semiconductor manufacturing iotfm case study...eda takes advantage of 30 years of semiconductors...
TRANSCRIPT
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Semiconductor Manufacturing IoTfM Case Study
A working example of the IoTfM in production.
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Cimetrix has Been an Expert in Improving Manufacturing Automation for 25 Years
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SemiconductorIndustryRevenueinBillionsSource:SemiconductorIndustryAssocia7on
$47.7
$28.0
$19.7$22.2
$18.1
$9.4
$40.5$42.8
$29.5
$15.9
$39.9$43.5
$36.9$32.0
$39.5 $40.5
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2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015
SemiconductorEquipmentBillingsinBillionsSources:SEMIandSEAJ
*IncompleteYear’sData
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Semiconductor Manufacturing Spans the Globe The technology used by fabricators for the production of semiconductors comes from suppliers all over the world.
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2003 2004 2005 2006 2007 2008 2009 2010
Distribu7onofFabricatorsbyRegion
RestofWorld Japan Americas China Europe
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Moore’s Law Ifhomepricesfellatthesamerateastransistors,youcouldpurchaseahomeforthepriceofapieceofcandy
Ifasmartphonewerebuiltusinga1971technologythephone’smicroprocessorwouldbethesizeofacar
IffuelefficiencyimprovedatthesamerateasMoore’slawyoucoulddriveacaryourenTrelifeonatankofgasIfskyscraperconstrucTonfellinpriceatthepaceofMoore’slawyoucouldbuyonetodayforthepriceofaPC
IfthesizeofthatskyscrapergrewattheMoore’space,itwouldbe35TmestheheightofEverest
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Modernfabscost$5B+ Atypicalfabstarts50,000wafersamonth
Awafertakes3-4monthstocyclethroughaplant
Awafercantakea1,000processestoproduce
About1,500toolsarerequiredtoproduceawafer
Around200differenttoolOEMsprovidetheequipmentforafab
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SEMI Standards Node (nm) 800 600 350 250 180 130 90 45 32 22 14 10
Process Window (Cpk)
Key Applications SPC R2R FDC VM PDM Big Data
Data Generated 0.016 0.3 2.4 40 240 1500 (MB/sec)
Supporting SECS-II GEM GEM300 EDA I EDA II E164… SEMI Standards
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SEMI Semiconductor Equipment and Materials International is the global industry association serving the manufacturing supply chain for the micro- and nano-electronics industries, including: ◤ Semiconductors ◤ Photovoltaics (PV) ◤ High-Brightness◤ LED ◤ Flat Panel Display (FPD) ◤ Micro-electromechanical systems
(MEMS) ◤ Printed and flexible electronics ◤ Related micro- and nano-electronics
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Typical Factory System Architecture
MES
Factory Information and Control SystemsAMHS
MES,RMS
Other DB
SensorGateway
OEM ToolS S S
GEM
…
Equipment Integration
Server
YMSAPC, FDC RMS
SOA
TCP/IP
Equipment Integration
ServerLocalDB
LocalDB
OEM Tool
GEMOEM Tool
GEMOEM Tool
GEM
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EDA/Interface A Opens Up a Whole New World of Information
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EDA In a Nutshell... EDA is a suite of model-based communication standards that enables devices of arbitrary size and complexity to securely publish data to multiple, distributed clients using standard Internet technologies.
What could be better suited for the IoT for manufacturing?
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PHM
DOE Modeling
S/W Test
Additional Applications
VM
Process Development
Simulation
Field Service Support
ACM
OEMToolRetrofi^ed
withInterfaceA
MES
Factory Information and Control Systems AMHS
MES, RMS
Other DB
SensorGatewayOEMTool
Integratedwith
InterfaceAS S S
Control
…
EquipmentIntegraTonServer
YMS
APC, FDC RMS
EquipmentIntegraTonServer
LocalDB
LocalDB
OEMTool,Retrofi^ed
withInterfaceA
OEMTool,withEDA
Control Control Control
FaciliTesData
TCP/IP ~??
HTTP
ProcessDevelopment
Simulation
AMC
Field ServiceSupportEDA-Enhanced
Factory System Enables remote viewing of the tool data.
OperatorInput
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EDA Takes Advantage of 30 Years of Semiconductors Experience ◤ Ability to query the equipment for its metadata◤ Multiple independent client application access◤ Use of mainstream communications technologies◤ Powerful event/alarm-based trace request structure◤ Support for “data-on-demand”◤ Performance monitoring and notification features◤ Secure access (local and remote)
Get the data you want…when and where you need it.
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Unified Equipment Model The one element that is wafer specific needs to be modified for your industry.
E164Model
ConfiguraTonSedngs
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EDA Enables Factories to… ◤ Give everything a voice: equipment, material, processes,
people, and the context to make it powerful, allowing you to:◤ Convert raw data to actionable information◤ Know why things happen…or don’t◤ Understand where all the time goes◤ Attack variability and minimize its impact◤ Build manufacturing domain knowledge◤ Reduce “time to money” for new products
Optimize performance, productivity, and profit.
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Merci Danke
Thank you
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