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MicroenvironMents
Solar Cell Wet ProCeSS Carrier
Improved minority carrier lifetime and cell yields
Overview Entegris has combined more than 40 years of experi-ence in handling critical substrates with user input to create the solar cell wet process carrier. Used in etch, cleaning and texturing applications, our 50- and 100-capacity carriers offer cleaner batch processes with fewer cell defects.
Improve your minority carrier lifetime with a high- performance process carrier. A proprietary tooth design prevents residual fluid from gathering in between the cell and tooth providing you with reduced marks and defects. In addition, a patented molding process encapsulates the stainless steel wafer support rods preventing metal contaminants in your processes. Built for strength and durability, the wafer support rod offers you longer process carrier life.
Features and BenefitsFeatures Benefits
Proprietary tooth design minimizes fluid traps Improved process throughput and yield
Patented overmolding technique covers all stainless steel, leaving no external exposure
Cleaner process baths improve cell yield and minority car-rier lifetime
PVDF base polymer offers excellent resistance to bath chemicals
Long-lasting carrier life
Carbon fiber filler in PVDF minimizes thermal expansion Improved equipment interoperability through carrier’s dimensional stability
Custom machined end walls fit wide variety of equipment requirements
Compatible with multiple automated machines
Optional retaining bar stabilizes cells within the carrier Improved process control
SpecificationsMaterials of construction:
End wall PVDF
Wafer supports Carbon fiber-filled PVDF, stainless steel core
Orientation: Horizontal or vertical
Maximum temperature:
80°C (176°F)
Patent: Pending
Performance TestingOver a nine month period, Entegris has worked closely with a key solar cell manufacturer to test various aspects of the wet process carrier design. A proprie-tary tooth profile was developed through continuous improvement testing on R&D and production wet benches. Additional product testing was conducted “down stream” of the wet process to verify dimensional integrity of cell locations, carrier interface points and RFID readability. These tests included compatibility testing in diffusion furnaces, stack splitters and ion implant tools.
Entegris® and the Entegris Ring Design® are registered trademarks of Entegris, Inc.
eNteGriS, iNC. Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USACustomer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022 In North America 800 394 4083 | www.entegris.com
©2011–2013 Entegris, Inc. All rights reserved 1330-7068ENT-0213
Dimensions
554.0 mm (21.81”)
592.8 mm (23.34”)
206.0 mm (8.11”)
206.0 mm (8.11”)SiDe VieW
toP VieW
100-capacity Carrier
FroNt VieW
End walls can be customized to fit virtually all equipment configurations.
For More InformationContact us at [email protected] or visit www.PVProcessSolutions.com to discover how to improve yields, increase efficiencies and reduce your costs.
Terms and Conditions of SaleAll purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer.
274.0 mm (10.78”) 274.0 mm (10.78”)
FroNt VieW
186.5 mm (7.34”)
197.0 mm (7.76”)
SiDe VieW
toP VieW
50-capacity Carrier
50-capacity100-capacity without optional retaining rod
100-capacity with optional retaining rod
Dimensions: Width – 197.0 mm (7.76”)
Width – 206.0 mm (8.11")
Width – 206.0 mm (8.11")
Length – 274.0 mm (10.78”)
Length – 554.0 mm (21.81")
Length – 554.0 mm (21.81")
Height – 186.5 mm (7.34”)
Height – 206.0 mm (8.11")
Height – 206.0 mm (8.11")
Pitch (center to center of tooth): 4.76 mm (0.187")
Weight: Without cells – 2.10 kg (4.63 lb)
Without cells – 4.15 kg (9.15 lb)
Without cells – 4.61 kg (10.16 lb)
With cells – 2.74 kg (6.04 lb)
With cells – 5.43 kg (11.97 lb)
With cells – 5.90 kg (13.01 lb)
Ordering InformationPart Number Description
WPC156-ST105-1 156 mm wet process carrier, 50-capacity
WPC156-ST110-1 156 mm wet process carrier, 100-capacity without retaining rod
WPC156-ST110-3 156 mm wet process carrier, 100-capacity with retaining rod