s urface engineering 3

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SURFACE ENGINEERING 3 Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring

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S URFACE ENGINEERING 3. Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring. Comparison of the coating processes. Pri n cipal sc h em e of ALD. Advantages of ALD (1). Advantages of ALD ( 2 ). - PowerPoint PPT Presentation

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Page 1: S URFACE ENGINEERING  3

SURFACE ENGINEERING 3

Atomic Layer Deposition (ALD) Technology:Innovative Layer-by-Layer Design of New Materials,

State-of-the-Art Surface Engineering & Nanostructuring

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Comparison of the coating processes

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Principal scheme of ALD

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Advantages of ALD (1)

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Advantages of ALD (2)

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Schematic representation of ALD reactor

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Typical films

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MLD (Molecular Layer Deposition)