residual gas analysis (rga) - deutsche messe...
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Fax: +49 (0)7141 68116-99
E-Mail [email protected]
www.cleanpart.com
Siemenstraße 1
D-71679 Asperg
Tel. +49 (0)7141 68116-0
Residual Gas Analysis (RGA)
Cleanpart provides material technology services for industrial components.
Among its broad analytical capabilities, cleanpart offers Residual Gas Analysis
(RGA).
Principle:
A residual gas analyzer (RGA) is a mass spectrometer typically designed for pro-
cess control and contamination monitoring in vacuum systems. RGAs are used in
most cases to monitor the quality of the vacuum and easily detect traces of im-
purities in the low-pressure gas environment. These impurities can be measured
down to 10-13 Torr levels, possessing sub-ppm detectability in the absence of
background interferences.
Benefits: n Certification of cleanliness of your parts, according to OEM specificationsn Cleanpart is able to supply cleaned parts according to Grade 4 (including
UV light control), Grade 2 and Grade 1 standards.n A detailed RGA report is supplied with each part, including parts outgassing
rates for water, CxHy v, CxHy nvn All parts are controlled and packaged in our ISO 5 cleanrooms
Areas of application:n High Vacuum and Ultra High Vacuum parts and sub-assemblies
Capabilitiesn Analyzed materials: All parts and assemblies that can sustain vaccum
conditionsn Size: handling of small and big parts and also assemblies n Mass spectrum: from 1 to 200
About Cleanpart:
The Cleanpart Group is an international successful service provider in the field of surface engineering. Our core business is the
treatment of components for high vacuum equipment to achieve maximum functionality and cleanliness of surfaces. Cleanpart is
the industry leader in Europe and USA, operating 11 centers, and providing dedicated transport solutions several times per week
in all major high tech areas in Europe. More information at www.cleanpart.com