Standard Operating ProcedureRIE: Oxford PlasmaPro 80

ContentsOperating Procedure ……………………………………………………………………………………………. 2 Recipe Setup ……………………………………………………………………………………………………….. 7Troubleshooting/ FAQ …………………………………………………………………………………………. 8Contact ………………………………………………………………………………………………………………… 9About this document ………………………………………………………………………………………….. 9

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Operating Procedure:

 Figure 1. Oxford PlasmaPro 80

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Starting a Run1. Check for tool status in Badger and make sure the tool is up and available for processing.2. Enable the tool on Badger.3. From the main computer, click the menu icon as shown below.

Figure 2. Main Computer Monitor

4. From the main menu, choose “User Login” under “Utilities” and enter user name and password in the PC4500 screen that pops up and hit verify (Figure 3).

a. Username = “OPT”, password = “OPT”b. Once you are logged in, you will have the access level of “Manager”. Click OK to get out

of access control window.5. Vent the load lock: System→Pumping (Figure 4)

a. Press the “Stop” button in the pump control dialogue box under chamber diagramb. Then press “Vent” button. c. The system goes through a pump and purge cycle before it starts venting to atmosphere.

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Figure 3. Oxford PlasmaPro 80 Main Menu & User Login Screen

Figure 4: System – Pumping Menu

6. Wait for the chamber to vent. Typically, the system venting is completed when the countdown time reaches (~60-70sec from 140s)

7. Open the chamber by switching the hoist direction knob to the “Up” position and pressing the two hoist buttons simultaneously (Figure 5). Note that the movement of the lid will stop when the host button is not pressed. The lid will move up first then rotate to facilitate loading/ unloading of the substrate.

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Figure 5. Tool Console Controls

8. Load your wafer/ substrate. Surround your substrate with slides or dummy wafer pieces (Figure 6) to minimize the sliding of the substrate when pumping starts.

Figure 6. Process Chamber

9. Close lid by moving the Hoist direction knob to “Down” position and pressing the “Hoist” buttons.

10. When the lid is closed, a window will pop up in the computer asking “Do you wish to generate pumpdown pressure log during next evacuation?” Say no.

11. Evacuate the chamber: System→Pumping (Figure 4)a. Press the “Stop” button b. Press the “Evacuate” button c. When prompted by the system, enter the wafer name.

12. Wait for the chamber to pump

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13. Load recipe: Process→Recipea. Press “Load” from the recipe selection section (Figure 7). Click “Yes” when asked whether

to overwrite, and choose the desired recipe.b. Review steps and ensure recipe is correct by selecting each step.

Figure 7: Recipe Selection Screen

 14. Note that you can run modify steps and run the modified recipe without saving it as the changes

are saved temporarily in the buffer and the recipe runs from the buffer.15. Run the recipe: in Process→Recipe, press the “Run Now” button (Figure 7). 16. You can monitor the process by selecting the command from the main menu icon “Process

Chamber” under “Processing” menu. 17. During processing, you can use the “Jump” command to skip to the next step, “Pause” to pause /

restart the process, “Stop” to stop the process (Figure 8).

Figure 8: Process Control Buttons

18. When the processing is complete, a Yellow Alert will show up. Click on the Alert and select Ok. 19. Vent the chamber and remove your substrate from System/ Pumping screen.

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a. Press “Stop“ button (stops pumping) b. Press Vent (Vents the chamber).c. Put the hoist control knob to up direction and open the chamber and remove your

samples.

Finishing up a Run:

Figure 9: Wafer ID prompt

20. Evacuate the chamber: System→Pumping

a. Press “Stop “ button b. Press “Evacuate” button c. A menu will pop (Figure 9) asking “Enter wafer name ((OK) Pump Empty Chamber

(Cancel)”.d. Press cancel as you will be pumping an empty chamber.

21. Log out: Utilities →User Login, then press “verify” without entering a username. The program will then enter the “View Only” mode.

Creating & Editing Recipes: 22. A recipe consists of a sequence of process steps to be run in the sequence given in the recipe. A

recipe typically consists of the following steps.a. Pump down to/ below a specified pressureb. Process steps – one or multiplec. Pump down to / below a specified pressure

23. Recipes are opened/loaded, edited, created or saved from the recipe section of the Processing/ Recipes page (Figure 7).

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24. In order to create a new recipe, click on “New” in the recipe editor section and type in a new name. Add/ edit steps and save the recipe using the “Save” button.

25. Alternatively, another recipe can be opened and the name can be changed and saved under the new name.

26. Step library section in the Processing/ Recipe page holds steps that can be copied into a recipe by dragging the step from the Step Library and dropping it in the open recipe in the recipe section.

27. Steps can be created independently either in the recipe section or in the Step library section.28. Changes made to the step parameters will be changed only in the recipe from which the step

was edited and not in all recipes in which the same step name is used. 29. To insert a step before an existing step, click on the existing step and choose “insert” command.30. To delete a step, click on the step and choose “Delete” command.31. Steps between “Repeat” and “Loop” steps will be repeated by number of times specified in the

“Repeat” step. 32. To edit step parameters -

a. Double click the step name.b. This will open the step editor browser.c. Input/ modify the relevant parameters.d. Enter saves the changes made in the step.e. Note that the changes are saved in the recipe that is loaded in the buffer.

33. Edited recipe can be run from the buffer without saving the edits in the recipe library.34. In order to replace the recipe in the recipe library, the recipe has to be saved using the “Save”

command in the recipe editor.

Troubleshooting/ FAQ:35. If encountering a problem, report in badger and send an email to the user list.36. Tool alerts:

a. A tool alert is displayed when an event that require attention occurs. Each alert is automatically categorized into one of the three categories as shown in the Table below.

Tool Alert Categories

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b. Tool alert banner and the tool alert message remain active as long as there is one or more alerts.

c. Tool alert dialogue box shows details of the alert and suggests possible actions that can be taken.

d. Possible responses to an alert are given in the Table below.

Possible Responses to Alerts

ContactCliff Knollenberg cknollen@stanford.edu Usha Raghuram usha@stanford.edu User list nano-oxford-npc@lists.stanford.edu

About this document1.0 11/30/2016 Usha Raghuram Initial Document

We encourage everyone to contribute to this document. Please follow these steps to integrate your comments/additions/suggestions:

Save this file to your computer Turn on the “track-changes” feature in Word Make your comments/additions/suggestions and save the file Email the finished document to the contact indicated above

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