790.11448067850.1107210301
0.12496616520.12869569390.1247632021
0.13857797450.14215685570.1383625917
0.15097243320.15387630060.150795434
0.16067154660.16222191720.1605968647
0.1662903210.16663397660.1663798677
0.16865056510.16846648460.168793331
0.16969008860.16935784750.1698481757
0.17026894940.16984257590.1704771073
0.17068000590.17020573370.170907287
0.17100058930.17052075630.1712497694
0.17129938720.17072655450.1713774016
0.17148813160.17090870010.1716373608
0.17169852990.17100624650.1718166931
0.17180102590.17126110880.1719620727
0.17190789010.1713476080.1720776528
0.17209621350.17142281630.1723248995
0.17211620540.17152080330.1723721227
0.17228198620.17166865250.1724394134
0.17238357360.17175261360.1726386531
0.17244084560.17184233490.1726185702
0.17258128260.17190503910.1727276339
0.1726429570.17195208980.1728871103
0.17273481280.17200914680.1729288117
0.17280806290.17207765280.1729403182
0.17283105290.17212905910.173007942
0.17288423490.17214619970.1731404268
0.17297628330.17229771920.1731750131
0.17303673010.17230630180.1731101723
0.17303529050.17232346880.1733033611
0.17307416540.1724250930.1733278933
0.17318366130.17242222910.1733293365
0.17314330860.17245660040.1733769732
0.1732038430.17246376240.1734997642
0.17334665670.17258701830.1735243381
0.17337552940.17258845230.1734694155
0.17341163040.17264008770.1734621908
0.17344774270.17266304420.1736458385
0.17346652560.17271471310.1736675485
0.17346508060.17279225990.1735619317
0.17344918740.17281812050.173666101
0.17349253760.17283248990.1736501802
0.17353445830.17281237320.1737558775
0.17357205520.17284686120.1737138766
0.17362268580.17291730640.1736965014
0.17361400470.17290580220.1737978936
0.17365018020.17300362440.1738152841
0.17371532470.17294031820.1738486231
0.17373704760.17295758010.173871821
0.17374428950.17299211160.173839925
0.17376456930.17305112680.1739820749
0.17378485250.17306696530.1739646594
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
1/C^2 (10^-6 pF^-2)
1/C^2
83.93104.684.68
138.65176.09139.6
181.6224.9182.9
200.5243.4201.9
213.7256215.5
223.8265.3225.8
231.5272.5233.8
238278.3240.5
243.8283.6246.2
249288.3251.6
254.2292.8256.8
258.7296.8261.3
262.8300.4265.4
266.6303.7269.2
270.1306.8272.8
273.4309.7276.1
276.5312.4279.2
279.4315282.2
282.1317.4284.9
284.7319.7287.5
287.1322290
289.5324292.3
291.7326294.5
293.9328296.7
295.9329.8298.8
297.8331.6300.8
299.8333.3302.7
301.5334.9304.6
303.3336.5306.3
305338.1308
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Current (nA)
Leakage currents
9873.379647.659844.15
7930.177717.857919.65
7092.726902.497095.65
6572.186354.146574.45
5682.295062.445708.34
3832.063764.813835.96
3475.423418.163478.25
3211.823161.373214.56
3002.092955.523005.28
2828.812787.522831.11
2686.292652.262688.38
2573.662549.262575.17
2494.772482.822495.35
2452.262449.732451.6
2435.042436.372434.01
2427.572429.952426.44
2423.442426.482421.96
2420.522423.892418.91
2418.252421.652416.49
2416.142420.192415.59
2414.812418.92413.76
2413.332418.212412.5
2412.612416.412411.48
2411.862415.82410.67
2410.542415.272408.94
2410.42414.582408.61
2409.242413.542408.14
2408.532412.952406.75
2408.132412.322406.89
2407.152411.882406.13
2406.722411.552405.02
2406.082411.152404.73
2405.572410.672404.65
2405.412410.312404.18
2405.042410.192403.26
2404.42409.132403.02
2403.982409.072403.47
2403.992408.952402.13
2403.722408.242401.96
2402.962408.262401.95
2403.242408.022401.62
2402.822407.972400.77
2401.832407.112400.6
2401.632407.12400.98
2401.382406.742401.03
2401.132406.582399.76
24012406.222399.61
2401.012405.682400.34
2401.122405.52399.62
2400.822405.42399.73
2400.532405.542399
2400.272405.32399.29
2399.922404.812399.41
2399.982404.892398.71
2399.732404.212398.59
2399.282404.652398.36
2399.132404.532398.2
2399.082404.292398.42
2398.942403.882397.44
2398.82403.772397.56
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Capacitance (pF)
Detector capacitance
7044.244910941.167170.7024
19223.822531007.688119488.16
32978.5650580.0133452.41
40200.2559243.5640763.61
45667.696553646440.25
50086.4470384.0950985.64
53592.2574256.2554662.44
5664477450.8957840.25
59438.4480428.9660614.44
6200183116.8963302.56
64617.6485731.8465946.24
66925.6988090.2468277.69
69063.8490240.1670437.16
71075.5692233.6972468.64
72954.0194126.2474419.84
74747.5695914.0976231.21
76452.2597593.7677952.64
78064.369922579636.84
79580.41100742.7681168.01
81054.09102208.0982656.25
82426.4110368484100
83810.2510497685439.29
85088.8910627686730.25
86377.2110758488030.89
87556.81108768.0489281.44
88684.84109958.5690480.64
89880.04111088.8991627.29
90902.25112158.0192781.16
91990.89113232.2593819.69
93025114311.6194864
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
I^2 (nA^2)
I^2
Chart2
9873.379647.659844.15
7930.177717.857919.65
7092.726902.497095.65
6572.186354.146574.45
5682.295062.445708.34
3832.063764.813835.96
3475.423418.163478.25
3211.823161.373214.56
3002.092955.523005.28
2828.812787.522831.11
2686.292652.262688.38
2573.662549.262575.17
2494.772482.822495.35
2452.262449.732451.6
2435.042436.372434.01
2427.572429.952426.44
2423.442426.482421.96
2420.522423.892418.91
2418.252421.652416.49
2416.142420.192415.59
2414.812418.92413.76
2413.332418.212412.5
2412.612416.412411.48
2411.862415.82410.67
2410.542415.272408.94
2410.42414.582408.61
2409.242413.542408.14
2408.532412.952406.75
2408.132412.322406.89
2407.152411.882406.13
2406.722411.552405.02
2406.082411.152404.73
2405.572410.672404.65
2405.412410.312404.18
2405.042410.192403.26
2404.42409.132403.02
2403.982409.072403.47
2403.992408.952402.13
2403.722408.242401.96
2402.962408.262401.95
2403.242408.022401.62
2402.822407.972400.77
2401.832407.112400.6
2401.632407.12400.98
2401.382406.742401.03
2401.132406.582399.76
24012406.222399.61
2401.012405.682400.34
2401.122405.52399.62
2400.822405.42399.73
2400.532405.542399
2400.272405.32399.29
2399.922404.812399.41
2399.982404.892398.71
2399.732404.212398.59
2399.282404.652398.36
2399.132404.532398.2
2399.082404.292398.42
2398.942403.882397.44
2398.82403.772397.56
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Capacitance (pF)
Detector capacitance
IV_CV_NGch_Vfd_thickness_PolySi
Leakage Current[nA]
Serial No.10V20V30V40V50V60V70V80V90V100V110V120V130V140V150V160V170V180V190V200V210V220V230V240V250V260V270V280V290V300V
183.9138.7181.6200.5213.7223.8231.5238.0243.8249.0254.2258.7262.8266.6270.1273.4276.5279.4282.1284.7287.1289.5291.7293.9295.9297.8299.8301.5303.3305.0
2104.6176.1224.9243.4256.0265.3272.5278.3283.6288.3292.8296.8300.4303.7306.8309.7312.4315.0317.4319.7322.0324.0326.0328.0329.8331.6333.3334.9336.5338.1
384.7139.6182.9201.9215.5225.8233.8240.5246.2251.6256.8261.3265.4269.2272.8276.1279.2282.2284.9287.5290.0292.3294.5296.7298.8300.8302.7304.6306.3308.0
I^2 [nA^2]
Serial No.10V20V30V40V50V60V70V80V90V100V110V120V130V140V150V160V170V180V190V200V210V220V230V240V250V260V270V280V290V300V
17044.219223.832978.640200.345667.750086.453592.356644.059438.462001.064617.666925.769063.871075.672954.074747.676452.378064.479580.481054.182426.483810.385088.986377.287556.888684.889880.090902.391990.993025.0
210941.231007.750580.059243.665536.070384.174256.377450.980429.083116.985731.888090.290240.292233.794126.295914.197593.899225.0100742.8102208.1103684.0104976.0106276.0107584.0108768.0109958.6111088.9112158.0113232.3114311.6
37170.719488.233452.440763.646440.350985.654662.457840.360614.463302.665946.268277.770437.272468.674419.876231.277952.679636.881168.082656.384100.085439.386730.388030.989281.490480.691627.392781.293819.794864.0
Detector Capacitance[pF]
Serial No.5V10V15V20V25V30V35V40V45V50V55V60V65V70V75V80V85V90V95V100V105V110V115V120V125V130V135V140V145V150V155V160V165V170V175V180V185V190V195V200V205V210V215V220V225V230V235V240V245V250V255V260V265V270V275V280V285V290V295V300V
19873.47930.27092.76572.25682.33832.13475.43211.83002.12828.82686.32573.72494.82452.32435.02427.62423.42420.52418.32416.12414.82413.32412.62411.92410.52410.42409.22408.52408.12407.22406.72406.12405.62405.42405.02404.42404.02404.02403.72403.02403.22402.82401.82401.62401.42401.12401.02401.02401.12400.82400.52400.32399.92400.02399.72399.32399.12399.12398.92398.8
29647.77717.96902.56354.15062.43764.83418.23161.42955.52787.52652.32549.32482.82449.72436.42430.02426.52423.92421.72420.22418.92418.22416.42415.82415.32414.62413.52413.02412.32411.92411.62411.22410.72410.32410.22409.12409.12409.02408.22408.32408.02408.02407.12407.12406.72406.62406.22405.72405.52405.42405.52405.32404.82404.92404.22404.72404.52404.32403.92403.8
39844.27919.77095.76574.55708.33836.03478.33214.63005.32831.12688.42575.22495.42451.62434.02426.42422.02418.92416.52415.62413.82412.52411.52410.72408.92408.62408.12406.82406.92406.12405.02404.72404.72404.22403.32403.02403.52402.12402.02402.02401.62400.82400.62401.02401.02399.82399.62400.32399.62399.72399.02399.32399.42398.72398.62398.42398.22398.42397.42397.6
1/C^2 *10^6 [pF^-2]
Serial No.5V10V15V20V25V30V35V40V45V50V55V60V65V70V75V80V85V90V95V100V105V110V115V120V125V130V135V140V145V150V155V160V165V170V175V180V185V190V195V200V205V210V215V220V225V230V235V240V245V250V255V260V265V270V275V280V285V290V295V300V
10.0100.0160.0200.0230.0310.0680.0830.0970.1110.1250.1390.1510.1610.1660.1690.1700.1700.1710.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1740.1740.1740.1740.1740.1740.1740.1740.1740.174
20.0110.0170.0210.0250.0390.0710.0860.1000.1140.1290.1420.1540.1620.1670.1680.1690.1700.1700.1710.1710.1710.1710.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.173
30.0100.0160.0200.0230.0310.0680.0830.0970.1110.1250.1380.1510.1610.1660.1690.1700.1700.1710.1710.1710.1720.1720.1720.1720.1720.1720.1720.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1730.1740.1730.1730.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.1740.174
NG-channelVfd[V]Thickness[um]Poly-Si[Mohm]
Serial No.NGch.Serial No.Serial No.Min.19.8
1Nothing1801323Max.24.1
2Nothing2752324AVG.21.3
3Nothing3803324
IV_CV_NGch_Vfd_thickness_PolySi
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Current (nA)
Leakage currents
168hr_stabiliby
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Capacitance (pF)
Detector capacitance
Plots
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
1/C^2 (10^-6 pF^-2)
1/C^2
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
000
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
I^2 (nA^2)
I^2
168hours stability check
hourIdTemp.(degree)
0.00182.125.7
0.25184.125.6
0.50186.825.6
0.75188.925.6
1.00190.625.6
1.25191.825.5
1.50193.025.6
1.75193.625.5
2.00194.725.5
2.25195.525.5
2.50196.425.6
2.75197.525.6
3.00198.625.6
3.25199.525.6
3.50199.925.6
3.75200.725.6
4.00201.525.6
4.25202.325.6
4.50203.025.7
4.75203.725.7
5.00204.125.6
5.25204.725.7
5.50205.225.7
5.75205.725.7
6.00205.925.7
6.25206.525.7
6.50206.725.7
6.75207.125.7
7.00207.225.7
7.25207.725.7
7.50207.625.7
7.75208.025.7
8.00208.025.7
8.25208.325.7
8.50208.325.7
8.75208.625.7
9.00208.425.7
9.25208.525.7
9.50208.625.7
9.75208.825.7
10.00208.725.7
10.25208.925.7
10.50208.825.7
10.75209.025.6
11.00208.925.7
11.25209.125.7
11.50209.025.7
11.75209.125.7
12.00209.125.7
12.25209.125.6
12.50209.125.7
12.75209.025.6
13.00209.125.7
13.25209.125.6
13.50209.325.7
13.75209.225.7
14.00209.625.7
14.25209.725.7
14.50209.825.7
14.75209.825.7
15.00209.925.7
15.25210.025.7
15.50210.125.7
15.75210.225.7
16.00210.425.8
16.25210.625.7
16.50210.625.8
16.75210.925.7
17.00210.825.7
17.25211.025.7
17.50210.725.7
17.75210.825.7
18.00210.525.7
18.25210.425.7
18.50210.425.7
18.75210.125.6
19.00210.325.8
19.25210.125.7
19.50210.325.7
19.75210.125.7
20.00210.325.7
20.25210.325.7
20.50210.625.7
20.75210.525.7
21.00210.725.7
21.25210.725.7
21.50210.625.7
21.75210.625.7
22.00210.425.7
22.25210.625.7
22.50210.625.7
22.75210.725.7
23.00210.525.7
23.25210.725.7
23.50210.425.7
23.75210.525.7
24.00210.325.7
24.25210.525.7
24.50210.225.7
24.75210.325.6
25.00210.125.7
25.25210.225.7
25.50210.225.7
25.75210.325.7
26.00210.325.7
26.25210.325.7
26.50210.425.7
26.75210.425.7
27.00210.525.7
27.25210.325.6
27.50210.425.7
27.75210.425.7
28.00210.525.7
28.25210.425.7
28.50210.425.7
28.75210.325.7
29.00210.325.6
29.25210.425.7
29.50210.525.6
29.75210.725.7
30.00210.625.7
30.25210.725.7
30.50210.725.7
30.75210.825.7
31.00210.725.7
31.25210.825.7
31.50210.825.7
31.75211.025.7
32.00211.025.7
32.25211.125.7
32.50210.925.7
32.75211.125.7
33.00210.925.7
33.25210.925.7
33.50210.925.7
33.75210.825.7
34.00210.825.7
34.25210.825.7
34.50210.725.7
34.75210.825.7
35.00210.725.7
35.25210.925.7
35.50210.725.7
35.75210.925.7
36.00210.925.7
36.25211.025.7
36.50210.925.7
36.75211.125.7
37.00211.025.7
37.25211.225.7
37.50211.125.7
37.75211.125.7
38.00210.825.7
38.25211.025.7
38.50210.825.7
38.75211.025.7
39.00210.825.7
39.25211.125.7
39.50211.025.7
39.75211.225.7
40.00211.125.7
40.25211.225.7
40.50211.125.7
40.75211.225.7
41.00211.025.7
41.25211.225.7
41.50211.125.7
41.75212.325.8
42.00212.225.7
42.25212.525.8
42.50211.325.7
42.75211.325.7
43.00211.025.7
43.25210.925.7
43.50210.725.7
43.75210.825.7
44.00210.525.6
44.25210.525.7
44.50210.325.7
44.75210.425.7
45.00210.225.7
45.25210.325.7
45.50210.125.7
45.75210.225.7
46.00210.025.7
46.25210.125.7
46.50210.025.7
46.75210.025.7
47.00210.025.7
47.25210.025.7
47.50209.925.7
47.75209.925.6
48.00209.725.7
48.25209.625.6
48.50209.525.7
48.75209.225.6
49.00209.125.7
49.25209.025.6
49.50208.725.7
49.75208.725.6
50.00208.725.7
50.25208.725.6
50.50208.525.6
50.75208.325.6
51.00208.225.7
51.25208.125.6
51.50208.025.6
51.75208.025.6
52.00207.825.6
52.25207.825.6
52.50207.725.6
52.75207.925.6
53.00207.825.6
53.25207.925.7
53.50207.925.7
53.75208.225.7
54.00207.825.6
54.25208.025.7
54.50207.625.6
54.75207.525.6
55.00207.225.7
55.25207.225.6
55.50207.125.7
55.75207.125.6
56.00206.925.6
56.25206.925.6
56.50206.725.6
56.75206.725.6
57.00206.525.6
57.25206.625.6
57.50206.525.6
57.75206.725.7
58.00206.425.6
58.25206.725.7
58.50206.425.6
58.75206.625.7
59.00206.325.6
59.25206.525.7
59.50206.325.6
59.75206.425.7
60.00206.225.6
60.25206.325.7
60.50206.225.6
60.75206.225.7
61.00206.225.6
61.25206.325.7
61.50206.225.6
61.75206.425.7
62.00206.425.6
62.25206.525.7
62.50206.525.6
62.75206.425.7
63.00206.525.6
63.25206.325.6
63.50206.225.6
63.75205.825.6
64.00205.525.6
64.25205.925.6
64.50205.725.5
64.75205.425.5
65.00205.225.5
65.25204.925.5
65.50205.125.5
65.75205.025.5
66.00204.925.5
66.25204.625.5
66.50204.625.5
66.75204.425.5
67.00204.325.5
67.25204.125.5
67.50204.125.5
67.75203.725.5
68.00203.025.5
68.25202.925.5
68.50203.425.5
68.75203.525.5
69.00203.725.5
69.25203.925.5
69.50203.825.5
69.75203.825.5
70.00203.725.5
70.25203.725.5
70.50203.625.5
70.75203.625.4
71.00203.525.5
71.25203.425.4
71.50203.325.4
71.75203.225.4
72.00203.125.4
72.25203.025.5
72.50203.025.5
72.75203.025.5
73.00203.025.5
73.25203.125.5
73.50203.125.5
73.75203.125.5
74.00203.325.5
74.25202.525.5
74.50202.625.5
74.75202.625.5
75.00202.925.5
75.25203.225.6
75.50203.725.6
75.75204.025.6
76.00204.625.7
76.25204.925.6
76.50205.325.7
76.75205.525.7
77.00206.025.7
77.25206.325.7
77.50206.225.8
77.75206.425.7
78.00206.425.7
78.25206.625.7
78.50206.625.7
78.75206.925.7
79.00206.725.7
79.25207.025.7
79.50206.925.7
79.75207.025.7
80.00206.925.7
80.25207.125.8
80.50207.025.7
80.75207.225.8
81.00207.025.7
81.25207.225.8
81.50207.125.7
81.75207.125.8
82.00207.225.7
82.25207.325.8
82.50207.425.8
82.75207.525.8
83.00207.625.7
83.25207.625.8
83.50207.725.7
83.75207.625.8
84.00207.825.8
84.25207.825.8
84.50207.825.8
84.75207.925.8
85.00208.025.8
85.25207.925.8
85.50208.125.8
85.75207.925.8
86.00208.125.8
86.25207.925.8
86.50208.125.8
86.75207.925.8
87.00208.125.8
87.25208.025.8
87.50208.025.8
87.75207.625.7
88.00208.025.7
88.25207.625.6
88.50207.325.7
88.75206.925.6
89.00206.525.6
89.25206.025.6
89.50205.625.6
89.75205.225.5
90.00205.525.6
90.25205.725.7
90.50206.225.7
90.75207.025.8
91.00207.425.8
91.25207.925.8
91.50208.125.8
91.75207.625.8
92.00207.625.8
92.25207.625.8
92.50207.725.8
92.75208.325.8
93.00208.325.8
93.25208.225.8
93.50208.125.8
93.75208.125.8
94.00208.025.7
94.25207.925.7
94.50207.825.7
94.75207.725.8
95.00207.625.7
95.25207.625.7
95.50207.325.7
95.75207.425.7
96.00207.225.7
96.25207.125.7
96.50207.025.7
96.75206.925.7
97.00207.025.7
97.25206.925.7
97.50206.925.7
97.75207.025.7
98.00206.925.7
98.25207.125.7
98.50207.125.7
98.75207.325.8
99.00207.525.8
99.25207.425.9
99.50207.625.8
99.75208.025.9
100.00208.225.9
100.25208.725.9
100.50209.025.9
100.75209.525.9
101.00209.725.9
101.25210.026.0
101.50210.226.0
101.75210.526.0
102.00210.726.0
102.25211.126.0
102.50211.226.0
102.75211.526.0
103.00211.626.0
103.25211.726.0
103.50211.826.1
103.75212.026.0
104.00212.126.1
104.25212.226.0
104.50212.426.1
104.75212.226.0
105.00212.526.0
105.25212.426.1
105.50212.526.0
105.75212.626.1
106.00212.526.0
106.25212.826.1
106.50212.726.1
106.75212.826.1
107.00212.826.1
107.25212.826.0
107.50212.826.1
107.75212.726.0
108.00212.826.1
108.25212.626.0
108.50212.826.1
108.75212.626.1
109.00212.726.0
109.25212.726.1
109.50212.726.0
109.75212.726.1
110.00212.626.0
110.25212.626.1
110.50212.526.0
110.75212.626.1
111.00212.426.0
111.25212.526.0
111.50212.126.0
111.75211.926.0
112.00212.126.0
112.25211.825.9
112.50211.425.9
112.75211.125.9
113.00210.825.9
113.25210.525.8
113.50210.525.9
113.75210.125.8
114.00209.825.8
114.25209.525.8
114.50209.425.8
114.75209.225.8
115.00209.025.8
115.25208.925.8
115.50208.825.8
115.75207.825.8
116.00207.625.8
116.25208.225.8
116.50208.025.8
116.75208.125.8
117.00208.225.8
117.25208.625.8
117.50208.525.8
117.75208.725.8
118.00208.725.8
118.25208.725.8
118.50208.825.8
118.75208.825.8
119.00208.825.8
119.25208.925.8
119.50208.925.8
119.75209.025.8
120.00209.025.8
120.25209.025.8
120.50208.825.8
120.75208.825.8
121.00208.825.8
121.25208.525.8
121.50208.025.8
121.75207.925.8
122.00207.825.8
122.25207.925.8
122.50207.825.8
122.75207.925.9
123.00208.125.8
123.25208.525.9
123.50208.725.9
123.75209.025.9
124.00209.426.0
124.25209.425.9
124.50209.725.9
124.75209.926.0
125.00210.025.9
125.25210.326.0
125.50210.426.0
125.75210.626.0
126.00210.726.0
126.25210.826.0
126.50210.926.0
126.75211.126.0
127.00211.026.0
127.25211.126.0
127.50211.126.0
127.75211.026.0
128.00211.126.0
128.25211.126.0
128.50211.126.0
128.75211.126.0
129.00211.126.0
129.25211.226.0
129.50211.126.0
129.75211.126.0
130.00211.026.0
130.25211.126.0
130.50211.226.0
130.75211.126.0
131.00211.226.0
131.25211.126.0
131.50211.226.0
131.75211.326.0
132.00211.226.0
132.25211.426.0
132.50211.326.0
132.75211.526.0
133.00211.626.0
133.25211.526.0
133.50211.626.0
133.75211.526.0
134.00211.726.0
134.25211.826.0
134.50211.726.0
134.75211.826.0
135.00211.726.0
135.25211.826.0
135.50211.626.0
135.75211.626.0
136.00211.625.9
136.25211.525.9
136.50211.325.9
136.75210.925.9
137.00210.925.9
137.25210.825.9
137.50210.525.9
137.75210.125.9
138.00210.025.9
138.25210.325.9
138.50210.225.9
138.75210.625.9
139.00210.725.9
139.25211.025.9
139.50211.226.0
139.75210.826.0
140.00210.125.9
140.25210.125.9
140.50210.425.9
140.75210.325.9
141.00210.925.9
141.25211.025.9
141.50211.026.0
141.75211.226.0
142.00211.626.0
142.25212.026.0
142.50212.226.0
142.75212.226.0
143.00212.326.0
143.25212.226.0
143.50212.126.0
143.75211.825.9
144.00211.525.9
144.25211.125.9
144.50210.725.9
144.75210.325.8
145.00209.025.8
145.25208.825.8
145.50208.625.8
145.75208.425.8
146.00208.325.8
146.25208.125.8
146.50207.925.8
146.75208.025.8
147.00208.225.8
147.25208.525.9
147.50208.825.9
147.75209.326.0
148.00209.625.9
148.25210.126.0
148.50210.226.0
148.75210.626.0
149.00210.726.0
149.25211.026.0
149.50211.026.0
149.75211.226.0
150.00211.226.0
150.25211.426.0
150.50211.526.1
150.75211.426.0
151.00211.526.0
151.25211.426.0
151.50211.426.0
151.75211.426.0
152.00211.626.0
152.25211.526.0
152.50211.626.0
152.75211.726.0
153.00211.826.0
153.25211.826.0
153.50212.026.0
153.75212.026.0
154.00212.126.0
154.25212.026.0
154.50212.226.1
154.75212.226.0
155.00212.326.1
155.25212.326.0
155.50212.426.1
155.75212.326.0
156.00212.526.1
156.25212.526.0
156.50212.526.1
156.75212.526.0
157.00212.526.1
157.25212.426.0
157.50212.526.1
157.75212.326.0
158.00212.426.1
158.25212.226.0
158.50212.326.1
158.75212.226.0
159.00212.226.1
159.25212.126.0
159.50211.925.9
159.75211.525.9
160.00211.025.9
160.25211.225.9
160.50210.825.9
160.75210.525.9
161.00210.125.9
161.25210.025.8
161.50209.625.8
161.75209.525.8
162.00209.225.8
162.25209.025.8
162.50208.925.7
162.75208.625.8
163.00208.625.8
163.25208.425.8
163.50208.325.8
163.75207.425.8
164.00207.325.8
164.25207.325.8
164.50207.225.8
164.75207.925.8
165.00--
165.25208.225.8
165.50208.225.8
165.75208.225.8
166.00208.325.8
166.25208.525.8
166.50208.325.8
166.75208.525.8
167.00208.425.8
167.25208.525.9
167.50208.425.8
167.75208.525.8
168.00208.525.8
0
0
0
0
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0
0
0
0
0
0
0
0
0
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0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
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0
0
Serial no 1 ?
Time (hours)
Leakage current (nA)
Stability test
182.1
184.1
186.8
188.9
190.6
191.8
193
193.6
194.7
195.5
196.4
197.5
198.6
199.5
199.9
200.7
201.5
202.3
203
203.7
204.1
204.7
205.2
205.7
205.9
206.5
206.7
207.1
207.2
207.7
207.6
208
208
208.3
208.3
208.6
208.4
208.5
208.6
208.8
208.7
208.9
208.8
209
208.9
209.1
209
209.1
209.1
209.1
209.1
209
209.1
209.1
209.3
209.2
209.6
209.7
209.8
209.8
209.9
210
210.1
210.2
210.4
210.6
210.6
210.9
210.8
211
210.7
210.8
210.5
210.4
210.4
210.1
210.3
210.1
210.3
210.1
210.3
210.3
210.6
210.5
210.7
210.7
210.6
210.6
210.4
210.6
210.6
210.7
210.5
210.7
210.4
210.5
210.3
210.5
210.2
210.3
210.1
210.2
210.2
210.3
210.3
210.3
210.4
210.4
210.5
210.3
210.4
210.4
210.5
210.4
210.4
210.3
210.3
210.4
210.5
210.7
210.6
210.7
210.7
210.8
210.7
210.8
210.8
211
211
211.1
210.9
211.1
210.9
210.9
210.9
210.8
210.8
210.8
210.7
210.8
210.7
210.9
210.7
210.9
210.9
211
210.9
211.1
211
211.2
211.1
211.1
210.8
211
210.8
211
210.8
211.1
211
211.2
211.1
211.2
211.1
211.2
211
211.2
211.1
212.3
212.2
212.5
211.3
211.3
211
210.9
210.7
210.8
210.5
210.5
210.3
210.4
210.2
210.3
210.1
210.2
210
210.1
210
210
210
210
209.9
209.9
209.7
209.6
209.5
209.2
209.1
209
208.7
208.7
208.7
208.7
208.5
208.3
208.2
208.1
208
208
207.8
207.8
207.7
207.9
207.8
207.9
207.9
208.2
207.8
208
207.6
207.5
207.2
207.2
207.1
207.1
206.9
206.9
206.7
206.7
206.5
206.6
206.5
206.7
206.4
206.7
206.4
206.6
206.3
206.5
206.3
206.4
206.2
206.3
206.2
206.2
206.2
206.3
206.2
206.4
206.4
206.5
206.5
206.4
206.5
206.3
206.2
205.8
205.5
205.9
205.7
205.4
205.2
204.9
205.1
205
204.9
204.6
204.6
204.4
204.3
204.1
204.1
203.7
203
202.9
203.4
203.5
203.7
203.9
203.8
203.8
203.7
203.7
203.6
203.6
203.5
203.4
203.3
203.2
203.1
203
203
203
203
203.1
203.1
203.1
203.3
202.5
202.6
202.6
202.9
203.2
203.7
204
204.6
204.9
205.3
205.5
206
206.3
206.2
206.4
206.4
206.6
206.6
206.9
206.7
207
206.9
207
206.9
207.1
207
207.2
207
207.2
207.1
207.1
207.2
207.3
207.4
207.5
207.6
207.6
207.7
207.6
207.8
207.8
207.8
207.9
208
207.9
208.1
207.9
208.1
207.9
208.1
207.9
208.1
208
208
207.6
208
207.6
207.3
206.9
206.5
206
205.6
205.2
205.5
205.7
206.2
207
207.4
207.9
208.1
207.6
207.6
207.6
207.7
208.3
208.3
208.2
208.1
208.1
208
207.9
207.8
207.7
207.6
207.6
207.3
207.4
207.2
207.1
207
206.9
207
206.9
206.9
207
206.9
207.1
207.1
207.3
207.5
207.4
207.6
208
208.2
208.7
209
209.5
209.7
210
210.2
210.5
210.7
211.1
211.2
211.5
211.6
211.7
211.8
212
212.1
212.2
212.4
212.2
212.5
212.4
212.5
212.6
212.5
212.8
212.7
212.8
212.8
212.8
212.8
212.7
212.8
212.6
212.8
212.6
212.7
212.7
212.7
212.7
212.6
212.6
212.5
212.6
212.4
212.5
212.1
211.9
212.1
211.8
211.4
211.1
210.8
210.5
210.5
210.1
209.8
209.5
209.4
209.2
209
208.9
208.8
207.8
207.6
208.2
208
208.1
208.2
208.6
208.5
208.7
208.7
208.7
208.8
208.8
208.8
208.9
208.9
209
209
209
208.8
208.8
208.8
208.5
208
207.9
207.8
207.9
207.8
207.9
208.1
208.5
208.7
209
209.4
209.4
209.7
209.9
210
210.3
210.4
210.6
210.7
210.8
210.9
211.1
211
211.1
211.1
211
211.1
211.1
211.1
211.1
211.1
211.2
211.1
211.1
211
211.1
211.2
211.1
211.2
211.1
211.2
211.3
211.2
211.4
211.3
211.5
211.6
211.5
211.6
211.5
211.7
211.8
211.7
211.8
211.7
211.8
211.6
211.6
211.6
211.5
211.3
210.9
210.9
210.8
210.5
210.1
210
210.3
210.2
210.6
210.7
211
211.2
210.8
210.1
210.1
210.4
210.3
210.9
211
211
211.2
211.6
212
212.2
212.2
212.3
212.2
212.1
211.8
211.5
211.1
210.7
210.3
209
208.8
208.6
208.4
208.3
208.1
207.9
208
208.2
208.5
208.8
209.3
209.6
210.1
210.2
210.6
210.7
211
211
211.2
211.2
211.4
211.5
211.4
211.5
211.4
211.4
211.4
211.6
211.5
211.6
211.7
211.8
211.8
212
212
212.1
212
212.2
212.2
212.3
212.3
212.4
212.3
212.5
212.5
212.5
212.5
212.5
212.4
212.5
212.3
212.4
212.2
212.3
212.2
212.2
212.1
211.9
211.5
211
211.2
210.8
210.5
210.1
210
209.6
209.5
209.2
209
208.9
208.6
208.6
208.4
208.3
207.4
207.3
207.3
207.2
207.9
0
208.2
208.2
208.2
208.3
208.5
208.3
208.5
208.4
208.5
208.4
208.5
208.5
Serial no 1 ?
Time (hours)
Leakage current (nA)
Stability test
0.01025815310.01074377540.0103191412
0.01590138690.01678832360.0159436599
0.0198780770.02098883960.0198616639
0.02315160480.02476774350.0231356202
0.03097085610.03901936720.0306888302
0.06809816340.07055273810.0679597637
0.08279143460.08558846250.0826567666
0.09693879210.10005743020.0967736067
0.11095645790.11448067850.1107210301
0.12496616520.12869569390.1247632021
0.13857797450.14215685570.1383625917
0.15097243320.15387630060.150795434
0.16067154660.16222191720.1605968647
0.1662903210.16663397660.1663798677
0.16865056510.16846648460.168793331
0.16969008860.16935784750.1698481757
0.17026894940.16984257590.1704771073
0.17068000590.17020573370.170907287
0.17100058930.17052075630.1712497694
0.17129938720.17072655450.1713774016
0.17148813160.17090870010.1716373608
0.17169852990.17100624650.1718166931
0.17180102590.17126110880.1719620727
0.17190789010.1713476080.1720776528
0.17209621350.17142281630.1723248995
0.17211620540.17152080330.1723721227
0.17228198620.17166865250.1724394134
0.17238357360.17175261360.1726386531
0.17244084560.17184233490.1726185702
0.17258128260.17190503910.1727276339
0.1726429570.17195208980.1728871103
0.17273481280.17200914680.1729288117
0.17280806290.17207765280.1729403182
0.17283105290.17212905910.173007942
0.17288423490.17214619970.1731404268
0.17297628330.17229771920.1731750131
0.17303673010.17230630180.1731101723
0.17303529050.17232346880.1733033611
0.17307416540.1724250930.1733278933
0.17318366130.17242222910.1733293365
0.17314330860.17245660040.1733769732
0.1732038430.17246376240.1734997642
0.17334665670.17258701830.1735243381
0.17337552940.17258845230.1734694155
0.17341163040.17264008770.1734621908
0.17344774270.17266304420.1736458385
0.17346652560.17271471310.1736675485
0.17346508060.17279225990.1735619317
0.17344918740.17281812050.173666101
0.17349253760.17283248990.1736501802
0.17353445830.17281237320.1737558775
0.17357205520.17284686120.1737138766
0.17362268580.17291730640.1736965014
0.17361400470.17290580220.1737978936
0.17365018020.17300362440.1738152841
0.17371532470.17294031820.1738486231
0.17373704760.17295758010.173871821
0.17374428950.17299211160.173839925
0.17376456930.17305112680.1739820749
0.17378485250.17306696530.1739646594
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
1/C^2 (10^-6 pF^-2)
1/C^2
83.93104.684.68
138.65176.09139.6
181.6224.9182.9
200.5243.4201.9
213.7256215.5
223.8265.3225.8
231.5272.5233.8
238278.3240.5
243.8283.6246.2
249288.3251.6
254.2292.8256.8
258.7296.8261.3
262.8300.4265.4
266.6303.7269.2
270.1306.8272.8
273.4309.7276.1
276.5312.4279.2
279.4315282.2
282.1317.4284.9
284.7319.7287.5
287.1322290
289.5324292.3
291.7326294.5
293.9328296.7
295.9329.8298.8
297.8331.6300.8
299.8333.3302.7
301.5334.9304.6
303.3336.5306.3
305338.1308
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Current (nA)
Leakage currents
9873.379647.659844.15
7930.177717.857919.65
7092.726902.497095.65
6572.186354.146574.45
5682.295062.445708.34
3832.063764.813835.96
3475.423418.163478.25
3211.823161.373214.56
3002.092955.523005.28
2828.812787.522831.11
2686.292652.262688.38
2573.662549.262575.17
2494.772482.822495.35
2452.262449.732451.6
2435.042436.372434.01
2427.572429.952426.44
2423.442426.482421.96
2420.522423.892418.91
2418.252421.652416.49
2416.142420.192415.59
2414.812418.92413.76
2413.332418.212412.5
2412.612416.412411.48
2411.862415.82410.67
2410.542415.272408.94
2410.42414.582408.61
2409.242413.542408.14
2408.532412.952406.75
2408.132412.322406.89
2407.152411.882406.13
2406.722411.552405.02
2406.082411.152404.73
2405.572410.672404.65
2405.412410.312404.18
2405.042410.192403.26
2404.42409.132403.02
2403.982409.072403.47
2403.992408.952402.13
2403.722408.242401.96
2402.962408.262401.95
2403.242408.022401.62
2402.822407.972400.77
2401.832407.112400.6
2401.632407.12400.98
2401.382406.742401.03
2401.132406.582399.76
24012406.222399.61
2401.012405.682400.34
2401.122405.52399.62
2400.822405.42399.73
2400.532405.542399
2400.272405.32399.29
2399.922404.812399.41
2399.982404.892398.71
2399.732404.212398.59
2399.282404.652398.36
2399.132404.532398.2
2399.082404.292398.42
2398.942403.882397.44
2398.82403.772397.56
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
Capacitance (pF)
Detector capacitance
7044.244910941.167170.7024
19223.822531007.688119488.16
32978.5650580.0133452.41
40200.2559243.5640763.61
45667.696553646440.25
50086.4470384.0950985.64
53592.2574256.2554662.44
5664477450.8957840.25
59438.4480428.9660614.44
6200183116.8963302.56
64617.6485731.8465946.24
66925.6988090.2468277.69
69063.8490240.1670437.16
71075.5692233.6972468.64
72954.0194126.2474419.84
74747.5695914.0976231.21
76452.2597593.7677952.64
78064.369922579636.84
79580.41100742.7681168.01
81054.09102208.0982656.25
82426.4110368484100
83810.2510497685439.29
85088.8910627686730.25
86377.2110758488030.89
87556.81108768.0489281.44
88684.84109958.5690480.64
89880.04111088.8991627.29
90902.25112158.0192781.16
91990.89113232.2593819.69
93025114311.6194864
Serial no 1
Serial no 2
Serial no 3
Bias voltage (V)
I^2 (nA^2)
I^2
-
Prototype module3 prototype inner detector sandwich modules built: Hybrids glued to sensors with thin ceramic spacers Readout pads bonded to silicon at periphery of hybridhybridsensorbonds
Brge Svane Nielsen, NBI
-
Brge Svane Nielsen, NBI
-
Beam test of modules680 MeV e- beam test at ASTRID ring at Aarhus University, DKFMD modulee- beam
Brge Svane Nielsen, NBI
-
Noise estimateInner sensor noise estimate
Noise SourceShort strips(14 mm)Long Strips(50 mm)Elect. + cap. 263 e- 309 e-Bias 208 e- 208 e-Ileak 47 e- 88 e-Total 338 e- 390 e-Signal (1 MIP)22000 e-22000 e-Signal/Noise 65 56
Brge Svane Nielsen, NBI
-
Test beam results, JulyTested prototype with high energy electron beam (680 MeV)Clear signal peakSignal/Noise 60
Brge Svane Nielsen, NBI
-
Test beam results, OctoberS/N=56S/N=47S/N=56S/N=58
Brge Svane Nielsen, NBI
-
Read-out electronicsLab test with sandwich and prototype Digitizer+RCU readoutGood progress with prototype Digitizer and USB version of RCU prototype Digitizer card + firmware built complete Digitizer+RCU chain works first beam tests with full electronics chain successfull preparing for final versionRCUDigitizer
Brge Svane Nielsen, NBI
-
Integration testInstallation of FMD3and FMD2 together withITS, etc.Beam pipe support
Brge Svane Nielsen, NBI
-
ConclusionsFMD prototype modules show excellent signal to noise characteristics ( 60:1).Hit sharing accounts for most of the particles seen between the MIP peak and the noise peak.Production of inner sensors and hybrids started.Final design of outer module, digitizer and mechanics progressing well.
Brge Svane Nielsen, NBI