process flow : overhead and cross section views ( diagrams courtesy of mr. bryant colwill ) grey=si,...
TRANSCRIPT
Process Flow : Overhead and Cross Section Views (Diagrams courtesy of Mr. Bryant Colwill)
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
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Step 1 Step 2 Step 3 Step 4 Step 5 Step 6
Step 7 Step 8 Step 9 Step 10 Step 11 Step 12
Step 1: Cleaning
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Starting Si Wafer
&
Sulfuric Acid / Peroxide Clean
Cross-section View of Wafer
Insert text here
Overhead View of Wafer
Step 2:
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Plasma Enhanced
Chemical Vapor Deposition
Of Silicon Dioxide
Overhead View of Wafer
Cross-section View of Wafer
Insert text here.
Probably include picture and name of machine here
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning (cont.)
name
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning (cont.)
name
name
Step 4:
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
INSERT
Overhead View of Wafer
Cross-section View of Wafer
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Overhead View of Wafer
Cross-section View of Wafer
Step 5:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Overhead View of Wafer
Cross-section View of Wafer
insert
Step 6:
name
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Overhead View of Wafer
Cross-section View of Wafer
Step 7:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Cross-section View of Wafer
Step 8:
Overhead View of Wafer
name
T T
T T
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T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
name
Step 9:
Cross-section View of Wafer
Overhead View of Wafer
T T
T T
TTTTT
T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Aluminum Removal by
Acid Etch
Overhead View of Wafer
Cross-section View of Wafer
Step 10:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Overhead View of Wafer
Cross-section View of Wafer
TTT
T
T
TTT T
T
name
Step 11:
TTT
T
T
TTT T
T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
name
Cross-section View of Wafer
Step 12:
Overhead View of Wafer