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©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 1 22 Bd Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr Samsung 3D V - NAND 92 - Layer Memory Fifth generation 3D NAND memory chip reveals Samsung’s latest memory technology and fabrication methods. SP19489 - MEMORY report by Belinda Dube Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

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Page 1: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 1

22 Bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

Samsung 3D V-NAND 92-Layer MemoryFifth generation 3D NAND memory chip reveals Samsung’s latest memory technology and fabrication methods.

SP19489 - MEMORY report by Belinda DubeLaboratory Analysis by Véronique LE TROADEC

September 2019 - Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 2

Table of Contents

Overview / Introduction 3

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Samsung

Market Analysis 12

o NAND Flash Market Revenue

o NAND Market Shipments

o Samsung NAND Flash RoadMap

Physical Analysis 16

o Synthesis of the Physical Analysis

o Physical Analysis Methodology

o 970 EVO Plus SSD Teardown

o Package

Package Views & Dimensions

o Memory Die

View, Dimensions & Marking

Cross-Section

Contacts and Metallization

o 3D NAND Patents

Physical Comparison (64 Layer Vs 92Layer V-NAND) 55

o Comparison Generation 5 92-layer and Generation 4 64-layer

Manufacturing Process Flow 60

o Global Overview

o Memory 3D 92 LayerFab Unit

o Memory 3D 92 Layer Process Flow

Cost Analysis 71

o Synthesis of the cost analysis

o Yields Explanation & Hypotheses

o Memory 3D 92 Layer

Memory Front-End Cost

Memory Front-End Cost per process steps

o Process Steps

o Component

Bonding Front-End Cost

Memory Wafer & Die Cost

Back-End : Final Test Cost

Memory 3D 92 Layer Component Cost

Estimated Price Analysis 88

Feedback 91

Company services 93

Page 3: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 3

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Executive Summary

The new technology era has a huge impact on Non-Volatile Memory (NVM), demanding memories with faster speed

and higher storage capacity. Manufacturers have therefore channeled investment into the development of new NVMs

with more memory cells in a single chip.

Samsung continues to dominate the semiconductor industry, including the memory industry, as shown by the

magnificent $22 billion revenue in 2018 generated by its NAND memory business. Its manufacturing techniques change

from one generation to another to produce reliable memory chips with higher capacity.

This report presents a detailed technology study of the latest Samsung 3D Vertical-NAND memory made with 92-Layer

word lines. Thanks to high quality optical images and high-resolution scanning electron microscope (SEM) images, the

physical analysis shows details of die cross sections, including material identification. The report includes a detailed

process to better understand the major fabrication steps. It also includes a cost estimation of producing Samsung’s

new generation 3D NAND chips and the packaging cost.

Finally, this report features a comparison of Samsung’s previous NVM generation with the latest generation. This

identifies the different and similar features in the two generations, and compares the fabrication cost and the impact of

the added layers.

Page 4: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 4

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Packaging

Package Cross Section©2019 by System Plus Consulting

Page 5: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 5

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Logic Area : Transistor Technology

Page 6: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 6

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Vertical NAND Cell

Vertical Cell structure –SEM©2019 by System Plus Consulting

Page 7: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 7

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Charge Trap Flash

Page 8: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 8

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

CTF NAND Cell

Cell structure WANOS Region –SEM©2019 by System Plus Consulting

Page 9: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 9

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Cross Section- Staircase

©2019 by System Plus Consulting

Page 10: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 10

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Cross Section- Metal Contacts

Page 11: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 11

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

NAND Memory Circuit Diagram

Cross Section-SEM©2019 by System Plus Consulting

Page 12: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 12

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Physical Analysis Comparison Gen 4 vs Gen 5

• The 5th generation V-NAND Dies are more dense than Gen4 dies.• Memory Array efficiency is higher for 5th generation dies. (NAND active area occupies less space on the die.)

Page 13: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 13

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Gen 5- 92 layer NAND vs Gen 4- 64 layer NAND

Page 14: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 14

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flowo Global Overviewo Driver Front-End Processo Memory Process

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Bit Line Formation and Contact Formation

Page 15: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 15

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Yieldso Driver Wafer & Die Costo Memory Wafer & Die

Costo Package Costo Final Costo Component Costo Cost per GB

Selling Price Analysis

Related Reports

About System Plus

Memory Wafer & Die Cost

Page 16: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 16

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Yieldso Driver Wafer & Die Costo Memory Wafer & Die

Costo Package Costo Final Costo Component Costo Cost per GB

Selling Price Analysis

Related Reports

About System Plus

Component Cost

Page 17: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 17

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

MEMORY• NAND Service – Memory Research• Status of the Memory Industry 2019• Emerging Non-Volatile Memory 2018• MRAM Technology and Business 2019

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

MEMORY• Leading-edge 3D NAND Memory Comparison 2018• Toshiba Sandisk 64 Layers 3D NAND Memory

Related Reports

Page 18: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 18

COMPANYSERVICES

Page 19: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 19

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Pluso Company serviceso Contact

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

Page 20: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 20

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Pluso Company serviceso Contact

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

www.systemplus.fr

Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 [email protected]

Mavis WANGTAIWANT :+886 979 336 [email protected]

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FRANKFURT/MAINEurope Sales Office

LYONYOLE HQ

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America Sales OfficeSteve LAFERRIEREPhoenix, AZWESTERN UST : +1 310 600 [email protected]

Chris YOUMANEASTERN US & CANADAT : +1 919 607 9839 [email protected]

Page 21: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

ORDER FORMPlease process my order for “Samsung 3D V-NAND 92-Layer Memory” Reverse Costing® – Structure, Process & Cost Report Ref: SP19489

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Page 22: Samsung 3D V-NAND 92-Layer Memory - System Plus Consulting · o 970 EVO Plus TearDown o Package o Memory Die o Patent Comparison Manufacturing Process Flow Cost Analysis Selling Price

1.INTRODUCTIONThe present terms and conditions apply to the offers, sales and deliveries of services managed by System PlusConsulting except in the case of a particular written agreement.Buyer must note that placing an order means an agreement without any restriction with these terms and conditions.

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