sem and temocw.snu.ac.kr/sites/default/files/note/5286.pdf · 2018. 1. 30. · sem auger e- aes,...
TRANSCRIPT
![Page 1: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/1.jpg)
Microstructural CharacterizationMicrostructural Characterizationof of
MaterialsMaterials
EunEun SooSoo ParkPark
Office: 33-316 Telephone: 880-7221Email: [email protected] hours: by an appointment
2009 spring
05. 13. 2009
![Page 2: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/2.jpg)
• 영상분석: 미세조직분석– SEM, TEM, STEM
(surface morphology)• 전자회절분석: 결정구조분석
– CBSD, CBED, SAED, Kikuchi pattern(crystllograhic structrue)
• 화학분석: 화학성분분석– EDS, EELS, AES
– (Element, composition)
09
Type of analysis
![Page 3: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/3.jpg)
09
Type of analysis
![Page 4: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/4.jpg)
• EDS : Energy Dispersion Spectroscopy• WDS: Wavelength Dispersive Spectroscopy• XRF: X-Ray Fluorescence
• EELS: Electron Energy Loss Spectroscopy
09
Type of analysis Chemical element
X-Ray
Electron
![Page 5: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/5.jpg)
EDS
• 특성 X-선은 원자의 종류및 전자 궤도에 따라 다르므로 이를 이용하여 시편의 화학적 성분을 정성 혹은 정량분석을 할 수 있다.
• EDS 는 정성분석에, WDS는 정량분석에
이용한다.
Type of analysis Chemical element
![Page 6: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/6.jpg)
EDSType of analysis Chemical element
X-Ray Spectrum 분석 Image Mapping
![Page 7: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/7.jpg)
EELS
atomic composition, chemical bonding, valence and conduction band electronic properties, surface properties, and element-specific pair distance distribution functions
Type of analysis Chemical element
![Page 8: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/8.jpg)
• AES : Auger Electron Spectroscopy• SAM: Scanning Auger Microscopy
09
Type of analysis Chemical element: surface-specific analytical technique
![Page 9: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM](https://reader034.vdocuments.us/reader034/viewer/2022051822/5febe5f565a382265952b5d3/html5/thumbnails/9.jpg)
• CBED: Convergent Beam Electron Diffraction• SAD: Selected Area electron Diffraction
09
Type of analysis Crystallographic structure